CN203422471U - Approach detector device - Google Patents

Approach detector device Download PDF

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Publication number
CN203422471U
CN203422471U CN201320232334.2U CN201320232334U CN203422471U CN 203422471 U CN203422471 U CN 203422471U CN 201320232334 U CN201320232334 U CN 201320232334U CN 203422471 U CN203422471 U CN 203422471U
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China
Prior art keywords
lens
opening
image sensor
proximity detector
layer
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Withdrawn - After Issue
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CN201320232334.2U
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Chinese (zh)
Inventor
栾竟恩
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STMicroelectronics Shenzhen R&D Co Ltd
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STMicroelectronics Shenzhen Manufacturing Co Ltd
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Priority to CN201320232334.2U priority Critical patent/CN203422471U/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93Batch processes
    • H01L24/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/96Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/568Temporary substrate used as encapsulation process aid
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04105Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/12105Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/18High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L2224/23Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
    • H01L2224/24Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
    • H01L2224/241Disposition
    • H01L2224/24135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/24137Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

The utility model discloses an approach detector device. The approach detector device can comprise: a first interconnected layer comprising a first dielectric layer and a plurality of first conductive path lines borne by the first dielectric layer; and an IC layer disposed on a first interconnected layer and provided with an image sensor IC and a light source IC transversely spaced from the image sensor IC. The approach detector device can comprise a second interconnected layer disposed on the IC layer, and provided with a second dielectric layer and a plurality of second conductive path lines borne by the second dielectric layer. The second interconnected layer can be provided with a first opening and a second opening respectively directed at the image sensor IC and the light source IC. each of the image sensor IC and the light source IC can be coupled to the first conductive path lines and the second conductive path lines. The approach detector can comprise a lens assembly disposed on the second interconnected layer and comprising a first lens and a second lens directed at the first opening and the second opening.

Description

Proximity detector equipment
Technical field
The disclosure relates to image sensor apparatus field, and relates more specifically to proximity detector equipment.
Background technology
Generally speaking, electronic equipment comprises one or more for the image sensor module of the media function of enhancing is provided.For example, typical electronic equipment can utilize image sensor module to carry out that image is caught or video conference call.Some electronic equipments comprise the additional image sensor apparatus for other object, such as proximity detector.
For example, electronic equipment can provide object distance with proximity detector, provides to focus on adjust for the image sensor module to camera special use.In mobile device application, when user's hand is nearby time, can detect with proximity detector, thereby rapidly and exactly equipment be waken up from power saving sleep pattern.Generally speaking, proximity detector comprises the light source that radiation is pointed to near potential object, and the imageing sensor that receives the radiation of being reflected by near object.
For example, transferred the application assignee the artificial Brodie of invention etc. No. 2009/0057544 U.S. Patent Application Publication for the image sensor module of mobile device.This image sensor module comprises lens, the shell of carrying lens, and the lens cover above lens and shell.This image sensor module comprises for adjusting the lens barrel member of lens.Comprise the electronic equipment of one or more image sensor module in manufacture during, especially, in production in enormous quantities, wish to manufacture as far as possible rapidly electronic product.
In multi-step process, manufacture typical image sensor module.The first step comprises that semiconductor processes is to provide image sensor IC (IC).Next step comprises the test for image sensor IC and the encapsulation of some forms.If need, image sensor IC can be assembled in image sensor module together with lens and removable lens barrel.Can be manually or via this assembling of machine carries out image sensor assembly.For example, in using the electronic equipment of surface mount component, picking up and place (pick-and-place (P & P)) machine can be by assembled to printed circuit board (PCB) (PCB).This type of separately shortcoming of encapsulation be, its efficiency may be quite low and its also may require to detect independently each equipment, increased manufacturing time.
The method of imageing sensor is disclosed in transferring the application's No. 2012/0248625 U.S. Patent Application Publication assignee, invention Ren Wei section phenanthrene etc.This imageing sensor comprises transparent supporting, a pair of IC in transparent supporting and in transparent supporting and around the encapsulating material of this pair of IC.
