CN203300613U - Substrate overturning equipment - Google Patents
Substrate overturning equipment Download PDFInfo
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- CN203300613U CN203300613U CN2013202799109U CN201320279910U CN203300613U CN 203300613 U CN203300613 U CN 203300613U CN 2013202799109 U CN2013202799109 U CN 2013202799109U CN 201320279910 U CN201320279910 U CN 201320279910U CN 203300613 U CN203300613 U CN 203300613U
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- substrate
- support body
- cage shape
- shape support
- frame body
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Abstract
The utility model discloses a piece of substrate overturning equipment. The substrate overturning equipment comprises an equipment main body, a cage-shaped frame body, an elevation conveying unit and a clamping overturning mechanism. The clamping overturning mechanism is arranged on a predetermined height position of a main frame body of the equipment main body. When the elevation conveying unit carries and lifts the cage-shaped frame body with a substrate placed therein to a predetermined height, the clamping overturning mechanism can clamp the cage-shaped frame body and further drive the cage-shaped frame body to overturn for a certain angle so as to make the substrate vertically arranged and then guided and conveyed to subsequent processing flow sites. When the cage-shaped frame body is overturning, the elevation conveying unit first falls to a height position. After the overturning operation is finished, the elevation conveying unit then rises to carry the cage-shaped frame body. By adopting the clamping overturning mechanism to drive the cage-shaped frame body to overturn, the substrate overturning equipment is enabled to make multiple groups of substrates overturned simultaneously and further make each substrate group vertically arranged in a spaced way before processing operations are started. The surface processing degree of each substrate can be consistent and uniform in subsequent processing stages. The aims of increasing the speed, saving manpower, enhancing processing effects and further increasing the processing efficiency are thus achieved.
Description
Technical field
The utility model relates to a kind of tipping arrangement, relates in particular to a kind ofly can carry out rotary movement before substrate processing, makes each substrate be the vertically-arranged state and is beneficial to the tipping arrangement of following process.
Background technology
Press, flourish along with semiconductor industry, the also extensive use thereupon of process technology that semiconductor is relevant, the coating of lifting glass substrate is processed as example, usually a default coating fluid is coated on this glass substrate, and coordinate apparatus for coating that the coating fluid of glass baseplate surface is stretched, and then make coating fluid form coated film in glass baseplate surface.
front (take coating as example with known substrate processing, other as clean or the flow process such as etching also identical) purchase kenel, usually by manpower, each plate base sequentially is arranged on a support body, and in order conveniently to carry, take out substrate, the operating personnel is usually laterally inserted and each substrate is after horizontal state be delivered to coating processing place by support body, only, based on the uniformity of considering each substrate surface coating, therefore must be under the vertically-arranged state and carry out in each substrate during coating, therefore when support body is delivered to coating processing place in the lump together with substrate, must each substrate be taken off rear upset by the operating personnel again and be the vertically-arranged state, place back again on support body and just carried out follow-up coating work flow, cause manpower and time cost significantly to improve, also can produce the not good scarce fraud of working (machining) efficiency, in addition, the kenel of purchasing by the manpower array substrate is not easily really arranged and is positioned over tram because of each substrate, angle and affect processed finished products, and then the not good problem points of generation end product quality.
Summary of the invention
Main purpose of the present utility model is to provide a kind of tipping arrangement of substrate.
For achieving the above object, the utility model by the following technical solutions:
A kind of tipping arrangement of substrate, comprise an equipment body, has a vertical main frame body to extending, and this main frame body bottom is provided with a setting position; One cage shape support body, comprise that the moulding of being arranged by the vertical, horizontal interleaved is formed hollow cage shape kenel, one side direction of this cage shape support body is formed with open end, and be provided with in this cage shape support body and go to upper and lower spaced at least two group bearing carriers, use and at least two group substrates laterally can be inserted by the open end of cage shape support body, make each substrate breasting be limited between each group bearing carrier and go to upper and lower the state of being spaced; One lifting supply unit, be arranged at this equipment body pre-position, can carry this cage shape support body and along main frame body, do to rise or down maneuver; One clamping switching mechanism, be arranged at main frame body one desired height position place, form when the lifting supply unit carries the cage shape support body of inserting substrate and rises to predetermined altitude, this clamping switching mechanism energy clamping also drives cage shape support body upset one angle, is sent to following process flow process place after making substrate be the vertically-arranged state; And wherein, in the process that this cage shape support body overturns, this lifting supply unit first drops to a height and position, and action to be flipped is completed once again and risen and accept this cage shape support body;
Unique innovative design by this, make the utility model contrast prior art, carry out the structure kenel of rotary movement in order to do driving cage shape support body by this clamping switching mechanism, so that each group substrate all is interval vertically-arranged state before processing, make follow-up man-hour each substrate surface processing stage of adding all can uniformity, reach fast, save manpower and significantly promote the industry Practical Benefit such as processing effect, working (machining) efficiency and end product quality.
