CN203210829U - System used for printing on substrates - Google Patents
System used for printing on substrates Download PDFInfo
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- CN203210829U CN203210829U CN 201320185517 CN201320185517U CN203210829U CN 203210829 U CN203210829 U CN 203210829U CN 201320185517 CN201320185517 CN 201320185517 CN 201320185517 U CN201320185517 U CN 201320185517U CN 203210829 U CN203210829 U CN 203210829U
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Abstract
The utility model provides a system used for printing on substrates (250). The system comprises a substrate loading table (170), a plurality of printing tables (190, 220, 290 and 330), a plurality of heating tables and a substrate sorting table (390). The substrate loading table (170) is used for loading the substrates on substrate transporting conveyor belts. The printing tables are used for printing on the substrates which are loaded on the substrate transporting conveyor belts. The heating tables are used for heating the printed substrates. The substrate sorting table is used for sorting the processed substrates. The substrate transporting conveyor belts are arranged in a parallel processing mode so as to enable the substrates to be conveyed to at least one of the printing tables (190, 220, 290 and 330), the heating tables and the substrate sorting table (390). In addition, at least one printing table (190, 220, 290 and 330) comprises two printing devices (192) placed on a supporting structure (183).
Description
Technical field
The application's embodiment relates to for the system of printing at substrate, relates in particular to the serigraphy system.
Background technology
Solar cell is photovoltaic (PV) device that daylight directly is converted to electrical power.Solar cell has one or more p-n junctions usually.Each p-n junction comprises in the semi-conducting material two not same districts, wherein a side is expressed as the p-type district and opposite side is expressed as n type district.When the p-n junction with solar cell is exposed to the DT, daylight directly is converted to by the PV effect.Solar cell produces the electrical power of specific quantity and is formed and be placed in the solar energy module by solar energy module, and the size of described solar energy module is confirmed as in order to carry the system power of desired amt.Solar energy module is joined in the panel with concrete framework and connector.Solar cell forms at silicon substrate usually, and described silicon substrate can be monocrystalline silicon substrate or polycrystalline silicon substrate.Typical solar cell comprises silicon substrate or silicon sheet, and the thickness of described silicon substrate or silicon sheet is usually less than about 0.3mm and there is the thin layer of a n type silicon to be positioned at the top, p-type district that is formed on the substrate.
Substantially, the standard silicon solar cell is manufactured on the substrate, described substrate comprise p-type base region, n type emitter region and be placed in the p-type base region and n type emitter region between the p-n junction district.N type district or n type semiconductor form with the quantity (being the quantity of electronics) that increases negative charge carriers by element (for example, phosphorus (P), arsenic (As) or antimony (the Sb)) doped semiconductor with some type.Similarly, thus p-type district or p-type semiconductor form by a covalent bond disappearance electronics in four covalent bonds that triad added to lattice and cause just being usually used in silicon crystal lattice.Therefore, dopant atom can be accepted from the electronics that is close to the atom covalence key to finish quadruple linkage.Dopant atom is accepted electronics, makes from half loss of a key of contiguous atom and causes the formation in " hole ".
When light drops on the solar cell, produce electron hole pair from the energy of incident photon in the both sides in p-n junction district.Electronics crosses p-n junction and is diffused into lower energy level, and the hole spreads in the opposite direction, and this makes and generates negative electrical charge and corresponding positive charge is assembled in base stage at emitter stage.When forming circuit and p-n junction is exposed to light time of some wavelength between emitter stage and base stage, electric current flows.The electric current that is produced by this semiconductor when semiconductor is illuminated flows through the contact, and described contact is placed in front side (being the light-receiving side) and the dorsal part of solar cell.The top contact structure is set to the thin metal wire of wide spacing substantially or refers to that described thin metal wire or confession under directions induced current are given bigger bus.Backside contacts is not limited to substantially in a plurality of thin metal wires and forms, because backside contacts does not stop incident illumination on solar cell.Solar cell covers lamellate dielectric substance substantially, such as Si
3N
4, to serve as ARC (or being called ARC), to minimize the light reflection from the top surface of solar cell.
The solar cell of production viable commercial is by the modifying device yield and increases the substrate production amount to form the needed manufacturing cost of solar cell to reduce with a major part that makes the PV device.
Serigraphy is used in for a long time and is used in the electronics industry in the design of the surface of substrate printing electric device, such as electric contact or interconnection line.The current state-of-the-art technology of solar cell fabrication process is also used silk-screen printing technique.In some applications, need be on solar cell substrate serigraphy contact line, such as finger.Finger and substrate contacts and the ohm that can form with one or more doped regions (for example, n type emitter region) connect.Ohmic contact is a kind of district that is positioned on the semiconductor device, and this district has been prepared as and has made that current/voltage (I-V) curve of device is straight line and symmetry, just, does not have the high resistance interface between the silicon doping district of semiconductor device and hard contact.Low resistance, stable contact be Solar cell performance and in solar cell fabrication process the crux place of formed circuit reliability.
Can use various patterning techniques, for example by using the patterning diffusion impervious layer to carry out the phosphorus diffusing step, with the more heavily doped zone of generation and more lightly doped zone, thereby heavily doped region is formed on the substrate surface.Back side contact connects to produce electric current by the Ohmic contact that forms with the p-type base region of substrate with the desired circuit of solar cell.For strengthening and the contacting of solar battery apparatus, common with on the heavily doped region of specific bit in being formed at substrate surface so that can form Ohmic contact.Owing to the electrical property of formed heavily doped region causes formed heavily doped region to trend towards stopping or minimizes the quantity of light that can be by described heavily doped region, so need minimize the size of described heavily doped region, also make these districts enough greatly to guarantee and to aim at reliably and to be formed in these districts referring to simultaneously.
The formation of heavily doped region and the formation that refers to can comprise the deposition of multilayer material.
In this area, knownly make solar cell by means of above-mentioned screen printing technique in crystalline silicon substrates and realize multilayer pattern with front surface and/or rear surface at solar cell.Multilayer pattern for example forms by double exposure or by means of some continuous print steps.This measure can be on suitable support member or substrate, and the substrate that for example has silicon or alumina substrate is undertaken by serigraphy, laser printing, ink jet printing or other similar technology.The solar cell that uses multilayer pattern to make formation for example have selective emitter becomes possibility.Sandwich construction (for example forming by ground floor at least and the second layer that is positioned at the ground floor top) allows to increase the electric current that carry the contact, but may make that typography is more complicated.In this case, in fact, must a plurality of layers be aimed at each other exactly with certain precision, described precision is usually in the scope of 10 microns (μ m).If substrate on automatic conveying device motion and the motion of print head suitably do not controlled, will form the pattern that deposits improperly so.Therefore, if make a mistake during the typography step, the possible misalignment of a plurality of printed layers makes substrate be dropped.
In addition, known serigraphy system may be expensive and low amount of product throughput may be provided.
Therefore, have to need to improve to be used in the system that substrate prints, be particularly useful for the system of serigraphy, described system need overcome at least one shortcoming in the prior art shortcoming.
The utility model content
According to embodiment, provide a kind of for the system of printing at substrate.In one embodiment, be used for comprising in the system that substrate prints: the substrate loading stage is used for substrate is loaded into substrate transportation conveyer belt; A plurality of print stations are used for printing at the substrate that is loaded onto on the substrate transportation conveyer belt; A plurality of warm tables are used for the heating printed base plate; The substrate pigeonholes is used for the letter sorting dry substrate.Substrate is transported conveyer belt to be arranged to handle side by side arrange substrate is transported at least one in a plurality of print stations, a plurality of warm table and the substrate pigeonholes.One of them print station comprises two printing equipments that are shelved on the supporting construction.
Consult following description, accompanying drawing and the claims of enclosing, these and other features, aspect and the advantage of this case will become better understood.The embodiment of description of drawings the utility model theme and and describe together in order to explain the principle of this case, the part of this specification is incorporated and constituted to described accompanying drawing into.
Description of drawings
Therefore, can be by of the present utility modelly more specifically describing of obtaining above to summarize with reference to embodiment, thus but understood in detail above-mentioned feature of the present utility model.Annexed drawings relates to embodiment of the present disclosure and describes in figure below:
-Fig. 1 is for being used for the schematic top plan view at the embodiment of the system that substrate prints;
-Fig. 2 A is for being used for the schematic side elevation at the embodiment of the system that substrate prints;
-Fig. 2 B is for being used for the schematic top plan view at the embodiment of the system that substrate prints;
-Fig. 3 is the schematic top plan view of the embodiment of loading stage;
-Fig. 4 is the schematic top plan view of the embodiment of print station;
-Fig. 5 is the schematic side elevation of the embodiment of print station;
-Fig. 6 is the schematic isometric view of the embodiment of printing equipment;
-Fig. 7 is the schematic top plan view of the print system among Fig. 6;
-Fig. 8 is the isometric view of the embodiment of substrate support;
-Fig. 9 is the schematic isometric view of the embodiment of inspection assembly;
-Figure 10 is the schematic top plan view of the embodiment of drying table;
-Figure 11 is the schematic side elevation of the embodiment of drying table;
-Figure 12 is the sectional view of the embodiment of drying table;
-Figure 13 is the opposite side cutaway view according to the drying table of Figure 12;
-Figure 14 is the sectional view of the embodiment of drying table;
-Figure 15 is the schematic top plan view of the embodiment of relieving platform;
-Figure 16 is the schematic top plan view of firing the embodiment of table;
-Figure 17 is the schematic top plan view of the embodiment of relieving platform;
-Figure 18 is the schematic side elevation of the embodiment of relieving platform;
-Figure 19 is the schematic top plan view of the embodiment of quality examination platform;
-Figure 20 is the schematic top plan view of the embodiment of substrate electrical efficiency detection test platform;
-Figure 21 is the schematic top plan view of the embodiment of pigeonholes;
-Figure 22 is the schematic side elevation of the embodiment of pigeonholes;
-Figure 23 is the schematic side elevation that is in the automated sorting device of two different operating positions.
The specific embodiment
To the one or more examples among the described embodiment be described in the accompanying drawings in detail with reference to various embodiment of the present utility model now.In the following description of accompanying drawing, same reference numerals refers to components identical.Substantially, difference with respect to each embodiment is only described.Each example provides as explanation of the present utility model, and and is not intended to as restriction of the present utility model.For instance, as the part of an embodiment and illustrate or the feature described can be used for other embodiment, or use to produce another embodiment together with other embodiment.Intention makes the utility model comprise such modifications and variations.
It should be noted that at this employed substrate 250 can be at least one element that is selected from the set that is made of the following in embodiment described herein: conductive material, the conductive material that especially has silicon or alumina substrate; Plate; Wafer; Paper tinsel; Semiconductor crystal wafer; Solar cell wafer, especially silicon solar cell wafer; Greenbelt (green-tape) circuit board; Be used for forming the similar articles of photovoltaic cell or greenbelt type circuit especially.For instance, can provide solar cell wafer or greenbelt circuit board as substrate.Therefore, can use embodiment more described herein for example to produce photovoltaic cell or greenbelt type circuit.
Employed substrate 250 can have top surface and lower surface in embodiment described herein.Substantially, be not limited to any embodiment, at least one surface of substrate (top surface or lower surface), or the top surface of substrate and lower surface can be generally planar.It is aclinal, smooth and surperficial stably in essence that term in this context " flat surfaces " need be interpreted as.
Embodiment described herein is provided in substrate 250 printing, in particular for system or the production line 110 of serigraphy, for example, described system or production line can be suitable for the lip-deep desired pattern production hard contact according to the substrate 250 of solar cell.According to various aspects, can be for the multiple production line in substrate 250 printings, for example dual production line according to system 110 of the present disclosure.
Fig. 1, Fig. 2 A and Fig. 2 B are used for describing a plurality of embodiment of print system 110, multiple serigraphy chamber treatment system for example, and a plurality of embodiment of described print system 110 can use together with various embodiment of the present disclosure.In possible enforcement, be not limited to any embodiment, system 110 can comprise substantially:
-substrate loading stage 170 is used for substrate is loaded into substrate transportation conveyer belt,
-a plurality of print stations 190,220,290,330, especially serigraphy platform is used for printing at the substrate that is loaded onto on the substrate transportation conveyer belt,
-a plurality of warm tables are used for heating through the substrate of printing,
-substrate pigeonholes 390 is used for the treated substrate of letter sorting, for example drying and/or the substrate fired.
