CN203249591U - Measuring instrument for measuring position and size of light spot of terahertz time-domain spectroscopy system - Google Patents

Measuring instrument for measuring position and size of light spot of terahertz time-domain spectroscopy system Download PDF

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Publication number
CN203249591U
CN203249591U CN 201320297229 CN201320297229U CN203249591U CN 203249591 U CN203249591 U CN 203249591U CN 201320297229 CN201320297229 CN 201320297229 CN 201320297229 U CN201320297229 U CN 201320297229U CN 203249591 U CN203249591 U CN 203249591U
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China
Prior art keywords
measuring
measurement
sheet
domain spectroscopy
terahertz time
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Expired - Fee Related
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CN 201320297229
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Chinese (zh)
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赵昆
董晨
宝日玛
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China University of Petroleum Beijing
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China University of Petroleum Beijing
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Abstract

The utility model is a measuring instrument for measuring the position and size of a light spot of a terahertz time-domain spectroscopy system. The measuring instrument comprises a translation bench and a clamping bench. A rectangular measuring plate is clamped on the clamping bench. The measuring plane of the measuring plate is vertical to a light beam of the terahertz time-domain spectroscopy system. The measuring plate is formed by fixedly overlaying at least two rectangular measuring sheets of different sizes. Centers of the measuring sheets are aligned, and corresponding side edges of the measuring sheets are arranged in parallel. The terahertz time-domain spectroscopy system is characterized by being capable of measuring phase positions and amplitudes of electromagnetic waves, and the measuring instrument utilizes the characteristics of the terahertz time-domain spectroscopy system in measurement. The measuring instrument is placed on an objective table of the terahertz time-domain spectroscopy system to measure the position and size of a light spot, and data obtained are consistent with measurement results of a diaphragm method. The measuring instrument can measure the position and size of the light spot of the terahertz time-domain spectroscopy system without using any auxiliary power supply and any circuit. The measuring instrument is simple in structure, high in sensitivity and measurement precision, low in price, and simple and practical in measuring method.

