CN203465009U - Infrared fluoroscopic imaging detection chip - Google Patents

Infrared fluoroscopic imaging detection chip Download PDF

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Publication number
CN203465009U
CN203465009U CN201320570558.4U CN201320570558U CN203465009U CN 203465009 U CN203465009 U CN 203465009U CN 201320570558 U CN201320570558 U CN 201320570558U CN 203465009 U CN203465009 U CN 203465009U
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battle array
infrared
face battle
ceramic package
infrared detector
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Expired - Lifetime
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CN201320570558.4U
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Chinese (zh)
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张新宇
佟庆
康胜武
罗俊
桑红石
谢长生
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Abstract

The utility model discloses an infrared fluoroscopic imaging detection chip. The infrared fluoroscopic imaging detection chip comprises a ceramic housing, a metal supporting and cooling plate, a driving control and fluoroscopic image preprocessing module, an area array uncooled infrared detector, and an area array infrared refractive micro lens. The driving control and fluoroscopic image preprocessing module, the area array uncooled infrared detector and the area array infrared refractive micro lens are coaxially and successively in the ceramic housing. The rear portion of the ceramic housing is arranged on the top portion of the metal supporting and cooling plate. The driving control and fluoroscopic image preprocessing module is arranged on the connection portion between the rear portion of the ceramic housing and the metal supporting and cooling plate. The area array uncooled infrared detector is arranged on the top portion of the driving control and fluoroscopic image preprocessing module. The area array infrared refractive micro lens is arranged on the top portion of the area array uncooled infrared detector. The infrared fluoroscopic imaging detection chip of the utility model has the advantage of compact structure, and has the advantage of performing single-chip fluoroscopic imaging detection on an infrared target based on infrared beam direction identification, the advantage that the infrared fluoroscopic imaging detection chip can be easily compatible or coupled with a conventional infrared optical system and the advantage of good target and environmental adaptability.

Description

A kind of infrared penetrating image forming detection chip
Technical field
The utility model belongs to infrared imaging detection technical field, more specifically, relates to a kind of infrared penetrating image forming detection chip.
Background technology
In the last few years, large face battle array infrared focal plane imaging Detection Techniques sustained and rapid development.Up to now, the array scale of infrared photosensor chip has increased to 1,000,000 grades, and still in quick increase.The minimum compact mechanism with the infrared photosensitive unit of high photoelectric sensitivity, has been reduced to tens nanometer degree at present.Super large face battle array infrared quantum photosensitive structure, as typical quantum line or quantum dot array etc., is just fermenting new breakthrough.The infrared electro of chip type is surveyed and Image Information Processing Integrated Architecture, has broken through critical technical bottleneck.In addition, the infrared imaging detection technology based on can identification beam direction, has also been subject to extensive concern at present.Since entering the new century, along with continuous expansion and the in-depth of research and application, target and ambient conditions are increasingly sophisticated, and infrared interference, antagonism and stealthy measure, also in continuous enhancing, have proposed requirements at the higher level to infrared focal plane imaging Detection Techniques.Further efficiently surveying, obtain, identify and process this one side of image object of going into hiding in complex background environment, seeking new breakthrough.
Generally, the infrared outgoing beam of target has multidirectional, and it is distributed in a spatial domain gradually increasing to disperse wave vector form.Be presented in imaging system visual field is target to multiple directions transmitting and the formed vectorial field of propagation of electromagnetic waves bundle.Conventional infreared imaging device is by optical system, by the multi-direction object beam in visual field do not make any distinction between ground centralized collection, compress and be shipped on light-sensitive array, through array photoelectricity, be converted to the electronic target image under multi-direction incident wave beam acting in conjunction.Generally speaking, in complex background environment, the infrared radiation light wave of target can reduce its radiation intensity because of loss after penetrating surrounding medium, cause infrared imaging detection framework to reduce signal to noise ratio (S/N ratio) and the signal to noise ratio of its photoelectric response, even under extreme case because intensity in transmission is too low or blocked completely and cannot carry out opto-electronic conversion and operate, do not possess perspective imaging ability.In order to carry out the multi-direction radiation beam of target acquisition based on perspective imaging object, current conventional way is: in larger spatial domain, discrete many cover imaging devices of arranging obtain unidirectional infrared target image of covering.There is the defects such as volume and the power consumption of imaging device are large, and cost is high, and imaging usefulness is low, and target and environmental suitability are poor.