According to various aspects, system 110 can have substrate transportation conveyer belt, described substrate transportation conveyer belt is arranged to handle side by side arrange, described substrate transportation conveyer belt is particularly useful for along the 110(of system namely, along parallel operation direction or operative orientation F, F ') transportation substrate 250, especially pass through loading stage 170, a plurality of print station 190,220,290,330, a plurality of warm table and pigeonholes 390 at least.
In some possible enforcements, as consult as described in Fig. 1, Fig. 2 A and Fig. 2 B, print system 110 can comprise the print station 190,220,290,330 more than two, three, four or four.
In some possible enforcements, as consult as described in Fig. 1, Fig. 2 A and Fig. 2 B, print system 110 can comprise the warm table more than two, three, four or four.
According to various aspects, as for example consulting as described in Fig. 1, Fig. 2 A and Fig. 2 B, print system 110 can comprise that quantity equals the print station 190,220,290 of the quantity of warm table.
In possible enforcement, be not limited to any embodiment, for example, warm table can comprise: one or more drying boxes 210,270,310 are used for dry printed base plate; With an optional table 350 of firing, be used for firing substrate, for example make substrate stand etching.
In some give an example embodiment, as consult as described in Fig. 1, Fig. 2 A and Fig. 2 B, print system 110 can comprise loading stage 111, print station 190, drying table 210, another print station 220, another drying table 270, another print station 290, another optional drying table 310, optionally another print station 330, optional table 350 and the pigeonholes 390 fired.
In an embodiment, consult Fig. 2 A and Fig. 2 B is described, print system 110 can comprise loading stage 111, print station 190, drying table 210, another print station 220, another drying table 270, another print station 290, another optional drying table 310, optionally one or more optional quality control unit 500, optional board unloading device 400, optional table 350, optional substrate loading device 550, optionally quality examination platform 360, optionally substrate electrical efficiency detection test platform 380 and the pigeonholes 390 fired of another print station 330, the quality through being provided for checking substrate 250.
Can be in embodiment that whole embodiment described herein are combined, each print station in the print station 190,220,290,330 comprises two printing equipments 192, screen printing apparatus for example, described printing equipment are usually through being provided in substrate 250 printings, for example serigraphy.Printing equipment 192 can be settled along direction of operating F, F ' and two substrate conveyer belts reception substrates 250 through being provided for arranging from being arranged to handle side by side.In this way, can implement multiple production line by system 110, especially dual production line is used for printed base plate 250.Specifically, two printing equipments 192 can print at substrate through being provided for being set up in parallel.
In possible enforcement, system controller 101 can be provided, described system controller 101 is through being provided for common one or more operations with automated manner control system 110.According to possible enforcement, for example, system controller 101 can be set operate each print station 190,220,290, two printing equipments 192 of 330 with the method for synchronization.Should be understood that term " method of synchronization " is intended to expression, carries out identical operations simultaneously by each equipment in each print station 190,220,290,330 two printing equipments 192.In other are implemented, for example, can arrange system controller 101 with relative to each other from master mode, nonsynchronous mode just, operate each print station 190,220,290, two printing equipments 192 of 330, this means that for example, the operation that print station 190, a printing equipment 192 of 220,290,330 may be carried out is different from the operation that print station 190,220,290,330,220,290, another printing equipment 192 of 330 are carried out simultaneously.In addition, in some exemplary enforcements, can stipulate: when the positive executable operations of a print station 190, a printing equipment of 220,290,330 192, print station 190,220,290,330,220,290, another printing equipment 192 of 330 are not worked.
Fig. 3 is used for describing a plurality of embodiment of loading stage 170, and described a plurality of embodiment can be combined with whole embodiment described herein, and described loading stage 170 can comprise that two import conveyer belt 111 into.Two each that import in the conveyer belt 111 can be imported into conveyer belt is arranged to handle side by side arrange, so that described two import conveyer belt 111 into and can for example arrive serigraphy and operate from receiving substrate and transmission base plate such as the input unit of infeed conveyor belt 113 to one or more subsequent operations separately.
In possible enforcement, substrate container (not shown) can be provided, described substrate container is through being provided for holding substrate 250.Infeed conveyor belt 113 can be through being provided for towards importing conveyer belt 111 conveying substrate containers into.Therefore, importing conveyer belt 111 into can receive substrate 250 from the substrate container that is transported by infeed conveyor belt 113, for example by take out substrate 250 one by one from substrate container.
For example, can arrange that substrate container piles up with one-tenth or the substrate 250 that holds in heaps, in other words, substrate container is stacked containers.For example, be used to into and pile up the substrate container that holds substrate 250 and can be box, described box comprises a plurality of slit compartments, fin, shelf etc., described slit compartment, fin, shelf etc. are through being arranged as one above another, each is used for holding substrate, so that substrate is stacked as one each other above another.
In possible enforcement, each imports conveyer belt 111 into can have withdrawing device 176, described withdrawing device 176 can be through arranging to take out substrate 250 usually one by one from substrate container, just extracts out or pull out substrate 250, receives substrates 250 in order to import conveyer belt 111 into.Withdrawing device 176 can comprise one or more travelling belts 177 and linear motor (not shown).At this and in the following description, term " linear motor " is interpreted as substantially, and linear stator and rotor by storing arranged side by side produce straight-line electrical induction motors.Linear motor can be travelled to and fro between substrate container through being provided for mobile one or more travelling belts 177, as for example indicated by the arrow " G " among Fig. 3.Withdrawing device 176 can be through arranging one or more travelling belts 177 to be positioned at below the substrate container.
One or more actuation member (not shown) can be provided, and described actuation member can be through being provided for carrying out the rotation of one or more travelling belts 177.In operation, linear motor allows the motion of one or more travelling belts 177, in order to described one or more travelling belts are positioned at below the substrate container.For instance, in operation, in case one or more travelling belt 177 is located in the position below the substrate container, can use one or more travelling belts 177, for example rotation starts, with from substrate container transportation substrate 250 to importing conveyer belt 111 into.In some specific enforcements, be positioned at one or more travelling belts 177 positions in place that are in substrate container and make contact be contained in the substrate 250 of substrate container, for example lower surface of substrate 250.The contact of one or more travelling belts 177 can cause producing friction with substrate 250, so that one or more travelling belt 177 can clamp substrate 250 and transport substrates 250 towards importing conveyer belt 111 into.
Can be in embodiment that all other embodiment described herein are combined, loading stage 170 can comprise two container mobile devices 172.Each container mobile device 172 can be placed in infeed conveyor belt 113 and import between the conveyer belt 111.
Each container mobile device 172 can be through being provided for vertical moving substrate container, for example, and progressively, stepping ground, continuously or quasi-continuous ground moving substrate container.
In operation, the vertical movement allows the location with infeed conveyor belt 113 and/or imports the substrate container that conveyer belt 111 is aimed at into.Should understand, in a possible embodiment, substrate container to providing: substrate container be in make substrate container lower surface or wall and infeed conveyor belt 113 and/or import conveyer belt 111 horizontal aliguments into or just over infeed conveyor belt 113 and/or import the position of conveyer belt 111 into.
Such as argumentation, importing conveyer belt 111 into can for example take out substrate 250 through being provided for taking out substrate 250 from substrate container below substrate container.
For instance, container mobile device 172 can be in the position of importing conveyer belt 111 horizontal aliguments into or just over the position of importing conveyer belt 111 into through arranging to reduce substrate container.Therefore in operation, can imagine, import the withdrawing device 176 that conveyer belt 111 can for example pass through to mention into and takes out substrate 250 below substrate container, described substrate 250 is first substrate bottom the piling up of substrate 250.
Can be in possible embodiment that whole embodiment described herein are combined, each container mobile device 172 can comprise linear-motion actuator 173.
In possible enforcement, linear-motion actuator 173 can comprise motor, and described motor is to operate by the energy, for example, and electric current, hydraulic fluid pressure or Pneumatic pressure.Linear-motion actuator 173 can comprise a motor that is selected from the set that is made of the following: motor, pneumatic motor, hydraulic piston, piezo-activator.Usually, be combined with whole embodiment described herein and the linear-motion actuator that uses can be intrinsic linear motion actuator or can be through arranging so that circular motion is converted into rectilinear motion.Conversion can be carried out by various types of mechanisms usually, and described various types of mechanisms are selected from the set that is made of the following: screw jack actuator, similar screw jack actuator, ball screw actuator and roller bearing screw jack actuator; Or the wheel shaft actuator, for example, cylinder actuator, gear actuator, pulley actuator; Or shaft actuator, analogous cable winch actuator, capstan winch actuator, rack pinion assembly actuator, chain drive actuator, belt transmission actuator, rigid chain actuator and rigidity belt actuator.
Container mobile device 172 further can comprise support member 174, and described support member 174 is through being provided for the supporting substrate container.
In a possible embodiment, can stipulate: by infeed conveyor belt 113 (be substrate 250 be not integrated into container in) transportation substrate 250 individually.Therefore, in operation, may not provide substrate container and the support member 174 can be through remaining on infeed conveyor belt 113 and importing conveyer belt 111 levels (namely with infeed conveyor belt 113 and import conveyer belt 111 into aim at) into, and through being arranged to only to be used for the transportation purpose, just, be used for moving one or more substrates 250 to importing conveyer belt 111 into from infeed conveyor belt 113.For instance, support member 174 can have one or more travelling belts (not shown) and be used for transportation substrate 250, can for example start described travelling belt by one or more actuation member (not shown), just, travelling belt is rotated.
Can in embodiment that whole embodiment described herein are combined, importing conveyer belt 111 places at each, for example at withdrawing device 176 places of importing conveyer belt 111 into, provide at least one base-plate buffering container 179.For instance, buffer container 179 can be orientated as and import conveyer belt 111 into each and be in line, for example above each imports conveyer belt 111 into, below or in the side.In operation, can fill base-plate buffering container 179 from the substrate 250 of infeed conveyor belt 113.Base-plate buffering container 179 can be stacked as one above another with a plurality of substrates 250 through arranging to hold for example a plurality of substrates 250.
For example, base-plate buffering container 179 can be box, and described box comprises a plurality of slit compartments, fin, shelf etc., and described a plurality of slit compartments, fin, shelf etc. are through being arranged as one above another, and each is used for holding substrate.
For instance, base-plate buffering container 179 can hold ten, 15,20,25,30 or more substrate 250.
Base-plate buffering container 179 can be placed in therein in some enforcements of the side of importing conveyer belt 111 into, can provide one or more actuation member (not shown) to be used for being displaced sideways buffer container 179 with respect to importing conveyer belt 111 into, for example, with respect to import into conveyer belt 111 move buffer container 179 from position in the line to the off-line position.Should understand, " line in position " of buffer container 179 for wherein with import conveyer belt 111 into and intersect with from importing the position that conveyer belt 111 receives substrates 250 into, and " the off-line position " of base-plate buffering container 179 is for wherein with to import conveyer belt 111 into non-intersect, just, importing the outside of conveyer belt 111 into and do not disturbing the position of importing conveyer belt 111 into.
Can in the embodiment that other embodiment are combined described herein all, can provide two buffering lifting devices 180.For example, each can be cushioned lifting device 180 is placed on each side of importing conveyer belt 111 into.
Each buffering lifting device 180 can be through being provided for vertical moving substrate buffer container 179, for example progressively, stepping ground, continuously or quasi-continuous ground moving substrate buffer container 179.For example, can use the buffering lifting device 180 with respect to import into conveyer belt 111 vertical mobile buffer containers 179 from position in the line to the off-line position.
In operation, by vertical moving substrate buffer container 179, can with import conveyer belt 111 into, the position moving substrate buffer container 179 that intersects with withdrawing device 176 especially.For instance, can locate buffer container 179 make the top of top or surperficial buffer container 179 or surface with import conveyer belt 111 into and aim at, just, horizontal aligument is in order to can be positioned at substrate 250 in from the above mentioned the first slit compartment, fin, shelf etc.
Therefore, vertical mobile buffer container 179, the vertical mobile buffer container 179 that for example makes progress allows substrate 250 is received and is stacked in the buffer container 179, for example in slit compartment that several are mentioned, fin, shelf etc., for example up to filling buffer container 179.
