CN203243590U - Rotation shower nozzle of electrostatic eliminator - Google Patents
Rotation shower nozzle of electrostatic eliminator Download PDFInfo
- Publication number
- CN203243590U CN203243590U CN 201320253953 CN201320253953U CN203243590U CN 203243590 U CN203243590 U CN 203243590U CN 201320253953 CN201320253953 CN 201320253953 CN 201320253953 U CN201320253953 U CN 201320253953U CN 203243590 U CN203243590 U CN 203243590U
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- nozzle
- shower nozzle
- rotating part
- xelminator
- joint portion
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Abstract
The utility model discloses a rotation shower nozzle of an electrostatic eliminator. The rotation shower nozzle is used for being assembled on the electrostatic eliminator to enable gas with ions to be blown out to the surface of a workpiece. The rotation shower nozzle of the electrostatic eliminator comprises a nozzle holder, a nozzle cover and a nozzle. The nozzle is provided with an ejection opening, an air inlet and a rotation part. The rotation part is contained in a containing space defined by a limiting opening of the nozzle cover and a limiting groove of the nozzle holder and can rotate relative to a central point. The rotation part of the rotation shower nozzle is rotated, so that the gas blow-off direction of the ejection opening of the rotation shower nozzle can be adjusted and changed, thus convenience is improved, and operation is simplified.
Description
Technical field
The utility model relates to a kind of rotary nozzle of Xelminator, and it is used for being installed on Xelminator, with the gas with ion of output by the Xelminator generation.
Background technology
Xelminator is the device that is applied to eliminate in the manufacture process of the workpiece such as semiconductor crystal wafer, glass substrate or circuit board the static of surface of the work, it utilizes spray point to produce corona discharge effect and with gas ionization, and will blow to surface of the work with the gas of the ion shower nozzle by Xelminator, and the static of surface of the work is neutralized.
On using, amass or eliminate the demand of the surface location of static according to surface of the work, Xelminator is distinguished numerous species, for example small-sized, hand-hold type, fan-type, bar-shaped, its Xelminator middle-size and small-size and hand-hold type is to be applied to small size, equipment or inside workpiece, local demand except electricity, this kind Xelminator is equipped with a shower nozzle, and shower nozzle is generally cone shape insulator, is used for making the surface that can be arrived by the shower nozzle outlet required elimination static with the gas of ion.
Yet, the existing shower nozzle that is used for Xelminator is the assembly hole that is arranged on regularly this Xelminator, and the gas with ion is blown out towards single direction, it is unfavorable for the use in response to various workpiece, the surface location that for example workpiece size, external form or institute must elimination static, and must labor intensive move the position of adjusting workpiece or Xelminator, cause operating inconvenience and losing time; Perhaps, when need to be in the part of the ad-hoc location of workpiece during except electricity, must manual operation adjust Xelminator itself, could change the direction of shower nozzle ejection gas, and make the surface that can arrive required elimination static with the gas of ion, cause the waste of complicated operation and inconvenience and time, human cost.
Summary of the invention
For solving the shortcoming of above-mentioned prior art, the purpose of this utility model is to provide a kind of rotary nozzle for Xelminator, it can adjust the opening direction of being exported gas by this Xelminator by rotating this rotary nozzle, and then will blow with the gas of ion to the surface of workpiece, the user need not mobile whole Xelminator as long as adjust rotary nozzle, can promote convenience and simplify the operation.
Reach in order to achieve the above object other purpose, a kind of rotary nozzle for Xelminator of the present utility model, wherein this Xelminator has a shower nozzle assembly hole and is communicated with a gas piping of this shower nozzle assembly hole, be provided with a spray point in this shower nozzle assembly hole, this spray point is used for making the γ-ray emission ionization by this gas piping input, this rotary nozzle comprises a nozzle carrier, one nozzle cover and a nozzle, this nozzle carrier has a gas passage and is communicated with a first end and one second end of this gas passage, this first end has an assembled portion of being combined for the shower nozzle assembly hole of this Xelminator, and the outside that the inboard of this second end has a stopper slot and this second end has one first joint portion; This nozzle cover has a limited mouth and one second joint portion, is combined with the first joint portion of this nozzle carrier in this second joint portion, and this limited mouth defines an accommodation space that is connected with this gas passage with this stopper slot; This nozzle has an ejiction opening, an air inlet and a rotating part, and this rotating part is placed in the accommodation space that this limited mouth and this stopper slot define and can be with respect to central point rotation, and this ejiction opening is connected with this gas passage with this air inlet.
In the above-mentioned rotary nozzle, the outer surface of this rotating part has the sphere radian, and the radian on the surface that this limited mouth and this stopper slot and this rotating part join and the sphere radian of this rotating part are corresponding, and this rotating part is some rotation centered by the centre of sphere corresponding to this sphere radian.
In the above-mentioned rotary nozzle, this first joint portion and this second joint portion have the screw thread that corresponds to each other.
In the above-mentioned rotary nozzle, this ejiction opening protrudes from this nozzle cover.
