CN105318129A - Rotary shaft with a vent groove - Google Patents
Rotary shaft with a vent groove Download PDFInfo
- Publication number
- CN105318129A CN105318129A CN201410236101.9A CN201410236101A CN105318129A CN 105318129 A CN105318129 A CN 105318129A CN 201410236101 A CN201410236101 A CN 201410236101A CN 105318129 A CN105318129 A CN 105318129A
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- CN
- China
- Prior art keywords
- vent slot
- running shaft
- axle sleeve
- air
- suction port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The invention discloses a rotary shaft with a vent groove. Airflow can be conveyed into the vent groove in a rotary shaft body from air inlets in a fixed shaft sleeve. According to the technical scheme, air enters the vent groove through the air inlets in the shaft sleeve, is guided into the vent groove in the shaft body through annular air guiding space and is finally exhausted out of an air outlet in the bottom end of the shaft body. All air paths, communicated with the annular air guiding space, of the air inlets are independent in space and do not interfere with one another. One end of the vent groove is communicated with the annular air guiding space all the time, and therefore even though the shaft sleeve is fixed and the shaft body rotates always, the process that air is conveyed into the vent groove in the shaft body from the air inlets in the shaft sleeve cannot be influenced.
Description
Technical field
The present invention relates to a kind of running shaft, particularly relate to a kind of rotational structure device needing air-flow conducting.
Background technique
In the equipment involved by semiconductor wafer process, usually can use the such assembly of running shaft, in some technological process, need to carry out delivery air by running shaft.Current revolute axes configuration can not ensure the effect of pneumatic convey.
Summary of the invention
Below provide the brief overview of one or more aspect to provide the basic comprehension to these aspects.Detailed the combining of this not all aspect contemplated of general introduction is look at, and both not intended to be pointed out out the scope of key or decisive any or all aspect of elements nor delineate of all aspects.Its unique object is the sequence that some concepts that will provide one or more aspect in simplified form think the more detailed description provided after a while.
The object of the invention is to solve the problem, provide a kind of band vent slot running shaft, air-flow can be passed to the vent slot in the axis body that always rotating from the fixed suction port running shaft axle sleeve.
Technological scheme of the present invention is: present invention is disclosed a kind of band vent slot running shaft, comprise rotatable in establish the multichannel suction port on the axis body of vent slot, axle sleeve, axle sleeve and the air guide annular space in axle sleeve, wherein air guide annular space is communicated with the vent slot in axis body with suction port respectively, and gas imports in vent slot via after suction port, air guide annular space.
According to an embodiment of band vent slot running shaft of the present invention, the gas circuit that multichannel suction port is communicated with air guide annular space is spatially separate, does not interfere with each other.
According to an embodiment of band vent slot running shaft of the present invention, the position of multichannel suction port on axle sleeve is changeless.
According to an embodiment of band vent slot running shaft of the present invention, also comprise the fixed plate for fixed axle sleeve.
According to an embodiment of band vent slot running shaft of the present invention, running shaft also comprises the multichannel air outlet being arranged on axis body bottom.
The present invention contrasts prior art following beneficial effect: in band vent slot running shaft of the present invention, axle sleeve is fixed, and axis body does the rotation rotated in axle sleeve, gas is entered by the multichannel suction port on axle sleeve, import to through air guide annular space in the vent slot in axis body, finally discharge from the air outlet of axis body bottom.Each gas circuit that suction port is communicated with air guide annular space spatially separately independent, do not interfere with each other.Because one end of vent slot is communicated with air guide annular space all the time, even if therefore axle sleeve maintains static and axis body is rotating always, also can not affect in the vent slot that gas is transported to from the suction port axle sleeve in axis body.Band vent slot running shaft of the present invention also can be used in multichannel vacuum.
Accompanying drawing explanation
Fig. 1 shows the appearance schematic diagram of the preferred embodiment of band vent slot running shaft of the present invention.