Can be in possible embodiment that whole embodiment described herein are combined, each buffering lifting device 180 can comprise linear-motion actuator (not shown), and described linear-motion actuator can be through being provided for vertical mobile buffer container 179.
In particular, can adopt with respect to the different vertical position of importing conveyer belt 111 into by vertical mobile buffer container 179.During operation, for example, removable buffer container 179 with import conveyer belt 111 into and aim to receive substrates 250 from importing conveyer belt 111 into.In case 179 one-tenth of substrate 250 and buffer containers are side by side, the latter can move up.Buffer container 179 liftings (namely vertical mobile) in order to reach different follow-up upright positions, can be imported into conveyer belt 111(especially by withdrawing device 176 from these positions subsequently) can transport substrate 250 in buffer container 179.Can stipulate: in operation, buffer container 179 initial with import into conveyer belt 111, especially with withdrawing device 176 levels, just, with import into conveyer belt 111, particularly with withdrawing device 176 horizontal aliguments.In this way, withdrawing device 176 substrate 250 can be positioned at buffer container 179 from first slit compartment, fin or the shelf of last beginning, as above discuss.Then, but lifting buffer container 179, in order to can put second substrate, the 3rd substrate or further substrate.
Fig. 4 is used for describing the possible embodiment of print station 190 to Fig. 7, and described possible embodiment can be combined with whole embodiment described herein, and described print station 190 can be provided in serigraphy system 110.Although in Fig. 6 and Fig. 7, only illustrate a printing equipment 192, but should be understood that this paper consults that embodiment in this case that Fig. 6 and Fig. 7 describe can be applicable to two printing equipments 192 of print station 190 or two printing equipments 192 of other print stations that can provide in system 110.
Can stipulate: in an embodiment, the print station of system 110 is mutually the same, but according to various aspects, described print station can be used for and may print different printing materials at the different surfaces of substrate through arranging with operation, the difference of described printing material is, for example, the chemical composition of described printing material or person's character aspect or sclerosis character or thermoset nature aspect and/or quantitative aspects, just thickness or width aspect.
According to various aspects, print station 190 can comprise two printing equipments 192, for example, and as shown in Fig. 1, Fig. 2 A and Fig. 4.Same case can be applicable to, for example, and another print station that can in system 110, provide.
Two printing equipments 192 can be placed on the relative both sides of print station 190, so that among each printing equipment 192 and direction of operating F, the F' is intersected.Specifically, two printing equipments 192 with respect to the center line of print station 190 toward each other, and be parallel to direction of operating F, F' so that in operation, the operation of described two printing equipments 192 synchronously can be under the situation that does not suffer too much vibration and manageable.
In an embodiment, for example, each printing equipment 192 can have: actuator 130 or printing table, described actuator 130 or printing table for example can be set to rotary actuator or rotary workbench, can for example print one or more substrate support 131(nested) be couple to described rotary actuator or rotary workbench; With printing chamber 102, especially serigraphy chamber, for example a serigraphy head; With two draw conveyer belt 112.In other words, print station 190 can comprise two actuators 130 and two printing chambers 102, and described two actuators 130 and two printing chambers 102 import conveyer belt 111 into from two of loading stage 170 and receive substrates 250.
Specifically, each of loading stage 170 imported conveyer belt 111 into can transmit each untreated substrate 250 to substrate support 131(namely, the path in Fig. 6 and Fig. 7 " F1 "), described substrate support 131 is couple to actuator 130.Each substrate support 131 can be provided at printing table, printing chamber 102 etc. locates.For instance, printing table can be provided as the rotary actuator assembly.
In addition, except importing being set up in parallel of conveyer belt 111 into, each can be drawn conveyer belt 112 is arranged to handle side by side (for example arrange, see Fig. 1, Fig. 2 A and Fig. 4), so that drawing conveyer belt 112, each can receive treated substrate 250 from the substrate support 131 that is couple to actuator 130, and for example transmit each treated substrate 250 and remove device to substrate, such as through be arranged to handle side by side arrange withdraw from conveyer belt 114, described substrate removes device can transmit each treated substrate to another operating desk, for example, drying table (i.e. path in Fig. 6 and Fig. 7 " F2 ").
Handle side by side the treatment system increase production capacity that can allow with minimum is set.For instance, be not limited to any embodiment, side by side processing can be by for example being carried out by the operations of 101 pairs of two actuators 130 of system controller and two printing chambers 102 synchronously.In other examples, processing can be carried out by two actuators 130 of autonomous operation and two printing chambers 102 side by side.
Although use the embodiment of the print station of Fig. 1, Fig. 2 A and Fig. 4 explanation to have especially two printing chambers 102 of two printing equipment 192(), two actuators 130 and four substrate supports 131, but print station can comprise extra printing equipment 192, especially extra printing chamber 102 and/or actuator 130 and/or substrate support 131.
The infeed conveyor belt 113 at loading stage 170 places and withdrawing from conveyer belt 114 and can be roughly the automated substrate Handling device at print station 190 places.Although substantially can will withdraw from conveyer belt 114, import conveyer belt 111 into, draw conveyer belt 112 and infeed conveyor belt 113 is described as the belt-type conveyer belt, under the situation that does not depart from basic categories of the present utility model described herein, can use the similar board transport of the conveyer belt, robot device of other types or other mechanism.The reader will notice, Fig. 1, Fig. 2 A and Fig. 4 only are used for describing the possible treatment system embodiment that can have benefited from various embodiment described herein, and therefore can use the material deposition chambers of other conveyer belts settings and other types under the situation that does not break away from basic categories of the present utility model described herein.
Each printing equipment 192 can further comprise mask to print 102B, for example serigraphy mask (for example, seeing Fig. 6 and Fig. 7).Should note at this, employed one or more mask to print 102B can be at least one element that is selected from the set that comprises the following in embodiment described herein: net, silk screen, thin slice, sheet metal, plastic sheet, template, plate, metallic plate, plastic plate, and described element can for example have a plurality of distinctive feature 102C; Or such as the element in the one or more elements that are selected from the set that comprises the following: hole, slit, straight-through otch or other apertures that form by straight-through otch, with pattern and the placement at substrate surface definition serigraphy material (being printing ink or slurry), and can for example be used for the serigraphy of photovoltaic cell or greenbelt type circuit.For instance, each printing equipment 192 can have printing equipment, and similar doctor, automation doctor (not shown) for example, described printing equipment can be used to order about the serigraphy material comes to form at substrate surface patterning by feature serigraphy material.
In the embodiment that some are given an example, substrate support 131 and printing chamber 102 can move relative to each other that substrate 250 is aimed at waiting the lip-deep screen printed pattern that is deposited on substrate 250.
For instance, can use actuator 102A and system controller 101 information from checking that assembly 200 receives, by mask to print 102B being positioned the desired locations above substrate surface, aim at (for example, seeing Fig. 6, Fig. 7 and Fig. 9) with substrate 250 with the screen printed pattern that the automation mode will be to be deposited.Check that assembly 200 can comprise one or more optical detection devices or video check device.In certain embodiments, provide the example of video camera as optical detection device or video check device.
In the enforcement that some are given an example, printing chamber 102 can be suitable at solar cell substrate deposition containing metal or contain dielectric material.For example, printing chamber 102 can be suitable at the metallic slurry of substrate surface deposition to form the hard contact structure at substrate surface.
According to the embodiment that can be combined with other embodiment described herein, rotatable actuation device assembly 130 and can be for example come positional actuator assembly 130 angularly by rotary actuator (not shown) around " M " axle (Fig. 6).In some possible enforcements, for example, system controller 101 can be further used for rotating and angled ground positional actuator assembly 130.
According to some embodiment that can be combined with other embodiment described herein, substrate support 131 selectively can be positioned in the print station 190 (being path " D1 " and " D2 " among Fig. 7) angledly.Actuator 130 also can have one or more support components to promote substrate support 131 or be used for carrying out the control of other automation equipments of processing substrate sequence in serigraphy system 110.
Fig. 4, Fig. 6 and Fig. 7 are used for describing a plurality of embodiment, described a plurality of embodiment can be combined with other embodiment described herein, among described a plurality of embodiment, actuator 130 can comprise a plurality of substrate supports 131, and each substrate support 131 is suitable for supporting substrate 250 during being executed in the silk-screen printing technique that prints in the chamber 102.For instance, actuator 130 can comprise four substrate supports 131.
Fig. 7 illustrates that schematically some of position of an actuator 130 in two actuators 130 of print station 190 may implement, whereby, identical description also will be applicable to another actuator 130 in two actuators 130 of print station 190, and wherein: (i) substrate support 131 is in a set to receive substrates 250 from conveyer belt 111; (ii) another substrate support 131 is in the position " 2 " in the printing chamber 102, so that another substrate 250 can receive screen printed pattern at this substrate surface; (iii) another substrate support 131 is in position " 3 ", is used for the treated substrate 250 of transmission to drawing conveyer belt 112; (iv) be in position " 4 " with another substrate support 131, described position " 4 " are the interstages between position set and position " 3 ".Consult the embodiment that uses Fig. 7 to describe, one or more printing chambers 102 that description has print station 190 can be suitable on the surface of substrate 250 with the desired pattern deposition materials, described substrate 250 is being positioned at during the silk-screen printing technique on the substrate support 131, is in position " 2 ".
Can in possible embodiment that whole embodiment described herein are combined, can provide two substrate turnover devices 182 in print station 190 inside.Can settle each substrate turnover device 182 importing conveyer belt 111 upstreams into, so that turning device 182 can be for example by withdrawing from one or more substrates 250 that conveyer belt 114 receives from previous operating desk.Each turning device 182 can overturn through arranging, and just, rotates 180 ° or be inverted and rotate, the substrate 250 that receives.Each turning device 182 can be towards importing conveyer belt 111 transport points one or more substrates 250 that receive and that may overturn into, the described conveyer belt 111 that imports into subsequently can be towards the one or more substrates 250 of two printing equipments, 192 transportations, for example, so that one or more substrates 250 are positioned on the substrate support 131.Therefore, in operation, can for example rotate startup turning device 182 before substrate 250 is transferred to printing equipment 192, to be inverted substrate overturn 250.Manage top or the lower surface of (i.e. printing) substrate if desired everywhere at printing equipment 192, substrate overturn 250 can be useful so.Can use the example of the embodiment of turning device for example describing to some extent among the WO-A-2010/094346 together with embodiment described herein.
Can be in possible embodiment that whole embodiment described herein are combined, print station 190 can have a supporting construction 183, and described supporting construction 183 is through arranging to support two printing equipments 192.In other words, can with the embodiment of the print station 190 that whole embodiment described herein are combined regulation: be supported on two printing equipments 192 on the supporting construction 183 or two printing equipments 192 are shelved on the supporting construction 183.Should be understood that in embodiment described herein each print station 190,220,290,330 has 183, two printing equipments 192 of a supporting construction and is shelved on the described supporting construction 183 or with two printing equipments 192 and is supported on the described supporting construction 183.
By a supporting construction 183 is provided for print station 190, wherein two printing equipments 192 are supported on the described supporting construction 183 or two printing equipments 192 are shelved on the described supporting construction 183, can reduce the volume of print station 190, especially side direction volume and weight.Therefore, for example, can significantly reduce the cost of transportation of print station 190.And, in print station 190, provide a supporting construction 183 can help assembling and the location of two printing equipments 192 between the installation period of described two printing equipments 192, thereby save cost.Specifically, provide a supporting construction 183 can accelerate alignment function because two printing equipments 192 to will definitely be easily with reference to the common support structure 183 of described two printing equipments 192.
In addition, by a supporting construction 183 of shelving two printing equipments 192 is provided, can reduce the vibration of print station 190 effectively during operation, especially be reduced in the possible resonance effects between two printing equipments 192.
Foregoing is equally applicable among each embodiment, wherein each print station 190,220,290,330 has 183, two printing equipments 192 of a supporting construction and is supported on the described supporting construction 183 or two printing equipments 192 are shelved on the described supporting construction 183.