Description of drawings
Fig. 1 is action schematic diagram of the present utility model.
Fig. 2 is action schematic diagram of the present utility model.
Fig. 3 is action schematic diagram of the present utility model.
Fig. 4 is action schematic diagram of the present utility model.
Fig. 5 is action schematic diagram of the present utility model.
Fig. 6 is action schematic diagram of the present utility model.
Fig. 7 is the schematic diagram of another enforcement kenel of the utility model.
Fig. 8 is action schematic diagram of the present utility model.
Fig. 9 is the stereogram that the utility model clamping switching mechanism and the moulding of cage shape support body coordinate kenel.
Embodiment
See also Fig. 1 to 6, the tipping arrangement of the utility model substrate comprises:
One equipment body 10, have a vertical main frame body 11 to extending, and these main frame body 10 bottoms are provided with a setting position 12;
One cage shape support body 20, comprise the hollow cage shape kenel that moulding 21 forms of by the vertical, horizontal interleaved, being arranged, one side direction of this cage shape support body 20 is formed with open end 22, and be provided with in this cage shape support body 20 and go to upper and lower spaced at least two group bearing carriers 23, use and at least two group substrate A laterally can be inserted by the open end 22 of cage shape support body 20, make each substrate A breasting be limited between each group bearing carrier 23 and go to upper and lower the state of being spaced; Wherein said bearing carrier 23 comprises that being arranged at least two back-up blocks 231 and upper and lower at least two cross bars 233 that configure and have support column 232 that cage shape support body 20 mouldings 21 are different from open end 22 1 sides forms (please coordinate and consult Fig. 1,2), wherein go to upper and lower the interval relative status between the set support column 232 of each cross bar 233, form when substrate A inserts cage shape support body 20, make this substrate A wherein an end face can be resisted against back-up block 231, and make this substrate A surface can be positioned at 232 of the relative support columns in upper and lower interval to be against spacing state;
One lifting supply unit 30, be arranged at this equipment body 10 pre-positions, can carry this cage shape support body 20 and along main frame body 11, do to rise or down maneuver; This lifting supply unit 30 is implemented comprise the transport platform 32 with at least two tourelles 31 and in order to the CD-ROM drive motor 33 that drives this tourelle 31, form, when CD-ROM drive motor 33 is ordered about tourelle 31 start, can make this transport platform 32 carry action;
One clamping switching mechanism 40, be arranged at main frame body 11 1 desired height position places, form when lifting supply unit 30 carries the cage shape support body 20 of inserting substrate A and rises to predetermined altitude, this clamping switching mechanism 40 can clamping and is driven cage shape support body 20 upset one angles and (please coordinate and consult Fig. 3 to 5 herein, 90 ° of this cage shape support body 20 upsets), be sent to following process flow process place after making substrate A be the vertically-arranged state; And wherein, in the process that this cage shape support body 20 overturns, this lifting supply unit 30 first drops to a height and position, and action to be flipped is completed once again and risen and accept this cage shape support body 20, to avoid interference situations; The work flow of wherein said substrate A comprises and carries out at least wherein a kind of work flow person of thinning, coating, cleaning or etching, and this part is not limited to;
Hold the said structure design, the utility model mainly can drive cage shape support body 20 by this clamping switching mechanism 40 and carry out the structure kenel of rotary movement, so that each group substrate A all is interval vertically-arranged state before processing, make follow-up man-hour each substrate A Surface Machining degree of adding all can uniformity, thus can improve before known substrate processing must elder generation by manpower arrange one by one, vertically-arranged substrate A just carried out the scarce frauds such as following process flow process; Comparatively speaking, the utility model need not to carry out substrate overturn A action by manpower as known, therefore can further reach fast, saves manpower and significantly promote the industry Practical Benefit such as processing effect, working (machining) efficiency and end product quality.
please coordinate and consult Fig. 6 to 8, wherein said tipping arrangement can be arranged at respectively the preposition of substrate A work flow and rearmounted flow process place (as shown in Figure 7), and then divide into first group of tipping arrangement 50 and second group of tipping arrangement 60, wherein this first group of tipping arrangement 50 can be substrate A to be processed upset after the vertically-arranged state and be sent to the work flow place and process, and this second group of tipping arrangement 60 receives the substrate A that machines and carry out rotary movement and make substrate A be horizontal state, make the operating personnel easily the substrate A that machines be taken out (as shown in Figure 8), the configuration kenel of tipping arrangement by this, can reach and insert substrate A, process, get the consistentization flow process operation of substrate A, with convenience and the working (machining) efficiency that significantly promotes operation.
for another shown in Figure 9, this clamping switching mechanism 40 rotating seat 42 of comprising a drive source 41 and being connected in these drive source 41 1 ends wherein, wherein this rotating seat 42 is the plate body kenel, and in these rotating seat 42 4 corner locations, respectively be provided with chuck 43, form this cage shape support body 20 and rise to predetermined altitude, and make center to should clamping switching mechanism 40 time, make the chuck 43 of this rotating seat 42 can coordinate clip to make holding action in the intervening portion of the moulding 21 of cage shape support body 20, order about rotating seat 42 upset starts (as indicating arrow L1) by this drive source 41, and then can overturn with moving by this cage shape support body 20 of interlock.