With regard to surrounding medium, its effect of blocking to infrared waves, only can involve limited beam direction conventionally, is difficult to cover the object beam in all directions.Even integrated by infrared detector array is mated to coupling with microlens array, the directional focusing effect based on lenticular infrared beam, catches in a certain/a little/particular propagation direction, by surrounding medium not completely or the infrared beam fully blocking.Even if the light of the relative imaging device of infrared target on main route of transmission is blocked, still can obtain the infrared target image information of sending in other particular propagation direction, realize perspective imaging.Generally speaking, the distribution of the infrared outgoing beam of macro-goal in time-space domain has continuity.By reasonable interpolation, the electronics fluoroscopy images obtaining can be expanded by appropriateness or strengthen.The infrared perspective image of target will have the electronics improvement of photographs or optimization, and more horn of plenty and the potential quality such as fine and smooth.
Utility model content
Above defect or Improvement requirement for prior art, the utility model provides a kind of infrared penetrating image forming detection chip, its object is to realize infrared penetrating image forming and surveys, and possess that measuring accuracy is high, target and good environmental adaptability, volume and quality are little, easily mate the feature being coupled with other conventional infrared optics/photoelectricity/physical construction.
For achieving the above object, according to an aspect of the present utility model, a kind of infrared penetrating image forming detection chip is provided, comprise: ceramic package, metallic support and heat sink, drive control and fluoroscopy images pretreatment module, face battle array non-refrigerated infrared detector, and face battle array infrarefraction lenticule, drive control and fluoroscopy images pretreatment module, face battle array non-refrigerated infrared detector, and the coaxial order of face battle array infrarefraction lenticule is arranged in ceramic package, ceramic package rear portion is arranged at metallic support and heat sink top, drive control and fluoroscopy images pretreatment module and be arranged at ceramic package rear portion and metallic support and heat sink junction, face battle array non-refrigerated infrared detector is arranged at and drives control and fluoroscopy images pretreatment module top, face battle array infrarefraction lenticule is arranged at face battle array non-refrigerated infrared detector top, and by the perforate of ceramic package face, its light entrance face is out exposed, face battle array infrarefraction lenticule comprises M * N unit microlens, wherein M and N are positive integer, face battle array non-refrigerated infrared detector is divided into M * N sub-face battle array non-refrigerated infrared detector, the quantity of this sub-face battle array non-refrigerated infrared detector is identical with lenticular quantity in face battle array infrarefraction lenticule, every height face battle array non-refrigerated infrared detector comprises P * Q photosensitive unit, wherein P and Q are positive integer, infrared light from diverse location is converged on different sub-face battle array non-refrigerated infrared detectors by unit microlens, from diverse location, but the infrared light in equidirectional is converged in the photosensitive unit at same position place in different sub-face battle array non-refrigerated infrared detectors by unit microlens, face battle array infrarefraction lenticule is for receiving the infrared light from target outgoing, and this infrared light is converged in the photosensitive unit of correspondence of different sub-face battle array full color imaging detectors in face battle array full color imaging detector, driving control and fluoroscopy images pretreatment module is used to face battle array non-refrigerated infrared detector that driving and adjustment signal are provided, photosensitive unit is electric signal for infrared light being carried out to opto-electronic conversion under the effect at driving and adjustment signal, and this electric signal is sent to and drives control and fluoroscopy images pretreatment module, drive control and fluoroscopy images pretreatment module also for electric signal is carried out to pre-service, with image data generating, and by this view data output.
Preferably, drive control and fluoroscopy images pretreatment module carries out pre-service employing to electric signal is asymmetric correction method.
Preferably, the side of ceramic package is provided with drives control signal output port, for exporting, drive control and fluoroscopy images pretreatment module offers driving and the adjustment signal of face battle array non-refrigerated infrared detector, the side of ceramic package is provided with the first pilot lamp, this lamp connection drives control for demonstration and fluoroscopy images pretreatment module is in normal operating conditions, the side of ceramic package is provided with detector and drives control signal input port, driving and adjustment signal for input face battle array non-refrigerated infrared detector, the side of ceramic package is provided with the second pilot lamp, this lamp is connected for display surface battle array non-refrigerated infrared detector and is in normal operating conditions, the side of ceramic package is provided with the 3rd pilot lamp, this lamp is connected for display surface battle array infrarefraction lenticule and is in normal operating conditions.