Fig. 2 A and 2B shows the sectional drawing of the preferred embodiment of band vent slot running shaft of the present invention.
Fig. 3 shows the appearance schematic diagram of multichannel air outlet of the present invention.
Fig. 4 shows the outline drawing of the axle sleeve in band vent slot running shaft of the present invention.
Reference character:
1 axis body
2 suction ports
3 air outlets
4 air guide annular spaces
5 fixed plates
6 axle sleeves
Embodiment
After the detailed description of reading embodiment of the present disclosure in conjunction with the following drawings, above-mentioned feature and advantage of the present invention can be understood better.In the accompanying drawings, each assembly is not necessarily drawn in proportion, and the assembly with similar correlation properties or feature may have identical or close reference character.
Fig. 1 shows the profile of the preferred embodiment of band vent slot running shaft of the present invention, and Fig. 2 A and 2B respectively illustrates the cross-section structure of this band vent slot running shaft.Please simultaneously see Fig. 1, Fig. 2 A and 2B, the band vent slot running shaft of the present embodiment comprise rotatable in establish the multichannel suction port 2 on the axis body 1 of vent slot, the changeless axle sleeve 6 in position, axle sleeve, the air guide annular space 4 in axle sleeve and multichannel air outlet 3.
As shown in Figure 4, one end of suction port is used for air inlet to the structure of axle sleeve, and the other end is communicated with air guide annular space 4, and air guide annular space 4 is communicated with the vent slot in axis body simultaneously.When carrying gas, axis body rotates and axle sleeve maintains static, and gas enters in air guide annular space 4 via each suction port 2, and then enters in the vent slot in the axis body that is communicated with it, finally discharges from the air outlet 3 being arranged on axis body bottom.The structure of multichannel air outlet as shown in Figure 3.Because one end of the vent slot in axis body is communicated with air guide annular space all the time, even if therefore running shaft is rotating always, the conveying of gas also can not affected.
In the present embodiment, the gas channels that multichannel suction port 2 is communicated with air guide annular space 4 is spatially separate, does not interfere with each other.Gas can enter/leave axle sleeve from the suction port 2 of axle sleeve side, then enters/leave in the vent slot of axis body, not by the impact that axis body in axle sleeve rotates, finally discharges from the multichannel air outlet 3 bottom axis body/sucks.
Preferably, band vent slot running shaft also comprises the fixed plate 5 for fixed axle sleeve.
Thering is provided previous description of the present disclosure is for making any person skilled in the art all can make or use the disclosure.To be all apparent for a person skilled in the art to various amendment of the present disclosure, and generic principles as defined herein can be applied to other variants and can not depart from spirit or scope of the present disclosure.Thus, the disclosure not intended to be is defined to example described herein and design, but the widest scope consistent with principle disclosed herein and novel features should be awarded.
Claims (5)
1. a band vent slot running shaft, comprise rotatable in establish the multichannel suction port on the axis body of vent slot, axle sleeve, axle sleeve and the air guide annular space in axle sleeve, wherein air guide annular space is communicated with the vent slot in axis body with suction port respectively, and gas imports in vent slot via after suction port, air guide annular space.
2. band vent slot running shaft according to claim 1, is characterized in that, the gas circuit that multichannel suction port is communicated with air guide annular space is spatially separate, does not interfere with each other.
3. band vent slot running shaft according to claim 1, is characterized in that, the position of multichannel suction port on axle sleeve is changeless.
4. band vent slot running shaft according to claim 1, is characterized in that, also comprise the fixed plate for fixed axle sleeve.
