TWM459656U - Rotatable nozzle for electrostatic eliminator - Google Patents

Description

Rotary nozzle of static eliminator

The present invention relates to a rotary nozzle for a static eliminator for mounting on a static eliminator to output an ion-containing gas generated by a static eliminator.

A static eliminator is a device for eliminating static electricity on a surface of a workpiece during manufacture of a semiconductor wafer, a glass substrate, or a circuit board. The discharge needle generates a corona discharge effect to ionize the gas and carry ions. The gas is blown through the nozzle of the static eliminator to the surface of the workpiece, and the static electricity on the surface of the workpiece is neutralized.

In application, depending on the surface area of the workpiece or the position of the surface to eliminate static electricity, there are many types of static eliminators, such as small, hand-held, fan-type, rod-shaped, and small and hand-held static eliminators are used in small areas. The static eliminator of the device or the workpiece is provided with a nozzle. The nozzle is generally a conical insulator for allowing the gas with ions to pass from the nozzle outlet to the surface where static elimination is required.

However, it is conventionally known that the nozzle for the static eliminator is fixedly disposed in the assembly hole of the static eliminator, and only the ionic gas can be blown out in a single direction, which is disadvantageous for the use of various workpieces, for example, The size of the workpiece, its appearance, or the position of the surface on which it is necessary to eliminate static electricity. It must be manually moved to adjust the position of the workpiece or static eliminator, resulting in inconvenient operation and wasted time; or, when it is necessary to partially remove electricity at a specific position of the workpiece, Manually adjust the static eliminator itself to The direction in which the gas is ejected from the nozzle is changed, so that the gas with ions can reach the surface where the static elimination is required, resulting in complicated operation and inconvenience, as well as waste of time and labor costs.

In order to solve the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a rotary nozzle for a static eliminator, which can adjust the opening direction of the gas outputted by the static eliminator by rotating the rotary nozzle, and then The ion gas is blown to the surface of the workpiece, and the user can adjust the rotary nozzle without moving the entire static eliminator, which improves convenience and simplifies operation.

In order to achieve the above and other objects, the present invention relates to a rotary nozzle for a static eliminator, wherein the static eliminator has a nozzle assembly hole and a gas line connecting the nozzle assembly hole, and the nozzle assembly hole Is provided with a discharge needle for ionizing a gas input from the gas line, the rotary nozzle comprising a nozzle holder, a nozzle cover and a nozzle, the nozzle holder having a gas passage and communicating the gas a first end of the channel and a second end, the first end having an assembly portion for coupling with the nozzle assembly hole of the static eliminator, the second end of the second end having a limiting slot and the second end The outer side of the end has a first joint portion; the nozzle cover has a limiting port and a second joint portion, and the second joint portion is combined with the first joint portion of the nozzle seat, the limit port and the limit position The slot defines a receiving space that communicates with the gas passage; the nozzle has a discharge port, an air inlet and a rotating portion, and the rotating portion is disposed in the limiting port and the limiting slot Included in space To a central point of rotation, the discharge outlet and the air inlet line communicating with the gas passage.

In the above rotating nozzle, the outer surface of the rotating portion has a spherical curvature, and the arc of the limiting port and the surface of the limiting groove that is in contact with the rotating portion corresponds to the spherical curvature of the rotating portion, and the The rotating portion rotates around the center of the sphere corresponding to the spherical curvature. .

In the above rotating nozzle, the first joint portion and the second joint portion have threads corresponding to each other.

In the above rotating nozzle, the discharge port protrudes from the nozzle cover.

In the rotating nozzle of the present invention, the rotating portion of the nozzle is rotatably limited to the limiting slot of the nozzle holder and the limiting opening of the nozzle cover, and the rotation can be adjusted and changed by rotating the rotating portion of the rotating nozzle The direction in which the gas at the discharge port of the nozzle is blown out can improve convenience and simplify operation.

10‧‧‧Static eliminator

12‧‧‧Spray assembly hole

13‧‧‧discharge needle

14‧‧‧ gas pipeline

100‧‧‧Rotating nozzle

110‧‧‧ nozzle holder

111‧‧‧ gas passage

112‧‧‧ first end

113‧‧‧ second end

114‧‧‧Assembly Department

115‧‧‧ Limit slot

116‧‧‧ First Joint Department

120‧‧‧Nozzle cover

121‧‧‧Limited mouth

122‧‧‧Second junction

130‧‧‧Nozzles

131‧‧‧Spray outlet

132‧‧‧air inlet

133‧‧‧Rotating Department

O‧‧‧ Center Point

L‧‧‧ center line

Fig. 1 is a partially exploded perspective view showing the rotary nozzle of the present embodiment mounted on a static eliminator.