With reference now to Fig. 1,, as in the prior art, proximity detector 20 comprises dielectric layer 26, the image sensor IC on dielectric layer 24, same light source 22 and the adhesives between image sensor IC and dielectric layer 25 on dielectric layer.Proximity detector 20 comprises and is positioned on dielectric layer 26 and has the lid 21 therein with a plurality of openings 31,32a-32b, and the transparent adhesives 23 that covers light source 22.Proximity detector 20 also comprises the lens 27 that carried by lid 21, and a plurality of bonding wire 29a-29c, and this bonding wire 29a-29c is coupled to the conductive trace on dielectric layer 26 by image sensor IC 24 and light source 22.Proximity detector 20 is also included in the additional transparent adhesives 28 between image sensor IC 24 and lens 27.The latent defect of this proximity detector 20 comprises the multi-step high precision encapsulation process of using P & P equipment.Equally, due to dimension constraint, this proximity detector 20 may be more unreliable and be difficult to be integrated in mobile device.
Utility model content
In view of aforesaid background technology, therefore object of the present disclosure is to provide a kind of proximity detector equipment of high efficiency manufacture.
To achieve these goals, the utility model provides a kind of proximity detector equipment, comprising:
The first interconnection layer, comprises the first dielectric layer and by a plurality of first conductive traces of its carrying;
Integrated circuit layer, on described the first interconnection layer and comprise
Image sensor IC, and
Light source integrated circuit, with described image sensor IC lateral separation;
The second interconnection layer, on described integrated circuit layer and comprise the second dielectric layer and by a plurality of second conductive traces of its carrying, described the second interconnection layer has the first opening and the second opening aimed at described image sensor IC and described light source integrated circuit respectively therein;
Each in described image sensor IC and described light source integrated circuit is coupled to described a plurality of the first conductive trace and the second conductive trace, and
Lens subassembly, on described the second interconnection layer and comprise first lens and the second lens of aiming at described the first opening and described the second opening respectively.
Preferably, wherein said integrated circuit layer comprises the horizontal encapsulating material around described image sensor IC and described light source integrated circuit.
Preferably, wherein said encapsulating material comprises a plurality of conductive vias, and each conductive via is coupling between paired described a plurality of the first conductive traces and described the second conductive trace of aiming at respectively.
Preferably, be also included in described first opening of described the second interconnection layer and the transparent adhesives in described the second opening.
Preferably, wherein said lens subassembly also comprises molded raw material, described molded raw material around described first lens and described the second lens and have respectively with described first lens and shown in one of them first opening of aiming at and second opening of the second lens.
Preferably, also comprise a plurality of contacts of being coupled to respectively described a plurality of the first conductive traces.
Preferably, wherein said a plurality of contact comprises a plurality of ball grid array contacts.
Preferably, wherein said first lens comprises filter lens.
Preferably, wherein said light source integrated circuit comprises light emitting diode.
To achieve these goals, the utility model also provides another kind of proximity detector equipment, comprising:
The first interconnection layer, comprises the first dielectric layer and by a plurality of first conductive traces of its carrying;
A plurality of contacts, are coupled to respectively described a plurality of the first conductive trace;
Integrated circuit layer, on described the first interconnection layer and comprise
Image sensor IC,
Light source integrated circuit, with described image sensor IC lateral separation, and
Encapsulating material, laterally around described image sensor IC and described light source integrated circuit;
The second interconnection layer, on described integrated circuit layer and comprise the second dielectric layer and by a plurality of second conductive traces of its carrying, described the second interconnection layer has the first opening and the second opening aimed at described image sensor IC and described light source integrated circuit respectively therein;
Each in described image sensor IC and described light source integrated circuit is coupled to described a plurality of the first conductive trace and the second conductive trace, and
Lens subassembly, on described the second interconnection layer and comprise first lens and the second lens of aiming at described the first opening and the second opening respectively.
