KR102485170B1 - Blowing device - Google Patents

Abstract

The present invention relates to a blowing device, specifically, by injecting and discharging air into the present invention to form a vortex, thereby removing fumes such as greenhouse gases, exhaust gases, and fine dust emitted during the semiconductor process to increase the semiconductor yield It relates to a blowing device that increases.

Description

Blowing device {Blowing device}

The present invention relates to a blowing device for removing, by using a vortex, fume generated during a semiconductor process as well as a process in which fine dust or contaminants are not allowed.

Among processes in various industrial fields, problems are often caused by fumes. As a representative example, it has been frequently reported that the defect rate greatly increases due to the generation of fumes during the semiconductor process, or that the health of personnel involved in the semiconductor process is adversely affected. A more detailed look at the problems caused by fume generation in the semiconductor process are as follows.

The semiconductor process goes through the steps of circuit design and mask manufacturing, wafer manufacturing, wafer processing, and chip assembly. Among them, the wafer processing process is a process for constructing a circuit on a wafer and goes through detailed processes such as diffusion, photo, etching, ion implantation, and polishing. Among these processes, SF6 (hexafluoride), CF4 (carbon tetrafluoride), NF3 (nitrogen trifluoride), HF (hydrogen fluoride), NOx (nitrogen oxide), ultrafine Various human pollutants such as dust are generated. Many substances generated in this process are carcinogenic substances that can cause infertility, respiratory disorders, and even leukemia. Fine dust settles on semiconductors that are painstakingly processed with expensive equipment and advanced technology, causing defects and causing great losses. also bring

Efforts to treat exhaust gases and fumes generated in these processes have been used by adopting a selective catalytic reduction method (SCR) or a wet scrubber method from the past, and recently, along with these efforts, clean rooms are being expanded. A clean room is an enclosed space that controls particles in the air, temperature, humidity, indoor air pressure, etc., and is an essential facility for purifying the air inside the semiconductor process room and increasing semiconductor yield.

However, selective catalytic reduction (SCR) and wet scrubbers have difficulties in removing all the exhaust gases generated at each stage of the semiconductor process, and clean rooms can remove exhaust gases from all stages during the semiconductor process. It is difficult to remove the generated exhaust gas.

In order to solve the above-mentioned problems, the present invention is installed at the source where the exhaust gas is discharged before the gas discharged from the semiconductor process is removed from the selective catalytic reduction (SCR) method, the wet scrubber method, and the clean room. It relates to a device capable of increasing semiconductor yield by controlling or removing the flow of gas to be

In addition, the present invention relates to a blowing device that may be used not only to discharge fume in a semiconductor process, but also to prevent or solve problems caused by fume during any process other than a semiconductor process.

A technical problem to be solved by the present invention is to remove gases discharged from various processes including a semiconductor process, and aims to effectively discharge fume by forming a vortex.

In addition, another technical problem to be solved by the present invention is to reduce the restrictions of the installation space by adopting a ring-shaped blowing device as another object.

A blowing device according to an embodiment of the present invention for achieving the above technical problem is a ring-shaped device, comprising: a housing; An inlet through which air is injected from the outside; a plurality of outlets for discharging the air injected from the inlet to the outside; an induction pipe through which the air injected from the inlet is moved, extending from the inlet to the respective outlets; A blowing device comprising a, in the outlets, the angle formed by the tangent line at the point where a virtual straight line extending in the direction in which air is discharged from each outlet and the inner circumferential surface of the housing meets - the point is called a contact point - is an acute angle can be characterized as

According to one embodiment, in order to prevent air discharged from the plurality of outlets from interfering with each other, at least one of the plurality of outlets may be disposed at different heights.

According to one embodiment, the induction pipe is a flexible material, and the length of the induction pipe extending from the injection pipe to the discharge port may have the same length.

According to the present invention as described above, there is an effect of purifying the inside of the process room by controlling or removing the gas discharged from any process with the vortex formed through the components of the present invention.

In addition, according to the present invention, the arrangement of the outlet has a certain pattern, and the direction of the gas discharged from the outlet is constant, so that a vortex can be easily formed.