Fig. 2 is a schematic view showing the connection of the rotary nozzle of the present embodiment to a static eliminator.

Figure 3 is a schematic cross-sectional view of A-A in Figure 2.

Fig. 4 is a schematic cross-sectional view showing the rotation of the nozzle of the rotary head in the present embodiment.

In order to fully understand the purpose, features and effects of this creation, we will give a detailed explanation of the creation by the following specific examples and with the attached drawings. For the following: Please refer to Figures 1 to 4 1 is a partial exploded view of the rotary nozzle mounted on the static eliminator of the present embodiment; FIG. 2 is a schematic diagram of the combination of the rotary nozzle mounted on the static eliminator of the present embodiment; 2 is a schematic cross-sectional view of AA in the figure; FIG. 4 is a schematic cross-sectional view showing a nozzle of the rotary nozzle when the nozzle is rotated.

Referring to FIG. 1 to FIG. 4 , the rotary nozzle 100 of the present embodiment is used for coupling to a static eliminator 10 having a nozzle assembly hole 12 and communicating the nozzle. A gas line 14 is assembled in the hole 12, and a discharge needle 13 is disposed in the nozzle assembly hole 12, and the discharge needle 13 is connected to a high voltage power supply (not shown) for generating a corona discharge. The gas input from the gas line 14 is ionized. In this embodiment, the nozzle assembly hole 12 is connected to the gas line 14, and the pressurized gas system enters the nozzle assembly hole 12 through the gas line 14 and is as shown in the figure. The gas line 14 is bent at a right angle and communicates with the bottom of the nozzle assembly hole 12. As an example, in the present invention, the discharge needle 13 is disposed along the gas line 14 and protrudes from the nozzle assembly. The bottom of the hole 12.

The rotary nozzle 10 of the present embodiment mainly includes a nozzle holder 110, a nozzle cover 120 and a nozzle 130. The nozzle holder 110 has a gas passage 111 and a first end 112 and a first end of the gas passage 111. The second end 113 has an assembly portion 114 for coupling with the nozzle assembly hole 12 of the static eliminator 10. For example, the assembly portion 114 on the first end 112 has a thread. The inner wall of the nozzle assembly hole 12 has a thread corresponding to the assembly portion 114. The second end 113 has a limiting groove 115 on the inner side and a first joint portion 116 on the outer side of the second end 113. The nozzle cover 120 The second coupling portion 122 is coupled to the first joint portion 116 of the nozzle holder 110. The limiting port 121 and the limiting slot 115 define The gas passage 111 is connected to one of the limiting spaces. The nozzle 130 has a discharge port 131, an air inlet 132, and a rotating portion 133. The rotating portion 133 is disposed in the limiting port 121 and the limiting slot 115. The defined accommodation space and can be rotated relative to a center point O (as shown in Figure 3 and Figure 4) The gas outlet 131 and the gas inlet 132 are in communication with the gas passage 111. In the present embodiment, the discharge port 131 is exemplified as a circular tube extending from the rotating portion 133 and protrudes from the limiting port 121. However, the discharge port 131 is not limited thereto, and the discharge port 131 may be other convex. The shape of the tube body of the limiting port 121.

When the static eliminator 10 is used, pressurized gas enters the nozzle assembly hole 12 from the gas line 14, and the discharge needle 13 in the hole 12 in the head group generates a corona discharge and surrounds it. The gas is decomposed and generates ions. The gas system with ions passes through the passage 111 of the nozzle holder 110 of the rotary nozzle 100, and enters the nozzle 130 from the inlet 132 of the nozzle 130, and finally is sprayed by the nozzle 130. The outlet 131 is blown to the surface of the workpiece. When the user wants to change the direction in which the nozzle 130 blows out the gas, the rotating portion 133 is rotated in the limiting port 121 and the limiting slot 115 relative to the center point O, thereby changing the direction in which the nozzle 130 blows out the gas. The static eliminator 10 is adjusted without moving, thereby improving operability and convenience.