Preferably, wherein said encapsulating material comprises a plurality of conductive vias, each conductive via be coupling in respectively paired described a plurality of the first conductive traces of aiming at and shown between the second conductive trace.
Preferably, be also included in described first opening of described the second interconnection layer and the transparent adhesives in the second opening.
Preferably, wherein said lens subassembly also comprises molded raw material, and described molded raw material is around described first lens and the second lens and have respectively one of them first opening of aiming at and the second opening with described first lens and the second lens.
Preferably, wherein said a plurality of contact comprises a plurality of ball grid array contacts.
Proximity detector equipment of the present utility model has following beneficial effect:
Can use sane wafer level process technology to manufacture proximity detector equipment.In addition, can manufacture in a large number proximity detector equipment.In addition, because first lens and the second lens are firmly integrated with lens subassembly model raw material, so this structure is mechanically firm.Equally, lens subassembly is firmly integrated with first interconnection layer the second interconnection layer and IC layer, has increased equally rigidity mechanically.The encapsulation of proximity detector equipment is thinner than typical method, therefore allows it to be integrated in mobile device more easily.In addition, proximity detector equipment, for image sensor IC and light source IC provide good coplanarity, has therefore reduced the calculated load that proximity test calculates
Accompanying drawing explanation
Fig. 1 is according to the schematic sectional view of the proximity detector equipment of prior art.
Fig. 2 is according to the schematic sectional view of proximity detector equipment of the present disclosure.
Fig. 3 is the process flow diagram for the manufacture of the method for the proximity detector equipment of Fig. 2.
Fig. 4 to Figure 13 is the schematic sectional view for the manufacture of the step of the proximity detector equipment of Fig. 2.
Figure 14 to Figure 16 is for the manufacture of according to the schematic sectional view of the step of another embodiment of proximity detector equipment of the present disclosure.
Embodiment
Now, with reference to the accompanying drawing that shows therein preferred embodiment of the present disclosure, the present embodiment is described more fully hereinafter.Yet the present embodiment can be embodied in many different forms, should not be understood to be limited to embodiment in this paper.On the contrary, provide these embodiment to make the disclosure will become careful and perfect, and will to those skilled in the art, pass on fully the scope of the present embodiment.Same numbers relates to same parts all the time, and by initial symbol, indicates similar components in alternative.
First with reference to figure 2, describe according to proximity detector equipment 40 of the present disclosure now.Proximity detector equipment 40 exemplarily comprises that the first interconnection layer 41, the first interconnection layers 41 comprise the first dielectric layer 45 and by a plurality of first conductive trace 48a-48b of its carrying.Proximity detector equipment 40 exemplarily comprises IC layer 42, IC layer 42 on the first interconnection layer 41 and comprise image sensor IC 56 and with the laterally spaced light source IC55 of image sensor IC.Light source IC55 can comprise light emitting diode (LED), such as infrared LED.
Proximity detector equipment 40 is exemplarily included in the second interconnection layer 43 on IC layer 42, and the second interconnection layer 43 comprises the second dielectric layer 46 and by a plurality of second conductive trace 51a-51b of its carrying.The second interconnection layer 43 is exemplarily included in the first opening 62a-62b aiming at image sensor IC 56 and light source IC55 respectively and the second opening 61 wherein.Each in image sensor IC 56 and light source IC55 can be coupled to a plurality of the first conductive trace 48a-48b and the second conductive trace 51a-51b.
In illustrated embodiment, the first opening 62a-62b exemplarily aims at image sensor IC 56.The first paired opening 62a-62b provides the path of the first and second lens cavities for image sensor IC 56.
Proximity detector equipment 40 is exemplarily included in the lens subassembly 44 on the second interconnection layer 43.Lens subassembly 44 exemplarily comprises first lens 53 and the second lens 52, and it is aimed at the first opening 62a-62b and the second opening 61 respectively.