In addition, according to the present invention, by adopting a flexible material as the material of the induction pipe, it is possible to make the same moving distance of air moving to each outlet through the induction pipe, and when the same amount of air is injected, the injected air It has the effect of simultaneously discharging under the same conditions.

In addition, according to the present invention, there is an effect of visually checking indoor air quality through a display device that measures the concentration of fine dust and outputs light of different colors according to the measured result value.

The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description below.

1 is a view showing the appearance of a blowing apparatus according to a first embodiment of the present invention.
2 is a view showing a perspective view of a blowing device according to a first embodiment of the present invention.
3 is a view explaining the flow of the air injected from the blowing device according to the first embodiment of the present invention and discharged.
4 is a side view of a blowing device according to a first embodiment of the present invention.
FIG. 5 is a view for explaining a method in which the arrangement of the inlet and the induction pipe of the blowing device is different according to the first embodiment of the present invention.
6 is a view showing different arrangements of inlets and outlets of a blowing device to form vortexes in multiple directions according to a second embodiment of the present invention.
7 shows a display device according to a third embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Advantages and features of the present invention, and methods for achieving them, will become clear with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and only the present embodiments make the disclosure of the present invention complete, and common knowledge in the art to which the present invention belongs. It is provided to fully inform the holder of the scope of the invention, and the present invention is only defined by the scope of the claims. Like reference numbers designate like elements throughout the specification.

Unless otherwise defined, all terms (including technical and scientific terms) used in this specification may be used in a meaning commonly understood by those of ordinary skill in the art to which the present invention belongs. In addition, terms defined in commonly used dictionaries are not interpreted ideally or excessively unless explicitly specifically defined. Terms used in this specification are for describing embodiments and are not intended to limit the present invention. In this specification, singular forms also include plural forms unless specifically stated otherwise in a phrase.

Terms such as "first" and "second" are used to distinguish one component from another, and the scope of rights should not be limited by these terms. For example, a first element may be termed a second element, and similarly, a second element may be termed a first element.

As used herein, "comprises" and/or "comprising" means that a stated component, step, operation, and/or element is one or more other components, steps, operations, and/or elements. Existence or additions are not excluded.

[First Embodiment]

1 is an external appearance of a blowing device 100 according to a first embodiment of the present invention. The external appearance of the blowing device 100 is a ring-shaped device. The ring shape is composed of an outer circle on the outer side and an inner circle on the inner side, and when air is injected from the outer circle of the ring-shaped blowing device 100, the air injected from the outer circle is discharged to the inner circle, resulting in a vortex to form a vortex.

The appearance of the present invention according to FIG. 1 is an example shown to make the present invention easier to understand, and the appearance may be different when additional components required for achieving the object of the present invention are further included.

Subsequently, with reference to FIG. 2, the reason for adopting the ring shape of the present invention will be described.

According to FIG. 1, the blowing device 100 transforms the flow of air injected into the present invention to remove fumes such as greenhouse gases and exhaust gases discharged from the semiconductor process, thereby intensifying the rotational motion. vortex) are formed. At this time, the blowing device 100 may be manufactured in a ring shape. When the ring shape is adopted as the blowing device 100 in this way, it is suitable to correspond to a disk-shaped wafer manufactured and processed in a semiconductor process, and the ring shape When air is injected from the outer circumferential surface and the air is discharged to the inner circumferential surface of the ring, the inner surface of the ring has a circular shape, so that the discharge direction can be set so that the discharged air can spirally rotate easily, or the circular ring This is because the inner surface is suitable for the long-lasting flow of air when the exhausted air rotates in a spiral.

However, in order to remove fume, which is the object to be solved by the present invention, the blowing device 100 of the present invention may have a desired shape and shape according to the above object, and is not limited to the shape shown in FIG. does not

In the above, the shape of the blowing device 100 according to the first embodiment has been studied.

Next, components of the blowing apparatus 100 according to the first embodiment will be described.

The blowing device 100 according to the first embodiment of the present invention may include a housing 10, an inlet 20, an outlet 30, and an induction pipe 40, and in achieving other objects of the present invention It may further include additional components as required.

