CN203249591U - Measuring instrument for measuring spot position and size of terahertz time-domain spectroscopy system - Google Patents
Measuring instrument for measuring spot position and size of terahertz time-domain spectroscopy system Download PDFInfo
- Publication number
- CN203249591U CN203249591U CN 201320297229 CN201320297229U CN203249591U CN 203249591 U CN203249591 U CN 203249591U CN 201320297229 CN201320297229 CN 201320297229 CN 201320297229 U CN201320297229 U CN 201320297229U CN 203249591 U CN203249591 U CN 203249591U
- Authority
- CN
- China
- Prior art keywords
- measuring
- domain spectroscopy
- terahertz time
- spectroscopy system
- size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001328 terahertz time-domain spectroscopy Methods 0.000 title claims abstract description 35
- 238000005259 measurement Methods 0.000 claims abstract description 56
- 238000013519 translation Methods 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims description 11
- 239000004793 Polystyrene Substances 0.000 claims description 3
- 229920002223 polystyrene Polymers 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 229920000573 polyethylene Polymers 0.000 claims description 2
- -1 polytetrafluoroethylene Polymers 0.000 claims 2
- 239000004698 Polyethylene Substances 0.000 claims 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims 1
- 239000004810 polytetrafluoroethylene Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 22
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 238000001228 spectrum Methods 0.000 abstract 1
- 238000004611 spectroscopical analysis Methods 0.000 description 13
- 238000005375 photometry Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 9
- 230000008901 benefit Effects 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- HGAZMNJKRQFZKS-UHFFFAOYSA-N chloroethene;ethenyl acetate Chemical compound ClC=C.CC(=O)OC=C HGAZMNJKRQFZKS-UHFFFAOYSA-N 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 210000003141 lower extremity Anatomy 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
本实用新型为一种测量太赫兹时域光谱系统光斑位置和大小的测量仪，测量仪包括有平移台和夹持台，夹持台上夹持有一矩形测量板；测量板的测量平面与太赫兹时域光谱系统的光束呈垂直方向设置；测量板由至少两片不同大小的矩形测量片固定叠加构成；各测量片的中心对正、相对侧边平行设置。该测量仪利用太赫兹时域光谱系统本身可以测量电磁波相位、振幅的特点进行测量；测量仪放在太赫兹时域光谱系统的载物台上，对光斑位置和大小进行测量，获得的数据与光阑法测量的结果吻合；该测量仪可不需要任何辅助电源和电路，能够对太赫兹时域光谱系统光斑位置和大小进行检测；该测量仪结构简单、灵敏度和测量精度高、价格低廉，测量方法简单实用。
The utility model relates to a measuring instrument for measuring the spot position and size of a terahertz time-domain spectrum system. The measuring instrument includes a translation platform and a clamping platform, and a rectangular measuring plate is clamped on the clamping platform; the measuring plane of the measuring plate and the The light beam of the terahertz time-domain spectroscopy system is arranged in a vertical direction; the measurement plate is composed of at least two rectangular measurement sheets of different sizes fixedly superimposed; the center of each measurement sheet is aligned, and the opposite sides are arranged in parallel. The measuring instrument uses the characteristics of the terahertz time-domain spectroscopy system itself to measure the phase and amplitude of electromagnetic waves; the measuring instrument is placed on the stage of the terahertz time-domain spectroscopy system to measure the position and size of the spot. The obtained data and The measurement results of the aperture method are consistent; the measuring instrument does not need any auxiliary power supply and circuit, and can detect the spot position and size of the terahertz time-domain spectroscopy system; the measuring instrument has a simple structure, high sensitivity and measurement accuracy, and low price. The method is simple and practical.
Description
Technical field
The utility model is about a kind of facula measurement device, relates in particular to a kind of measuring instrument for measuring terahertz time-domain spectroscopy system facula position and size.