Preferably, the bottom surface of ceramic package is provided with the input of infrared electro response signal and infrared picture data output port, photoelectric response signal for output face battle array non-refrigerated infrared detector, the bottom surface of ceramic package is provided with the 4th pilot lamp, for display surface battle array non-refrigerated infrared detector, be in normal signal output state, the bottom surface of ceramic package is provided with infrared electro response signal output port, for the photoelectric output signal of face battle array non-refrigerated infrared detector is introduced and is driven control and fluoroscopy images pretreatment module, the bottom surface of ceramic package is provided with the 4th pilot lamp, for showing, drive control and fluoroscopy images pretreatment module is in normal data input state, the bottom surface of ceramic package is provided with the input of infrared electro response signal and infrared picture data output port, for the photoelectric response signal input of face battle array non-refrigerated infrared detector is driven to control and fluoroscopy images pretreatment module, and sequential infrared image data are exported from driving control and fluoroscopy images pretreatment module.
Preferably, the side of ceramic package is provided with power port, and for accessing power lead to be connected with external power source, the side of ceramic package is provided with the 5th pilot lamp, for display power supply, connects.
In general, the above technical scheme of conceiving by the utility model compared with prior art, can obtain following beneficial effect:
1, the single-chip perspective imaging of target is surveyed, owing to passing through the larger area array infrared detector of coupling surface battle array refractive micro lenses and array, the imaging detection operation of realization based on the direction of propagation identification of infrared wave beam, so the utlity model has the advantage of the infrared detector array perspective detection infrared image target based on monolithic functionalization;
2, measuring accuracy is high, because the utility model adopts face battle array refractive micro lenses and face battle array non-refrigerated infrared detector, they all have high array scale mixed integrated and have high structural stability, so the utlity model has the advantage that measuring accuracy is high;
3, target adaptability is good, and because the utility model has adopted the single-chip identification imaging detection technology based on beam propagation direction, the infrared target of can imaging detection going into hiding in complex background environment, so the utlity model has the advantage that target adaptability is good;
4, good environmental adaptability, because the utility model has adopted the non-refrigerated infrared detector based on thermal effect, and there is the fixedly refractive micro lenses of pattern, measure spectral coverage wider, be operated in conventional room temperature environment, so the utlity model has the advantage of good environmental adaptability.
5, easy to use, because the utility model has adopted face battle array infrarefraction lenticule, face battle array non-refrigerated infrared detector and driven control and the such architectural framework of fluoroscopy images pretreatment module, so the utlity model has, patch conveniently, easily mate the advantage of coupling with infrared optical system, other electronics and mechanical hook-up.
Accompanying drawing explanation
Fig. 1 is the structural representation of infrared penetrating image forming detection chip of the present utility model.
Fig. 2 is the principle schematic of infrared penetrating image forming detection chip of the present utility model.
In institute's drawings attached, identical Reference numeral is used for representing identical element or structure, wherein:
1-drives control signal output port, 2-the first pilot lamp, 3-drives control and fluoroscopy images pretreatment module, 4-detector drives control signal input port, 5-the second pilot lamp, 6-face battle array non-refrigerated infrared detector, 7-face battle array infrarefraction lenticule, 8-the 3rd pilot lamp, 9-infrared electro response signal output port, 10-the 4th pilot lamp, the input of 11-infrared electro response signal and infrared picture data output port, 12-power port, 13-ceramic package, 14-metallic support and heat sink, 15-the 5th pilot lamp.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein is only in order to explain the utility model, and be not used in restriction the utility model.In addition,, in each embodiment of described the utility model, involved technical characterictic just can not combine mutually as long as do not form each other conflict.
As shown in Figure 1, infrared penetrating image forming detection chip of the present utility model comprises: ceramic package 13, metallic support and heat sink 14, drive control and fluoroscopy images pretreatment module 3, face battle array non-refrigerated infrared detector 6 and face battle array infrarefraction lenticule 7.