According to FIG. 2 , the housing 10 serves as a body for accommodating components of the blowing device 100 . Here, the material of the housing 10 may include a material having elasticity in preparation for physical explosion due to air expansion and heat resistance in preparation for shape deformation by heat. In other words, in the semiconductor process, the process time may be long due to the large amount of semiconductor to be processed, or there may be a step in which the process time is long among the semiconductor process steps, and the blowing device 100 continuously plays a role during the extended semiconductor process time. It may be a material containing some degree of elasticity in order to prepare for physical explosion due to expansion by continuously injected air, and the heat generated by the machine or equipment while processing for a long time causes the blowing device 100 to It may be a material containing a high level of heat resistance to prepare for shape deformation.

In addition, the housing 10 accommodates a plurality of inlets 20 through which air is injected from the outside, and the housing 10 accommodates a plurality of outlets 30 through which the injected air is discharged to the outside. Then, inside the housing 10, as a pipe leading from the inlet to the outlet, an induction pipe 40 through which air is moved is accommodated, and at the top or bottom of the housing 10, a device that can be combined with equipment used in the semiconductor process There may be a predetermined groove.

Next, the inlet 20 according to the first embodiment will be described.

According to FIG. 2 , the inlet 20 is a hole through which air is injected into the blowing device 100 as the term implies. Normally, a hole allows air to flow in and out in various directions regardless of the user's will. can be designed to be injected. Specifically, in order to supply air to the blowing device 100, a device capable of continuously supplying air is required, and a space into which such air supply means can be inserted is required. Accordingly, an insertion groove (not shown) having a predetermined shape into which the air supply means can be inserted may be provided inside the inlet 20 of the present invention, and only when pressure is applied to the insertion groove, the inlet ( 20) is opened so that air can be injected.

Alternatively, the air supplied from the air supply unit may be controlled by providing a valve (not shown) between the inlet 20 and the air supply unit. Specifically, in this case, it is preferable that the inlet 20 allows air to flow in and out in various directions regardless of the user's will, like a conventional hole, and the valve can control such air. In other words, by installing a valve between the inlet 20 and the air supply means, the valve is opened when air is supplied, and the valve is closed at normal times to easily control the flow of air.

When using a valve, there is an advantage in that a larger amount of air can be controlled than when air is supplied through a gap made by applying pressure to the insertion groove described above. However, since it may not be necessary to control a large amount of air and only a small amount of air can be used as needed, in the air supply method of the present invention, it means that the method can be varied depending on the purpose and means. it's a bar

Next, the outlet 30 of the present invention according to the first embodiment will be described.

According to FIG. 2, the outlet 30 is a key component for forming a vortex according to the purpose of the present invention, and the shape and arrangement of the outlets 30 are important for forming a vortex. become an element

First, looking at the shape of the outlet 30, an induction pipe 40 may be coupled to one end of the outlet 30. On the other hand, the induction pipe 40 may be further provided with an air conditioning stopper 31 designed to constantly discharge air when a large amount of air is suddenly supplied. The air conditioning stopper 31 is optionally provided. It's just something that can be done, but it's not a necessary configuration. On the other hand, the other end of the induction pipe 40 is provided with a discharge hole through which air is discharged to the outside in contact with the housing 10.

In summary, air is injected from the inlet 20, and the injected air can be moved along the induction pipe 40 to the outlet 30, and at this time, one end of the outlet 30 and the induction pipe 40 are separated. The air conditioning stopper 31 may be optionally further provided. The air conditioning stopper 31 may serve to couple the induction pipe 40 and the outlet 30 and simultaneously control the amount of air discharged from the outlet 30 .

For reference, according to FIG. 2, the role of controlling the amount of air discharged from the air conditioning stopper 31 can also play a large role in forming an ideal vortex. Specifically, the ideal vortex ) In order to form, the same amount of air must be discharged from each outlet 30, and if a large amount of air is suddenly injected and cannot be controlled, the amount of air discharged from the plurality of outlets 30 It is difficult to form an ideal vortex because the amount of air discharged differently and indiscriminately discharged can interfere with each other's air flow. Therefore, by designing the air control stopper 31 at the top of the outlet 30, it is possible to solve this problem by constantly discharging the injected air.