Description

Measure the measuring instrument of terahertz time-domain spectroscopy system facula position and size
Technical field
The utility model is about a kind of facula measurement device, relates in particular to a kind of measuring instrument for measuring terahertz time-domain spectroscopy system facula position and size.
Background technology
For the instrument that utilizes electromagnetic wave to carry out material and material analysis, the beam pattern that comprises spot diameter, center, energy distribution is made by the specimen in early stage and the data analysis in later stage all has significant impact.At present, people have been developed various types of facula measurement devices and measuring method, as: [1] utilizes scanning charge-coupled image sensor (CCD) to measure a narrow Bezier bundle spot (Measuring a narrow Bessel beam spot by scanning a charge-coupled device (CCD) pixel), the method (Method for measuring the spot size of a laser beam using a boundary-diffraction wave) of the spot size of the laser beam of the boundary diffraction wave measurement that use [2].But in the above existing measurement mechanism and measuring method, surveying instrument uses CCD to make array, and cooperates complicated circuit to measure; Therefore, prior art exists that price is high, complex structure, measuring process are loaded down with trivial details, and needs the defectives such as external power supply.The terahertz time-domain spectroscopy system itself has can directly measure the advantages such as electromagnetic phase place, amplitude, and above-mentioned prior art does not take full advantage of these characteristics of terahertz time-domain spectroscopy system itself.
Thus, the inventor relies on experience and the practice of being engaged in for many years relevant industries, proposes a kind of measuring instrument of measuring terahertz time-domain spectroscopy system facula position and size, to overcome the defective of prior art.
The utility model content
The purpose of this utility model is to provide a kind of measuring instrument of measuring terahertz time-domain spectroscopy system facula position and size, can without any need for auxiliary power supply and electronic circuit, can detect terahertz time-domain spectroscopy system facula position and size; And this measuring instrument is simple in structure, highly sensitive, cheap, and measuring method is simple and practical.
The purpose of this utility model is achieved in that a kind of measuring instrument of measuring terahertz time-domain spectroscopy system facula position and size, and described measuring instrument includes translation stage and the grain-clamping table that is connected on the translation stage, and clamping has a rectangle to measure plate on the described grain-clamping table; The light beam of the measurement plane of described measurement plate and terahertz time-domain spectroscopy system arranges in vertical direction; Described measurement plate is measured the sheet fixed overlay by the rectangle of at least two different sizes and is consisted of; Described central alignment, the relative side of respectively measuring sheet be arranged in parallel.
In a preferred embodiments of the present utility model, described measurement plate measures sheet by first and the second measurement sheet stack consists of; Described first measures the length and width size of sheet less than the length and width size of the second measurement sheet.
In a preferred embodiments of the present utility model, the described sheet of respectively measuring is made by teflon, polystyrene, tygon or quartz material.
In a preferred embodiments of the present utility model, described measurement sheet is provided with the cross scale mark.
In a preferred embodiments of the present utility model, described the first measurement sheet and second is measured sheet and is fixed by polymer adhesive.
In a preferred embodiments of the present utility model, described first measures sheet and second measures the described measurement plate of the one-body molded formation of sheet.
From the above mentioned, the utility model adopts common used material to be made into the measurement plate, and by translation stage and the described measuring instrument of the common composition of grain-clamping table, the characteristics that this measuring instrument utilizes terahertz time-domain spectroscopy system itself can measure electromagnetic wave phase place, amplitude are measured; Measuring instrument is positioned on the objective table of terahertz time-domain spectroscopy system, facula position and size are measured, the data of acquisition are coincide with the result who utilizes the diaphragm method to measure; This measuring instrument can without any need for auxiliary power supply and electronic circuit, can detect terahertz time-domain spectroscopy system facula position and size; And this measuring instrument is simple in structure, sensitivity and measuring accuracy high, cheap, measuring method is simple and practical.
Description of drawings
The following drawings only is intended to the utility model done and schematically illustrates and explain, does not limit scope of the present utility model.Wherein:
Figure 1A: the perspective view of measuring the measuring instrument of terahertz time-domain spectroscopy system facula position and size for the utility model.
Figure 1B: be the main TV structure synoptic diagram of Figure 1A.
Fig. 1 C: be the plan structure synoptic diagram of Figure 1A.
Fig. 2: for measuring the structural representation of plate in the utility model.
Fig. 3 A: when being positioned at measurement sheet center for reference light in the utility model (the reference light light beam passes first and measures sheet and the second measurement sheet), the time-domain spectroscopy signal S of the terahertz time-domain spectroscopy system that obtains TwoCurve.
Fig. 3 B: be the curve magnification figure in the T=6-10ps interval among Fig. 3 A.
Fig. 4: when being positioned at individual layer measurement sheet for reference light in the utility model (the reference light light beam only passes second and measures sheet), the time-domain spectroscopy signal S of the terahertz time-domain spectroscopy system that obtains SingleCurve.
Fig. 5 A: be the curve map of time-domain spectroscopy signal SI (I=17) in the utility model.