Driving control and fluoroscopy images pretreatment module 3, face battle array non-refrigerated infrared detector 6 and the coaxial order of face battle array infrarefraction lenticule 7 is arranged in ceramic package 13.
Ceramic package 13 rear portions are arranged at metallic support and heat sink 14 tops.
Drive control and fluoroscopy images pretreatment module 3 and be arranged at ceramic package 13 rear portions and metallic support and heat sink 14 junctions.
Face battle array non-refrigerated infrared detector 6 is arranged at and drives control and fluoroscopy images pretreatment module 3 tops.
Face battle array infrarefraction lenticule 7 is arranged at face battle array non-refrigerated infrared detector 6 tops, and by the facial perforate (not shown) of ceramic package 13, its light entrance face is out exposed.
Face battle array infrarefraction lenticule 7 comprises M * N unit microlens, and wherein M and N are positive integer.
Face battle array non-refrigerated infrared detector 6 is divided into M * N sub-face battle array non-refrigerated infrared detector, the quantity of this sub-face battle array non-refrigerated infrared detector is identical with lenticular quantity in face battle array infrarefraction lenticule 7, every height face battle array non-refrigerated infrared detector comprises P * Q photosensitive unit, and wherein P and Q are positive integer.Infrared light from diverse location is converged on different sub-face battle array non-refrigerated infrared detectors by unit microlens, and the infrared light from diverse location but in equidirectional is converged in the photosensitive unit at same position place in different sub-face battle array non-refrigerated infrared detectors by unit microlens.
Face battle array infrarefraction lenticule 7 is for receiving the infrared light from target outgoing, and this infrared light converged in the photosensitive unit of correspondence of different sub-face battle array full color imaging detectors in face battle array full color imaging detector 6.
Driving control and fluoroscopy images pretreatment module 3 is used to face battle array non-refrigerated infrared detector 6 that driving and adjustment signal are provided.
Photosensitive unit is electric signal for infrared light being carried out to opto-electronic conversion under the effect at driving and adjustment signal, and this electric signal is sent to and drives control and fluoroscopy images pretreatment module 3.
Drive control and fluoroscopy images pretreatment module 3 also for electric signal is carried out to pre-service, with image data generating, and by this view data output.What particularly, electric signal is carried out to pre-service employing is asymmetric correction method.
The side of ceramic package 13 is provided with drives control signal output port 1, for exporting, drives control and fluoroscopy images pretreatment module 3 offers driving and the adjustment signal of face battle array non-refrigerated infrared detector 6.
The side of ceramic package 13 is provided with the first pilot lamp 2, and this lamp connection drives control for demonstration and fluoroscopy images pretreatment module 3 is in normal operating conditions.
The side of ceramic package 13 is provided with detector and drives control signal input port 4, for driving and the adjustment signal of input face battle array non-refrigerated infrared detector 6.
The side of ceramic package 13 is provided with the second pilot lamp 5, and this lamp is connected for display surface battle array non-refrigerated infrared detector 6 and is in normal operating conditions.
The side of ceramic package 13 is provided with the 3rd pilot lamp 8, and this lamp is connected for display surface battle array infrarefraction lenticule 7 and is in normal operating conditions.
The bottom surface of ceramic package 13 is provided with the input of infrared electro response signal and infrared picture data output port 9, for the photoelectric response signal of output face battle array non-refrigerated infrared detector 6.
The bottom surface of ceramic package 13 is provided with the 4th pilot lamp 8, for display surface battle array non-refrigerated infrared detector 6, is in normal signal output state.
The bottom surface of ceramic package 13 is provided with infrared electro response signal output port 9, for by the photoelectric output signal of face battle array non-refrigerated infrared detector 6, introduces and drives control and fluoroscopy images pretreatment module 3.
The bottom surface of ceramic package 13 is provided with the 4th pilot lamp 10, for showing, drives control and fluoroscopy images pretreatment module 3 is in normal data input state.
The bottom surface of ceramic package 13 is provided with the input of infrared electro response signal and infrared picture data output port 11, be used for the photoelectric response signal of face battle array non-refrigerated infrared detector 6, control and fluoroscopy images pretreatment module 3 are driven in input, and sequential infrared image data are controlled and 3 outputs of fluoroscopy images pretreatment module from driving;
The side of ceramic package 13 is provided with power port 12, for accessing power lead to be connected with external power source.