In possible enforcement, be not limited to any embodiment, supporting construction 183 can for example be vertical bars, bar or pillar by supporting pole 184(), lateral support member 185 or cross bar (can for example be made by metal and can be fixed to pole 184) and one or more gripper shoe 186(may be rigidly connected to each other and be rigidly connected to support pole 184 and/or lateral support member 185) form.In possible enforcement, for example, one or more gripper shoes 186 can be made by metal, in further implementing, made by building stones, building stone for example, such as granite (namely usually mainly by quartzy, mica and feldspar is formed and hard, granular, the crystallization through being commonly used for building stone, the rock of pyrogene).
For example, can be provided at by following steps and support being rigidly connected between pole 184, lateral support member 185 and the gripper shoe 186: be in place with pin, threaded or wedge or bolt or nut and bolting, fastening; Use any other mechanical organ to fix, fix or fix with screw rod with rivet; Or install with mechanical interference; Or welding.
By at least one or a plurality of gripper shoe 186 that is made by building stones is provided, can overcome the possible shortcoming that is derived from metal construction, such as usually because the unstability that thermal deformation and elongation cause, described thermal deformation and extend can cause during handling, for example loss of significance during printing.Building stones or building stone (such as granite) can have the stabilizer pole molecular structure and compare low thermal coefficient of expansion with metal, and for example, granite can have about 6 μ m/ ℃ to 7 μ m/ ℃ thermal coefficient of expansion.In addition, building stones or building stone (such as granite) can have the proportion that is lower than metal usually, for example less than 1/3rd of metal proportion.In an embodiment, except one or more gripper shoes 186, support pole 184 and/or lateral support member 185 and also can be made by building stones or building stone (such as granite).In possible enforcement, make and support connected to one another pole 184, lateral support member 185 and gripper shoe 186 define the supporting construction of box-shaped by providing by building stones, thereby the overall weight that can reduce the overall weight of supporting construction 183 and supporting construction 183 can be similar to the weight of the similar structures that is made by metal, even the thickness of the element that is made by building stones may also be like this greater than the thickness of the element that is made by metal.For example, the thickness of the element that is made by building stones can be between 3cm and 5cm, and the described element that is made by building stones is such as supporting pole 184 and/or lateral support member 185 and/or gripper shoe 186.
Make at least one or a plurality of gripper shoe 186 also can be used for reducing the vibration that print station may suffer during operation by the building stone such as granite, described vibration is derived from two actuators 130 of print station 190 and the motions of two printing chambers 102 usually.
In a possible embodiment, can importing conveyer belt 111 into, draw conveyer belt 112 and withdrawing from conveyer belt 114 and be supported on the supporting construction 183 print station 190.
In possible enforcement, two turning devices 182 of print station 190 also can be shelved on the supporting construction 183.
In some possible enforcements, the printing chamber 102 of each printing equipment 192 can comprise a plurality of actuators, for example the actuator 102A(that is communicated with system controller 101 for example, stepping motor or servomotor).Actuator 102A can be used to adjust the mask to print 102B that is placed in the printing chamber 102 with respect to position and/or the angular orientation of substrate to be printed 250.
According to some embodiment that can be combined with embodiment described herein, print station 190 can have one or more inspection assemblies 200, described inspection assembly 200 can be provided at consults Fig. 1, the entrance of each printing equipment 192 that Fig. 2 A and Fig. 4 describe position set place of the substrate support 131 of actuator 130 (for example) and/or outlet (for example locating in the position " 3 " of the substrate support 131 of actuator 130), for example, see Fig. 6, and described inspection assembly 200 can be suitable for checking the substrate 250 that is placed on the substrate support 131, desired pattern can be printed on the described substrate 250 by serigraphy.In possible enforcement, the inspection assembly 200 of set in place can for example use the low resolution video camera to detect through being provided for detecting the probable edge crack of treated substrate.Can be through being provided for quality and/or the Position Control (be the precision of printed patterns) of printing material on substrate 250 at the inspection assembly 200 of position " 3 ", be generally used for for example using the closed-loop control of the printing operation of high resolution camera (such as being equipped with the video camera of 16M to 20M pixel ccd sensor).
In possible enforcement, each printing equipment 192 can comprise that installing rack 194(is overhead framework etc.), be used for supporting inspection assembly 200.For example, installing rack 194 can be provided at each actuator 130 upstream (for example, seeing Fig. 4), and in a possible embodiment, installing rack 194 can be installed in and import on the conveyer belt 111.For instance, can will check that assembly 200 cantilevereds are installed in installing rack 194, described installing rack 194 is provided at and imports on the conveyer belt 111 and contiguous actuator assembly 130.Therefore, can will check that assembly 200 hangs in fact and check that assembly 200 is projected in substrate support 131 tops that are couple to actuator 130.
In some implementations, the installing rack 194 that is used for the inspection assembly 200 of supporting printing platform 190 can be placed in each conveyer belt 111, just locating the upstream (namely substrate support 131 can receive the position of substrates 250 from conveyer belt 111 therein) of the position set of substrate support 131, aiming in fact above the position set of substrate support 131 in order to each can be checked assembly 200.Can in embodiment that embodiment described herein is combined, the installing rack 194 that is used for the inspection assembly 200 of supporting printing platform 190 being placed at each and withdrawing from conveyer belt 114, just locating the upstream of the position " 3 " of substrate support 131.
Consult the embodiment of the case description substrate support 131 of Fig. 8, described embodiment can be combined with other embodiment described herein.In the example of Fig. 8, substrate support 131 can comprise conveyer belt assembly 139 substantially.For instance, conveyer belt assembly 139 can comprise at least one element or a plurality of element that is selected from the set that comprises the following: feeding spool 135, take spool 136, roller bearing 140 and one or more actuator 148.One or more actuators 148 can be couple to feeding spool 135 and/or take spool 136.One or more actuators 148 can be suitable for feeding and maintain the backing material 137 that is positioned on the gripper shoe 138.In some possible enforcements, gripper shoe 138 can have substrate substantially, substrate 250 and backing material 137 can be positioned on the described substrate during the silk-screen printing technique in being executed in printing chamber 102.
Can be in embodiment described herein that further embodiment described herein is combined, backing material 137 can be set in order to allow substrate 250 be remained on the plate 138 by negative pressure (for example vacuum), wherein described substrate 250 is placed in a side of backing material 137, described negative pressure is applied to the opposite side of backing material 137 by traditional device for vacuum generation (for example, vavuum pump, vacuum ejector).
In the embodiment with respect to the explanation of Fig. 8 example, for example, vacuum or negative pressure can be applied to the vacuum ports (not shown) that forms in the substrate of plate 138, so that can be with substrate " chucking " on the substrate of plate 138.
Can be in embodiment described herein that other embodiment described herein are combined, for allowing to keep substrate 250 by negative pressure, backing material 137 can be porous material, for example to air permeable, described porous material for example can be made up of porous paper or another similar material, and described another similar material for example is plastics or the textile material of carrying out identical, similar or equivalent function.
In the embodiment with respect to the explanation of Fig. 8 example, for example, actuator 148 can be coupled to feeding spool 135 and take one or more in the spool 136, or actuator 148 can be suitable for and feeding spool 135 and take one or more engagements in the spool 136, in order to the motion that is positioned at the substrate 250 on the backing material 137 accurately can be controlled in substrate support 131.Implement for example feeding spool 135 and take two opposite ends that spool 136 can be suitable for receiving one section backing material 137 separately according to some.In some give an example embodiment, each actuator 148 can hold one or more drives 147, described one or more drive 147 is couple to the surface of backing material 137 or contacts with the surface of backing material 137, and described backing material 137 is positioned at feeding spool 135 and/or takes on the spool 136.Drive 147 can be used to control motion and the position of backing material 137 on gripper shoe 138.
Consult Fig. 9, the embodiment that checks assembly 200 is described, described embodiment can use together with embodiment described herein, and checks that the embodiment of assembly 200 can be suitable for identifying and/or checking substrate 250, for example identification and/or inspection before printing and/or after printing.Although in the embodiment that uses Fig. 9 to describe, to check that assembly 200 is illustrated as is placed in substrate support 131 tops (substrate 250 is positioned on the described substrate support 131), but this case is not got rid of: one or more other operating desks that the embodiment of inspection assembly 200 described herein can be used for system 110.For instance, can will check that assembly 200 is placed in one or more substrate transportation conveyer belts top of one or more other operating desks of system 110.
This paper for example can comprise one or more video camera 121(in conjunction with the employed inspection assembly 200 of embodiment described herein, has such as video camera, the ccd video camera of the electronic image sensor of CCD image sensor or has video camera such as the electronic image sensor of cmos image sensor).Might provide following examples: check that in described embodiment assembly 200 comprises two, three, four, five or even more video camera 121.In possible enforcement, four video cameras 121 can be provided, described four video cameras 121 are placed on foursquare four angles, and in further possible enforcement, also the 5th video camera 121 can be placed in foursquare center.In addition, for example, check that assembly 200 also can comprise to check and check result is sent to the electronic component of system controller 101 that described system controller 101 is used for orientation and the position of analytic substrate 250 on substrate support 131.
The observation district 122 of one or more video camera 121 in some implementations, for example, one or more video cameras 121 can be positioned at the surface of substrate 250, so that can check at least one part or the district on surface 251.In an embodiment, aforesaid installing rack 194 can be used to one or more video cameras 121 are supported on substrate 250 tops, for example, and in position set place of the substrate support 131 of actuator 130.The information that one or more video cameras 121 receive can be used to carry out at least one following operation or how following operation: the image or the picture that obtain substrate 250; Detect base board defect, for example edge crack; Acquisition is deposited on image or the picture of the layer on the substrate 250; For example aim at mask to print 102B and therefore aim at the material of deposition subsequently by implementing closed-loop control.
According to some examples of video camera 121, video camera 121 can be InGaAs type video camera, and described InGaAs type video camera for example has the ccd array of cooling to strengthen the signal to noise ratio of detection signal.In possible enforcement, check that assembly 200 can separate with surround lighting in the surface 251 of substrate 250 and the zone between the video camera 121 by sealing or shielding.
Can check that assembly 200 also can comprise one or more filters (not shown) in some possible embodiment that embodiment described herein is combined, described one or more filters are placed between the surface of video camera 121 and substrate 250.For instance, one or more filters may be selected to be and allow only some expectation wavelength to be passed to video camera 121, reduce the quantity of not expecting energy that video camera 121 receives, thereby improve the signal to noise ratio of detected radiation.For example, the example of one or more filters can be the one or more wave filters that are selected from the set that comprises the following: bandpass filter, narrow band filter, optical edge wave filter, notch filter or wide-band filter, described wave filter is available from for example Barr Associates company or available from Andover company.
The possible embodiment of system controller 101 can be used to promote control and the automation of whole serigraphy system 110, and can comprise at least one element that is selected from the set that comprises the following: CPU (CPU) (not shown), memory (not shown) and support circuit (or I/O) (not shown).For instance, CPU can be a kind of in any type of computer processor, can the industry setting use described computer processor (for example to control various chamber processes and hardware, conveyer belt, optical check assembly, motor, fluid delivery hardware etc.) and surveillance and chamber processes (for example, substrate position, process time, detector signal etc.).Memory can be connected to CPU, and memory can be one or more handy memories, such as random-access memory (ram), read-only storage (ROM), floppy disk, hard disk, mass storage or be positioned at this locality or the digital storage of any other form of far-end.For example, can and be stored in software instruction and data coding and be used to indicate CPU in the memory.Also can be used for supporting in a conventional manner processor with supporting circuit to be connected to CPU.For example, support circuit can comprise following at least one: cache memory, power supply, clock circuit, input/output circuitry system, subsystem etc.The program (or computer instruction) that can read by system controller 101 can determine which task is to carry out at substrate.In certain embodiments, program is the software that system controller 101 can read.Controller 101 comprises that code is to produce and to store the corresponding combination with any other of sequence of motion, substrate optical checking system information of substrate position information, various controlled members at least.
Figure 10 is used for describing the possible embodiment of drying table 210 or drying box to Figure 14, and described may can the combination with whole embodiment described herein by embodiment can provide described drying table 210 or drying box in system 110.Usually, drying table 210 can be used for eliminating volatile solvent, and described volatile solvent may be present in the material on being printed on treated substrate.
