Summary of the invention
The embodiments of the present invention that are described hereinafter provide the improved Apparatus and method for for the projection of the light of patterning.
Therefore, according to one embodiment of the present invention, provide a kind of optoelectronic device, it comprises the monolithic array of semiconductor substrate and light-emitting component, and described light-emitting component is disposed on described substrate with the two-dimensional pattern of irregular lattice.
In disclosed embodiment, light-emitting component comprises vertical cavity surface-emitting laser (VCSEL) diode.
In some embodiments, the two-dimensional pattern of light-emitting component is uncorrelated pattern.
In one embodiment, light-emitting component comprises first and second groups of light-emitting components, wherein, described first and second groups are staggered and are arranged on substrate by corresponding the first and second patterns, and wherein said equipment comprises the first and second conductors, the first and second conductors are connected respectively separately to drive first and second groups of light-emitting components, make described equipment selectively by one or two utilizing emitted light in the first and second patterns.Described equipment also can comprise projection optical device and imaging device, projection optical device is configured to the light by the light-emitting component emission is projected on object, thereby imaging device is configured to catching the image of object with low-resolution mode when only having first group of light-emitting component to be actuated to utilizing emitted light to project on object by the low resolution pattern, thereby and be configured to when both being actuated to utilizing emitted light when first and second groups of light-emitting components high resolution design is projected to object the image with high resolution model seizure object.
In some embodiments, described equipment comprises projecting lens, projecting lens is installed on semiconductor substrate and is configured to gather and focuses on the light by light-emitting component emission, so that the light beam that projection contains the light pattern corresponding with the two-dimensional pattern of light-emitting component on substrate.Described equipment also can comprise diffraction optical element (DOE), and described DOE is installed on substrate and is configured to expand by the duplicate a plurality of adjacent one another are of generation pattern the light beam of institute's projection.Projecting lens and DOE can be formed on the opposite side of single optical substrate.
Alternatively, described equipment comprises single diffraction optical element (DOE), DOE is installed on semiconductor substrate and is configured to gather and focus on the light by the light-emitting component emission, so that the light beam that projection contains the light pattern corresponding with the two-dimensional pattern of light-emitting component on substrate, expand the light beam of institute's projection by the duplicate a plurality of adjacent one another are that produces this pattern simultaneously.
In addition, according to one embodiment of the present invention, provide a kind of method for the pattern projection, the method comprises producing to have the light beam that applies pattern thereon.This light beam is used projecting lens to be projected, in order to pattern is projected on the first area with first angular region in space.The field multiplier is employed to expand the light beam that is projected the lens projection, in order to pattern is projected to having than on the second area of the second angular region of the first angular region large at least 50% in space.
In addition, according to one embodiment of the present invention, provide a kind of method for the manufacture of optoelectronic device.Described method comprises to be provided semiconductor substrate and forms the monolithic array of light-emitting component with the two-dimensional pattern of irregular lattice on substrate.
From the following detailed description of embodiments of the present invention by reference to the accompanying drawings, the present invention will be understood more fully, in the accompanying drawings:
Embodiment
General introduction
In many optical projection application, pattern must be projected in the wide-angle scope.For example, in the 3D of the described kind be described in superincumbent background technology part mapping application, the pattern that often it is desirable for the light for creating mapping (map) should be projected in 90 ° or larger.In traditional optical design, reach rational optical quality and need to use expensive multicomponent projection optical device in such wide field (FOV) scope.For consumer's application, the two all may make the cost of such optical device and size prestige and step back, and the consumer applies the solution of the compact cheapness of common needs.
The some embodiments of the present invention that are described have hereinafter solved these demands by the field multiplier, the field multiplier is followed the projection optical device in optical train and is expanded the field of the required pattern of projection thereon, keeps the optical quality of the pattern of institute's projection simultaneously.The interpolation of field multiplier makes uses the projection optical device of compact cheapness to become possibility at wide regional extent inner projection pattern, and described projection optical device itself has relatively narrow FOV.
In disclosed embodiment, optical devices comprise electron gun, the light beam of electron gun pattern generation.The light beam of projecting lens projection pattern, and in the situation that there is no a multiplier, will project having on the given area corresponding with field of view (FOV) projecting lens certain angular region in space to pattern.(as in the context of this instructions and the term " lens " used, unless otherwise expressly noted, referring to unzoned lens and compound multicomponent lens in claims).Multiplier is inserted in the FOV of projecting lens---between lens and Zhong given area, space---and expand the bundle of institute's projection, and make pattern be projected onto having than on the zone of the angular region of the FOV of projecting lens large at least 50% in space.According to design, the bundle be expanded of following a multiplier can be the twice of FOV of projecting lens or even more.
In some embodiments, electron gun comprises the monolithic array of light-emitting component, the monolithic array of described light-emitting component by be applied to light beam on two-dimensional pattern corresponding to pattern be disposed on semiconductor substrate.
System is described
Fig. 1 is the schematic side elevation according to the 3D mapped system 20 of one embodiment of the present invention.System 20 is described to use an example of the field multiplier of the described kind be described below here, rather than by the mode of restriction.Similarly, principle of the present invention can be applicable in the optical projection system of other kind, and described optical projection system requires wide FOV and compactness and the low advantage of cost provided by disclosed embodiment can be provided.
System 20 comprises projecting subassembly 30, and projecting subassembly 30 projects to the bundle of patterning 38 on the surface of object 28---in this example, be the hand of system user.The image of the pattern of image-forming assembly 32 these lip-deep institute projections of seizure is also processed this image, in order to obtain this surperficial 3D figure.For this purpose, assembly 32 generally includes objective optics 40 and catches the imageing sensor 42 of image and process this image to generate the digital processing unit (not shown) of 3D mapping.The details of the picture catching of system 20 and processing aspect for example is being described in above mentioned U.S. Patent Application Publication 2010/0118123 and U.S. Patent Application Publication 2010/0007717, open this paper that is merged in by reference of these two publics announcement of a patent application.
Projecting subassembly 30 comprises beam generator 34 and a multiplier 36 of patterning, and beam generator 34 projections of patterning have the irradiation beam of the patterning of certain FOV, and the bundle of a multiplier 36 expansion institutes projection has the bundle 38 of the patterning of wider FOV with establishment.In this example, pattern comprises the luminous point random or high-contrast on black background that quasi-random is arranged, as what explained in the public announcement of a patent application of mentioning in the above.Alternatively, the pattern of any other suitable type (comprising image) can this form be projected.
Integrated pattern generator
The VCSEL array can be advantageously used in manufactures compact high-intensity light source and projector.In traditional VCSEL array, laser diode is disposed in regular lattice, for example, and such as the line grating pattern described in the U.S. Patent Application Publication 2011/0188054 of mentioning in the above, or the hexagonal lattice pattern.The two-dimensional pattern of the constant gap of (for example,, between the adjacent transmitter in the VCSEL array) between adjacent elements as the term " regular lattice " used in the context at this instructions and claims in referring to its pattern.Say in this sense term " regular lattice " and periodic lattice synonym.
The embodiments of the present invention that are described have hereinafter departed from this model, and as an alternative, the VCSEL array in the pattern that provides laser diode wherein to be disposed in irregular lattice.Optical device can be coupled, and being projected in space by the pattern of the light of the element of VCSEL array emission, becomes the pattern of corresponding point, the light that wherein each point comprises the corresponding laser diode emission in array.Usually (although optional), from the auto-correlation of the position of the laser diode of the function as transverse shift, the unessential this meaning of any displacement that is greater than the diode size is said, the pattern of the laser diode position in array and therefore the pattern of point be incoherent.Random, pseudorandom and quasi-periodic pattern is the example of such uncorrelated pattern.Therefore the light pattern be projected will be also incoherent.
The VCSEL array of this class patterning is used in particular for the pattern projection module of manufacturing integration, as described below.With the projector equipment be known in the art, compare, such module has the simple advantage of Design and manufacture, and can realize reducing and better performance of cost and size.
Fig. 2 is the schematic top view according to the optoelectronic device of one embodiment of the present invention, and it comprises semiconductor element 100, and the monolithic array of VCSEL diode 102 is formed on semiconductor element 100 by the two-dimensional pattern of irregular lattice.This array is formed on semiconductor substrate by the photoetching method of the identical type be known in the art with being used for manufacturing the VCSEL array, simultaneously suitable film layer structure forms laser diode, and conductor offers the laser diode 102 array by electric power and grounding connection from contact pad 104.
The irregular lattice arrangement of Fig. 2 realizes by the mask of suitable design simply, and photo etched mask is used to by any required two-dimensional pattern manufacturing array.Alternatively, the surface emitting element of other kind can be manufactured (although incoherent light source, as LED, may be not suitable for some pattern projection application) by this way similarly as the irregular array of light emitting diode (LED).
The monolithic VCSEL array of the described kind shown in Fig. 2 has advantages of high power extensibility.For example, use current technology, there is 0.3mm
2the tube core of effective coverage can comprise 200 transmitters, it has about 500mW or larger total luminous power output.VCSEL diode emission circular beam, and can be designed to the circular Gaussian beam that emission has single transverse mode, this is conducive to create high-contrast and highdensity dot pattern.Because the VCSEL emission wavelength is metastable as the function of temperature, so described dot pattern will be stable during operation equally, even without the effective cooling of array.
Fig. 3 A is that it comprises the VCSEL array according to the schematic side elevation of the integrated projection optical module 110 of one embodiment of the present invention, for example the array shown in Fig. 2.VCSEL tube core 100 is usually tested at wafer scale, and then is cut and is arranged on suitable stroma 114 together with suitable electrical connection 116,118.This electrical connection and possible control circuit (not shown) also can be coupled to tube core 100 by wire bonded conductor 122.
Be arranged on the lens 120 on the suitable spacer 122 of tube core top, gather and the output bundle of projection VCSEL transmitter.For temperature stability, can use glass lens.The diffraction optical element (DOE) 124 that is spaced apart device 126 location has created a plurality of duplicate 128 of pattern, and this duplicate 128 is fan out in the angular region of expansion.For example, DOE can comprise Damman grating or like, as described in the U.S. Patent Application Publication 2009/0185274 and 2010/0284082 of mentioning in the above.
Fig. 4 A is the front schematic view by the pattern 160 of the expansion of projection optical module 110 projections according to one embodiment of the present invention.The figure shows the fan-out pattern of the described kind created by DOE124.In this example, DOE has been extended to the bundle of institute's projection the array of 11 * 11 pieces 162, and described Kuai162 center is on axle 164 separately, although can produce alternatively the piece of more or less quantity.Each piece 162(in Fig. 4 A is due to pincushion distortion, and it has the foursquare shape of distortion) pattern that comprises bright spot 166, the pattern of bright spot 166 is the duplicate of the pattern of VCSEL array.
Usually, in this example, the fan-out angle between adjacent piece 162 is in the scope of 4-8 °.Suppose that each such piece for example comprises approximately 200 points in incoherent pattern, approximately 200 points are corresponding with approximately 200 laser diodes 102 in the VCSEL array for this, and 11 * 11 fan-out patterns 160 shown in Fig. 4 A will comprise more than 20,000 points.DOE124 is designed such that the duplicate of institute's projection of pattern covers the surface in (tile) space or regional, as for example described in the U.S. Patent Application Publication 2010/0284082.
Fig. 3 B is the schematic side elevation according to the integrated projection optical module 130 of optional embodiment of the present invention, and this module contains irregular VCSEL array, for example array shown in Fig. 2.In the present embodiment, the diffracted lens 130 of the refraction projection lens 120 of module 110 replace.Lens 130 and fan-out DOE134(are similar to DOE124) can be formed on the opposite side of same optical substrate 132.Although diffraction lens is responsive to wavelength variations, it is feasible that the relative stability of the wavelength of VCSEL element becomes this method.DOE134 is by form 138 protections that are arranged on spacer 140.
Fig. 3 C is the schematic side elevation according to the integrated projection optical module 150 of another embodiment of the invention, and this module contains irregular VCSEL array.Here, the function of diffraction lens and fan-out DOE is bonded in the single diffraction element 154 be formed on optical substrate 152, and optical substrate 152 is also as form.Element 154 is carried out and focused on and two functions of fan-out: it gathers and focuses on the light by the emission of the light-emitting component on tube core 100, so that the light beam that projection contains the light pattern corresponding with the two-dimensional pattern of light-emitting component on substrate, expand the light beam of institute's projection by the duplicate a plurality of adjacent one another are that produces pattern as implied above simultaneously.
At the assembly process of the module shown in Fig. 3 A-C, DOE above aims at four dimensions (X, Y, Z and rotation) with respect to VCSEL tube core 100 usually.The embodiment of 9B and 9C can be favourable aspect aligning, be accurate to approximately 1 μ m because be used to manufacture the two photoetching process of VCSEL array and DOE/ diffraction lens structure, thereby allow simply by the packaging passive alignment of coupling reference mark in X, Y and rotation.Due to the high precision of manufacturing, Z-aims at (that is, the distance between VCSEL tube core and DOE and lens) only needs movement among a small circle.Therefore Z-aims at can be had seedbed realize or may use for example Laser Scanning Confocal Microscope of height measuring equipment when the VCSEL array is in energising, for example, measures the distance between VCSEL surface and DOE surface and completes without seedbed.
The module of Fig. 3 A-C can be used as the pattern projector in 3D mapped system 20.The pattern of tiling (for example, be projected on interested object as shown in Figure 4 A), and image-forming module 32 catches the image of the pattern on object 28.As explained earlier, the processor be associated with image-forming module each some place measured pattern in image is shifted with respect to the partial lateral of known reference, and therefore based on this part displacement, finds the depth coordinate of that by triangulation.
Each duplicate of the pattern corresponding with in piece 162 in Fig. 4 A one is inner incoherent, but with adjacent piece, is height correlation usually.Because each duplicate of pattern comprises the point 166 that is distributed in the relatively small amount in relatively little angular region, so the transverse shift of the pattern on object is about the spacing of piece 162 or when larger than the spacing of piece 162, fuzzy possibility is arranged in depth coordinate.In order to reduce this ambiguity, VCSEL tube core 100 can be manufactured with the laser diode of larger quantity, and therefore the optical device of projection module can produce larger piece; But this solution has increased the two complicacy and cost of VCSEL tube core and optical device.