In the rotary nozzle of the present utility model, the rotating part of this nozzle rotatably is limited in the limited mouth of the stopper slot of this nozzle carrier and this nozzle cover, can be by the rotating part of this rotary nozzle of rotation, and adjust to change the gas blow-off direction of the ejiction opening of this rotary nozzle, and can promote convenience and simplify the operation.
Description of drawings
Fig. 1 is the decomposed schematic diagram that the rotary nozzle of the utility model embodiment is installed on Xelminator.
Fig. 2 be the rotary nozzle of the utility model embodiment be installed on Xelminator in conjunction with schematic diagram.
Fig. 3 is the generalized section of A-A among Fig. 2.
Fig. 4 is among the utility model embodiment, the generalized section the during rotation of the nozzle of rotary nozzle.
[primary clustering symbol description]
10 Xelminators
12 shower nozzle assembly holes
13 spray points
14 gas pipings
100 rotary nozzles
110 nozzle carriers
111 gas passages
112 first ends
113 second ends
114 assembled portion
115 stopper slots
116 first joint portions
120 nozzle covers
121 limited mouths
122 second joint portions
130 nozzles
131 ejiction openings
132 air inlets
133 rotating parts
The O central point
The L center line
Embodiment
For fully understanding the purpose of this utility model, feature and effect, now by following specific embodiment, and cooperate accompanying drawing, the utility model is described in detail, illustrate as after:
Please refer to Fig. 1 to Fig. 4, Fig. 1 is the decomposed schematic diagram that the rotary nozzle of the utility model embodiment is installed on Xelminator; Fig. 2 be the rotary nozzle of the utility model embodiment be installed on Xelminator in conjunction with schematic diagram; Fig. 3 is the generalized section of A-A among Fig. 2; Fig. 4 is among the utility model embodiment, the generalized section the during rotation of the nozzle of rotary nozzle.
Please refer to Fig. 1 to Fig. 4, the rotary nozzle 100 of the utility model embodiment is used for being bonded to an Xelminator 10, this Xelminator 10 has a shower nozzle assembly hole 12 and is communicated with a gas piping 14 of this shower nozzle assembly hole 12, be provided with a spray point 13 in this shower nozzle assembly hole 12, this spray point 13 is connected with high voltage source supply (not shown), for generation of corona discharge so that by the γ-ray emission ionization of this gas piping 14 inputs, in the present embodiment, this shower nozzle assembly hole 12 is communicated with this gas piping 14, gas-pressurized is to enter in this shower nozzle assembly hole 12 by this gas piping 14, and as shown in the figure, this gas piping 14 at right angles bends, and be communicated in the bottom of this shower nozzle assembly hole 12, as an example, this spray point 13 is the bottoms that arrange and protrude from this shower nozzle assembly hole 12 along this gas piping 14 in the utility model.
The rotary nozzle 10 of the utility model embodiment mainly comprises a nozzle carrier 110, one nozzle cover 120 and a nozzle 130, wherein, this nozzle carrier 110 has a gas passage 111 and is communicated with a first end 112 and one second end 113 of this gas passage 111, this first end 112 have for an assembled portion 114 of shower nozzle assembly hole 12 combinations of this Xelminator 10, for example, assembled portion 114 on this first end 112 has screw thread, the inwall of this shower nozzle assembly hole 12 has screw thread that should assembled portion 114, and the outside that the inboard of this second end 113 has a stopper slot 115 and this second end 113 has one first joint portion 116; This nozzle cover 120 has a limited mouth 121 and one second joint portion 122, the first joint portion 116 combinations of this second joint portion 122 and this nozzle carrier 110, and this limited mouth 121 defines an accommodation space that is connected with this gas passage 111 with this stopper slot 115; This nozzle 130 has an ejiction opening 131, an air inlet 132 and a rotating part 133, this rotating part 133 is placed in the accommodation space that this limited mouth 121 and this stopper slot 115 define and can be with respect to a central point O (as shown in Figures 3 and 4) rotation, and this ejiction opening 131 is connected with this gas passage 111 with this air inlet 132.In the present embodiment, this ejiction opening 131 is exemplified as the pipe that extends from this rotating part 133, and by protrusion in this limited mouth 121, yet it is not limited to this, and this ejiction opening 131 also can be the tubular form that other protrudes from limited mouth 121.
When using this Xelminator 10, gas-pressurized is entered in this shower nozzle assembly hole 12 by this gas piping 14, spray point 13 in this jet head sets mesopore 12 produces corona discharge, and gas around it is decomposed and produces ion, pass through the passage 111 of the nozzle carrier 110 of this rotary nozzle 100 with the gas of ion, and entered in this nozzle 130 by the air inlet 132 of this nozzle 130, the ejiction opening 131 by this nozzle 130 blows out to surface of the work at last.When user's wish changes the direction of these nozzle 130 blow gas, can make relatively this central point O rotation in this limited mouth 121 and this stopper slot 115 of this rotating part 133, change whereby the direction of these nozzle 130 blow gas, adjust this Xelminator 10 and then lifting operation and convenience and need not movement.