Fig. 5 B: be the curve magnification figure in the T=6-10ps interval among Fig. 5 A.
Fig. 6 A: be the curve map of time-domain spectroscopy signal SI (I=29) in the utility model.
Fig. 6 B: be the curve magnification figure in the T=6-10ps interval among Fig. 6 A.
Embodiment
Understand for technical characterictic of the present utility model, purpose and effect being had more clearly, now contrast description of drawings embodiment of the present utility model.
Such as Figure 1A, Figure 1B, Fig. 1 C and shown in Figure 2, the utility model proposes a kind of measuring instrument 100 of measuring terahertz time-domain spectroscopy system facula position and size, described measuring instrument 100 includes translation stage 1 and the grain-clamping table 2 that is connected on the translation stage 1, and clamping has a rectangle to measure plate 3 on the described grain-clamping table 2; The light beam of the measurement plane of described measurement plate 3 and terahertz time-domain spectroscopy system arranges in vertical direction; Described measurement plate 3 is measured the sheet fixed overlay by the rectangle of at least two different sizes and is consisted of; In the present embodiment, as shown in Figure 2, described measurement plate 3 measures sheet 31 by first and 32 stacks of the second measurement sheet consist of; Described first measures the length and width size of sheet 31 less than the length and width size of the second measurement sheet 32; The described first central alignment, relative side of measuring sheet and the second measurement sheet be arranged in parallel.In the utility model, described measurement sheet 31,32 adopts to be made the lower material of terahertz wave band absorption coefficient, such as: teflon, polystyrene, tygon or quartz material etc.; The first measurement sheet 31 and second is measured sheet 32 and can be selected identical material to make, and also can adopt different materials to make; In the present embodiment, described the first measurement sheet 31 and second is measured sheet 32 and is selected the polythene material making; Two thickness of measuring sheet can be identical, also can be different.
Further, in the present embodiment, described first measures sheet 31 is provided with cross scale mark 311.
In the present embodiment, described the first measurement sheet 31 and the second measurement sheet 32 can be adhesively fixed by bonding agent (as: epoxy resin etc.);
In another embodiment of present embodiment, described the first measurement sheet 31 and second is measured sheet 32 and is also adopted the described measurement plate of the one-body molded formation of mechanical pressing mold mode.
In the present embodiment, described measurement plate 3 can also be made of the rectangle measurement sheet fixed overlay of different sizes more than two.
In the present embodiment, described translation stage 1 can adopt multidirectional translation stage, also can adopt unidirectional translation stage; The manual translation platform can be adopted, also motorized precision translation stage can be adopted.
The utility model also provides a kind of measuring method of utilizing above-mentioned measuring instrument to measure terahertz time-domain spectroscopy system facula position and size, said method comprising the steps of:
(1) the noise threshold signal A0 of selection terahertz time-domain spectroscopy system;
(2) place and adjust measuring instrument;
According to the measurement sheet of institute's photometry spot size selection appropriate size of estimating, wherein, the first area of measuring sheet 31 is greater than the area of institute's photometry spot; Measuring instrument 100 is positioned on the objective table (not shown) of terahertz time-domain spectroscopy system, measures the lower limb of plate 3 and the table top of objective table and be arranged in parallel; Position of reference light according to system, adjust the micrometer caliper 11 (shown in Figure 1A) of translation stage 1, so that the centrally aligned reference light of the first measurement sheet 31 obtains the double-deck time-domain spectroscopy signal S that measures sheet (at this moment, the reference light light beam passes first and measures sheet and the second measurement sheet) Two, its main peak maximal value is designated as A Two, the corresponding time of this main peak maximal value is designated as T1 (as shown in Figure 3A); Then, rotating screw mircrometer gauge 11 so that reference light places the position that the second measurement sheet 32 is only arranged, obtains the time-domain spectroscopy signal S that individual layer is measured sheet (at this moment, the reference light light beam only passes second and measures sheet) Single, its main peak maximal value is designated as A Single, the corresponding time of this main peak maximal value is designated as T2 (as shown in Figure 4).
(3) size of sheet is measured in affirmation;
At signal S TwoIn, seek the amplitude A with respect to time T 2 places Two' (shown in Fig. 3 B); If A Two' be less than or equal to A0, think that first measures sheet 31 areas greater than institute's photometry spot area (because A Two' be less than or equal to threshold value A 0, the amplitude that appears at so the T2 position is thought noise, measurement result is not exerted an influence, proof does not have light beam to see through from the second measurement sheet (single-layer positions), that is to say that all light beams all are radiated at first and measure on the sheet, and see through from double-deck position), then carry out follow-up measurement; If A Two' greater than A0, then first measure sheet 31 areas less than institute's photometry spot area, need to reselect corresponding measurement sheet or measure plate.
(4) DATA REASONING and gathering;