Background technology
For the instrument that utilizes electromagnetic wave to carry out material and material analysis, the beam pattern that comprises spot diameter, center, energy distribution is made by the specimen in early stage and the data analysis in later stage all has significant impact.At present, people have been developed various types of facula measurement devices and measuring method, as: [1] utilizes scanning charge-coupled image sensor (CCD) to measure a narrow Bezier bundle spot (Measuring a narrow Bessel beam spot by scanning a charge-coupled device (CCD) pixel), the method (Method for measuring the spot size of a laser beam using a boundary-diffraction wave) of the spot size of the laser beam of the boundary diffraction wave measurement that use [2].But in the above existing measurement mechanism and measuring method, surveying instrument uses CCD to make array, and cooperates complicated circuit to measure; Therefore, prior art exists that price is high, complex structure, measuring process are loaded down with trivial details, and needs the defectives such as external power supply.The terahertz time-domain spectroscopy system itself has can directly measure the advantages such as electromagnetic phase place, amplitude, and above-mentioned prior art does not take full advantage of these characteristics of terahertz time-domain spectroscopy system itself.
Thus, the inventor relies on experience and the practice of being engaged in for many years relevant industries, proposes a kind of measuring instrument of measuring terahertz time-domain spectroscopy system facula position and size, to overcome the defective of prior art.
The utility model content
The purpose of this utility model is to provide a kind of measuring instrument of measuring terahertz time-domain spectroscopy system facula position and size, can without any need for auxiliary power supply and electronic circuit, can detect terahertz time-domain spectroscopy system facula position and size; And this measuring instrument is simple in structure, highly sensitive, cheap, and measuring method is simple and practical.
The purpose of this utility model is achieved in that a kind of measuring instrument of measuring terahertz time-domain spectroscopy system facula position and size, and described measuring instrument includes translation stage and the grain-clamping table that is connected on the translation stage, and clamping has a rectangle to measure plate on the described grain-clamping table; The light beam of the measurement plane of described measurement plate and terahertz time-domain spectroscopy system arranges in vertical direction; Described measurement plate is measured the sheet fixed overlay by the rectangle of at least two different sizes and is consisted of; Described central alignment, the relative side of respectively measuring sheet be arranged in parallel.
In a preferred embodiments of the present utility model, described measurement plate measures sheet by first and the second measurement sheet stack consists of; Described first measures the length and width size of sheet less than the length and width size of the second measurement sheet.
In a preferred embodiments of the present utility model, the described sheet of respectively measuring is made by teflon, polystyrene, tygon or quartz material.
In a preferred embodiments of the present utility model, described measurement sheet is provided with the cross scale mark.
In a preferred embodiments of the present utility model, described the first measurement sheet and second is measured sheet and is fixed by polymer adhesive.
In a preferred embodiments of the present utility model, described first measures sheet and second measures the described measurement plate of the one-body molded formation of sheet.
From the above mentioned, the utility model adopts common used material to be made into the measurement plate, and by translation stage and the described measuring instrument of the common composition of grain-clamping table, the characteristics that this measuring instrument utilizes terahertz time-domain spectroscopy system itself can measure electromagnetic wave phase place, amplitude are measured; Measuring instrument is positioned on the objective table of terahertz time-domain spectroscopy system, facula position and size are measured, the data of acquisition are coincide with the result who utilizes the diaphragm method to measure; This measuring instrument can without any need for auxiliary power supply and electronic circuit, can detect terahertz time-domain spectroscopy system facula position and size; And this measuring instrument is simple in structure, sensitivity and measuring accuracy high, cheap, measuring method is simple and practical.
Description of drawings
The following drawings only is intended to the utility model done and schematically illustrates and explain, does not limit scope of the present utility model.Wherein:
Figure 1A: the perspective view of measuring the measuring instrument of terahertz time-domain spectroscopy system facula position and size for the utility model.
Figure 1B: be the main TV structure synoptic diagram of Figure 1A.