Particularly, IC layer 42 comprises the horizontal encapsulating material 47 around image sensor IC 56 and light source IC55.Encapsulating material 47 exemplarily comprises a plurality of conductive via 50a-50b that run through wherein.Each conductive via 50a-50b is coupling between paired a plurality of the first conductive trace 48a-48b and the second conductive trace 51a-51b that aim at respectively.
Proximity detector equipment 40 is exemplarily included in transparent adhesives 54a-54b in the first opening 62a-62b of the second interconnection layer and the second opening 61.In the illustrated embodiment, lens subassembly 44 comprises around the molded raw material 57 of first lens 53 and the second lens 52.Lens subassembly 44 exemplarily comprises the first opening 59a-59b and the second opening 58, and it is aimed at one of them of first lens 53 and the second lens 52 respectively.In the illustrated embodiment, the first opening 59a-59b aims at first lens 53.
In addition, proximity detector equipment 40 exemplarily comprises a plurality of contact 49a-49b (Figure 16), and it is coupled to respectively a plurality of the first conductive trace 48a-48b, and for example, a plurality of contact 49a-49b (Figure 16) can comprise a plurality of BGA contacts.First lens 53 can comprise filter lens (for example glass filter or with the transparent sheet of optical filtering coat).In addition or as alternative, first lens 53 can also comprise concentrating element.
Relate on the other hand the method for manufacturing proximity detector equipment 40.The method can comprise and forms that the first interconnection layer 41, the first interconnection layers 41 comprise the first dielectric layer 45 and by a plurality of first conductive trace 48a-48b of its carrying.The method can comprise and form IC layer 42, IC layer 42 on the first interconnection layer 41 and comprise image sensor IC 56 and with the laterally spaced light source IC55 of image sensor IC 56.The method can comprise and forms the second interconnection layer 43, the second interconnection layers 43 on IC layer 42 and comprise the second dielectric layer 46 and by a plurality of second conductive trace 51-51b of its carrying.The second interconnection layer can have the first opening 62a-62b aiming at image sensor IC 56 and light source IC55 respectively and the second opening 61 therein, and each in image sensor IC and light source IC can be coupled to a plurality of the first conductive trace 48a-48b and the second conductive trace 51-51b.The method can also comprise and form lens subassembly 44, and lens subassembly 44 is on the second interconnection layer 43 and comprise first lens 53 and the second lens 52 of aiming at the first opening 62a-62b and the second opening 61 respectively.
In addition,, with reference now to Fig. 3 to Figure 16, flow process Figure 70 illustrates the method for be used for producing the semiconductor devices 20 (square frames 71).In the illustrated embodiment, show the wafer level process technology for the manufacture of identical in pairs proximity detector equipment 40, but should be understood that, typical process will comprise the manufacture (be sometimes included in the embodiment of the variation in single manufacture process, the proximity detector of the vicinity illustrating does not need identical) of a large amount of proximity detector equipment.The method comprises formation bearing bed 90, and the adhesive linkage on bearing bed 90 91 (Fig. 4 and square frame 73).The method comprises image sensor IC 56 and light source IC55 is positioned to (Fig. 5 and square frame 74) on adhesive linkage 91.In this, can also locate the surperficial erecting equipment (for example capacitor) of other expectations arbitrarily.The method is included in image sensor IC 56 and light source IC55 above forms encapsulating material 47 to define IC layer 42 (Fig. 6 and square frame 75).
The method comprise by caking layer 91, with separated IC layer and on the opposing face of IC layer, again IC layer is applied to adhesive linkage by 42 upside-down mounting of IC layer on bearing bed 90 (Fig. 7 and square frame 77).The method also comprises and forms the second interconnection layer 43 and by a plurality of second conductive trace 51a-51b (Fig. 8 and square frame 78) of its carrying.
The method is included in the first opening 62a-62b of the second interconnection layer 43 and the second opening 61 and forms transparent adhesives 54a-54b.The method also comprises first lens 53 and the second lens 52 is positioned to transparent adhesives 54a-54b upper (Fig. 9 and square frame 79).