Next, the arrangement structure of the outlet 30 for forming a vortex will be described.

As described above, it is important that a certain amount of air is discharged from each of the plurality of outlets 30 in order to form an ideal vortex. However, a vortex is not formed only when a certain amount of air is discharged, and a vortex is formed only when the air discharged in a certain amount rotates in a spiral around a certain reference axis.

According to FIG. 3, the reference axis in the present invention can be referred to as an axis passing through the center of the blowing device 100, and in order to spirally rotate, the discharge direction of the air discharged from the outlet 30 must have a certain pattern. In other words, in order to spirally rotate clockwise or counterclockwise along the reference axis passing through the center of the blowing device 100, the arrangement of the plurality of outlets 30 and the discharge direction have a constant pattern, so that the discharged air spirals make it rotate For example, a plurality of outlets 30, a point where an imaginary straight line (L1: see FIG. 3) extending in a direction in which air is discharged from each outlet and the inner circumferential surface of the housing 10 meet, that is, the virtual straight line and the When the angle formed by the tangent line (L2: see FIG. 3) passing through the contact point where the inner circumferential surface of the housing 10 comes into contact has an angle value of θ (see FIG. 3:), which is an acute angle, each of the plurality of outlets 30 has the same θ With a value, if the air is discharged in one direction by setting the center of the blowing device 100 in the clockwise or counterclockwise direction of the reference axis, the air is discharged in the same direction. can be formed. For reference, the θ may preferably have any value within the range of 15 degrees to 40 degrees.

However, even if the direction in which the air is discharged has a certain pattern and the arrangement angle of the outlet 30 is the same, it may not be possible to form an ideal vortex that performs a spiral rotation. The reason is that if the plurality of outlets 30 are arranged at the same height of the housing 10, they are arranged on the same line in the horizontal direction, and when the air is discharged from the outlet 30, the air flow interferes with each other, so the ideal vortex ( vortex) may be difficult to form. Therefore, referring to FIG. 4 , when the outlet 30 is disposed in the housing 10, it is preferable that at least one of the outlets 30 be disposed at different heights so that air flows do not interfere with each other. Preferably, assuming that any one outlet 30 exists as shown in FIG. 4, the outlet 30 formed in the next order on the inner circumferential surface is 1 mm to 5 mm lower than the previous one, and then The burn outlet 50 may be formed higher by the same height again. More preferably, it may be formed to have a height difference of 2 mm between the front and rear discharge ports.

In addition, the number of outlets 30 may affect the formation of an ideal vortex, and preferably, as shown in FIG. 2, the diameter of the inner circumference of the housing 10 in which the outlets 30 are accommodated. to 300 (mm), the number of outlets 30 is 8 in total, and the spacing of each of the 8 outlets 30 is equal to the center of the inner circle of the blowing device 100. (vortex) formation may be possible. For reference, it is to be understood that the blowing device 100 shown in FIG. 2 is only one embodiment, and the present invention is not limited by the number of outlets 30 shown in FIG. 2 .

Above, the arrangement structure and number of outlets for forming an ideal vortex were investigated.

Returning to FIG. 2 again, the induction pipe 40, which is a pipe through which air moves between the inlet 20 and the outlet 30, will be described.

The induction pipe 40 is a pipe that guides the air injected from the inlet 20 to reach the outlet 30 without losing its direction. The induction pipe 40 is connected from the inlet 20 to a plurality of Up to the outlet 30 are arranged on each side. What should be noted here is that the guide pipe is disposed at each of the plurality of outlets 40.

If the same amount of air is injected from the inlet 20, the time to reach the respective outlets 40 is the same only when the distance the injected air moves is the same, so that the late discharged air is an ideal vortex. ) can be prevented from obstructing the flow of air that forms. Accordingly, it is preferable that the distance that the air injected from the inlet 20 moves to the outlet 30, that is, the length of the induction pipe 40 should be all the same.

Therefore, the inside of the housing 10 must accommodate the guide pipe 40 having the same length, and the guide pipe 40 having the same length is accommodated from the inside of the ring-shaped housing 10, the guide pipe ( It is necessary to consider the material of 40) and the number and arrangement of inlets 20.

