CN203238350U - Substrate heating furnace - Google Patents
Substrate heating furnace Download PDFInfo
- Publication number
- CN203238350U CN203238350U CN 201320140023 CN201320140023U CN203238350U CN 203238350 U CN203238350 U CN 203238350U CN 201320140023 CN201320140023 CN 201320140023 CN 201320140023 U CN201320140023 U CN 201320140023U CN 203238350 U CN203238350 U CN 203238350U
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- Prior art keywords
- heater
- substrate heating
- furnace
- heating furnace
- electrical heating
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- Expired - Fee Related
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Abstract
The utility model provides a substrate heating furnace. The substrate heating furnace comprises a cylindrical furnace body, wherein a heat insulation layer is arranged on the outer wall of the furnace body. The substrate heating furnace is characterized in that annular electrical heated wires coaxial with the furnace body and an electrode connected with the electrical heated wires are arranged inside the furnace body. According to the substrate heating furnace provided by the utility model, the layout of the electrical heated wires is optimized, and the multiple groups of the electrical heated wires are arranged into a ring in the furnace body. The substrate heating furnace provided by the utility model has the advantages that the heating is uniform, and the fine adjustment of the temperature in each region can also be realized by adjusting the different groups of electrical heated wires.
Description
Technical field
The utility model relates to a kind of vacuum film deposition substrate heating furnace.
Background technology
By gas phase, liquid phase, solid phase transformation, the process that forms specific dimension size crystal is called the crystal growth to material under the conditions such as certain temperature, pressure, concentration, medium, pH.Wherein, for the control of temperature, usually can use substrate heating furnace.The uniform process furnace of Heating temperature can effectively be controlled the speed of growth and the quality of crystal.At present, substrate heating furnace ubiquity heater strip layout commonly used is unreasonable, causes heating region even not, can not subregion control etc. defective.
The utility model content
For defects of the prior art, the utility model provides a kind of electrical heating wire rationally distributed substrate heating furnace.
The utility model provides a kind of substrate heating furnace, and it comprises columnar body of heater, and described furnace body outer wall is provided with thermofin, it is characterized in that: the annular electro heater strip coaxial with described body of heater is set in the described body of heater.
Preferably, described electrical heating wire is arranged on described furnace body inside twist.
Preferably, be provided with twist the described electrical heating wire of many groups in the described body of heater.
Preferably, be provided with the described electrical heating wire of many groups in the described body of heater, every group of described electrical heating wire all arranges ringwise along described inboard wall of furnace body, and S-shaped along described body of heater axis direction extension.
Preferably, described furnace body frame is located on the resistant to elevated temperatures base.
Substrate heating furnace of the present utility model has been optimized the layout of electrical heating wire, many group electrical heating wires are set, and annular is arranged in the body of heater.The utlity model has homogeneous heating, its also can be further by regulating not electrical heating wire on the same group, realize the advantages such as meticulous adjusting of each regional temperature.
Description of drawings
Below in conjunction with the drawings and specific embodiments the utility model is described in further detail.
Fig. 1 is the longitudinal sectional view of the utility model the first embodiment;
Fig. 2 is the vertical view of the utility model the first embodiment;
Fig. 3 is the vertical view of the utility model the second embodiment;
Fig. 4 is the sectional perspective structural representation of electrical heating wire among Fig. 3.
Embodiment
In order to make those skilled in the art person understand better the utility model scheme, and above-mentioned purpose of the present utility model, feature and advantage can be become apparent more, below in conjunction with embodiment and embodiment accompanying drawing the utility model is described in further detail.
As shown in Figure 1 to Figure 3, a kind of substrate heating furnace of the present utility model comprises the body of heater 12 that is set up on the resistant to elevated temperatures base 10, and this body of heater 12 is round shape, and body of heater 12 outer walls are provided with thermofin 14.The annular electro heater strip 16 that body of heater 12 interior settings and body of heater 12 are coaxial, the two ends of electrical heating wire 16 connect power supply (not shown) by electrode (not shown).Heat in electrically heated mode, can realize rapid heating and cooling.
Among the utility model the first embodiment, the axis setting of electrical heating wire 16 along body of heater 12 inboard volutions along body of heater 12, the i.e. structure of spring-like.The so spiral electrical heating wire 16 of many groups can also be set certainly as required, and coaxial being arranged in the body of heater 12 is so that the temperature distribution in the regulating stove and raising Heating temperature.
Among the utility model the second embodiment, body of heater 12 interior being provided with are equally organized electrical heating wires 16 more, so that the temperature distribution in the regulating stove and raising Heating temperature.Every group of electrical heating wire 16 all along body of heater 12 inwalls ringwise (semicircle or arc) arrange, and S-shapedly extend along body of heater 12 axis directions; Its structure can be as shown in Figure 4.Certainly, also can the coaxial such electrical heating wire 16 of many groups that arranges radially be set along body of heater 12 in the body of heater 12, in order to control subtly the temperature of different zones in the stove.Namely by controlling not the on the same group switch of electrical heating wire and voltage, control the electrical heating wire thermal value of different positions.
The above only is embodiment of the present utility model.Protection domain of the present utility model is not limited to this, anyly is familiar with those skilled in the art in the technical scope that the utility model discloses, and the variation that can expect easily or replacement all should be encompassed within the protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain that claim was defined.
Claims (4)
1. substrate heating furnace, it comprises columnar body of heater, described furnace body outer wall is provided with thermofin, it is characterized in that: the annular electro heater strip coaxial with described body of heater is set in the described body of heater, and the electrode of the described electrical heating wire of connection; Described electrical heating wire is arranged on described furnace body inside twist.
2. substrate heating furnace according to claim 1 is characterized in that: be provided with twist the described electrical heating wire of many groups in the described body of heater.
3. substrate heating furnace according to claim 1 is characterized in that: be provided with the described electrical heating wires of many groups in the described body of heater, every group of described electrical heating wire all arranges ringwise along described inboard wall of furnace body, and S-shapedly extends along described body of heater axis direction.
4. one of them described substrate heating furnace according to claim 1-3, it is characterized in that: described furnace body frame is located on the resistant to elevated temperatures base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320140023 CN203238350U (en) | 2013-03-26 | 2013-03-26 | Substrate heating furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320140023 CN203238350U (en) | 2013-03-26 | 2013-03-26 | Substrate heating furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203238350U true CN203238350U (en) | 2013-10-16 |
Family
ID=49315666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320140023 Expired - Fee Related CN203238350U (en) | 2013-03-26 | 2013-03-26 | Substrate heating furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203238350U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109338476A (en) * | 2018-11-26 | 2019-02-15 | 国宏中晶集团有限公司 | A kind of sapphire crystal annealing temperature control system and method |
-
2013
- 2013-03-26 CN CN 201320140023 patent/CN203238350U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109338476A (en) * | 2018-11-26 | 2019-02-15 | 国宏中晶集团有限公司 | A kind of sapphire crystal annealing temperature control system and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131016 Termination date: 20180326 |