The method is included on first lens 53 and the second lens 52 and forms molded raw material 57 to limit lens subassembly 44 (Figure 10 and square frame 80).In certain embodiments, the formation of molded raw material 57 can be that film is auxiliary.The method comprises IC42, the second interconnection layer 43 and lens subassembly 44 upside-down mountings (Figure 11 and square frame 81) (reusing heating steps fails adhesive linkage 91) on bearing bed 90.The method comprises the part (Figure 12 and square frame 82) at the back of grinding IC layer 42.
The method comprises and forms the first interconnection layer 41, and it comprises the first dielectric layer 45 and by a plurality of first conductive trace 48a-48b (Figure 13 and square frame 84) of its carrying.In this embodiment, a plurality of the first conductive trace 48a-48b definition LGA contacts.The method also comprises cutting step (Figure 15) (square frame 84-86).
Preferably, can use sane wafer level process technology to manufacture proximity detector equipment 40.In addition, can manufacture in a large number proximity detector equipment 40.In addition, because first lens 53 and the second lens 52 are firmly integrated with lens subassembly model raw material 57, so this structure is mechanically firm.Equally, lens subassembly 44 is firmly integrated with the first interconnection layer 41, the second interconnection layer 43 and IC layer 43, has increased equally rigidity mechanically.The encapsulation of proximity detector equipment 40 is thinner than typical method, therefore allows it to be integrated in mobile device more easily.In addition, proximity detector equipment 40, for image sensor IC 55 and light source IC56 provide good coplanarity, has therefore reduced the calculated load (from having adjacent source and receiver position) that proximity test calculates.
Referring again to Figure 14 to Figure 16, description is for the manufacture of the step of another embodiment of the method for proximity detector equipment 40 now.In embodiment at this for the manufacture of the method for proximity detector equipment 40, give hereinbefore the step described in conjunction with Fig. 2 to Figure 13 and element initial symbol and at this without repeating.This embodiment and previous embodiment difference be, the method is exemplarily included in that a plurality of first conductive trace 48a '-48b ' are upper forms a plurality of ball grid array contact 49a '-49b ' (Figure 14 and square frame 85).The method exemplarily comprises the cutting step (Figure 15-Figure 16) that uses cutting blade 97 '.
Benefit from the instruction existing in aforementioned specification and accompanying drawing, those skilled in the art can expect many modifications of the present disclosure and other embodiment.Therefore, should be appreciated that the disclosure is not limited only to disclosed specific embodiment, and modification and embodiment are intended to comprise within the scope of the appended claims.

Claims (14)

1. a proximity detector equipment, is characterized in that, comprising:
The first interconnection layer, comprises the first dielectric layer and by a plurality of first conductive traces of its carrying;
Integrated circuit layer, on described the first interconnection layer and comprise
Image sensor IC, and
Light source integrated circuit, with described image sensor IC lateral separation;
The second interconnection layer, on described integrated circuit layer and comprise the second dielectric layer and by a plurality of second conductive traces of its carrying, described the second interconnection layer has the first opening and the second opening aimed at described image sensor IC and described light source integrated circuit respectively therein;
Each in described image sensor IC and described light source integrated circuit is coupled to described a plurality of the first conductive trace and the second conductive trace, and
Lens subassembly, on described the second interconnection layer and comprise first lens and the second lens of aiming at described the first opening and described the second opening respectively.
2. proximity detector equipment as claimed in claim 1, is characterized in that, wherein said integrated circuit layer comprises the horizontal encapsulating material around described image sensor IC and described light source integrated circuit.
3. proximity detector equipment as claimed in claim 2, is characterized in that, wherein said encapsulating material comprises a plurality of conductive vias, and each conductive via is coupling between paired described a plurality of the first conductive traces and described the second conductive trace of aiming at respectively.
4. proximity detector equipment as claimed in claim 1, is characterized in that, is also included in described first opening of described the second interconnection layer and the transparent adhesives in described the second opening.