According to FIG. 2, two inlets 20 are disposed adjacent to each other, so that there is an outlet in which the outlet 30 is disposed close to the inlets 20, or an outlet disposed far from the inlet 20 However, it is difficult to arrange guide tubes 40 having the same length.

In order to solve this problem, the induction pipe 40 is made of a flexible material, and the flexible induction pipe is bent where the inlet 40 and the outlet 30 are disposed close to each other, so that the inlet 40 It is possible to set the air movement distance equal to that of the place where the outlet 30 is disposed far away.

In this way, if the induction pipe 40 is made of a flexible material, the distances that the injected air travels to the respective outlets 30 can be equal regardless of the number or arrangement of the inlets 20. . However, another problem may occur if the guide tube 40 is excessively dependent on a flexible material. For example, problems such as excessive bending applied to the guide tube 40, too close contact with each other, or entanglement of the guide tubes when the blowing device 100 is driven may occur. In order to compensate for this, a manifold (41: see Fig. 2) tube type can be adopted.

The manifold 41 pipe type is a pipe in which several branch pipes are diverged from one main stem pipe. That is, the induction pipe 40, which is one main stem, continues from the inlet 20, and then can be divided into several branches of the induction pipe 40 at one branch point. When the manifold (41) tube type is adopted, the induction pipe (40) is divided into several branches from the branching point used in the manifold (41) tube type, and the lengths of the divided tubes are equalized The distance that the air injected from the inlet 40 moves can be matched. In this way, by using the manifold (41) tube type, only the lengths of the various branched tubes divided from the branch point need to be the same, so it is possible to overcome the need to inevitably give a severe bend to match the air movement distance to some extent. there is.

On the other hand, as another method of accommodating the guide pipe 40 having the same length in the housing 10, a method of increasing the number of injection ports 20 or changing the arrangement of the injection ports 20 may be adopted. For example, referring to FIG. 5, when a total of eight outlets 30 are arranged, one inlet 20 is placed between two outlets 30 adjacent to each other to use a total of four inlets 20. . Specifically, as can be seen in FIG. 5, assuming that a total of 8 outlets are equally arranged in 8 equal parts based on the center of the inner circle of the blowing device 100, the two outlets 30 adjacent to each other are disposed Doedoe, the inlet 20 is disposed at a position that can be equally divided into 4 parts based on the center of the outer circle of the blowing device 100, using a total of four inlets 20, and each inlet 20 from the neighboring Since the induction pipe 40 of the same length can be connected to the two outlets 30, it is possible to connect and use the induction pipe 40 without giving a bend.

In this way, the injected air can be discharged from the outlet 30 at the same time by changing the arrangement and number of the inlets 20 to keep the distance that the air injected from the inlet 20 moves to the outlet 30 is constant. It is possible to implement the same structural conditions so that an ideal vortex is formed by the air discharged through this.

In the above, the first embodiment was examined.

Next, referring to FIG. 6, a second embodiment in which a vortex is formed in multiple directions, unlike the first embodiment, will be described.

[Second Embodiment]

Except for the number or arrangement of components of the blowing device 100 according to the second embodiment of the present invention, other components are almost the same as those of the blowing device 100 according to the first embodiment, so that the second embodiment The same description of the operating principle will be omitted, and only the differences will be described below.

According to the second embodiment of the present invention, the blowing device 100 may form a vortex in multiple directions. This means that a vortex can be formed in multiple directions or the direction of the vortex can be selectively selected.

Referring to FIG. 6 and comparing with FIG. 3, in order to form a vortex in a plurality of directions, the number of inlets 20 and outlets 30 is increased or the arrangement is changed to form a vortex in a plurality of directions. ) can be formed.

For example, in order to form a vortex in the first direction, as shown in FIG. 3, the eight first outlets 30 and the outer circle of the housing 10 are divided into eight equal parts around the inner circle of the housing 10 If two first inlets 20 adjacent to each other are disposed and air is injected, a vortex in the first direction is formed. Next, in order to form a vortex in the second direction, the second outlets 30 and the second inlets 20 are additionally placed while leaving the existing arrangement in which the vortex in the first direction is formed. You can do it.