In possible enforcement, serigraphy system 110 comprises at least one drying table substantially, two drying tables optionally, even three drying tables optionally.Can provide drying table in the centre between two print stations, and in some instances, also can provide drying table in (latter) print station downstream, position, end along system 110.In any case bound by theory and being not limited under the situation of any embodiment not, serigraphy system 110 can comprise many drying tables substantially, and the quantity of described drying table equals the quantity of print station or lacks one than print station quantity.Usually, can provide drying table in the positive downstream of print station basically.As will be hereinafter explaining in detail, can in embodiment that whole embodiment described herein are combined, can provide drying table in each print station downstream, but except position, the end print station of system 110, print station back, position, described end can be with baking furnace is arranged.
In certain aspects, drying table can be identical, but described drying table can be through arranging to operate under the different operating conditions, described different operating condition can for example comprise different temperature (for example for different temperature curves or development along drying table, being also referred to as " temperature ramp ") and/or heat time heating time and/or rate of drying.The representative temperature scope that is used for the operation drying table can be between 250 ℃ to 300 ℃.For example, the selection of different operating condition can be depending on the type of material that is printed on the substrate in the print station of the positive upstream of specific drying table, for example chemical composition or sclerosis character or thermoset nature, and/or quantity, i.e. thickness or width.
Drying table 210 can comprise two drier conveyers 211, and each drier conveyer 211 is through locating for example receive substrates 250 from withdrawing from conveyer belt 114 in printing equipment 192 after substrate 250 is handled.Each drier conveyer 211 can be arranged to handle side by side arrange, so that each drier conveyer 211 can be for example received treated substrate 250 from the conveyer belt 114 that withdraws from of print station 190.In possible enforcement, drying table 210 can comprise: one or more fluid conveying devices 229 are used for process fluid is transported in the drying table 210; With possible fluid suction device 228, be used for to discard fluid and extract out from drying table 210.
Figure 12 and Figure 13 are used for the embodiment of big volume description drying table 210, and the embodiment of described drying table 210 can be combined with whole embodiment described herein and provide.In general, drying table 210 can comprise treatment region 202, energy can be transported to the one or more substrates that are positioned at the treatment region 202 from hot system 201 in treatment region 202, in order to can dry be deposited on the lip-deep material of one or more substrates.For instance, be not limited to any embodiment, deposition materials can be and contains aluminium (Al) slurry, such as unleaded aluminum metal ceramic size (for example, Al Cermet6214), described aluminium (Al) slurry that contains is usually used in the manufacture of solar cells technology to form back side contact at the crystalline solar cells substrate.In possible example, deposition materials can be for the silver of the front side of solar cell (Ag) slurry (for example, the PV156 that is made by DuPontTM) or is used for silver-colored aluminium (Ag/Al) slurry (from the PV202 of DuPontTM) of the dorsal part of solar cell.
For example, describe with respect to Figure 12 some aspect in, can use two drier conveyers 211 along the path " D " with substrate 250 side by side transmission by treatment region 202.
Each drier conveyer 211 can be roughly the automated substrate Handling device, and described automated substrate Handling device is used for transmitting and/or locatees one or more substrates by treatment region 202.In with respect to the embodiment that for example Figure 12 describes, each drier conveyer 211 can comprise single belt 205, supporting substrate 250 during described single belt 205 is suitable for being handling in the treatment region 202.Usually, belt 205 can be the belt that is suitable for standing the treatment temperature that reaches in treatment region 202.In possible enforcement, belt 205 can be selected from the set that comprises the following: metal belt, glass fiber impregnated belt, the belt of ceramic material dipping or the belt of metal impregnation.
Figure 12 and Figure 13 are used for describing a plurality of embodiment of hot system 201, and described a plurality of embodiment all can be combined with embodiment described herein, and described hot system 201 can be included in the drying table 210.Hot system 201 can comprise radiation heating assembly 204 and possible Convective Heating assembly 203 substantially, and described radiation heating assembly 204 and possible Convective Heating assembly 203 can one be used from rapid draing and be deposited on material on the substrate surface.In possible enforcement, can separately control advection heat transmission mode and the radiant heat transmission mode heating curve (for example, temperature reduced time curve) during drying process, to realize expecting, thereby improve output and reduce energy consumption.For instance, be not limited to any embodiment, can will be elevated at the substrate temperature during the drying process between about 150 ℃ and about 300 ℃.In general, ideal situation is that the adhesive that is no more than in the deposition materials temperature (for example, 300 ℃ to 350 ℃) of decomposition takes place to prevent from damaging the pattern that forms at substrate.
In embodiment described herein, radiation heating assembly 204 can comprise one or more electromagnetic energy conveying devices substantially, and described one or more electromagnetic energy conveying devices are used for providing by treatment region 202 time energy to the substrate that is positioned on the belt 205.In possible enforcement, the electromagnetic energy conveying device can comprise one or more light fixture 204A(Figure 12 and Figure 13), described one or more light fixture 204A can and/or select with one or more desired wavelength conveyings and be radiated substrate 250 through debugging.Can select substantially from one or more wavelength of the emittance of radiation heating assembly 204 conveyings, in order to absorb described emittance by the material that is deposited on the substrate surface.Yet, in the situation (such as semiconductor substrate, solar cell or other similar devices) of the heat budget of paying close attention to treated substrate, ideal situation may be the wavelength that limit transport arrives the emittance of substrate, absorbs so that emittance is preferably absorbed and be can't help substantially to make the material of substrate by deposition materials.In example, be not limited to any embodiment, in the situation that substrate is made up of siliceous (Si) material, can adjust or filter the wavelength of the energy of light fixture 204A conveying, in order to only carry greater than the wavelength of the absorption edge of the silicon amount with the energy that reduces silicon substrate and absorb, the absorption edge of described silicon is about 1.06 (μ m) substantially.
In some instances, substrate and the material that is deposited on each type on the substrate surface for each type, select and/or adjust the optimal wavelength that radiation heating assembly 204 is carried, improving the absorption of institute's conveying capacity, and therefore improve the drying process of deposition materials.In possible enforcement, light fixture 204A can be infrared ray (IR) light fixture, and described infrared ray (IR) light fixture for example can provide the maximum operating temp between about 1200 ℃ and 1800 ℃ and have in the peak power emission greater than the wavelength place of about 1.4 μ m.In some instances, light fixture 204A is the about 1 meter long fast medium wave IR of two filament 5kW light fixture, and described light fixture can be available from the Heraeus Nobelight company of German Hanau.Therefore in some situation, ideal situation is to be transported to the power of light fixture and to adjust the temperature of filament in the light fixture and adjust one or more wavelength (for example, Wei grace law) from the emitted radiation of light fixture 204A by adjustment.Therefore, by using system controller 101, can adjust the power supply (not shown) that is couple to light fixture 204A, the knowledge of the optical absorption characteristic of deposition materials on substrate surface and the wavelength of the energy that light fixture 204A carries, to improve drying process.
Figure 13 is used for describing a plurality of embodiment of radiation heating assembly 204, described a plurality of embodiment all can be combined with embodiment described herein, two light fixture 204A that described radiation heating assembly 204 utilizes in the process island 202 that is positioned at desired length and extends along the process island 202 of desired length.When during drying process during with the length of one or more board transport light fixture 204A, can locate light fixture 204A with the one or more substrates of transmission energy (path " E ") to the belt 205 that is positioned in the process island 202.In some situation, one or more reflectors 249 can be provided at light fixture 204A top and not expect the heat of part and concentrate energy towards substrate 250 with other that reduce that main story is passed to hot system 201.Equally, in some situation, the reflector that light fixture 204A can have on the side that is placed in light fixture is not expected the heat of part and is concentrated energy towards substrate 250 with other that reduce that main story is passed to hot system 201.
Typical case is that hot system 201 also utilizes Convective Heating assembly 203 to use advection heat transmission method transmission heat to substrate, and such as carry heated air (for example, air) on the surface of whole base plate, described substrate orientation is in treatment region 202.The advection heat transmission method will be substantially with similar speed heated substrates and deposition materials.In the relative condition with higher of substrate conductivity (such as silicon substrate), it is even relatively that the temperature homogeneity on the whole base plate will keep.The advection heat transfer rate also can be by adjusting convection gas flow rate and/or temperature and control easily.
For example, consult the embodiment that describes with respect to Figure 12, Convective Heating assembly 203 can comprise that fluid conveying device 229, charging portion 245(namely seal chamber substantially, collects fluid at this sealing chamber place and is used for distributing) and gas heating component 240.Therefore, being placed in gas that the substrate for the treatment of region 202 can provide from fluid transmitting device 229 by guiding heats by gas heating component 240 and the surface of crossing substrate 250.In some possible enforcements, be not limited to any embodiment, fluid conveying device 229 can be the AC fan, and described AC fan can carry the gas (seeing path " B ") of expectation flow rate by radiation heating assembly 204 and enter treatment region 202.
According to various aspects, charging portion 245 can be the enclosed area substantially, described enclosed area be used for guiding the gas carried from fluid transmitting device 229 by gas heating component 240, enter charging portion outlet section 243 and subsequently by treatment region 202.Charging portion 245 also can comprise charging portion inducer 244, and the gas that described charging portion inducer 244 is suitable for receiving by treatment region 202 transmission provides gas to return or recirculation path, in order to can collect and reuse heated air, such as air.Therefore, recirculation path is following path A 1-A6 substantially, and described path A 1-A6 is by heat exchange zone 246, gas heating component 240, charging portion outlet section 243, treatment region 202 and charging portion inducer 244, as shown in figure 12.The recirculation heated air can help to reduce with the amount of air heat to the required energy of expectation temperature before at least a portion heated air is delivered into treatment region 202 again.
In an embodiment, described embodiment all can be combined with embodiment described herein, and Convective Heating assembly 203 can comprise heat-exchange device 230.Heat-exchange device 230 can be used to the gas of carrying from fluid conveying device 229 and the recycle gas that receives from treatment region 202 removes bad pollutant (Reference numeral A5-A6).Heat-exchange device 230 can comprise one or more heat exchange surfaces 232.One or more heat exchange surfaces 232 can be couple to heat controller 231 and/or one or more filter-type element, described one or more filter-type elements are suitable for removing possible pollutant from the gas of this section by charging portion 245.
In general, heat controller 231 can be suitable for temperature with heat exchange surface 232 and remain below under the temperature of temperature of the heated air that is transported to treatment region 202, with cohesion and remove any volatile component that is included in the recycle gas.Heat exchange surface 232 also can be used to preheating is transported to gas heating component 240 from fluid conveying device 229 gas (being path " B ").The power consumption that preheating gas also can help to improve the gas efficiency of heating surface and therefore be reduced in the drying process of the indoor execution of drying chamber before gas enters gas heating component 240.Because energy consumption usually can be the key factor in the cost of producing solar battery apparatus, the method for the gas that preheating and/or recirculation this paper discuss can help to reduce having cost and therefore reducing the producing cost of the device that forms of serigraphy production line.
Usually, recycle gas can comprise a considerable amount of one or more volatile components, and described one or more volatile component is that the evaporation owing to the volatile component of escaping from deposition materials during drying process is entrained in the recycle gas.By heat exchange surface 232 being maintained under the temperature of the congealing point that is lower than volatile component, volatile component will condense and remove from recycle gas.Volatile component is trapped in also can helps to reduce recycle gas in the heat-exchange device 230 to the pollution of substrate and charging portion 245 components.In can be applicable to the example of whole embodiment described herein, the temperature maintenance of one or more heat exchange surfaces 232 can be lower than about 219 ℃ temperature to remove any organic solvent, such as terpineol or ester class.In some implementations, heat exchange surface 232 can be maintained under the temperature between about 40 ℃ and about 80 ℃ with cohesion and be entrained in steam material in the recycle gas.The temperature of heat exchange surface 232 can be by using the heat-exchange device of system controller 101 and heat controller 231(such as traditional recirculated fluid formula or thermoelectric (al) type) control.Similarly, owing to the gravity reason, condensing upon the fluid collecting region 233(that volatile component on the heat exchange surface 232 can flow to charging portion 245 is path " C ") and be collected in the fluid collecting region 233 of charging portion 245.In some implementations, fluid collecting region 233 can comprise one or more floss holes, and described one or more floss holes are used for carrying the steam material of collection to waste gathering system (not shown).