Fig. 1 C: be the plan structure synoptic diagram of Figure 1A.
Fig. 2: for measuring the structural representation of plate in the utility model.
Fig. 3 A: when being positioned at measurement sheet center for reference light in the utility model (the reference light light beam passes first and measures sheet and the second measurement sheet), the time-domain spectroscopy signal S of the terahertz time-domain spectroscopy system that obtains
TwoCurve.
Fig. 3 B: be the curve magnification figure in the T=6-10ps interval among Fig. 3 A.
Fig. 4: when being positioned at individual layer measurement sheet for reference light in the utility model (the reference light light beam only passes second and measures sheet), the time-domain spectroscopy signal S of the terahertz time-domain spectroscopy system that obtains
SingleCurve.
Fig. 5 A: be the curve map of time-domain spectroscopy signal SI (I=17) in the utility model.
Fig. 5 B: be the curve magnification figure in the T=6-10ps interval among Fig. 5 A.
Fig. 6 A: be the curve map of time-domain spectroscopy signal SI (I=29) in the utility model.
Fig. 6 B: be the curve magnification figure in the T=6-10ps interval among Fig. 6 A.
Embodiment
Understand for technical characterictic of the present utility model, purpose and effect being had more clearly, now contrast description of drawings embodiment of the present utility model.
Such as Figure 1A, Figure 1B, Fig. 1 C and shown in Figure 2, the utility model proposes a kind of measuring instrument 100 of measuring terahertz time-domain spectroscopy system facula position and size, described measuring instrument 100 includes translation stage 1 and the grain-clamping table 2 that is connected on the translation stage 1, and clamping has a rectangle to measure plate 3 on the described grain-clamping table 2; The light beam of the measurement plane of described measurement plate 3 and terahertz time-domain spectroscopy system arranges in vertical direction; Described measurement plate 3 is measured the sheet fixed overlay by the rectangle of at least two different sizes and is consisted of; In the present embodiment, as shown in Figure 2, described measurement plate 3 measures sheet 31 by first and 32 stacks of the second measurement sheet consist of; Described first measures the length and width size of sheet 31 less than the length and width size of the second measurement sheet 32; The described first central alignment, relative side of measuring sheet and the second measurement sheet be arranged in parallel.In the utility model, described measurement sheet 31,32 adopts to be made the lower material of terahertz wave band absorption coefficient, such as: teflon, polystyrene, tygon or quartz material etc.; The first measurement sheet 31 and second is measured sheet 32 and can be selected identical material to make, and also can adopt different materials to make; In the present embodiment, described the first measurement sheet 31 and second is measured sheet 32 and is selected the polythene material making; Two thickness of measuring sheet can be identical, also can be different.
Further, in the present embodiment, described first measures sheet 31 is provided with cross scale mark 311.
In the present embodiment, described the first measurement sheet 31 and the second measurement sheet 32 can be adhesively fixed by bonding agent (as: epoxy resin etc.);
In another embodiment of present embodiment, described the first measurement sheet 31 and second is measured sheet 32 and is also adopted the described measurement plate of the one-body molded formation of mechanical pressing mold mode.
In the present embodiment, described measurement plate 3 can also be made of the rectangle measurement sheet fixed overlay of different sizes more than two.
In the present embodiment, described translation stage 1 can adopt multidirectional translation stage, also can adopt unidirectional translation stage; The manual translation platform can be adopted, also motorized precision translation stage can be adopted.