Specifically, between the first outlets 30 arranged in 8 equal parts around the inner circle of the housing 10, second outlets 30 arranged in 16 equal parts around the center of the inner circle of the housing 10 are additionally disposed, In order to form a plurality of vortexes having different directions, it is preferable that the outlets 30 in the second direction have different discharge directions from the outlets 30 in the first direction. In the following description, like the first inlets 20, the second inlets 20 are adjacent to each other. However, in order to distinguish the first inlets 20 and the second inlets 20, it is preferable to leave a predetermined distance from each other.

In this way, when the second outlets 30 and the second inlets 20 are added, a vortex in the first direction is formed from the first outlets 30 and the first inlets 20, Since a vortex in the second direction can be formed from the second outlets 30 and the second inlet 20, the vortex in the direction desired by the user can be selectively formed.

Meanwhile, by adding the second outlets 30 and the second inlets 20, a vortex in the third direction may be formed. In other words, the vortex in the third direction is a vortex made by simultaneously forming a vortex in the first direction and a vortex in the second direction, and The vortex in the second direction is combined, and the vortex in the third direction can form a more powerful turbulent flow. However, if the discharge directions of the first outlets 30 and the discharge directions of the second outlets 30 are opposite to each other, that is, directions that can interfere with each other when air is discharged, a vortex in the third direction is formed. Since it is meaningless, an appropriate discharge direction in which a vortex in the first direction and a vortex in the second direction do not interfere with each other should be considered.

On the other hand, although only the embodiment in which the outlets are formed so that the first direction and the second direction cross each other is shown in the drawings, the outlets may be formed so that the first and second directions face the same direction. In this case, if a vortex is formed when air is discharged through the outlets in the first direction, the size or speed of the vortex may be further increased by further discharging air through the outlets in the second direction. .

Next, with reference to FIG. 7, a third embodiment including additional components to the first embodiment will be described.

[Example 3]

The blowing device 100 according to the third embodiment of the present invention has the components and operation principles of the blowing device 100 according to the first embodiment except for the display device 50, which is an additional component of the blowing device 100. The same description of the same will be omitted, and only the differences will be described below.

According to FIG. 7, the display device 50, which is an additional component of the blowing device 100, outputs light of different colors depending on the concentration of fine dust or serves as a light that can be used in a dark workplace.

Specifically, the display device 50 is preferably disposed on the entire top or the upper edge of the blowing device 100, or disposed on the entire side of the blowing device 100 or partially in the longitudinal direction of the side, but the display device 50 The arrangement of is not limited to the above arrangement, and any arrangement in which the user can easily check the result value obtained from the display device 50 is allowed without limitation.

Subsequently, the display device 50 includes a power supply unit (not shown), a measurement unit (not shown), a light emitting unit (not shown), and a control unit (not shown).

Referring to the order in which the components of the display device 50 are listed, the power supply unit is for supplying electricity to the device, and the power supply unit 101 may be a battery or a rechargeable battery due to the nature of the present invention, which requires portability. there is. That is, the user can purchase a battery for use of the blowing device 100 and insert it into the housing 10, or connect the housing 10 with a charging terminal already inserted to an external power source through a cable or the like By doing so, it is possible to charge the electric energy necessary for using the device. On the other hand, although not shown in detail in FIG. 7, a series of circuits enabling wireless charging may be included in the housing 10. In this case, the user simply places the housing 10 on the charger. The power supply unit may be implemented to charge the corresponding device.

Subsequently, the measurement unit is an electronic sensor that measures the concentration of fine dust in the air diffused in the room. The method for measuring the fine dust in the measurement unit is a sensor that measures the change in the weight of the filter paper by passing air through the filter paper of the measurement unit, It may be any one of the fine dust measuring sensors widely known in the technical field to which the present invention belongs, such as a sensor that transmits light to the air entering the measuring instrument and measures the number of scattering of the light.