5. proximity detector equipment as claimed in claim 1, it is characterized in that, wherein said lens subassembly also comprises molded raw material, described molded raw material around described first lens and described the second lens and have respectively with described first lens and shown in one of them first opening of aiming at and second opening of the second lens.
6. proximity detector equipment as claimed in claim 1, is characterized in that, also comprises a plurality of contacts of being coupled to respectively described a plurality of the first conductive traces.
7. proximity detector equipment as claimed in claim 6, is characterized in that, wherein said a plurality of contacts comprise a plurality of ball grid array contacts.
8. proximity detector equipment as claimed in claim 1, is characterized in that, wherein said first lens comprises filter lens.
9. proximity detector equipment as claimed in claim 1, is characterized in that, wherein said light source integrated circuit comprises light emitting diode.
10. a proximity detector equipment, is characterized in that, comprising:
The first interconnection layer, comprises the first dielectric layer and by a plurality of first conductive traces of its carrying;
A plurality of contacts, are coupled to respectively described a plurality of the first conductive trace;
Integrated circuit layer, on described the first interconnection layer and comprise
Image sensor IC,
Light source integrated circuit, with described image sensor IC lateral separation, and
Encapsulating material, laterally around described image sensor IC and described light source integrated circuit;
The second interconnection layer, on described integrated circuit layer and comprise the second dielectric layer and by a plurality of second conductive traces of its carrying, described the second interconnection layer has the first opening and the second opening aimed at described image sensor IC and described light source integrated circuit respectively therein;
Each in described image sensor IC and described light source integrated circuit is coupled to described a plurality of the first conductive trace and the second conductive trace, and
Lens subassembly, on described the second interconnection layer and comprise first lens and the second lens of aiming at described the first opening and the second opening respectively.
11. proximity detector equipment as claimed in claim 10, it is characterized in that, wherein said encapsulating material comprises a plurality of conductive vias, each conductive via be coupling in respectively paired described a plurality of the first conductive traces of aiming at and shown between the second conductive trace.
12. proximity detector equipment as claimed in claim 10, is characterized in that, are also included in described first opening of described the second interconnection layer and the transparent adhesives in the second opening.
13. proximity detector equipment as claimed in claim 10, it is characterized in that, wherein said lens subassembly also comprises molded raw material, and described molded raw material is around described first lens and the second lens and have respectively one of them first opening of aiming at and the second opening with described first lens and the second lens.
14. proximity detector equipment as claimed in claim 10, is characterized in that, wherein said a plurality of contacts comprise a plurality of ball grid array contacts.
CN201320232334.2U 2013-04-28 2013-04-28 Approach detector device Withdrawn - After Issue CN203422471U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104122541A (en) * 2013-04-28 2014-10-29 意法半导体研发(深圳)有限公司 Approach detector device with interconnection layers and correlation method
CN105895625A (en) * 2014-12-25 2016-08-24 意法半导体有限公司 Wafer-level package for proximity sensor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104122541A (en) * 2013-04-28 2014-10-29 意法半导体研发(深圳)有限公司 Approach detector device with interconnection layers and correlation method
CN104122541B (en) * 2013-04-28 2016-08-17 意法半导体研发(深圳)有限公司 There is proximity detector equipment and the correlation technique of interconnection layer
US9768341B2 (en) 2013-04-28 2017-09-19 STMicroelectronics (Shenzhen) R&D Co., Ltd. Proximity detector device with interconnect layers and related methods
US10141471B2 (en) 2013-04-28 2018-11-27 STMicroelectronics (Shenzhen) R&D Co., Ltd. Proximity detector device with interconnect layers and related methods
US10326039B2 (en) 2013-04-28 2019-06-18 STMicroelectronics (Shenzhen) R&D Co., Ltd. Proximity detector device with interconnect layers and related methods
CN105895625A (en) * 2014-12-25 2016-08-24 意法半导体有限公司 Wafer-level package for proximity sensor
CN105895625B (en) * 2014-12-25 2018-09-21 意法半导体有限公司 Wafer-class encapsulation for proximity sensor

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