The utility model also provides a kind of measuring method of utilizing above-mentioned measuring instrument to measure terahertz time-domain spectroscopy system facula position and size, said method comprising the steps of:
(1) the noise threshold signal A0 of selection terahertz time-domain spectroscopy system;
(2) place and adjust measuring instrument;
According to the measurement sheet of institute's photometry spot size selection appropriate size of estimating, wherein, the first area of measuring sheet 31 is greater than the area of institute's photometry spot; Measuring instrument 100 is positioned on the objective table (not shown) of terahertz time-domain spectroscopy system, measures the lower limb of plate 3 and the table top of objective table and be arranged in parallel; Position of reference light according to system, adjust the micrometer caliper 11 (shown in Figure 1A) of translation stage 1, so that the centrally aligned reference light of the first measurement sheet 31 obtains the double-deck time-domain spectroscopy signal S that measures sheet (at this moment, the reference light light beam passes first and measures sheet and the second measurement sheet)
Two, its main peak maximal value is designated as A
Two, the corresponding time of this main peak maximal value is designated as T1 (as shown in Figure 3A); Then, rotating screw mircrometer gauge 11 so that reference light places the position that the second measurement sheet 32 is only arranged, obtains the time-domain spectroscopy signal S that individual layer is measured sheet (at this moment, the reference light light beam only passes second and measures sheet)
Single, its main peak maximal value is designated as A
Single, the corresponding time of this main peak maximal value is designated as T2 (as shown in Figure 4).
(3) size of sheet is measured in affirmation;
At signal S
TwoIn, seek the amplitude A with respect to time T 2 places
Two' (shown in Fig. 3 B); If A
Two' be less than or equal to A0, think that first measures sheet 31 areas greater than institute's photometry spot area (because A
Two' be less than or equal to threshold value A 0, the amplitude that appears at so the T2 position is thought noise, measurement result is not exerted an influence, proof does not have light beam to see through from the second measurement sheet (single-layer positions), that is to say that all light beams all are radiated at first and measure on the sheet, and see through from double-deck position), then carry out follow-up measurement; If A
Two' greater than A0, then first measure sheet 31 areas less than institute's photometry spot area, need to reselect corresponding measurement sheet or measure plate.
(4) DATA REASONING and gathering;
Rotating screw mircrometer gauge 11, the first left side edge of measuring sheet 31 overlaps with reference light in the plate 3 with measuring, continue rotating screw mircrometer gauge 11, measurement plate 3 levels are moved to the left, reference light is moved from left to right along the first horizontal center line of measuring sheet 31; Be moved to the left in the process measuring plate 3 levels, measure plate 3 and set successively from left to right a plurality of measuring positions, record the time-domain spectroscopy signal curve of each measuring position and the relative scale of the micrometer caliper of this position; Wherein, the first time-domain spectroscopy signal of measuring the left side edge position of sheet 31 is decided to be SL, and the scale of the micrometer caliper of this position is decided to be NL relatively; The first time-domain spectroscopy signal of measuring the right side edge position of sheet 31 is decided to be SR, and the scale of the micrometer caliper of this position is decided to be NR relatively; Be decided to be SI in the left side edge position of the first measurement sheet 31 and the time-domain spectroscopy signal of each measuring position between the right side edge position, the scale of the micrometer caliper of each position is decided to be NI relatively, I is 1,2,3,4 ... etc. (number of described a plurality of measuring positions is set according to the scale division value of required measuring accuracy and micrometer caliper); After obtaining the time-domain spectroscopy signal SI curve of each measuring position, record and gather in each time-domain spectroscopy signal SI curve with respect to the amplitude of time T 1 and T2, be decided to be respectively AI
T1And AI
T2The data that record and gather are made form.
(5) calculate spot size according to measurement data;
In above table, observe AI
T2Data, find AI
T2Reduce first to increase again (AI according to measuring sequence
T2Reflected the area of irradiation at the second measurement sheet.In the process that the measurement plate moves to left, the position that can obtain the hot spot irradiation changes, and wherein shines the area change process of single-layer positions for from large to small, changes from small to big, so corresponding AI again
T2Reduce first to increase again according to measuring sequence); According to order from left to right, compare successively AI
T2With the size of A0, find out for the first time AI
T2Relative micrometer caliper scale less than or equal to the position of A0 is designated as NP1; In the present embodiment, shown in Fig. 5 A, Fig. 5 B, when I=17, obtain the time-domain spectroscopy signal S17 curve of this measuring position, A17 on this measuring position
T2Less than A0, the micrometer caliper scale that this position is corresponding is designated as NP1; Then, find out for the first time AI
T2Greater than the position of A0, the micrometer caliper scale of the measuring position, left side of this position of record next-door neighbour is designated as NP2; In the present embodiment, shown in Fig. 6 A, Fig. 6 B, when I=30, A30
T2Greater than A0; The micrometer caliper scale of the measuring position, left side of this position of record next-door neighbour when I=29 (that is :) is designated as NP2.