), 보통일 때의 미세먼지 농도는 31~80 (㎍ /

), 나쁨일 때의 미세먼지 농도는 81~150 (㎍ /

), 매우 나쁨일 때의 미세먼지 농도는 151 이상((㎍ /

)이다.Air quality can be classified according to the concentration of fine dust measured by the measurement unit, and the air quality can be classified into good, normal, bad, and very bad according to the standards presented by the World Health Organization (WHO). The concentration of fine dust at the time is 0~30 (μg /

), the concentration of fine dust at normal times is 31-80 (μg /

), the concentration of fine dust when bad is 81 to 150 (μg /

), the concentration of fine dust when it is very bad is 151 or more ((μg /

)to be.

))) 일 때는 제 1색상, 대기질이 보통(= 미세먼지 농도(31~80((㎍ /

)))일 때는 제 2색상, 대기질이 나쁨(= 미세먼지 농도(81~150((㎍ /

)))일 때는 제 3색상, 대기질이 매우 나쁨(= 미세먼지 농도(150 이상(㎍ /

)))일 때는 제 4색상의 빛을 출력하여, 디스플레이 장치(50)를 통해 대기질을 시각적으로 구분할 수 있게 구현한 것이다.In this way, the change in air quality according to the concentration of fine dust can be expressed by dividing it into light output from the light emitting unit. Specifically, the light emitting unit is a light emitting device such as an LED, and refers to outputting light of at least one or more different colors according to the result value obtained from the measuring unit, for example, the air quality is good (= fine dust concentration (0 to 30 (μg)) /

))), the first color, the air quality is normal (= fine dust concentration (31 ~ 80 ((μg /

))), the second color, air quality is poor (= fine dust concentration (81 ~ 150 ((μg /

))), the third color, the air quality is very bad (= fine dust concentration (more than 150 (μg /

))), the light of the fourth color is output so that the air quality can be visually distinguished through the display device 50.

In addition, the display device 50 may play a role of illuminating a dark part in addition to a role of outputting light of different colors according to the concentration of fine dust. When performing the role of lighting, it is divided into a fifth color different from the first to fourth colors, so that the role of determining the air quality and the role of lighting to illuminate can be separated and used.

Next, the control unit of the display device 50 will be described.

The controller mainly serves to give a signal to operate the light emitting unit of the display device 50 based on information obtained from the measuring unit of the display device 50 .

The control unit first divides the fine dust concentration value measured by the measuring unit into at least two or more ranges, and controls the light emitting unit to display light having a specific color corresponding to the specific range when the fine dust concentration value in the specific range is detected. That is, by matching different colors of light for each of two or more ranges of fine dust concentration values, a signal is given to the light emitting unit to express the air quality suitable for the situation.

Accordingly. In the third embodiment, it can be visually confirmed whether the present invention has performed its role well from the first embodiment, that is, whether fume is removed by the vortex formed in the first embodiment, or simply the concentration of fine dust It can be seen that this is an embodiment that can be used as a device for determining indoor air quality by measuring a value.

All embodiments of the above blowing device have been looked at. On the other hand, the present invention is not limited to the specific embodiments and application examples described above, and various modifications and implementations by those skilled in the art to which the present invention pertains without departing from the gist of the present invention claimed in the claims. Of course, these modifications should not be understood separately from the technical spirit or perspective of the present invention.

10: housing
20: inlet
30: outlet
31: air conditioning stopper
40: water pipe
41: manifold
50: display device
100: blowing device

Claims (3)

As a ring-shaped device,
housing;
An inlet through which air is injected from the outside;
a plurality of outlets for discharging the air injected from the inlet to the outside;
an induction pipe through which the air injected from the inlet is moved, extending from the inlet to the respective outlets;
As a blowing device comprising a,
In the outlets, an angle θ formed by a tangent line at a point where an imaginary straight line extending a direction in which air is discharged from each outlet and an inner circumferential surface of the housing meet - the point is referred to as a contact point - forms an acute angle,
The induction pipe is a flexible material, characterized in that the length of the induction pipe extending from the inlet to the outlet has the same length,
blowing device.
According to claim 1,
Characterized in that, in order to prevent the air discharged from the plurality of outlets from interfering with each other, at least one outlet is disposed at a different height.
blowing device.
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