The effect explanation:
the tipping arrangement of the utility model substrate mainly passes through equipment body, cage shape support body, unique innovative design that lifting supply unit and clamping structure that switching mechanism is total to form, make the utility model contrast prior art, carry out the structure kenel of rotary movement in order to do driving cage shape support body by this clamping switching mechanism, so that each group substrate all is interval vertically-arranged state before processing, make follow-up man-hour each substrate surface processing stage of adding all can uniformity, to reach quick, save manpower and significantly promote processing effect, the industry such as working (machining) efficiency and end product quality Practical Benefit.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited to this, anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; can expect easily changing or replacing, within all should being encompassed in protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion by described protection range with claim.
Claims (5)
1. the tipping arrangement of a substrate is characterized in that comprising:
One equipment body, have a vertical main frame body to extending, and this main frame body bottom is provided with a setting position;
One cage shape support body, comprise that the moulding of being arranged by the vertical, horizontal interleaved is formed hollow cage shape kenel, one side direction of this cage shape support body is formed with open end, and be provided with in this cage shape support body and go to upper and lower spaced at least two group bearing carriers, substrate is laterally inserted by the open end of cage shape support body, makes each substrate breasting be limited between each group bearing carrier and goes to upper and lower the state of being spaced;
One lifting supply unit, be arranged at this equipment body pre-position, can carry cage shape support body and along main frame body, do to rise or down maneuver;
One clamping switching mechanism, be arranged at main frame body one desired height position place, when the lifting supply unit carried cage shape support body and rises to predetermined altitude, the clamping of clamping switching mechanism also drove cage shape support body upset one angle, is sent to following process flow process place after the substrate in cage shape support body is the vertically-arranged state; In the process that cage shape support body overturns, this lifting supply unit first drops to a height and position, and action to be flipped is completed once again and risen and accept cage shape support body.
2. the tipping arrangement of substrate according to claim 1, it is characterized in that described work flow comprises carries out at least wherein a kind of work flow of thinning, coating, cleaning or etching.
3. the tipping arrangement of substrate according to claim 1 and 2, it is characterized in that described tipping arrangement is arranged at respectively the preposition of substrate work flow and rearmounted flow process place, and then divide into first group and second group of tipping arrangement, wherein this first group of tipping arrangement is sent to the work flow place after substrate overturn to be processed being the vertically-arranged state, and this second group of tipping arrangement receives the substrate that machines and carry out rotary movement and make substrate be horizontal state, make the operating personnel easily the substrate that machines be taken out, the configuration kenel of tipping arrangement by this, can reach and insert substrate, process, get the consistentization flow process operation of substrate.
4. the tipping arrangement of substrate according to claim 1 and 2, it is characterized in that the rotating seat that described clamping switching mechanism comprises a drive source and is connected in this drive source one end, wherein this rotating seat is the plate body kenel, and in these rotating seat four corner locations, respectively be provided with chuck, form this cage shape support body and rise to predetermined altitude, and make center to should the clamping switching mechanism time, make the chuck of this rotating seat can coordinate clip to make holding action in the intervening portion of the moulding of cage shape support body, order about rotating seat upset start by drive source, and then can overturn with moving by this cage shape support body of interlock.
5. the tipping arrangement of substrate according to claim 1 and 2, it is characterized in that described lifting supply unit comprises a transport platform with at least two tourelles and in order to drive the CD-ROM drive motor of this tourelle, when CD-ROM drive motor is ordered about the tourelle start, be to make this transport platform carry action.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202799109U CN203300613U (en) | 2013-05-21 | 2013-05-21 | Substrate overturning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202799109U CN203300613U (en) | 2013-05-21 | 2013-05-21 | Substrate overturning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203300613U true CN203300613U (en) | 2013-11-20 |
Family
ID=49576607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013202799109U Expired - Fee Related CN203300613U (en) | 2013-05-21 | 2013-05-21 | Substrate overturning equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203300613U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110299420A (en) * | 2019-07-09 | 2019-10-01 | 理想晶延半导体设备（上海）有限公司 | The antireflective coating deposition method of crystal silicon solar batteries |
-
2013
- 2013-05-21 CN CN2013202799109U patent/CN203300613U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110299420A (en) * | 2019-07-09 | 2019-10-01 | 理想晶延半导体设备（上海）有限公司 | The antireflective coating deposition method of crystal silicon solar batteries |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131120 Termination date: 20180521 |