In the rotary nozzle 100 of above-mentioned the utility model embodiment, the outer surface of this rotating part 133 has the sphere radian, and the radian on the surface that this limited mouth 121 and this stopper slot 115 and this rotating part 133 join and the sphere radian of this rotating part 133 are corresponding, and this rotating part 133 point O centered by the centre of sphere corresponding to this sphere radian is rotated.Particularly, in the present embodiment, the limited mouth 121 of this nozzle cover 120 has circular cross-section with the stopper slot 115 of this nozzle carrier 110, the rotating part 133 of this nozzle 130, the limited mouth 121 of this nozzle cover 120 arrange along a centre line L is concentric with the stopper slot 115 of this nozzle carrier 110, and this centre line L is by this central point O.When this rotating part 133 rotates in this limited mouth 121 and this stopper slot 115, this ejiction opening 131 can rotate take this central point O as pivot on the plane at this centre line L place, perhaps, this ejiction opening 131 can present the Space Rotating of movement locus such as taper seat, its summit take this central point O as taper seat, and the gas openings of ejiction opening 131 1 ends of tubulose is rotated on the plane of vertical this centre line L, and then reach the direction of adjusting ejiction opening 131 ejection gases.
In the rotary nozzle 100 of above-mentioned the utility model embodiment, the first joint portion 116 of this nozzle carrier 110 has the screw thread that corresponds to each other with the second joint portion 112 of this nozzle cover 120, the first joint portion 116 of this nozzle carrier 110 is with after the second joint portion 112 of this nozzle cover 120 combines, the limited mouth 121 of this nozzle carrier 110 and the stopper slot of this nozzle cover 120 115 are common to form these accommodation spaces, and makes this nozzle 130 by accommodating and be limited in this accommodation space.
Accordingly, in the rotary nozzle 100 of the utility model embodiment, the rotating part 133 of this nozzle 130 are stopper slots 115 of rotatably being limited in this nozzle carrier 110 with the limited mouth 121 of this nozzle cover 120 in, can be by the rotating part 113 of this rotary nozzle 100 of rotation, and the direction that the gas that adjust to change the ejiction opening 131 of this rotary nozzle 100 blows out, and can promote convenience and simplify the operation.
The utility model is open with preferred embodiment hereinbefore, yet those skilled in the art will appreciate that this embodiment only is used for describing the utility model, and should not be read as restriction scope of the present utility model.It should be noted, such as with variation and the displacement of this embodiment equivalence, all should be made as and be covered by in the category of the present utility model.Therefore, protection range of the present utility model when with claim the person of being defined be as the criterion.
Claims (4)
1. rotary nozzle that is used for Xelminator, wherein this Xelminator has a shower nozzle assembly hole and is communicated with a gas piping of this shower nozzle assembly hole, be provided with a spray point that is used for making by the γ-ray emission ionization of this gas piping input in this shower nozzle assembly hole, it is characterized in that this rotary nozzle comprises:
One nozzle carrier, have a gas passage and be communicated with a first end and one second end of this gas passage, this first end has an assembled portion of being combined for the shower nozzle assembly hole of this Xelminator, and the outside that the inboard of this second end has a stopper slot and this second end has one first joint portion;
One nozzle cover has a limited mouth and one second joint portion, is combined with the first joint portion of this nozzle carrier in this second joint portion, and this limited mouth defines an accommodation space that is connected with this gas passage with this stopper slot; And
One nozzle has an ejiction opening, an air inlet and a rotating part, and this rotating part is placed in the accommodation space that this limited mouth and this stopper slot define and can be with respect to central point rotation, and this ejiction opening is connected with this gas passage with this air inlet.
2. rotary nozzle as claimed in claim 1, it is characterized in that, the outer surface of this rotating part has the sphere radian, and the radian on the surface that this limited mouth and this stopper slot and this rotating part join and the sphere radian of this rotating part are corresponding, and this rotating part is some rotation centered by the centre of sphere corresponding to this sphere radian.
3. rotary nozzle as claimed in claim 1 is characterized in that, this first joint portion and this second joint portion have the screw thread that corresponds to each other.
4. such as each described rotary nozzle in the claims 1 to 3, it is characterized in that this ejiction opening protrudes from this nozzle cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320253953 CN203243590U (en) | 2013-05-10 | 2013-05-10 | Rotation shower nozzle of electrostatic eliminator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320253953 CN203243590U (en) | 2013-05-10 | 2013-05-10 | Rotation shower nozzle of electrostatic eliminator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203243590U true CN203243590U (en) | 2013-10-16 |
Family
ID=49320843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320253953 Expired - Fee Related CN203243590U (en) | 2013-05-10 | 2013-05-10 | Rotation shower nozzle of electrostatic eliminator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203243590U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107213999A (en) * | 2017-06-26 | 2017-09-29 | 苏州市海新机电工业设备有限公司 | One kind rotation silencing means |
-
2013
- 2013-05-10 CN CN 201320253953 patent/CN203243590U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107213999A (en) * | 2017-06-26 | 2017-09-29 | 苏州市海新机电工业设备有限公司 | One kind rotation silencing means |
| CN107213999B (en) * | 2017-06-26 | 2019-04-23 | 苏州市海新机电工业设备有限公司 | A kind of rotation silencing means |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131016 Termination date: 20160510 |