The side of ceramic package 13 is provided with the 5th pilot lamp 15, for display power supply, connects.
Below with reference to Fig. 2, principle of work of the present utility model is described:
The face battle array infrarefraction lenticule that face battle array non-refrigerated infrared detector and array scale have reduced than existing infrared eye mixes integrated, and the infrared penetrating image forming forming in chip surveys framework.The array mode of face battle array infrarefraction lenticule and face battle array non-refrigerated infrared detector is: under the array scale setting or spatial resolution pattern; every unit infrarefraction lenticule respectively with polynary non-refrigerated infrared detector, as 2 * 2 yuan, 4 * 4 yuan, 8 * 8 yuan larger non-refrigerated infrared detectors of array corresponding (coupling coupling) even.For unit infrarefraction lenticule, the infrared wave beam in the particular propagation direction of not blocked by surrounding medium, in a specific photosensitive unit by this infrarefraction lenticule directional focusing in the sub-face battle array non-refrigerated infrared detector corresponding with it.Focal beam spot converts photoelectric response signal to by the sub-face battle array full color imaging detector that is placed in this place.
By by the pre-service in addition of the photoelectric response signal of the corresponding photosensitive unit in each sub-area array infrared detector, infrared wave beam arranged discrete in particular propagation direction is arrived to specified array spatial domain, complete the infrared imaging detection based on beam propagation direction and the image information that with detector coordinates, characterize and build, obtain one/several perspective image data that the infrared wave beam of target in particular propagation direction transmits.
Below briefly introduce operating process of the present utility model:
During operation, first with parallel signal line, connect drive control signal output port 1, detector drives control signal input port 4; With parallel data line, connect infrared electro response signal output port 9, and the input of infrared electro response signal and infrared picture data output port 11; Power lead is connected on power port 12.Then by parallel communication line (access interface 1 simultaneously), send into electric power starting instruction, chip starts self check, now the first pilot lamp 2, the second pilot lamp 5, the 3rd pilot lamp 8, the 4th pilot lamp 10, the 5th pilot lamp 12 hook switch flash.Self check is by rear the 3rd pilot lamp 8, and the 4th pilot lamp 10 extinguishes, and chip enters duty.By parallel communication line, send into after work order, chip starts to carry out photoelectric response signal measurement.Photoelectric response signal is by infrared electro response signal output port 9 and the input of infrared electro response signal and infrared picture data output port 11, send into and drive control and fluoroscopy images pretreatment module 3, now the 4th pilot lamp 8 and the 5th pilot lamp 10 hook switch flash again.Through driving the sequential infrared image data after control and fluoroscopy images pretreatment module 3 are processed, by the input of infrared electro response signal and 11 outputs of infrared picture data output port.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all any modifications of doing within spirit of the present utility model and principle, be equal to and replace and improvement etc., within all should being included in protection domain of the present utility model.

Claims (5)

1. an infrared penetrating image forming detection chip, comprising: ceramic package, metallic support and heat sink, drives control and fluoroscopy images pretreatment module, face battle array non-refrigerated infrared detector and face battle array infrarefraction lenticule, it is characterized in that,
Driving the coaxial order of control and fluoroscopy images pretreatment module, face battle array non-refrigerated infrared detector and face battle array infrarefraction lenticule is arranged in ceramic package;
Ceramic package rear portion is arranged at metallic support and heat sink top;
Drive control and fluoroscopy images pretreatment module and be arranged at ceramic package rear portion and metallic support and heat sink junction;
Face battle array non-refrigerated infrared detector is arranged at and drives control and fluoroscopy images pretreatment module top;
Face battle array infrarefraction lenticule is arranged at face battle array non-refrigerated infrared detector top, and by the perforate of ceramic package face, its light entrance face is out exposed;
Face battle array infrarefraction lenticule comprises M * N unit microlens, and wherein M and N are positive integer;
Face battle array non-refrigerated infrared detector is divided into M * N sub-face battle array non-refrigerated infrared detector, and the quantity of this sub-face battle array non-refrigerated infrared detector is identical with lenticular quantity in face battle array infrarefraction lenticule;
Every height face battle array non-refrigerated infrared detector comprises P * Q photosensitive unit, and wherein P and Q are positive integer;
Infrared light from diverse location is converged on different sub-face battle array non-refrigerated infrared detectors by unit microlens, and the infrared light from diverse location but in equidirectional is converged in the photosensitive unit at same position place in different sub-face battle array non-refrigerated infrared detectors by unit microlens;
Face battle array infrarefraction lenticule is used for receiving the infrared light from target outgoing, and this infrared light is converged in the photosensitive unit of correspondence of different sub-face battle array full color imaging detectors in face battle array full color imaging detector;
Driving control and fluoroscopy images pretreatment module is used to face battle array non-refrigerated infrared detector that driving and adjustment signal are provided;
Photosensitive unit is electric signal for infrared light being carried out to opto-electronic conversion under the effect at driving and adjustment signal, and this electric signal is sent to and drives control and fluoroscopy images pretreatment module;
Drive control and fluoroscopy images pretreatment module also for electric signal is carried out to pre-service, with image data generating, and by this view data output.
