CN203135201U - 控制准分子气体激光器放电腔内温度的装置 - Google Patents
控制准分子气体激光器放电腔内温度的装置 Download PDFInfo
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- CN203135201U CN203135201U CN 201320026549 CN201320026549U CN203135201U CN 203135201 U CN203135201 U CN 203135201U CN 201320026549 CN201320026549 CN 201320026549 CN 201320026549 U CN201320026549 U CN 201320026549U CN 203135201 U CN203135201 U CN 203135201U
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- 238000001816 cooling Methods 0.000 claims abstract description 65
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 14
- 101710163391 ADP-ribosyl cyclase/cyclic ADP-ribose hydrolase Proteins 0.000 claims description 45
- 239000000498 cooling water Substances 0.000 claims description 33
- 238000001514 detection method Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 5
- 230000000087 stabilizing effect Effects 0.000 claims description 5
- 230000006641 stabilisation Effects 0.000 description 5
- 238000011105 stabilization Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000008676 import Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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CN 201320026549 CN203135201U (zh) | 2013-01-18 | 2013-01-18 | 控制准分子气体激光器放电腔内温度的装置 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103092229A (zh) * | 2013-01-18 | 2013-05-08 | 中国科学院光电研究院 | 激光器温度稳定控制系统 |
CN104953444A (zh) * | 2015-07-03 | 2015-09-30 | 中国科学院光电研究院 | 一种用于准分子激光器的气体循环系统 |
CN108427449A (zh) * | 2018-02-09 | 2018-08-21 | 北京科益虹源光电技术有限公司 | 基于Smith预估补偿的准分子激光器温度控制方法及系统 |
CN109818240A (zh) * | 2019-01-25 | 2019-05-28 | 北京科益虹源光电技术有限公司 | 一种准分子激光器温度控制装置和方法 |
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2013
- 2013-01-18 CN CN 201320026549 patent/CN203135201U/zh not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103092229A (zh) * | 2013-01-18 | 2013-05-08 | 中国科学院光电研究院 | 激光器温度稳定控制系统 |
CN103092229B (zh) * | 2013-01-18 | 2015-04-08 | 中国科学院光电研究院 | 激光器温度稳定控制系统 |
CN104953444A (zh) * | 2015-07-03 | 2015-09-30 | 中国科学院光电研究院 | 一种用于准分子激光器的气体循环系统 |
CN104953444B (zh) * | 2015-07-03 | 2018-05-01 | 中国科学院光电研究院 | 一种用于准分子激光器的气体循环系统 |
CN108427449A (zh) * | 2018-02-09 | 2018-08-21 | 北京科益虹源光电技术有限公司 | 基于Smith预估补偿的准分子激光器温度控制方法及系统 |
CN109818240A (zh) * | 2019-01-25 | 2019-05-28 | 北京科益虹源光电技术有限公司 | 一种准分子激光器温度控制装置和方法 |
CN109818240B (zh) * | 2019-01-25 | 2024-02-09 | 北京科益虹源光电技术有限公司 | 一种准分子激光器温度控制装置和方法 |
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Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
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Effective date of registration: 20200903 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Aerospace Information Research Institute,Chinese Academy of Sciences Effective date of registration: 20200903 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Aerospace Information Research Institute,Chinese Academy of Sciences Address before: 9 Dengzhuang South Road, Haidian District, Beijing 100094 Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |
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Granted publication date: 20130814 |
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