CN202096777U - Waste gas flow interception liquefying device for solar diffusion furnace - Google Patents
Waste gas flow interception liquefying device for solar diffusion furnace Download PDFInfo
- Publication number
- CN202096777U CN202096777U CN2011201380813U CN201120138081U CN202096777U CN 202096777 U CN202096777 U CN 202096777U CN 2011201380813 U CN2011201380813 U CN 2011201380813U CN 201120138081 U CN201120138081 U CN 201120138081U CN 202096777 U CN202096777 U CN 202096777U
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- bottle
- waste gas
- diffusion furnace
- gas
- solar energy
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Abstract
The utility model provides a waste gas flow interception liquefying device for a solar diffusion furnace, which is characterized by comprising a bottle fixed onto the diffusion furnace. One end of a gas guide tube is connected with the tail of the diffusion furnace, the other end of the gas guide tube is connected with the bottle, quartz tubules are arranged inside the bottle, and an exhaust port is arranged on the top of the bottle. High-temperature waste gas generated in the diffusion process is guided into a gas gathering bottle for waste gas interception through the gas guide tube, cooling time of the waste gas in the gas gathering bottle can be greatly prolonged since the waste gas are buffered through the plurality of quartz tubules in the gas gathering bottle, and thereby the waste gas discharged into the gas gathering bottle can be completely cooled and liquefied, and discharged waste gas is further reduced.
Description
Technical field
The utility model relates to a kind of solar energy diffusion furnace waste gas liquefying plant that dams that is used for.
Background technology
Diffusion furnace is one of important technological equipment of operation before the integrated circuit production line; Its main application is that semiconductor is mixed; Promptly under hot conditions, dopant material is diffused into silicon chip; Thereby change and control type, concentration and the distribution of impurity in the semiconductor, so that set up different electrical characteristics zones.Diffusion furnace in the course of the work, the tail gas that produces through High temperature diffusion directly gets into discharge duct, can produce more toxic emission, not only influences plant area's air quality, also can cause certain atmosphere pollution.
Summary of the invention
The purpose of the utility model provides and a kind ofly makes waste gas in the solar energy diffusion furnace be able to the device that dams and liquefy.
In order to achieve the above object; The technical scheme of the utility model has provided a kind of solar energy diffusion furnace waste gas liquefying plant that dams; It is characterized in that: comprise the bottle that is fixed on the diffusion furnace, an end of wireway connects the afterbody of diffusion furnace, and the other end connects bottle; In bottle, be provided with quartzy tubule, have exhaust outlet at the top of bottle.
Further, said bottle is located at fixedly on the bottle platform, and fixedly the bottle platform is fixed on the said diffusion furnace through fixed screw.
The irregular stacking in said bottle of said quartzy tubule, and pile with bottle.
The utility model provides is used for the solar energy diffusion furnace waste gas liquefying plant that dams; The high-temp waste gas that diffusion technique produces imports the gas bottle that waste gas dams through wireway; Buffering through a large amount of quartzy tubules in the gas bottle; Waste gas obtains prolongation by a relatively large margin the cool time in gas bottle, can make the waste gas that enters gas bottle obtain sufficient cooling liquid, further reduces exhaust gas discharging.
Description of drawings
The dam vertical view of liquefying plant of a kind of solar energy diffusion furnace waste gas that Fig. 1 provides for the utility model;
The dam side view of liquefying plant of a kind of solar energy diffusion furnace waste gas that Fig. 2 provides for the utility model.
The specific embodiment
For making the utility model more obviously understandable, now with a preferred embodiment, and conjunction with figs. elaborates as follows.
Like Fig. 1 and shown in Figure 2, a kind of solar energy diffusion furnace waste gas that provides for the utility model liquefying plant that dams comprises bottle 1; Bottle 1 is located at fixedly on the bottle platform 6, and fixedly bottle platform 6 is fixed on the said diffusion furnace through fixed screw 4, and an end of wireway 5 connects the afterbody of diffusion furnace; The other end connects bottle 1, in bottle 1, is provided with quartzy tubule 2, the irregular stacking in bottle 1 of quartzy tubule 2; And pile with bottle 1, the top of bottle 1 has exhaust outlet 3.
The course of work of the utility model is following: the high-temp waste gas that the solar energy crystal silicon battery produces in diffusion technique imports the bottle 1 that waste gas dam from the wireway 5 of diffusion furnace afterbody; Buffering through a large amount of quartzy tubule 2 in the bottle 1 is dammed; Waste gas obtains prolongation by a relatively large margin the cool time in bottle 1; Can make the waste gas that enters bottle 1 obtain sufficient cooling liquid, thereby make the toxic emission in the external discharge duct realize further reducing.
Claims (3)
1. solar energy diffusion furnace waste gas liquefying plant that dams; It is characterized in that: comprise the bottle (1) that is fixed on the diffusion furnace; One end of wireway (5) connects the afterbody of diffusion furnace; The other end connects bottle (1), in bottle (1), is provided with quartzy tubule (2), has exhaust outlet (3) at the top of bottle (1).
2. a kind of solar energy diffusion furnace waste gas as claimed in claim 1 liquefying plant that dams is characterized in that: said bottle (1) is located at fixedly on the bottle platform (6), and fixedly bottle platform (6) is fixed on the said diffusion furnace through fixed screw (4).
3. a kind of solar energy diffusion furnace waste gas as claimed in claim 1 liquefying plant that dams is characterized in that: said quartzy tubule (2) irregular stacking in said bottle (1), and pile with bottle (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201380813U CN202096777U (en) | 2011-05-04 | 2011-05-04 | Waste gas flow interception liquefying device for solar diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201380813U CN202096777U (en) | 2011-05-04 | 2011-05-04 | Waste gas flow interception liquefying device for solar diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202096777U true CN202096777U (en) | 2012-01-04 |
Family
ID=45382814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201380813U Expired - Fee Related CN202096777U (en) | 2011-05-04 | 2011-05-04 | Waste gas flow interception liquefying device for solar diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202096777U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107824001A (en) * | 2017-12-13 | 2018-03-23 | 无锡正隆星源电子科技有限公司 | Diffusion furnace emission-control equipment |
-
2011
- 2011-05-04 CN CN2011201380813U patent/CN202096777U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107824001A (en) * | 2017-12-13 | 2018-03-23 | 无锡正隆星源电子科技有限公司 | Diffusion furnace emission-control equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120104 Termination date: 20200504 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |