CN203365461U - Single convex beam type micromechanical acceleration sensor - Google Patents
Single convex beam type micromechanical acceleration sensor Download PDFInfo
- Publication number
- CN203365461U CN203365461U CN 201320386160 CN201320386160U CN203365461U CN 203365461 U CN203365461 U CN 203365461U CN 201320386160 CN201320386160 CN 201320386160 CN 201320386160 U CN201320386160 U CN 201320386160U CN 203365461 U CN203365461 U CN 203365461U
- Authority
- CN
- China
- Prior art keywords
- protruding
- sensitive chip
- sensitive
- responsive
- framework
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The utility model provides a single convex beam type micromechanical acceleration sensor, which comprises a sensitive chip and a lower glass plate. The sensitive chip comprises a framework, a sensitive convex beam, a mass block and a piezoresistor. The sensitive convex beam is arranged in the framework. One end of the sensitive convex beam is connected with the framework, and the other end of the sensitive convex beam is connected with the mass block. The sensitive convex beam and the mass block together form a movable portion of the sensitive chip. The piezoresistor is arranged on the upper surface of the sensitive convex beam, and the sensitive chip is in bonding connection with the lower glass plate. The sensitive convex beam disposed in the sensitive chip is formed by an upper rectangular beam and a lower rectangular beam with the same length in a composite mode. The rectangular beams have narrow tops and wide bottoms. A gap is reserved between the movable portion of the sensitive chip and the lower glass plate. The single convex beam type micromechanical acceleration sensor has higher sensitivity than a normal cantilever beam on the condition of the same inherent frequency and has higher inherent frequency than the normal cantilever beam on the condition of the same sensitivity.
Description
Technical field
The utility model belongs to the micro-acceleration sensor technical field, is specifically related to the protruding girder type micro mechanical acceleration transducer of a kind of list.
Background technology
The basic functional principle of micromechanics piezoresistance type acceleration sensor is to take semi-conductive piezoresistive effect as basis, and beam island structure commonly used, support mass by semi-girder or tie-beam, adopts Implantation or diffusion technique to make voltage dependent resistor (VDR) on beam.When sensor is experienced the masterpiece used time, mass produces skew, drives semi-girder or tie-beam is distorted or crookedly wait deformation, thereby the generation STRESS VARIATION causes that the voltage dependent resistor (VDR) resistance changes in resistance.Utilize suitable peripheral circuit that but this variation is converted to measuring-signal as formal outputs such as voltage, electric currents.Just can set up output signal and by the relation between measuring acceleration through demarcating, thereby to measure extraneous acceleration.For general cantilever beam structure, transversal effect is relatively large, and natural frequency and sensitivity are difficult to take into account.Add for pressure resistance type the meter that hastens, frequency and sensitivity are two most important parameter indexs.The problem that the cantilever beam type micro-acceleration gauge all exists frequency and sensitivity mutually to restrict, sensitivity is low for the frequency height, and frequency is low highly sensitive.
Summary of the invention
The technical problems to be solved in the utility model is to provide the protruding girder type micro mechanical acceleration transducer of a kind of list, protruding beam design by semi-girder, make the common cantilever deck-molding of sensor of the present utility model remolding sensitivity under identical natural frequency, otherwise higher natural frequency arranged the same sensitivity situation is next.
The protruding girder type micro mechanical acceleration transducer of list of the present utility model is characterized in that described sensor comprises sensitive chip and lower glass plate; Wherein, sensitive chip contains framework, responsive protruding beam, mass, voltage dependent resistor (VDR), and its annexation is, be provided with responsive protruding beam in described framework, one end of responsive protruding beam is connected with framework, and the other end is connected with mass, and responsive protruding beam and mass form the moving part of sensitive chip jointly; Voltage dependent resistor (VDR) is arranged on responsive protruding beam upper surface: described sensitive chip is connected by bonding with lower glass plate.
The protruding beam of sensitivity in described sensitive chip adopts upper rectangular beam equal in length, lower rectangular beam to be composited.
Up-narrow and down-wide in the protruding beam of described sensitivity, the width of going up rectangular beam is less than the width of lower rectangular beam, and the ratio of both width is 0.2～0.8.
The thickness of described lower rectangular beam is 0.2～5 with the ratio of the thickness of upper rectangular beam.
Described voltage dependent resistor (VDR) is set to four, is placed on the top of responsive protruding beam near framework, square of four end to end formations of voltage dependent resistor (VDR), and foursquare four limits are parallel with four limits of framework respectively.
Distance between moving part in described sensitive chip and lower glass plate is 2 μ m～20 μ m.Make sensitive chip that enough movement clearance be arranged on the one hand, can adjust ratio of damping on the other hand when condition is suitable.
The protruding beam micromechanics of list of the present utility model piezoresistance type acceleration sensor, when forces are applied, the relative matrix motion of mass causes responsive protruding beam to deform, thereby causes that the voltage dependent resistor (VDR) on responsive protruding beam changes, and just can know the size of acceleration by peripheral testing circuit.
The advantage of the protruding girder type micro mechanical acceleration transducer of list of the present utility model is:
1. adopt the protruding beam single mass of single-ended solid.Owing to adopting protruding beam form, voltage dependent resistor (VDR) is produced on the top rectangular beam of composite beam relative narrower, like this, not only can obtain less transversal effect, can obtain higher sensitivity again simultaneously.Most importantly the bottom width of responsive protruding beam can be wider under same sensitivity, have larger stiffness coefficient, thereby this sensor has high natural frequency.
2. width and the thickness of responsive protruding back section rectangular beam can be adjusted according to the needs of sensitivity and natural frequency, have increased the dirigibility of design.
3. responsive part is surrounded by peripheral frame, and movable structure is enclosed in cavity like this, is easy to the operation of follow-up packaging technology, and technique is simple, reproducible, yield rate is high.
4. the voltage dependent resistor (VDR) headtotail is linked to be a square and forms the Hui Sitong full-bridge and be placed on the position be connected with framework near protruding beam, owing to being the concentrated place of protruding stress beam here, therefore can obtain larger sensitivity.
5. the protruding girder type micro mechanical acceleration transducer of list of the present utility model is to be bonded together and to be formed by sensitive chip and lower glass plate, and packaging technology is simple, easy to operate.
6. suitable distance is arranged between the moving part of sensitive chip and lower glass plate, make sensitive chip that enough movement clearance be arranged on the one hand, can adjust ratio of damping on the other hand when condition is suitable, guaranteed that working band of the present utility model is wider.
The accompanying drawing explanation
Fig. 1 is the structural representation of the protruding beam micro-machine acceleration transducer of list of the present utility model;
In figure: 1. responsive protruding beam 3. mass 4. voltage dependent resistor (VDR) 5. lower glass plate of framework 2..
Embodiment
Below in conjunction with accompanying drawing, the utility model is further described.
Embodiment 1
Fig. 1 is the structural representation of the protruding beam micro-machine acceleration transducer of list of the present utility model.In Fig. 1, the protruding girder type micro mechanical acceleration transducer of list of the present utility model, comprise sensitive chip and lower glass plate 5; Wherein, sensitive chip contains framework 1, responsive protruding beam 2, mass 3, voltage dependent resistor (VDR), its annexation is, be provided with responsive protruding beam 2 in described framework 1, one end of responsive protruding beam 2 is connected with framework 1, the other end is connected with mass 3, responsive protruding beam 2 and the common moving part that forms sensitive chip of mass 3; Voltage dependent resistor (VDR) is arranged on responsive protruding beam 2 upper surfaces: described sensitive chip is connected by bonding with lower glass plate 5.
The protruding beam 2 of sensitivity in described sensitive chip adopts upper rectangular beam, lower rectangular beam equal in length to be composited.
Up-narrow and down-wide in the protruding beam 2 of described sensitivity, the width of going up rectangular beam is less than the width of lower rectangular beam, and the ratio of both width is 0.2～0.8.
The thickness of described lower rectangular beam is 0.2～5 with the ratio of the thickness of upper rectangular beam.
Described voltage dependent resistor (VDR) is set to four, is placed on the top of responsive protruding beam 2 near framework, and voltage dependent resistor (VDR) 4 is one of them.Square of four end to end formations of voltage dependent resistor (VDR), foursquare four limits are parallel with four limits of framework 1 respectively.
In the present embodiment, the distance between the moving part in described sensitive chip and lower glass plate 5 is 5 μ m.The upper rectangular beam width of responsive protruding beam 2 is 150 μ m, and thickness is 100 μ m, and length is 600 μ m; The lower rectangular beam width of responsive protruding beam 2 is 300 μ m, and thickness is 100 μ m, and length is also 600 μ m; The thickness of mass 3 is 200 μ m, and length and width are 600 μ m.Sensor chip and lower glass plate 5 adopt the bonding mode to combine.Sensor natural frequency of the present utility model is about 113kHz, and sensitivity is 0.1 μ V/g/V approximately.
Embodiment 2
The present embodiment is identical with the structure of embodiment 1, and difference is, the upper rectangular beam width of the protruding beam of described sensitivity is 150 μ m, and thickness is 100 μ m, and length is 900 μ m; The lower rectangular beam width of responsive protruding beam is 900 μ m, and thickness is 200 μ m, and length is 900 μ m; Mass thickness is 300 μ m, and length is 900 μ m, and width is identical with responsive protruding beam, is 900 μ m.Sensor natural frequency of the present utility model is 85kHz, and sensitivity is 0.2 μ V/g/V approximately.The moving part of sensitive chip and the gap of glass plate are 10 μ m.
Claims (6)
1. the protruding girder type micro mechanical acceleration transducer of list, it is characterized in that: described sensor comprises sensitive chip and lower glass plate (5); Wherein, sensitive chip contains framework (1), responsive protruding beam (2), mass (3), voltage dependent resistor (VDR), its annexation is, be provided with responsive protruding beam (2) in described framework (1), one end of responsive protruding beam (2) is connected with framework (1), the other end is connected with mass (3), and responsive protruding beam (2) and mass (3) form the moving part of sensitive chip jointly; Voltage dependent resistor (VDR) is arranged on responsive protruding beam (2) upper surface: described sensitive chip is connected by bonding with lower glass plate (5).
2. according to the protruding girder type micro mechanical acceleration transducer of the described list of claim l, it is characterized in that: the protruding beam of the sensitivity in described sensitive chip (2) adopts upper rectangular beam equal in length, lower rectangular beam to be composited.
3. the protruding girder type micro mechanical acceleration transducer of list according to claim 2, it is characterized in that: the width of the upper rectangular beam in the protruding beam of described sensitivity (2) is less than the width of lower rectangular beam, and the ratio of both width is 0.2～0.8.
4. the protruding girder type micro mechanical acceleration transducer of list according to claim 2, it is characterized in that: the thickness of described lower rectangular beam is 0.2～5 with the ratio of the thickness of upper rectangular beam.
5. according to the protruding girder type micro mechanical acceleration transducer of the described list of claim l, it is characterized in that, described voltage dependent resistor (VDR) is set to four, be placed on the top of responsive protruding beam (2), square of four end to end formations of voltage dependent resistor (VDR), foursquare four limits are parallel with four limits of framework (1) respectively.
6. the protruding girder type micro mechanical acceleration transducer of list according to claim 1 is characterized in that: the distance between the moving part in described sensitive chip and lower glass plate (5) is 2 μ m～20 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320386160 CN203365461U (en) | 2013-07-02 | 2013-07-02 | Single convex beam type micromechanical acceleration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320386160 CN203365461U (en) | 2013-07-02 | 2013-07-02 | Single convex beam type micromechanical acceleration sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203365461U true CN203365461U (en) | 2013-12-25 |
Family
ID=49813207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320386160 Expired - Fee Related CN203365461U (en) | 2013-07-02 | 2013-07-02 | Single convex beam type micromechanical acceleration sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203365461U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308718A (en) * | 2013-07-02 | 2013-09-18 | 中国工程物理研究院电子工程研究所 | Single convex beam type micromechanical acceleration sensor |
| CN114993446A (en) * | 2022-05-27 | 2022-09-02 | 中国地质大学（武汉） | Double-cantilever beam fiber grating vibration sensor and optimization method thereof |
-
2013
- 2013-07-02 CN CN 201320386160 patent/CN203365461U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308718A (en) * | 2013-07-02 | 2013-09-18 | 中国工程物理研究院电子工程研究所 | Single convex beam type micromechanical acceleration sensor |
| CN114993446A (en) * | 2022-05-27 | 2022-09-02 | 中国地质大学（武汉） | Double-cantilever beam fiber grating vibration sensor and optimization method thereof |
| CN114993446B (en) * | 2022-05-27 | 2023-10-27 | 中国地质大学（武汉） | Double-cantilever beam fiber grating vibration sensor and optimization method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101858929B (en) | Capacitive micro-acceleration sensor with symmetrically combined elastic beam structure and production method thereof | |
| CN103115720B (en) | Quartz girder resonant mode micro-pressure sensor chip with silicon substrate single island structure | |
| CN100437117C (en) | Composite beam piezoresistive accelerometer | |
| CN103235155B (en) | A kind of piezoresistance type acceleration sensor with full-bridge micro girder construction | |
| CN103197101A (en) | Non-uniform section cantilever beam piezoelectricity accelerating speed sensor | |
| CN101271124B (en) | L-beam piezoresistance type micro-accelerometer and production method thereof | |
| CN103344785A (en) | Capacitive micro inertial sensor with self calibration function | |
| CN102175137B (en) | Extensometer for measuring micro-deformation of component | |
| CN103941041A (en) | Single-mass-block three-axis MEMS accelerometer with three frame structures | |
| CN105021846B (en) | A kind of six axis one type micro acceleration sensors and preparation method thereof | |
| CN102647657B (en) | Monolithic integrated MEMS (Micro-electromechanical Systems) piezoresistive ultrasonic sensor | |
| CN104568279B (en) | A kind of multi-axis force transducer | |
| CN102620865A (en) | Beam-film double island structure micro-pressure high-overload sensor chip | |
| CN203365461U (en) | Single convex beam type micromechanical acceleration sensor | |
| CN101089625A (en) | Metal capacitance microaccelerator | |
| CN100465088C (en) | Phi-shaped resonant micromechanical silicon pressure sensor | |
| CN104950137A (en) | Transverse sensitive acceleration sensor chip having stress isolation structure | |
| CN103308718A (en) | Single convex beam type micromechanical acceleration sensor | |
| CN103293336A (en) | Double-cantilever beam type micro-mechanical acceleration sensor | |
| CN203324300U (en) | Double-cantilever-beam-type micro mechanical acceleration sensor | |
| CN203133110U (en) | Resistance strain type acceleration sensor | |
| Zhang et al. | A SOI sandwich differential capacitance accelerometer with low-stress package | |
| CN203365460U (en) | Three-convex-beam micromechanical accelerometer | |
| CN201605163U (en) | High-capacitance micro inertial sensor with comb-shaped damping holes | |
| CN103323623B (en) | Three-convex-beam micromechanical accelerometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131225 Termination date: 20160702 |