Fig. 4 B is the front schematic view according to the pattern of the expansion by the projection optical module projection 170 of the optional embodiment of the present invention that has solved the relevant issues between adjacent block.(the field multiplier based on DOE of Fig. 3 A and Fig. 3 B can be configured to produce the pattern the same with pattern 160 or 170 similarly.) fan-out DOE at the pattern of this staggered tiling shown in Fig. 4 B by suitable design produces.This design in, at least some in the piece in pattern with respect to adjacent piece by lateral excursion a side-play amount, this side-play amount is the part of described spacing.Particularly, in this example, piece 172 with respect to adjacent piece 174 by lateral excursion half-block.(suppose to only have the horizontal cross displacement to be used in depth survey, side-play amount is in vertical direction in this example).
Due to this side-play amount between piece, the scope of depth survey is clearly doubled effectively.Other is staggered, and wherein, adjacent piece has been shifted 1/3 or 1/4 of interblock distance, for example, can provide wider clear measurement.The DOE that provides these and other fan-out pattern can use methods known in the art for example the method based on the Gerchberg-Saxton algorithm be designed.
Fig. 5 has formed the schematic top view of semiconductor element 180 thereon according to the monolithic VCSEL array of another embodiment of the present invention.This array is similar to the array of Fig. 2, different, has two groups by independent conductor 186 and the 188 VCSEL diodes 182 and 184 that drive in the embodiment of Fig. 5.In the drawings, diode 182 and 184 is shown as has different shapes, but the difference of this shape is for visual clear, and in fact, all VCSEL diodes in two groups are of similar shape usually.
Two groups of VCSEL diodes 182 that illustrate in the drawings and 184 can with image-forming module 32(Fig. 1) in high-resolution image sensors 42 jointly use, to realize the zoom function in depth map system 20.For the independent line of electric force of described two group feeds can by the single metal level of VCSEL tube core for described two groups provide independent power traces, or realize by adding metal level, make each group by different layer feeds.Described two groups can contain the diode of identical or different quantity, and this depends on the required Performance Characteristics of system.Imageing sensor is assumed to support the pixel of adjacent detector element to merge (binning) (this take the resolution that reduces provide sensitivity and the speed of enhancing as cost), the cutting of sensing region and adjustable clock rate.These functions are provided by various commercially available imageing sensors.
Under the wide-angle pattern, a group (for example, diode 182) in two groups of VCSEL diodes receives electric power, and another group is disconnected.Therefore, the group be powered is can high power driven, is no more than total rated power of VCSEL tube core with the brightness that increases each point in pattern.(due to the effectively distance increase between adjacent transmitter under this pattern, this has reduced relevant thermal effect, so the higher power of each transmitter is possible.) simultaneously, imageing sensor 42 operates under the pixel merging patterns, and therefore form the low-resolution image of the whole visual field of system.Because the detector element of imageing sensor merged (bin), so this imageing sensor can at full speed catch and output image.Processor is measured the transverse shift of the pattern in this image, in order to produce initial low resolution depth map.
Processor is divisible and analyze described low resolution depth map, for example, in order to be identified in the potential interested object in visual field, human body.In this stage, processor can select to amplify interested object.For this purpose, processor powers on to all VCSEL diodes 182 and 184 in two groups, in order to produce high resolution design.Processor also indicating image sensor 42 operates under cutting (crop) pattern, so that the found zone therein of the interested object only in scanning field of view.In this stage, imageing sensor is read out with full resolution (in cropped zone) usually, and merges without pixel, and therefore imageing sensor can catch the high-definition picture of high resolution design.Owing to reading regional cutting, imageing sensor also can be with the high speed output image under high resolution model.Now, processor is measured the transverse shift of the pattern in this latter's image, in order to form the high-resolution depth map of interested object.
Embodiment described above optimally used the electric power resource of the pattern projector based on VCSEL and imageing sensor the detection resource the two.Under wide-angle pattern and these two patterns of zoom mode, the sweep velocity of imageing sensor and sensitivity can be adjusted (by pixel merging, cutting and clock rate adjustment) for usually with constant frame rate 30 frames/the provide second depth map of suitable resolution for example.
Although some embodiments in above-mentioned embodiment are specifically related to 3D based on pattern mapping, pattern described above projector can be used on equally the light that uses patterning other apply, comprise bis-kinds of imaging applications of 2D and 3D.Therefore, will understand, embodiment described above is cited by way of example, and the invention is not restricted to hereinbefore by the content that illustrates especially and describe.On the contrary, scope of the present invention be included in that the combination of described various features above and sub-portfolio the two and those skilled in the art will occur when reading foregoing description with undocumented its variation and modification in the prior art.