Reference light is decided to be R1 to the distance of institute's photometry spot left side edge; Reference light is decided to be R2 to the distance of institute's photometry spot right side edge; The diameter of institute's photometry spot is decided to be D;
R1=|NL-NP1| is (when reference light moves to the NP1 position, the hot spot left hand edge just exposes to measures the plate left hand edge, so, then reference light moves to the distance R 1=|NL-NP1| that passes by in the NP1 position by left hand edge, is the distance of hot spot left hand edge and reference light); R2=|NP2-NR| is (when reference light moves to the NP2 position, the hot spot right hand edge just exposes to measures the plate right hand edge, so, the distance R 2=|NP2-NR| that passed by by NP2 position movement to right hand edge of reference light then is the distance of hot spot right hand edge and reference light); Spot diameter D=R1+R2 then.
(6) measure the spot center position;
Institute's photometry spot is Q with respect to the reference light eccentric degree;
(the spot center position equates that apart from left and right edges reference light equates not necessarily that apart from left and right edges the distance of reference light and actual spot center is eccentric degree in Q=|R1-R2|/2.)；
According to eccentric degree Q, can determine institute photometry spot center.
Wherein: when R1＞R2, for institute's photometry spot with respect to reference light left avertence Q, when R1＜R2, for institute's photometry spot with respect to reference light right avertence Q.
Further, in order to improve the accuracy of measurement, after above-mentioned measuring process finishes, can be according to above-mentioned measuring process duplicate measurements one or many; Near obtaining NP1 and the corresponding measuring position of NP2 value in the measuring process first time, increase measuring position point or shorten the interval, measuring position; Step when other measuring processs were measured with the first time is identical, does not repeat them here.
In the present embodiment, except above-mentioned measuring process, can also be in step (2), to measure plate 3 around the first cross center of measuring sheet clockwise or be rotated counterclockwise an acute angle, then, by translation stage the measurement plate level is moved, to obtain the hot spot characteristic that this side up.
The utility model compared with prior art has following advantage:
The utility model adopts common used material to be made into the measurement plate, and by translation stage and the described measuring instrument of the common composition of grain-clamping table, the characteristics that this measuring instrument utilizes terahertz time-domain spectroscopy system itself can measure electromagnetic wave phase place, amplitude are measured; Measuring instrument is positioned on the objective table of terahertz time-domain spectroscopy system, facula position and size are measured, the data of acquisition are coincide with the result who utilizes the diaphragm method to measure; This measuring instrument can without any need for auxiliary power supply and electronic circuit, can detect terahertz time-domain spectroscopy system facula position and size; And this measuring instrument is simple in structure, sensitivity and measuring accuracy high, cheap, measuring method is simple and practical.
The above only is the schematic embodiment of the utility model, is not to limit scope of the present utility model.Any those skilled in the art, the equivalent variations of having done under the prerequisite that does not break away from design of the present utility model and principle and modification all should belong to the scope that the utility model is protected.
