CN203432380U - Diffusion furnace air exhausting device - Google Patents
Diffusion furnace air exhausting device Download PDFInfo
- Publication number
- CN203432380U CN203432380U CN201320568363.6U CN201320568363U CN203432380U CN 203432380 U CN203432380 U CN 203432380U CN 201320568363 U CN201320568363 U CN 201320568363U CN 203432380 U CN203432380 U CN 203432380U
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- China
- Prior art keywords
- air exhausting
- diffusion furnace
- furnace
- air
- exhausting device
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- Expired - Fee Related
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Abstract
The utility model discloses a diffusion furnace air exhausting device, which comprises a quartzy furnace tube in a diffusion furnace, wherein an air exhausting pipe is vertically arranged on one side of the outlet of the quartzy furnace tube; one or more air inlets are formed in the air exhausting pipe; the air outlet of the air exhausting pipe is connected with a draft fan. The diffusion furnace air exhausting device has the advantages that the structure is simple, after the draft fan is opened, the air exhausting pipe can effectively collect hot gas at a furnace opening to lower the temperature of the periphery of the furnace opening, the harmful gas in the hot gas can be exhausted, as a result, the damage to the health of working personnel can be avoided, the reaction of mixed gases outside the furnace body is not affected by high temperature, and the normal gas supply and running are ensured.
Description
Technical field
The utility model relates to field of semiconductor processing, is specifically related to a kind of diffusion furnace air exhausting device.
Background technology
Diffusion furnace is one of important technological equipment of operation before semiconductor production line, for the techniques such as diffusion, oxidation, annealing, alloy and sintering of the industries such as large scale integrated circuit, discrete device, power electronics, photoelectric device and optical fiber.The main application of diffusion technique is under hot conditions, semiconductor crystal wafer to be adulterated, and soon element phosphor, boron diffuse into silicon chip, thereby changes and control type, concentration and the distribution of impurity in semiconductor, to set up different electrical characteristics regions.During diffusion furnace operation, because temperature in stove is high, cause external temperature relatively high, especially fire door place temperature is far above workshop temperature, fire door outside is nearby the required several gas hybrid reactions place of equipment, temperature continues the too high stability that can affect gas, make reaction that deviation occur, normally air feed, causes equipment fault normally not move.
Summary of the invention
The technical problems to be solved in the utility model is to provide a kind of diffusion furnace air exhausting device, effectively reduce fire door ambient temperature, extract the pernicious gas that in body of heater, reaction produces out, guarantee that the outer gas reaction of body of heater is not subject to temperatures involved, guarantees the normal air feed of equipment and operation.
The utility model is achieved through the following technical solutions:
Diffusion furnace air exhausting device, comprise the Quartz stove tube in diffusion furnace, on the body of heater of described Quartz stove tube exit one side, be vertically fixed with an exhaust duct, at least offer an air inlet on described exhaust duct, the air outlet of described exhaust duct is communicated with workshop exhaust system.
The further improvement project of the utility model is, described exhaust duct is rectangular tube, and described air inlet is opened in respectively on adjacent two sidewalls near described Quartz stove tube exit.
The utility model further improvement project is that described air inlet is provided with the cover plate of adjustable openings size.
Compared to the prior art the utility model has the following advantages:
The utility model is simple in structure, air exhauster is opened the hot gas that rear exhaust duct can effectively be collected fire door, reduce fire door temperature around, pernicious gas in hot gas can also be extracted out and avoided staff's health to work the mischief, it guarantees that the outer mixed gas reaction of body of heater is not subject to temperatures involved, guarantees the normal air feed of equipment and operation.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Fig. 2 be in Fig. 1 A to schematic diagram.
The specific embodiment
Diffusion furnace air exhausting device as shown in Figure 1, comprise the Quartz stove tube 1 in diffusion furnace, on the body of heater of Quartz stove tube 1 exit one side, be vertically fixed with an exhaust duct 2, on the sidewall of exhaust duct 2, at least offer an air inlet 3, the air outlet of exhaust duct 2 is communicated with workshop exhaust system, extracts fire door gas around under the drive of air exhauster out.
In the present embodiment, exhaust duct 2 is rectangular tube, and air inlet 3 is opened in respectively on adjacent two sidewalls near Quartz stove tube 1 exit, wherein, all offers two air inlets 3 on two sidewalls, can effectively collect gas.Air inlet 3 is provided with the cover plate 4 of adjustable openings size, can regulate flexibly opening according to the discharge capacity of gas.
Claims (3)
1. diffusion furnace air exhausting device, comprise the Quartz stove tube (1) in diffusion furnace, it is characterized in that: on the body of heater of described Quartz stove tube (1) exit one side, be vertically fixed with an exhaust duct (2), on described exhaust duct (2), at least offer an air inlet (3), the air outlet of described exhaust duct (2) is communicated with workshop exhaust system.
2. diffusion furnace air exhausting device as claimed in claim 1, is characterized in that: described exhaust duct (2) is rectangular tube, and described air inlet (3) is opened in respectively on adjacent two sidewalls near described Quartz stove tube (1) exit.
3. diffusion furnace air exhausting device as claimed in claim 2, is characterized in that: described air inlet (3) is provided with the cover plate (4) of adjustable openings size.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320568363.6U CN203432380U (en) | 2013-09-13 | 2013-09-13 | Diffusion furnace air exhausting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320568363.6U CN203432380U (en) | 2013-09-13 | 2013-09-13 | Diffusion furnace air exhausting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203432380U true CN203432380U (en) | 2014-02-12 |
Family
ID=50061414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320568363.6U Expired - Fee Related CN203432380U (en) | 2013-09-13 | 2013-09-13 | Diffusion furnace air exhausting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203432380U (en) |
-
2013
- 2013-09-13 CN CN201320568363.6U patent/CN203432380U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140212 Termination date: 20170913 |