CN203414732U - 用于极紫外光刻机的动态气体锁 - Google Patents
用于极紫外光刻机的动态气体锁 Download PDFInfo
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104597115A (zh) * | 2015-02-12 | 2015-05-06 | 中国科学院光电研究院 | 极紫外辐照材料测试系统的真空获得装置及相应测试方法 |
CN106094444A (zh) * | 2016-06-03 | 2016-11-09 | 中国科学院光电研究院 | 一种用于极紫外光刻机的动态气体锁 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104597115A (zh) * | 2015-02-12 | 2015-05-06 | 中国科学院光电研究院 | 极紫外辐照材料测试系统的真空获得装置及相应测试方法 |
CN104597115B (zh) * | 2015-02-12 | 2019-03-19 | 中国科学院光电研究院 | 极紫外辐照材料测试系统的真空获得装置及相应测试方法 |
CN106094444A (zh) * | 2016-06-03 | 2016-11-09 | 中国科学院光电研究院 | 一种用于极紫外光刻机的动态气体锁 |
CN106094444B (zh) * | 2016-06-03 | 2017-11-10 | 中国科学院光电研究院 | 一种用于极紫外光刻机的动态气体锁 |
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C14 | Grant of patent or utility model | ||
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Effective date of registration: 20200831 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 100094, No. 9 Deng Nan Road, Beijing, Haidian District Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences Effective date of registration: 20200831 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics, Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences |
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Granted publication date: 20140129 |
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CX01 | Expiry of patent term |