In the rotary nozzle 100 of the present embodiment, the outer surface of the rotating portion 133 has a spherical curvature, and the arc of the limiting port 121 and the surface of the limiting slot 115 that is in contact with the rotating portion 133 and the rotation The spherical curvature of the portion 133 corresponds to the rotation of the rotating portion 133 with the spherical center corresponding to the spherical curvature as a center point O. Specifically, in the embodiment, the limiting port 121 of the nozzle cover 120 and the limiting slot 115 of the nozzle holder 110 have a circular cross section, and the rotating portion 133 of the nozzle 130 and the limiting port of the nozzle cover 120 121 and the limiting groove 115 of the nozzle holder 110 are concentrically disposed along a center line L, and the center line L passes through the center point O. When the rotating portion 133 rotates in the limiting port 121 and the limiting slot 115, the ejection port 131 can rotate on the plane where the center line L is located with the center point O as a rotation center, or the spray The outlet 131 can exhibit a motion trajectory such as a spatial rotation of a conical surface, the center point O being the apex of the conical surface, and the gas opening at one end of the tubular ejection opening 131 is rotated on a plane perpendicular to the center line L, Further, the direction in which the gas is ejected from the discharge port 131 is adjusted.

In the rotary nozzle 100 of the present embodiment, the first joint portion 116 of the nozzle holder 110 and the second joint portion 112 of the nozzle cover 120 have corresponding threads, and the first joint portion 116 of the nozzle holder 110 is After the second joint portion 112 of the nozzle cover 120 is coupled, the limiting port 121 of the nozzle holder 110 and the limiting slot 115 of the nozzle cover 120 together form the accommodating space, and the nozzle 130 is accommodated and limited. Located in the accommodating space.

Accordingly, in the rotary nozzle 100 of the present embodiment, the rotating portion 133 of the nozzle 130 is rotatably limited to the limiting slot 115 of the nozzle holder 110 and the limiting port 121 of the nozzle cover 120, The rotation portion 113 of the rotary head 100 is rotated to adjust the direction in which the gas is blown out of the discharge port 131 of the rotary head 100, thereby improving convenience and simplifying the operation.

The present invention has been disclosed in the above preferred embodiments, and it should be understood by those skilled in the art that the present invention is only intended to depict the present invention and should not be construed as limiting the scope of the present invention. It should be noted that variations and permutations equivalent to those of the embodiments are intended to be included within the scope of the present invention. Therefore, the scope of protection of this creation is subject to the definition of the scope of patent application.

10‧‧‧Static eliminator

12‧‧‧Spray assembly hole

13‧‧‧discharge needle

14‧‧‧ gas pipeline

100‧‧‧Rotating nozzle

110‧‧‧ nozzle holder

111‧‧‧ gas passage

112‧‧‧ first end

113‧‧‧ second end

114‧‧‧Assembly Department

115‧‧‧ Limit slot

116‧‧‧ First Joint Department

120‧‧‧Nozzle cover

121‧‧‧Limited mouth

122‧‧‧Second junction

130‧‧‧Nozzles

131‧‧‧Spray outlet

132‧‧‧air inlet

133‧‧‧Rotating Department

L‧‧‧ center line

Claims (4)

A rotating nozzle for a static eliminator, wherein the static eliminator has a nozzle assembly hole and a gas line connecting the nozzle assembly hole, wherein the nozzle assembly hole is provided with a discharge needle, and the discharge needle is used for The gas input from the gas line is ionized, the rotating nozzle comprises: a nozzle holder having a gas passage and communicating with one of the first end and the second end of the gas passage, the first end having An assembly part of the nozzle assembly hole of the static eliminator has a limiting groove on the inner side of the second end and a first joint on the outer side of the second end; a nozzle cover having a limiting port and a a second joint portion, the second joint portion is coupled with the first joint portion of the nozzle seat, the limit port and the limit groove define an accommodation space communicating with the gas passage; and a nozzle Having a discharge port, an air inlet, and a rotating portion, the rotating portion is received in the receiving space defined by the limiting port and the limiting slot, and is rotatable relative to a center point, the discharge port is The air inlet and the gas passage Connectivity. The rotating nozzle according to claim 1, wherein the outer surface of the rotating portion has a spherical curvature, and the limiting port and the curvature of the surface of the limiting groove that is in contact with the rotating portion and the rotating portion The spherical curvature corresponds to the rotation of the spherical portion centered on the spherical arc corresponding to the spherical curvature. The rotary nozzle of claim 1, wherein the first joint and the second joint have threads corresponding to each other. The rotary nozzle of any one of claims 1 to 3, wherein the discharge port protrudes from the nozzle cover.