CN203284465U - PECVD stove with fluorine cleaning device - Google Patents
PECVD stove with fluorine cleaning device Download PDFInfo
- Publication number
- CN203284465U CN203284465U CN201320346180XU CN201320346180U CN203284465U CN 203284465 U CN203284465 U CN 203284465U CN 201320346180X U CN201320346180X U CN 201320346180XU CN 201320346180 U CN201320346180 U CN 201320346180U CN 203284465 U CN203284465 U CN 203284465U
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- CN
- China
- Prior art keywords
- gas
- pecvd
- stove
- flange
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 30
- 238000004140 cleaning Methods 0.000 title claims abstract description 22
- 229910052731 fluorine Inorganic materials 0.000 title claims abstract description 18
- 239000011737 fluorine Substances 0.000 title claims abstract description 18
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 22
- 238000009826 distribution Methods 0.000 claims abstract description 17
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 11
- 239000010703 silicon Substances 0.000 claims abstract description 11
- 238000010438 heat treatment Methods 0.000 claims abstract description 8
- 239000007789 gas Substances 0.000 claims description 61
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 16
- 239000011148 porous material Substances 0.000 claims description 12
- 239000002912 waste gas Substances 0.000 claims description 12
- 229910052786 argon Inorganic materials 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 6
- 238000010926 purge Methods 0.000 claims description 5
- 229920000742 Cotton Polymers 0.000 claims description 3
- 230000005669 field effect Effects 0.000 claims description 3
- 239000005357 flat glass Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 claims description 3
- GVGCUCJTUSOZKP-UHFFFAOYSA-N nitrogen trifluoride Chemical group FN(F)F GVGCUCJTUSOZKP-UHFFFAOYSA-N 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- -1 fluorine ions Chemical class 0.000 abstract 1
- 238000003825 pressing Methods 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 235000013312 flour Nutrition 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- 238000010186 staining Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201320346180XU CN203284465U (en) | 2013-06-17 | 2013-06-17 | PECVD stove with fluorine cleaning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201320346180XU CN203284465U (en) | 2013-06-17 | 2013-06-17 | PECVD stove with fluorine cleaning device |
Publications (1)
Publication Number | Publication Date |
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CN203284465U true CN203284465U (en) | 2013-11-13 |
Family
ID=49540838
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201320346180XU Expired - Fee Related CN203284465U (en) | 2013-06-17 | 2013-06-17 | PECVD stove with fluorine cleaning device |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN203284465U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104233234A (en) * | 2013-06-17 | 2014-12-24 | 沙嫣 | PECVD (plasma enhanced chemical vapor deposition) furnace with fluorine cleaning device and fluorine cleaning method of furnace |
-
2013
- 2013-06-17 CN CN201320346180XU patent/CN203284465U/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104233234A (en) * | 2013-06-17 | 2014-12-24 | 沙嫣 | PECVD (plasma enhanced chemical vapor deposition) furnace with fluorine cleaning device and fluorine cleaning method of furnace |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Nantong Johnson Photoelectric Technology Co., Ltd. Assignor: Sha Xiaolin|Sha Yan Contract record no.: 2014320000315 Denomination of utility model: PECVD (plasma enhanced chemical vapor deposition) furnace with fluorine cleaning device and fluorine cleaning method of furnace Granted publication date: 20131113 License type: Exclusive License Record date: 20140417 |
|
LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20161228 Address after: 226400 Rudong Jiangsu Economic Development Zone, Rudong, Jialing River Road on the north side Patentee after: Nantong Johnson Photoelectric Technology Co., Ltd. Address before: 200336 Shanghai International Trade Center, room 2201, No. 1801, West Yan'an Road Patentee before: Sha Yan Patentee before: Sha Xiaolin |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131113 Termination date: 20180617 |