2. infrared penetrating image forming detection chip according to claim 1, is characterized in that, drives control and fluoroscopy images pretreatment module carries out pre-service employing to electric signal is asymmetric correction method.
3. infrared penetrating image forming detection chip according to claim 1, is characterized in that,
The side of ceramic package is provided with drives control signal output port, for exporting, drives control and fluoroscopy images pretreatment module offers driving and the adjustment signal of face battle array non-refrigerated infrared detector;
The side of ceramic package is provided with the first pilot lamp, and this lamp connection drives control for demonstration and fluoroscopy images pretreatment module is in normal operating conditions;
The side of ceramic package is provided with detector and drives control signal input port, for driving and the adjustment signal of input face battle array non-refrigerated infrared detector;
The side of ceramic package is provided with the second pilot lamp, and this lamp is connected for display surface battle array non-refrigerated infrared detector and is in normal operating conditions;
The side of ceramic package is provided with the 3rd pilot lamp, and this lamp is connected for display surface battle array infrarefraction lenticule and is in normal operating conditions.
4. infrared penetrating image forming detection chip according to claim 1, is characterized in that,
The bottom surface of ceramic package is provided with the input of infrared electro response signal and infrared picture data output port, for the photoelectric response signal of output face battle array non-refrigerated infrared detector;
The bottom surface of ceramic package is provided with the 4th pilot lamp, for display surface battle array non-refrigerated infrared detector, is in normal signal output state;
The bottom surface of ceramic package is provided with infrared electro response signal output port, for the photoelectric output signal of face battle array non-refrigerated infrared detector is introduced and driven control and fluoroscopy images pretreatment module;
The bottom surface of ceramic package is provided with the 4th pilot lamp, for showing, drives control and fluoroscopy images pretreatment module is in normal data input state;
The bottom surface of ceramic package is provided with the input of infrared electro response signal and infrared picture data output port, for the photoelectric response signal input of face battle array non-refrigerated infrared detector is driven to control and fluoroscopy images pretreatment module, and sequential infrared image data are exported from driving control and fluoroscopy images pretreatment module.
5. infrared penetrating image forming detection chip according to claim 1, is characterized in that,
The side of ceramic package is provided with power port, for accessing power lead to be connected with external power source;
The side of ceramic package is provided with the 5th pilot lamp, for display power supply, connects.
CN201320570558.4U 2013-09-13 2013-09-13 Infrared fluoroscopic imaging detection chip Expired - Lifetime CN203465009U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103512667A (en) * 2013-09-13 2014-01-15 华中科技大学 Infrared perspective imaging detecting chip
CN113660433A (en) * 2021-08-16 2021-11-16 华中科技大学鄂州工业技术研究院 Uncooled thermal infrared focal plane device and infrared imaging equipment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103512667A (en) * 2013-09-13 2014-01-15 华中科技大学 Infrared perspective imaging detecting chip
CN103512667B (en) * 2013-09-13 2015-09-23 华中科技大学 A kind of infrared penetrating image forming detection chip
CN113660433A (en) * 2021-08-16 2021-11-16 华中科技大学鄂州工业技术研究院 Uncooled thermal infrared focal plane device and infrared imaging equipment
CN113660433B (en) * 2021-08-16 2023-05-30 华中科技大学鄂州工业技术研究院 Uncooled thermal infrared focal plane device and infrared imaging equipment

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