Rotating screw mircrometer gauge 11, the first left side edge of measuring sheet 31 overlaps with reference light in the plate 3 with measuring, continue rotating screw mircrometer gauge 11, measurement plate 3 levels are moved to the left, reference light is moved from left to right along the first horizontal center line of measuring sheet 31; Be moved to the left in the process measuring plate 3 levels, measure plate 3 and set successively from left to right a plurality of measuring positions, record the time-domain spectroscopy signal curve of each measuring position and the relative scale of the micrometer caliper of this position; Wherein, the first time-domain spectroscopy signal of measuring the left side edge position of sheet 31 is decided to be SL, and the scale of the micrometer caliper of this position is decided to be NL relatively; The first time-domain spectroscopy signal of measuring the right side edge position of sheet 31 is decided to be SR, and the scale of the micrometer caliper of this position is decided to be NR relatively; Be decided to be SI in the left side edge position of the first measurement sheet 31 and the time-domain spectroscopy signal of each measuring position between the right side edge position, the scale of the micrometer caliper of each position is decided to be NI relatively, I is 1,2,3,4 ... etc. (number of described a plurality of measuring positions is set according to the scale division value of required measuring accuracy and micrometer caliper); After obtaining the time-domain spectroscopy signal SI curve of each measuring position, record and gather in each time-domain spectroscopy signal SI curve with respect to the amplitude of time T 1 and T2, be decided to be respectively AI T1And AI T2The data that record and gather are made form.
(5) calculate spot size according to measurement data;
In above table, observe AI T2Data, find AI T2Reduce first to increase again (AI according to measuring sequence T2Reflected the area of irradiation at the second measurement sheet.In the process that the measurement plate moves to left, the position that can obtain the hot spot irradiation changes, and wherein shines the area change process of single-layer positions for from large to small, changes from small to big, so corresponding AI again T2Reduce first to increase again according to measuring sequence); According to order from left to right, compare successively AI T2With the size of A0, find out for the first time AI T2Relative micrometer caliper scale less than or equal to the position of A0 is designated as NP1; In the present embodiment, shown in Fig. 5 A, Fig. 5 B, when I=17, obtain the time-domain spectroscopy signal S17 curve of this measuring position, A17 on this measuring position T2Less than A0, the micrometer caliper scale that this position is corresponding is designated as NP1; Then, find out for the first time AI T2Greater than the position of A0, the micrometer caliper scale of the measuring position, left side of this position of record next-door neighbour is designated as NP2; In the present embodiment, shown in Fig. 6 A, Fig. 6 B, when I=30, A30 T2Greater than A0; The micrometer caliper scale of the measuring position, left side of this position of record next-door neighbour when I=29 (that is :) is designated as NP2.
Reference light is decided to be R1 to the distance of institute's photometry spot left side edge; Reference light is decided to be R2 to the distance of institute's photometry spot right side edge; The diameter of institute's photometry spot is decided to be D;
R1=|NL-NP1| is (when reference light moves to the NP1 position, the hot spot left hand edge just exposes to measures the plate left hand edge, so, then reference light moves to the distance R 1=|NL-NP1| that passes by in the NP1 position by left hand edge, is the distance of hot spot left hand edge and reference light); R2=|NP2-NR| is (when reference light moves to the NP2 position, the hot spot right hand edge just exposes to measures the plate right hand edge, so, the distance R 2=|NP2-NR| that passed by by NP2 position movement to right hand edge of reference light then is the distance of hot spot right hand edge and reference light); Spot diameter D=R1+R2 then.
(6) measure the spot center position;
Institute's photometry spot is Q with respect to the reference light eccentric degree;
(the spot center position equates that apart from left and right edges reference light equates not necessarily that apart from left and right edges the distance of reference light and actual spot center is eccentric degree in Q=|R1-R2|/2.);
According to eccentric degree Q, can determine institute photometry spot center.
Wherein: when R1>R2, for institute's photometry spot with respect to reference light left avertence Q, when R1<R2, for institute's photometry spot with respect to reference light right avertence Q.
Further, in order to improve the accuracy of measurement, after above-mentioned measuring process finishes, can be according to above-mentioned measuring process duplicate measurements one or many; Near obtaining NP1 and the corresponding measuring position of NP2 value in the measuring process first time, increase measuring position point or shorten the interval, measuring position; Step when other measuring processs were measured with the first time is identical, does not repeat them here.
In the present embodiment, except above-mentioned measuring process, can also be in step (2), to measure plate 3 around the first cross center of measuring sheet clockwise or be rotated counterclockwise an acute angle, then, by translation stage the measurement plate level is moved, to obtain the hot spot characteristic that this side up.
The utility model compared with prior art has following advantage:
The utility model adopts common used material to be made into the measurement plate, and by translation stage and the described measuring instrument of the common composition of grain-clamping table, the characteristics that this measuring instrument utilizes terahertz time-domain spectroscopy system itself can measure electromagnetic wave phase place, amplitude are measured; Measuring instrument is positioned on the objective table of terahertz time-domain spectroscopy system, facula position and size are measured, the data of acquisition are coincide with the result who utilizes the diaphragm method to measure; This measuring instrument can without any need for auxiliary power supply and electronic circuit, can detect terahertz time-domain spectroscopy system facula position and size; And this measuring instrument is simple in structure, sensitivity and measuring accuracy high, cheap, measuring method is simple and practical.
The above only is the schematic embodiment of the utility model, is not to limit scope of the present utility model.Any those skilled in the art, the equivalent variations of having done under the prerequisite that does not break away from design of the present utility model and principle and modification all should belong to the scope that the utility model is protected.