5. band vent slot running shaft according to claim 1, is characterized in that, running shaft also comprises the multichannel air outlet being arranged on axis body bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410236101.9A CN105318129A (en) | 2014-05-30 | 2014-05-30 | Rotary shaft with a vent groove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410236101.9A CN105318129A (en) | 2014-05-30 | 2014-05-30 | Rotary shaft with a vent groove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105318129A true CN105318129A (en) | 2016-02-10 |
Family
ID=55246135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410236101.9A Pending CN105318129A (en) | 2014-05-30 | 2014-05-30 | Rotary shaft with a vent groove |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105318129A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106640927A (en) * | 2016-12-01 | 2017-05-10 | 无锡市创恒机械有限公司 | Rotary ventilating shaft |
| WO2018006283A1 (en) * | 2016-07-06 | 2018-01-11 | Acm Research (Shanghai) Inc. | Substrate supporting apparatus |
| CN109208779A (en) * | 2018-10-23 | 2019-01-15 | 河南展泓图信息科技有限公司 | A kind of energy-saving wall body structure |
Citations (7)
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| US20050218752A1 (en) * | 2004-03-30 | 2005-10-06 | Bray James W | System and method for cooling a super-conducting device |
| JP4602397B2 (en) * | 2005-01-26 | 2010-12-22 | イーグル工業株式会社 | Cryogenic fluid supply / discharge device and superconducting device |
| CN101981360A (en) * | 2008-03-28 | 2011-02-23 | 伊格尔工业股份有限公司 | Rotary joint |
| CN202109131U (en) * | 2011-06-09 | 2012-01-11 | 杨丽梅 | Multi-pipeline pneumatic rapid movable connector |
| CN102439345A (en) * | 2009-06-02 | 2012-05-02 | 国立大学法人东京海洋大学 | Rotary joint for low-temperature application |
| CN202278826U (en) * | 2011-10-29 | 2012-06-20 | 深圳市三兴精密工业设备有限公司 | Vacuum rotating shaft for digital printer |
| CN202733275U (en) * | 2012-05-17 | 2013-02-13 | 德阳宝特机械设备有限责任公司 | Multichannel rotary joint |
-
2014
- 2014-05-30 CN CN201410236101.9A patent/CN105318129A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050218752A1 (en) * | 2004-03-30 | 2005-10-06 | Bray James W | System and method for cooling a super-conducting device |
| JP4602397B2 (en) * | 2005-01-26 | 2010-12-22 | イーグル工業株式会社 | Cryogenic fluid supply / discharge device and superconducting device |
| CN101981360A (en) * | 2008-03-28 | 2011-02-23 | 伊格尔工业股份有限公司 | Rotary joint |
| CN102439345A (en) * | 2009-06-02 | 2012-05-02 | 国立大学法人东京海洋大学 | Rotary joint for low-temperature application |
| CN202109131U (en) * | 2011-06-09 | 2012-01-11 | 杨丽梅 | Multi-pipeline pneumatic rapid movable connector |
| CN202278826U (en) * | 2011-10-29 | 2012-06-20 | 深圳市三兴精密工业设备有限公司 | Vacuum rotating shaft for digital printer |
| CN202733275U (en) * | 2012-05-17 | 2013-02-13 | 德阳宝特机械设备有限责任公司 | Multichannel rotary joint |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018006283A1 (en) * | 2016-07-06 | 2018-01-11 | Acm Research (Shanghai) Inc. | Substrate supporting apparatus |
| CN109478524A (en) * | 2016-07-06 | 2019-03-15 | 盛美半导体设备（上海）有限公司 | Baseplate support device |
| US10770335B2 (en) | 2016-07-06 | 2020-09-08 | Acm Research (Shanghai) Inc. | Substrate supporting apparatus |
| CN109478524B (en) * | 2016-07-06 | 2022-01-25 | 盛美半导体设备(上海)股份有限公司 | Substrate supporting device |
| CN106640927A (en) * | 2016-12-01 | 2017-05-10 | 无锡市创恒机械有限公司 | Rotary ventilating shaft |
| CN109208779A (en) * | 2018-10-23 | 2019-01-15 | 河南展泓图信息科技有限公司 | A kind of energy-saving wall body structure |
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| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160210 |
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| WD01 | Invention patent application deemed withdrawn after publication |