Claims (6)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320297229 CN203249591U (en) | 2013-05-28 | 2013-05-28 | Measuring instrument for measuring spot position and size of terahertz time-domain spectroscopy system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320297229 CN203249591U (en) | 2013-05-28 | 2013-05-28 | Measuring instrument for measuring spot position and size of terahertz time-domain spectroscopy system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203249591U true CN203249591U (en) | 2013-10-23 |
Family
ID=49376024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320297229 Expired - Fee Related CN203249591U (en) | 2013-05-28 | 2013-05-28 | Measuring instrument for measuring spot position and size of terahertz time-domain spectroscopy system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203249591U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103256893A (en) * | 2013-05-28 | 2013-08-21 | 中国石油大学(北京) | Gauge and method of measuring position and size of light spot in terahertz time and domain spectroscopy system |
| CN103969215A (en) * | 2014-05-15 | 2014-08-06 | 中国石油大学(北京) | Terahertz time-domain spectroscopy system and measurement method thereof |
-
2013
- 2013-05-28 CN CN 201320297229 patent/CN203249591U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103256893A (en) * | 2013-05-28 | 2013-08-21 | 中国石油大学(北京) | Gauge and method of measuring position and size of light spot in terahertz time and domain spectroscopy system |
| CN103256893B (en) * | 2013-05-28 | 2015-07-08 | 中国石油大学(北京) | Gauge and method of measuring position and size of light spot in terahertz time and domain spectroscopy system |
| CN103969215A (en) * | 2014-05-15 | 2014-08-06 | 中国石油大学(北京) | Terahertz time-domain spectroscopy system and measurement method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102589452B (en) | Method and device for measuring film thickness and refractive index | |
| CN103335819B (en) | Device and method for optical detection of high-precision pyramid prism | |
| CN102175647B (en) | Device and method for measuring electrostriction coefficient by multi-beam laser heterodyne method | |
| CN110082385B (en) | A micro-nano metal structure for realizing circular dichroism and its application | |
| CN103438810B (en) | A kind of wide cut flexible board thickness real-time detection apparatus and method | |
| CN102679894A (en) | Method for measuring central thickness of reflecting type differential confocal lens | |
| CN102980530A (en) | Elliptic partial measurement device and measurement method based on spatial light modulator | |
| CN102419198A (en) | A liquid level high-precision real-time laser triangulation measurement method and measurement device | |
| CN102768184A (en) | System for Young modulus measurement of film | |
| CN102353916B (en) | Method for measuring magnetoconstriction coefficient through multi-beam laser heterodyne secondary harmonic method | |
| CN102679895A (en) | Method for measuring center thickness of reflective confocal lens | |
| CN104677315A (en) | Measuring method of surface roughness of silicon wafers | |
| CN105823757A (en) | High-precision liquid refractive index measurer realized by using fiber white-light interferometry, and measurement method thereof | |
| CN203249591U (en) | Measuring instrument for measuring spot position and size of terahertz time-domain spectroscopy system | |
| TWI638133B (en) | Non-contact lens radius of curvature and thickness detection device and detection method thereof | |
| CN103256893B (en) | Gauge and method of measuring position and size of light spot in terahertz time and domain spectroscopy system | |
| CN106918445A (en) | Device based on 4 quadrant detector light-metering fibre focal ratio degradation | |
| CN102253001A (en) | Doppler vibrating mirror sine modulation multi-beam laser heterodyne second harmonic measurement device and method for measuring magnetostriction coefficient | |
| CN108398386B (en) | Method and apparatus for in-plane anisotropic crystal axis orientation | |
| CN204008571U (en) | A kind of multi-faceted detection ultrasonic test block | |
| CN102519405A (en) | Detector for flatness of reflecting surface of plane mirror and service method of detector | |
| CN105181604A (en) | Multi-angle incident single shot ellipsometry measurement method | |
| CN108871206A (en) | Surface measurement method and surface measuring device | |
| CN110702018B (en) | Device and method for measuring thickness of sample in diamond anvil cell | |
| CN102865932B (en) | Hartmann sensor consisting of spherical micro lens array and spherical detector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131023 Termination date: 20150528 |
|
| EXPY | Termination of patent right or utility model |