In addition, collect any volatile component of carrying secretly in the gas by using heat-exchange device 230, can reduce the local pressure that passes through the steam in the portion gas for the treatment of region 202 again, therefore, if the steam of a large amount of residual quantities is retained in the recycle gas, with respect to the quantity that originally is allowed to, allow flowing gas to receive from the solvent material of the bigger quantity of deposition materials evaporation so.Therefore, finishing the drying process required time can reduce by the quantity that is increased in the solvent material that receives in the process gas of substrate that flows.
For example with reference to Figure 13, treatment region 202 can be sealed partly by one or more walls (such as the wall 253 of hot system 201 and the wall 114A of drier conveyer 211), thereby the wherein overwhelming majority of the heat that the heated air that Convective Heating assembly 203 is carried and radiation heating assembly 204 provide can not lost.For example with reference to Figure 12, in some possible enforcements, be not limited to any embodiment, hot system 201 and treatment region 202 can the sealings at least partly by one or more walls 207.For example, wall 207 can have aperture 208 in the opposite end for the treatment of region 202 to allow minimizing the quantity of the heated air of leaving drying table 210 simultaneously by using belt 205 that board transport is entered treatment region 202 and treatment region 202 is left in transmission.Partial closure's treatment region 202 also can help prevent the treatment chamber of any vicinity of finding of any contaminants in the gas that flows through treatment region 202.
According to some aspects, be not limited to any embodiment, inner shield 252 can be used to flowing gas that further guiding provides by the outlet port 243A of charging portion outlet section 243 and flows and flow to the input port 244A of charging portion inducer 244 at the substrate 250 that is positioned at treatment region 202.Inner shield 252 also can be used to reflect and further guide any heat that radiation heating assembly 204 provides to the substrate 250 that is positioned on the belt 205.
By adjusting the heat that Convective Heating assembly 203 and radiation heating assembly 204 provide, drying process can be adjusted and/or optimization with drying time of improving deposition materials and reduce any possible heat budget problem that may appear in the drying process.In an embodiment, for example with respect to the described embodiment of Figure 12, convection current can be carried by treatment region 202 with the direction (being direction A4) opposite with the motion (being direction " D ") of substrate 250 and be imported into substrate and improve temperature ramp speed with preheating.In addition, because silicon substrate can have low absorption coefficient in the IR wavelength, so can greatly reduce efficiency of thermal transfer by the combination of using advection heat transmission mode and radiant heat transmission mode and therefore greatly reduce the dry substrate required time.Because the efficiency of thermal transfer that increases can be improved the heating curve of each dry substrate, because can the higher technological temperature of easier realization.
Use method described herein also can reduce needs to buffer unit, described buffer unit is generally used in the traditional silk-screened technology guaranteeing that deposition materials is drying, and usually efficient is too low and the time is oversize and can not catch up with all the other Production Line amounts because tradition is only utilized cycle time in the drying process of radiation.Use the radiation heating of advection heat transmission and wavelength control, the substrate in each drying table 210 will reduce heating cycle, and 1400 crystalline silicons 156mm * the 156mm substrate per hour so that the drying box output can exceed in less than about 2 meters long systems.Therefore, quick heat treatment method described herein can reduce cycle time, reduces the floor space that is occupied by drying table 210 and reduce the desired CoO of dry substrate.
Figure 14 is used for describing a plurality of embodiment of hot system 201, among described a plurality of embodiment, does not recycle the gas (being path A 5 and path A 6) that returns from treatment region 202.For example, leave the gas (for example, path " B ") of fluid conveying device 229 before being transferred by gas heating component 240 and treatment region 202, enter entrance charging portion 249A, by a plurality of heat-exchange tubes 248 and enter outlet charging portion 249B.Substantially with heat-exchange tube 248 sealing, so that the gas of " B " is by the inner area 248A of pipe and do not mix with the gas that returns from treatment region 202 along the path.In some possible enforcements, the gas that returns along path A 5 and path A 6 from treatment region 202 is before discharging by port 247 from hot system 201, through the outer surface of heat-exchange tube 248.Therefore, by using the temperature of heat controller 231 control heat-exchange tubes 248, but preheating flow to the temperature of the gas of gas heating component 240 from fluid conveying device 229, and can cool off the gas that returns from treatment region 202 to remove any volatile component of carrying secretly.In general, heat controller 231 is suitable for temperature with the surface of heat-exchange tube 248 (being heat exchange surface 232) and remains below under the temperature of temperature of the heated air that is transported to treatment region 202, with cohesion and remove any volatile component that is included in the gas that flows along path A 6.Owing to the gravity reason, condensing upon the fluid collecting region 233(that volatile component on the heat-exchange tube 248 will flow to charging portion 245 is path " C ") and be collected in the fluid collecting region 233 of charging portion 245.Fluid collecting region 233 can comprise one or more floss holes, and described one or more floss holes are used for carrying the steam material of collection to waste gathering system (not shown).
Embodiment according to being combined with whole embodiment described herein can provide another print station 220 in serigraphy system 110.Print station 220 can be identical with print station 190 in fact.Print station 220 can receive dry substrate 250 from drying table 210.Usually, import two of print station 220 into conveyer belt 111 and be arranged to handle side by side arrange, can receive substrates 250 from the drier conveyer 211 of drying table 210 so that each imports conveyer belt 111 into.
Embodiment according to being combined with whole embodiment described herein can provide another drying table 270 in serigraphy system 110.Drying table 270 can be identical with drying table 210 in fact.Drying table 270 can receive substrate 250 from print station 220.Usually, two drier conveyers 211 of drying table 270 are arranged to handle side by side arrange, so that each drier conveyer 211 can receive substrate 250 from the conveyer belt 114 that withdraws from of print station 220.
Embodiment according to being combined with whole embodiment described herein can provide another print station 290 in serigraphy system 110.Print station 290 can be identical with print station 190 in fact.Print station 290 can receive dry substrate 250 from drying table 270.Usually, import two of print station 290 into conveyer belt 111 and be arranged to handle side by side arrange, can receive substrates 250 from the drier conveyer 211 of drying table 270 so that each imports conveyer belt 111 into.
Embodiment according to being combined with whole embodiment described herein can provide another optional drying table 310 in serigraphy system 110.Drying table 310 can be identical with drying table 210 in fact.Drying table 310 can receive substrate 250 from print station 290.Usually, two drier conveyers 211 of drying table 310 are arranged to handle side by side arrange, so that each drier conveyer 211 can receive substrate 250 from the conveyer belt 114 that withdraws from of print station 290.
Embodiment according to being combined with whole embodiment described herein can provide another optional print station 330 in serigraphy system 110.Print station 330 can be identical with print station 190 in fact.Print station 330 can receive dry substrate 250 from drying table 310.Usually, import two of print station 330 into conveyer belt 111 and be arranged to handle side by side arrange, can receive substrates 250 from the drier conveyer 211 of drying table 310 so that each imports conveyer belt 111 into.
Figure 16 is used for describing the possible embodiment that fires table 350, described may can the combination with whole embodiment described herein by embodiment, the described table 350 of firing can be provided in the serigraphy system 110, for example after position, end (latter) print station of system 110.Usually, firing table 350 can be through being provided for the material of etch printing on treated substrate 250.For example, firing table 350 can be through arranging to operate under the temperature between 700 ℃ to 800 ℃.Fire table 350 and can be configured to than dry director, to obtain to be printed in the expectation etching of the material on the treated substrate 250.Usually setting is etched with and makes printing material firmly adhere to substrate 250, and this low resistance that can be used for obtaining on the substrate contacts with stable.
In some possible enforcements, fire table 350 and can receive substrate 250 from another optional print station 330, just, receive substrate 250 from the conveyer belt 114 that withdraws from of being arranged to handle side by side another the optional print station 330 that arranges.
In other possible enforcements that another optional print station 330 is not provided, also can not provide another drying table 310, and fire table 350 and can for example receive substrate 250 from print station 290, just receive substrate 250 from the conveyer belt 114 that withdraws from of being arranged to handle side by side the print station 290 that arranges.
Fire table 350 and can comprise through being arranged to handle side by side two of arranging and fire conveyer belt 311, receive substrates 250 with the conveyer belt 114 that withdraws from from print station 290 or another optional print station 330.
According to various aspects (for example describing with respect to Figure 15), discharge mechanism 400 can be provided at the print station downstream, position, end along system 110, (namely fire table 350 positive upstreams) for example in the porch of firing table 350.Can arrange discharge mechanism 400 with from for example print station 290 or from another optional print station 330(if provide) the treated substrate 250 of unloading, and towards the treated substrate 250 of other operating desks transportations of for example firing table 350 or before system 110 finishes, providing.
For example, according to various aspects, fire table 350 and can receive substrate 250 from discharge mechanism 400, but not receive substrate 250 from print station 290 or from another optional print station 330.
In possible enforcement, discharge mechanism 400 can comprise and is placed in crossbeam 402 or the cross bar that withdraws from conveyer belt 114 tops.Crossbeam 402 can extend transverse to from middle section and withdraws from conveyer belt 114, for example extends to side regions at two that fire table 350 directly over firing conveyer belt 311, two withdraw from conveyer belt 114 directly over.Can provide a pair of substrate pick-up member 403 at crossbeam 402.Each substrate pick-up member 403 can for example comprise: the mechanical grip member, such as tongue piece, plate, anchor clamps clamper etc.; Or Bernoulli Jacob's clamper; Or negative pressure (being vacuum or suction) retaining member, such as negative pressure clamper, suction cup etc.; Or the every combination in front.This can be set to along crossbeam 402 removablely to substrate pick-up member 403, move to middle section with zone from the side, and vice versa.In operation, each substrate pick-up member 403 therefore can be from the side the conveyer belt 114 that withdraws from the zone take substrate 250 away, and in the middle section (substrate 250 is positioned this middle section) one fires the described substrate 250 of conveyer belt 311 transportations.For instance, each substrate pick-up member 403 can be through arranging with operation from being positioned at the substrate 250 that withdraws from the conveyer belt 114 below: vertical lifting substrate 250, from withdraw from conveyer belt 114 towards fire conveyer belt 311 moving substrates 250, reduction substrate and with substrate orientation in firing on the conveyer belt 311.In possible enforcement, can provide one or more linear motors (not shown) to be used for along crossbeam 402 moving substrate pick-up member 403.For example, describe the example of the embodiment of linear motor in EP-A-1.672.773, the embodiment of described linear motor can use together with embodiment described herein.
Can be in possible embodiment that whole embodiment described herein are combined, system 110 can have one or more optional quality controls unit 500, described one or more optional quality controls unit 500 is through being provided for checking the quality of substrate 250, for example for detection of the probable edge crack of treated substrate.Quality control unit 500 can comprise the optical check assembly, and described optical check assembly can comprise for example video camera etc., for example as above uses Fig. 9 described.As described herein, optional quality control unit 500 can be placed in one of embodiment of system 110, surpass one or even the exit (being positive downstream) of each print station.For instance, optional quality control unit 500 can be provided at another optional print station 330(if provide) exit (being positive downstream direction), or the exit of print station 290.In some implementations, optional quality control unit 500 can be provided at discharge mechanism 400 positive upstreams, for example, as Fig. 2 A and Fig. 2 B and shown in Figure 15.
According to various aspects, for example, as describing according to Figure 17 and Figure 18, loading attachment 550 can be provided at after one or more operating desks that relieving platform 400 downstreams provide, for example in the exit of firing table 350, just, in the positive downstream of firing table 350.Loading attachment 550 can be through arranging to carry out " pick up and put " operation, just, pick up to be placed in from two that for example fire table 350 substrates 250 of firing conveyer belt 311 and with described substrate 250 and be arranged to handle side by side on two transportation conveyer belts 552 that arrange.Two transportation conveyer belts 552 can be placed on two both sides of firing conveyer belt 311.Therefore, can operate loading attachment 550 (to provide two transportation conveyer belts 552 in this side zones) from middle section (entreat the zone for example to provide two hereinto and fire conveyer belt 311) moving substrate to side zones.