Claims (6)

1. measure terahertz time-domain spectroscopy system facula position and big or small measuring instrument for one kind, it is characterized in that: described measuring instrument includes translation stage and the grain-clamping table that is connected on the translation stage, and clamping has a rectangle to measure plate on the described grain-clamping table; The light beam of the measurement plane of described measurement plate and terahertz time-domain spectroscopy system arranges in vertical direction; Described measurement plate is measured the sheet fixed overlay by the rectangle of at least two different sizes and is consisted of; Described central alignment, the relative side of respectively measuring sheet be arranged in parallel.
2. the measuring instrument of measurement terahertz time-domain spectroscopy as claimed in claim 1 system facula position and size is characterized in that: described measurement plate is measured sheet and second by first and is measured the sheet stack and consist of; Described first measures the length and width size of sheet less than the length and width size of the second measurement sheet.
3. the measuring instrument of measurement terahertz time-domain spectroscopy as claimed in claim 2 system facula position and size, it is characterized in that: the described sheet of respectively measuring is made by teflon, polystyrene, tygon or quartz material.
4. the measuring instrument of measurement terahertz time-domain spectroscopy as claimed in claim 3 system facula position and size, it is characterized in that: described measurement sheet is provided with the cross scale mark.
5. the measuring instrument of measurement terahertz time-domain spectroscopy as claimed in claim 3 system facula position and size, it is characterized in that: described first measures sheet is fixed by polymer adhesive with the second measurement sheet.
6. the measuring instrument of measurement terahertz time-domain spectroscopy system's facula position as claimed in claim 3 and size is characterized in that: described the first measurement sheet and the described measurement plate of the second measurement one-body molded formation of sheet.
CN 201320297229 2013-05-28 2013-05-28 Measuring instrument for measuring position and size of light spot of terahertz time-domain spectroscopy system Expired - Fee Related CN203249591U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103256893A (en) * 2013-05-28 2013-08-21 中国石油大学(北京) Gauge and method of measuring position and size of light spot in terahertz time and domain spectroscopy system
CN103969215A (en) * 2014-05-15 2014-08-06 中国石油大学(北京) Terahertz time-domain spectroscopy system and measurement method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103256893A (en) * 2013-05-28 2013-08-21 中国石油大学(北京) Gauge and method of measuring position and size of light spot in terahertz time and domain spectroscopy system
CN103256893B (en) * 2013-05-28 2015-07-08 中国石油大学(北京) Gauge and method of measuring position and size of light spot in terahertz time and domain spectroscopy system
CN103969215A (en) * 2014-05-15 2014-08-06 中国石油大学(北京) Terahertz time-domain spectroscopy system and measurement method thereof

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Granted publication date: 20131023

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