In possible enforcement, loading attachment 550 can comprise not shown clamper device, and described clamper device is through being provided for clamping substrate 250 and firing conveyer belt 311 from two and move described substrate 250 described substrate 250 is seated on two transportation conveyer belts 552.Clamper device can comprise for example mechanical grip member, negative pressure clamper or Bernoulli Jacob's clamper.According to various aspects, loading attachment 550 can have one or more base-plate buffering containers 554, and described one or more base-plate buffering containers 554 are placed in each side (for example, seeing Figure 17) of two transportation conveyer belts 552.According to the embodiment that can be combined with whole embodiment described herein, in operation, clamper device can be filled base-plate buffering container 554 by being placed to from two substrates of firing conveyer belt 311 in the base-plate buffering container 554.In possible operation is implemented, in case base-plate buffering container 554 is full, can carry out substrate from two fire 311 to two transportations of conveyer belt conveyer belt 552 normally pick up and put operation.Fill base-plate buffering container 554 and can be used for the high production productivity of maintenance system 110, though when with one or more operational example of loading attachment 550 upstreams as supspending for maintenance purpose or also being like this when stopping.Usually, the base-plate buffering container 554 of filling can be extracted out by the side withdrawing device 556 of for example drawer (for example, seeing Figure 18).
Figure 19 is used for describing the possible embodiment that can be combined with whole embodiment described herein, among this embodiment, can provide quality examination platform 360 in the operating unit downstream of system 110, described operating unit such as print station, drying table or fire table 350.Quality examination platform 360 can be through arranging the quality with the control substrate, for example through arranging to carry out one or more optical qualities controls of substrate, for example detects the fracture, spot, stain of treated substrate, different color or tones.Usually, quality examination platform 360 can comprise through being arranged to handle two transportation conveyer belts 366 of setting side by side for the substrate transportation.Therefore, in operation, quality examination platform 360 can receive substrate 250 from two substrate transportation conveyer belts, for example receive substrate 250 from two transportation conveyer belts 552 that leave loading attachment 550, subsequently described substrate 250 is moved to two transportation conveyer belts 366, to carry out one or more quality controls at the substrate 250 that moves along two transportation conveyer belts 366.In possible enforcement, above each and in two transportation conveyer belts 366 each of two transportations in the conveyer belts 366, two optical check assemblies (for example can be comprised video camera, not shown) be placed in transportation conveyer belt 366 tops to carry out control (described fracture can be found usually) and the follow-up further control for detection of the fracture on the substrate successively in the pattern of printing material, to detect colour-difference or the hue difference on the substrate surface.In the embodiment that for example consults Figure 19 description, the optical check assembly can have light source 368, and for example, luminaire, described light source 368 are seated in below two transportation conveyer belts 366 usually.Each light source 368 can with the video camera perpendicular alignmnet that is placed in transportation conveyer belt 366 tops.Each light source 368 can be through being provided for from the below towards being seated in substrate 250 projection lights of transportation on the conveyer belt 366, just, and by dorsal part illumination or the rear illumination of substrate.By penetrating substrate with back side light or rear illumination, can help and improve the operation of video camera.
The quality control result of each substrate can temporarily or for good and all be stored in the particular memory buffer of substrate 250 special uses by system controller 101.According to various aspects, system controller 101 can be through arranging each substrate 250 that is subjected to quality control with tracking, up to substrate 250 is sorted and is seated in the special container, as describing in detail hereinafter.
Figure 20 is used for describing possible embodiment, and described possible embodiment can be combined with whole embodiment described herein, and among this embodiment, system 110 can have substrate electrical efficiency detection test platform 380.For example, electrical efficiency detection test platform 380 can be from quality examination platform 360(if provide) receive substrate (for example the transportation of two from be included in described quality examination platform 360 conveyer belt 366 receives), or directly receive substrates (for example firing conveyer belt 311 from two receives) from firing table 350.Usually, electrical efficiency detection test platform 380 can comprise two test units 381, described two test units 381 can for example, be tested in one or more electric currents and/or voltage efficiency that the pattern that is printed in the material on the substrate is carried out through arranging to carry out one or more electrical efficiency tests.Electrical efficiency detection test platform 380 can comprise two transportation conveyer belts 386, described two transportation conveyer belts 386 are arranged to handle side by side arrange, described two transportation conveyer belts 386 can from by two transportation conveyer belt 366(if provide) receive substrate, or directly fire conveyer belt 311 or one or more other operating desks (if providing) receive substrate from two.In possible enforcement, can provide a test unit 381 along two each transportation conveyer belts 386 that transports in the conveyer belts 386.In operation, the test of one or more electrical efficiency can be carried out at the substrate 250 that is moving along two transportation conveyer belts 386 by two test units 381.
For example, describe the example of the embodiment of test unit in WO-A-2009/078047 or WO-A-2011/026875, described embodiment can use together with embodiment described herein.
The result of the electrical efficiency test of each substrate can temporarily or for good and all be stored in the particular memory buffer of substrate 250 special uses by system controller 101.According to various aspects, system controller 101 can be through arranging each substrate 250 that is subjected to the electrical efficiency test with tracking, up to substrate 250 is sorted and is seated in the special container, as describing in detail hereinafter.
According to various aspects, discharge mechanism 800 can be provided at the exit (being electrical efficiency detection test platform 380 positive downstreams) of electrical efficiency detection test platform 380.Discharge mechanism 800 can be through arranging to transport and be placed to from two transportation conveyer belt 386 proof substrates 250 of unloading and with proof substrate 250 on the further substrate transportation conveyer belt 396, and a described further substrate transportation conveyer belt 396 can for example be the part of the pigeonholes 390 of system 110.
In possible enforcement, discharge mechanism 800 can comprise crossbeam 802 or the cross bar that is placed in substrate transportation conveyer belt 396 tops.Crossbeam 802 can extend transverse to substrate transportation conveyer belt 386, from the middle section directly over two transportation conveyer belts 386 to the side regions directly over substrate transportation conveyer belt 396.Can provide a pair of substrate pick-up member (not shown) at crossbeam 802.Each substrate pick-up member can for example comprise: the mechanical transport member, such as tongue piece, plate, clamper etc.; Or Bernoulli Jacob's clamper; Or negative pressure, (being vacuum or suction) retaining member is such as negative pressure clamper, suction cup etc.; Or the every combination in front.The substrate pick-up member that is installed on the crossbeam 802 can be identical with the substrate pick-up member of describing according to Figure 15 403.Specifically, can this be set to along crossbeam 802 removablely to the substrate pick-up member, move to middle section with zone from the side, and vice versa.Therefore, each substrate pick-up member can be taken substrate 250 away from transportation conveyer belt 386 in side regions, and transports substrates 250 at the middle section that substrate 250 is positioned towards a transportation conveyer belt 396.In possible enforcement, can provide one or more linear motors (not shown) to be used for along crossbeam 802 moving substrate pick-up member.
According to various aspects, system 110 can have pigeonholes 390, and described pigeonholes 390 can be through arranging with letter sorting and putting substrate 250, and described substrate 250 is followed the trail of by system controller 101 usually, and for example, from electrical efficiency detection test platform 380(if provide) leave.For instance, pigeonholes 390 can sort and put through arranging with the quality that depends on substrate 250 and/or electrical efficiency.
For example, as describing according to Figure 21, pigeonholes 390 can comprise usually: transportation conveyer belt 396, and described transportation conveyer belt 396 receives substrate 250 from previous operating desk (for example electrical efficiency detection test platform 380); With one or more letter sortings unit 395, each letter sorting unit 395 has a plurality of substrate containers (memory location for example, (not shown)), described substrate container is suitable for holding a plurality of through letter sorting substrate 250, and described a plurality of being generally through letter sorting substrate 250 piled up or set in heaps.The result of the optical check that can be depending on the result of the electrical efficiency test of carrying out at efficient detection test platform 380 and/or carry out at quality examination platform 360 carries out the tracking substrate that will transport conveyer belt 396 transportations and sorts and be placed in the substrate container under the control of system controller 101.By letter sorting and storing, substrate 250 by 396 transportations of transportation conveyer belt can be divided into several set or the classification of the substrate that is contained in the memory location, each set or classification chart are shown with specific collection or the classification of the substrate of shared electrical quantity and/or surface or printing quality.All have identical shared electrical quantity and/or the substrate 250 of surface or printing quality in case memory location is full of, memory location moves towards discharging area so, for example the side discharging area.Can provide memory location transportation conveyer belt 392 with towards side discharging area transportation substrate container, wherein for example can provide side withdrawing device 394, for example drawer (for example, seeing Figure 22).
Figure 21 is used for describing the possible embodiment of letter sorting unit 395 to Figure 23, described may can the combination with whole embodiment described herein by embodiment, described letter sorting unit 395 has one or more automated sorting devices 410, and described one or more automated sorting devices 410 are through arranging to pick up substrate 250 from transportation conveyer belt 396 and described substrate 250 being seated in the as above specific storage lattice inside of argumentation.Each automated sorting device 410 can be by system controller 101 control, is placed in the memory location in order to the substrate 250 that picks up depended on by system controller 101 management trace information.For example, describe the example of the embodiment of automated sorting device in EP-A-1.768.174, the embodiment of described automated sorting device can use together with embodiment described herein.
According to possible enforcement, for example to consult Figure 23 and describe, automated sorting device 410 can comprise the executor 414 for moving substrate 250.In possible enforcement, executor 414 can have a plurality of clamping components (not shown), and described a plurality of clamping components are on the public flat clamping.For instance, can provide two, three, four or even the clamping component above four.Each clamping component can comprise: the mechanical grip member, such as tongue piece, plate, anchor clamps clamper etc.; Or Bernoulli Jacob's clamper; Or negative pressure (being vacuum or suction) retaining member, such as negative pressure clamper, suction cup etc.; Or the every combination in front.Automated sorting device 410 can be through arranging to operate between one or more diverse locations of one or more picking regions 417 and memory location inside, described one or more picking region 417 can be the zone that wherein has transportation conveyer belt 396, described one or more diverse location is by Reference numeral 418 indication, and described one or more diverse locations are especially with respect to the lateral location of picking region 417.In operation, executor 414 can be therefore mobile between picking region 417 and memory location.Motion 425,426 can be provided, and executor 414 can be connected to described motion 425,426.In possible enforcement, automated sorting device 410 can comprise that 420, two electricity of support component rotate stepping motor 422,423 and are installed on the described support component 420.Electricity rotates stepping motor 422,423 through arranging to rotate around turning cylinder Z1 and Z2, and described turning cylinder Z1 and Z2 can be parallel to each other and for example be essentially level.An electricity can be rotated stepping motor 422 is mechanically connected to motion 425 and another electricity rotation stepping motor 423 can be mechanically connected to motion 426.
According to various aspects, automated sorting device 410 can comprise that also another electricity rotates stepping motor 428, described another electricity rotates stepping motor 428 and rotates around turning cylinder Y1 through being provided for, and described turning cylinder Y1 usually and the planar quadrature that is positioned at of turning cylinder Z1 and Z2.In this way, automated sorting device 410 is suitable for support component 420 is positioned on 360 ° the circular arc.
Can be in embodiment that whole embodiment described herein are combined, motion 425 can comprise the arm 430 that is connected to motor 422, for example, can be parallel to a pair of arm each other.In possible enforcement, arm 430 can be connected to tube element 432 around said pivot at crank connecting link 431 places.Tube element 432 and then can pivot and be connected to executor 414.
Motion 425 also can comprise being rod 434, for example can be a pair of system rod of rigidity, and described system excellent 434 pivots by armlet 435 and is connected to support component 420.In possible enforcement, be that rod 434 can pivot and is connected to crank connecting link 431.Also provide rod 437, described excellent 437 to pivot around the pivotal axis different with the pivotal axis that is rod 434 and be connected to crank connecting link 431.In addition, rod 437 and then can pivot with respect to the pivotal axis different with the pivotal axis of tube element 432 and be connected to executor 414.Tube element 432 can be hollow and rod 437 can be inserted tube elements 432 inner and freely slide.
Can be in embodiment that whole embodiment described herein are combined, motion 426 can comprise arm 438, and for example a pair of arm can be connected to motor 423 with described arm 438.Also arm 438 can be connected to rod 440, described excellent 440 and then pivot with respect to the pivotal axis consistent with the pivotal axis of tube element 432 and be connected to executor 414.
In operation, automated sorting device 410 can be moved at different operating positions, for example at as shown in figure 23 two different operating positions.Specifically, by actuation motor 422, it is rod 434 that arm 430 remains parallel to, and tube element 432 remains parallel to rod 437, and mobile executor 414 is so that clamping component is on the plane that is parallel to initial flat clamping in fact.
In operation, actuation motor 423 allows not only to come mobile executor 414 along trunnion axis X but also along vertical axis Y.In addition, actuation motor 428 allows support component 420 to rotate, in order to also can move executor 414 along the trunnion axis with trunnion axis X quadrature.In this way, automated sorting device 410 can be suitable for substrate 250 is positioned between the ad-hoc location in picking region 417 and the memory location, can settle described substrate 250 and described substrate 250 for example also to can be placed on the Different Plane with respect to picking region 417 laterally offsets.
Although preamble, can design other and further embodiment of the present utility model at embodiment of the present utility model under the situation that does not break away from basic categories of the present utility model, and determine category of the present utility model by claims subsequently.
Claims (15)
1. one kind is used for the system of printing at substrate (250), and described system comprises:
Substrate loading stage (170) is used for described substrate is loaded into substrate transportation conveyer belt,
A plurality of print stations (190,220,290,330) are used for printing at the described substrate that is loaded onto on the described substrate transportation conveyer belt,
A plurality of warm tables are used for the described printed base plate of heating,
Substrate pigeonholes (390) is used for the treated substrate of letter sorting,
Wherein described substrate transportation conveyer belt is arranged to handle side by side arrange, with described substrate is transported to described a plurality of print station (190,220,290,330), described a plurality of warm tables and described substrate pigeonholes (390) wherein at least one,
Wherein at least one described print station (190,220,290,330) comprises two printing equipments (192) that are shelved on the supporting construction (183).
2. the system as claimed in claim 1, wherein each described print station (190,220,290,330) comprises two printing equipments (192) that are shelved on the supporting construction (183).
3. system as claimed in claim 1 or 2, wherein said two printing equipments (192) with respect to the center line of described print station (190,220,290,330) and toward each other.
4. system as claimed in claim 1 or 2, wherein said supporting construction (183) comprises support pole (184), lateral support member (185) and the one or more gripper shoe (186) that is rigidly connected to each other.
5. system as claimed in claim 1 or 2, described system comprises system controller (101), described system controller (101) is through being provided for method of synchronization operation described at least two printing equipments (192).
6. system as claimed in claim 1 or 2, wherein each printing equipment (192) comprises that an actuator (130), printing chamber (102), a mask to print (102B), two draw conveyer belt (112) and inspection assembly (200) that at least one is possible, wherein, substrate support (131) is couple to a described actuator (130), draws conveyer belt (112) and is arranged to handle side by side arrange for described two.
7. system as claimed in claim 1 or 2, wherein at least one described print station (190,220,290,330) comprises substrate turnover device (182).
8. system as claimed in claim 1 or 2, wherein said loading stage (170) comprises two withdrawing devices (176), described two withdrawing devices (176) transport described taking-up substrate (250) through arranging to take out substrate (250) from substrate container and to import conveyer belt (111) into towards two, and described two import conveyer belt (111) into for described two printing equipments (192) of transportation substrate (250) to print station (190,220,290,330).
9. system as claimed in claim 8, wherein said loading stage (170) comprises two container mobile devices (172), each container mobile device (172) is provided at described two each that import in the conveyer belt (111) and imports the possible base-plate buffering container (179) that conveyer belt (111) is located and be connected with buffering lifting device (180) into through being provided for vertical moving substrate container.
10. system as claimed in claim 1 or 2, wherein at least one described warm table comprises: drying table (210,270,310) has treatment region (202); Hot system (201) is through arranging with conveying capacity in described treatment region (202); With two drier conveyers (211), arrange through being arranged to handle side by side.
11. system as claimed in claim 10, wherein said hot system (201) comprises radiation heating assembly (204) and possible Convective Heating assembly (203), wherein said radiation heating assembly (204) can comprise one or more light fixtures (204A), described one or more light fixture (204A) is radiated described substrate (250) through arranging to carry under one or more wavelength, and described possible Convective Heating assembly (203) can comprise fluid conveying device (229), charging portion (245), gas heating component (240) and heat-exchange device optionally (230).
12. system as claimed in claim 1 or 2, described system comprises and fires table (350), the described table (350) of firing is gone up the described material of printing through being provided for being etched in treated substrate (250), and the described table (350) of firing comprises through being arranged to handle side by side two of arranging and fires conveyer belt (311).
13. system as claimed in claim 1 or 2, described system is included in described print station (190,220,290,330) or wherein one or more discharge mechanisms (400 in the downstream of at least one of another operating desk, 800), described one or more discharge mechanism (400,800) through arranging to unload carried base board (250) and to transport described treated substrate (250) towards other operating desks, each discharge mechanism (400,800) comprise and being placed in through being arranged to handle side by side the substrate conveyer belt (114 that arranges, 396) Shang Fang crossbeam (402,802) with along described crossbeam (402,802) a pair of substrate pick-up member (403) of removable installation.
14. system as claimed in claim 1 or 2, described system comprise substrate electrical efficiency detection test platform (380), described substrate electrical efficiency detection test platform (380) comprises two transportation conveyer belts (386) that arrange through being arranged to handle side by side.
15. system as claimed in claim 1 or 2, wherein said pigeonholes (390) sorts and puts substrate (250) through arranging with the quality that depends on described substrate (250) and/or electrical efficiency, and comprise one or more letter sortings unit (395), each letter sorting unit (395) has automated sorting device (410), and described automated sorting device (410) is through arranging to pick up and to put substrate (250).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320185517 CN203210829U (en) | 2013-04-12 | 2013-04-12 | System used for printing on substrates |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320185517 CN203210829U (en) | 2013-04-12 | 2013-04-12 | System used for printing on substrates |
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| Publication Number | Publication Date |
|---|---|
| CN203210829U true CN203210829U (en) | 2013-09-25 |
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| CN 201320185517 Expired - Fee Related CN203210829U (en) | 2013-04-12 | 2013-04-12 | System used for printing on substrates |
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| CN103832052A (en) * | 2014-03-21 | 2014-06-04 | 深圳市索阳新能源科技有限公司 | Fully automatic battery piece image positioning silk-screen printing equipment |
| CN103950274A (en) * | 2014-04-22 | 2014-07-30 | 中国电子科技集团公司第四十八研究所 | Multichannel silk-screen printing line |
| CN104354453A (en) * | 2014-10-21 | 2015-02-18 | 吴江迈为技术有限公司 | Efficient printing method and device for solar battery piece |
| CN106739443A (en) * | 2017-01-10 | 2017-05-31 | 苏州市宜晖印花设备厂 | Footwear material full-automatic decorating machine |
| CN108189538A (en) * | 2017-12-29 | 2018-06-22 | 广州泰行智能科技有限公司 | Method for printing screen, device, terminal device and storage medium |
| CN108263077A (en) * | 2017-12-29 | 2018-07-10 | 广州泰行智能科技有限公司 | Method for printing screen, device, terminal device and the storage medium of mobile phone screen |
| CN108267015A (en) * | 2017-12-29 | 2018-07-10 | 广州泰行智能科技有限公司 | Heat dissipating method, device, terminal device and the storage medium of silk-screen continuous tunnel furnace |
| CN108267014A (en) * | 2017-12-29 | 2018-07-10 | 广州泰行智能科技有限公司 | Control method, device, terminal device and the storage medium of silk-screen continuous tunnel furnace |
| CN109494282A (en) * | 2018-12-11 | 2019-03-19 | 无锡先导智能装备股份有限公司 | Silk screen rubber printing equipment and its method |
| CN109878222A (en) * | 2019-04-02 | 2019-06-14 | 广州益峰尖纸制品有限公司 | A kind of PCB ink curing device and its working method |
| CN110214477A (en) * | 2017-01-31 | 2019-09-06 | 西门子股份公司 | For producing the control device and method of circuit board with optimizing yield on assembly line |
| CN112018011A (en) * | 2014-12-02 | 2020-12-01 | 应用材料意大利有限公司 | Device for printing on a substrate for producing solar cells and method for transporting said substrate |
| CN114616100A (en) * | 2019-11-13 | 2022-06-10 | 先进装配系统新加坡有限公司 | Screen loading system and method |
| DE112014001047B4 (en) | 2013-02-28 | 2023-03-16 | Panasonic Intellectual Property Management Co., Ltd. | Solar cell module manufacturing method and solar cell module adhesive application system |
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| DE112014001047B4 (en) | 2013-02-28 | 2023-03-16 | Panasonic Intellectual Property Management Co., Ltd. | Solar cell module manufacturing method and solar cell module adhesive application system |
| CN103832052A (en) * | 2014-03-21 | 2014-06-04 | 深圳市索阳新能源科技有限公司 | Fully automatic battery piece image positioning silk-screen printing equipment |
| CN103832052B (en) * | 2014-03-21 | 2016-09-07 | 深圳市索阳新能源科技有限公司 | A kind of full-automatic battery slice image location screen printing apparatus |
| CN103950274A (en) * | 2014-04-22 | 2014-07-30 | 中国电子科技集团公司第四十八研究所 | Multichannel silk-screen printing line |
| CN103950274B (en) * | 2014-04-22 | 2016-01-06 | 中国电子科技集团公司第四十八研究所 | A kind of multichannel serigraphy line |
| CN104354453A (en) * | 2014-10-21 | 2015-02-18 | 吴江迈为技术有限公司 | Efficient printing method and device for solar battery piece |
| CN104354453B (en) * | 2014-10-21 | 2017-02-08 | 苏州迈为科技股份有限公司 | Efficient printing method and device for solar battery piece |
| CN112018011A (en) * | 2014-12-02 | 2020-12-01 | 应用材料意大利有限公司 | Device for printing on a substrate for producing solar cells and method for transporting said substrate |
| CN112018014A (en) * | 2014-12-02 | 2020-12-01 | 应用材料意大利有限公司 | Device for printing on a substrate for producing solar cells and method for transporting said substrate |
| CN106739443A (en) * | 2017-01-10 | 2017-05-31 | 苏州市宜晖印花设备厂 | Footwear material full-automatic decorating machine |
| CN110214477B (en) * | 2017-01-31 | 2021-05-18 | 西门子股份公司 | Control device and method for the production of printed circuit boards in an assembly line with optimized production |
| CN110214477A (en) * | 2017-01-31 | 2019-09-06 | 西门子股份公司 | For producing the control device and method of circuit board with optimizing yield on assembly line |
| US11363750B2 (en) | 2017-01-31 | 2022-06-14 | Siemens Aktiengesellschaft | Method and control device for the throughput-optimised production of printed circuit boards on a pick-and-place line |
| CN108267015A (en) * | 2017-12-29 | 2018-07-10 | 广州泰行智能科技有限公司 | Heat dissipating method, device, terminal device and the storage medium of silk-screen continuous tunnel furnace |
| CN108267014A (en) * | 2017-12-29 | 2018-07-10 | 广州泰行智能科技有限公司 | Control method, device, terminal device and the storage medium of silk-screen continuous tunnel furnace |
| CN108263077A (en) * | 2017-12-29 | 2018-07-10 | 广州泰行智能科技有限公司 | Method for printing screen, device, terminal device and the storage medium of mobile phone screen |
| CN108189538A (en) * | 2017-12-29 | 2018-06-22 | 广州泰行智能科技有限公司 | Method for printing screen, device, terminal device and storage medium |
| CN109494282A (en) * | 2018-12-11 | 2019-03-19 | 无锡先导智能装备股份有限公司 | Silk screen rubber printing equipment and its method |
| CN109494282B (en) * | 2018-12-11 | 2024-07-02 | 无锡先导智能装备股份有限公司 | Silk screen glue printing device and method thereof |
| CN109878222B (en) * | 2019-04-02 | 2020-11-17 | 毅嘉电子（苏州）有限公司 | PCB printing ink solidification equipment |
| CN109878222A (en) * | 2019-04-02 | 2019-06-14 | 广州益峰尖纸制品有限公司 | A kind of PCB ink curing device and its working method |
| CN114616100A (en) * | 2019-11-13 | 2022-06-10 | 先进装配系统新加坡有限公司 | Screen loading system and method |
| CN114616100B (en) * | 2019-11-13 | 2024-03-08 | 先进装配系统新加坡有限公司 | Silk screen loading system and method |
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