CN203083705U - Device for accurately measuring temperature-change elliptic polarization in wide-temperature range - Google Patents
Device for accurately measuring temperature-change elliptic polarization in wide-temperature range Download PDFInfo
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- CN203083705U CN203083705U CN 201320061547 CN201320061547U CN203083705U CN 203083705 U CN203083705 U CN 203083705U CN 201320061547 CN201320061547 CN 201320061547 CN 201320061547 U CN201320061547 U CN 201320061547U CN 203083705 U CN203083705 U CN 203083705U
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Abstract
A device for accurately measuring temperature-change elliptic polarization in a wide-temperature range belongs to the technical field of optical measurement. The device is composed of a spectroscopic elliptic polarimeter, a thermostat and a temperature control system. A controlled temperature is preset through the temperature control system, a heating wire in the thermostat is controlled to generate heat, and the heating wire is neutralized with liquid nitrogen which is poured into the thermostat so as to achieve the preset controlled temperature. Thus, accurate measurement of temperature-change elliptic polarization in the wide-temperature range (77K-423K) is realized. The device provided by the utility model has main advantages of large temperature-change area, high temperature-control precision, strong practicality and low cost.
Description
Technical field
The utility model relates to a kind ofly accurately measures the device of alternating temperature elliptic polarization at wide warm area, belongs to field of optical measuring technologies.
Background technology
Ellipsometric measurement technology (being called for short ellipse inclined to one side technology) is the variation that utilizes light beam to reflect on interface or film or occur polarization state during transmission, a kind of optical means of research interface or film characteristics.Ellipse inclined to one side technology has strong interference immunity, high sensitivity, sample is not had advantages such as specific (special) requirements, thereby has a wide range of applications in fields such as material science, microelectric technique, thin film technique, physics, chemistry, biology and medical science.The restriction of normal temperature ellipsometric measurement art probe temperature is big, can not temperature control, can't carry out the measurement of sample in the different temperatures interval, and the photoelectric property of many materials under non-room temperature condition also demanded research urgently, therefore, existing normal temperature ellipsometric measurement device just can't be realized the measurement for sample photoelectric property under non-room temperature condition.But now existing alternating temperature ellipsometric measurement technology, as application number be 201110030726.6, the utility model name is called " a kind of variable temperatures ellipsometric measurement instrument sample chamber device and alternating temperature method thereof ", utility model people for Zheng Yuxiang, Cai Qingyuan, Chen Liangyao, Zhang Rongjun, Li Jing, Wang Songyou, Yang Yuemei, discloses a kind of variable temperatures ellipsometer test sample chamber device and alternating temperature method.Wherein device comprises gas cylinder, air valve, solenoid valve, Dewar flask, sample chamber, sample stage, heating resistor, temperature sensor, temperature controller etc.The sample chamber is divided into upper cavity and lower chamber two parts, and lower chamber is rectangular parallelepiped, and the upper cavity side is trapezoidal, has optical window on the inclined-plane, both sides of upper cavity.Described alternating temperature method is divided into two kinds of high temperature mode and low temperature modes.In low temperature mode, utilize gas at normal temperature heating cryogenic liquid to produce cryogenic refrigeration gas, cryogenic refrigeration gas is injected the sample chamber through heat insulation gas pipe line, make sample stage reach setting low temperature.In high temperature mode,, make sample stage reach setting high temperature by the heating resistor heating.But mainly there are following two deficiencies in prior art: 1. the alternating temperature interval is narrow: it is 77K that the low temperature warm area can't reach liquid nitrogen temperature.2. temperature-controlled precision is poor: because the deficiency of temperature-adjusting circuit design aspect can't realize the temperature control of high precision (0.1K).These apparatus and method no longer adopt the liquid nitrogen refrigerating nitrogen that passes through of the prior art, by the nitrogen that has freezed sample are freezed, but adopt liquid nitrogen directly to cool off sample, thereby can make the lowest temperature of low-temperature space reach liquid nitrogen temperature 77K.If liquid nitrogen is changed to liquid helium, also have the potentiality that continue to expand the alternating temperature interval.On the other hand, these apparatus and method have realized the raising of temperature-controlled precision by to the improvement in temperature-adjusting circuit algorithm and the design.
Summary of the invention
In order to overcome the shortcomings and deficiencies that prior art exists, the utility model proposes a kind of device of accurately measuring alternating temperature elliptic polarization at wide warm area.
The technical scheme of the utility model patent realizes in the following manner:
A kind of device of accurately measuring alternating temperature elliptic polarization at wide warm area, comprise spectrum formula ellipsometer, thermostat and temperature-controlling system, it is characterized in that thermostat comprises Dewar flask, objective table, pedestal and three-dimensional adjustable platform, three-dimensional adjustable platform is positioned at the pedestal top, can carry out three-dimensional regulates, the objective table side of being tubbiness, top opening, under wear underseal and close, have four relative windows on its four side, airtight by the quartz glass encapsulation respectively, former and later two relative windows are watch window, about two windows be measurement window; The objective table bottom surface has heating wire, objective table is positioned at the Dewar flask bottom, be connected in the objective table with in the Dewar flask, Dewar flask places above the three-dimensional adjustable platform together with objective table, add a cover sealing above the Dewar flask, cover and worn variable valve (liquid nitrogen filler) (injecting liquid nitrogen by this mouthful is cold), temperature sensor installing port and vacuum valve; Temperature-controlling system comprises temperature sensor, amplifier, single-chip microcomputer, wherein temperature sensor is installed on the objective table, temperature sensor is connected to amplifier input terminal through the temperature sensor installing port by lead, the output terminal of amplifier is connected to single-chip microcomputer, the control port of single-chip microcomputer connects on the heating wire that is affixed on the objective table bottom face producing heat, thereby control heater strip electric current is to adjust the balance control temperature of cold and heat in the Dewar flask; The incident arm of spectrum formula ellipsometer and outgoing arm lay respectively at the testing sample that two measurement window of objective table side sentence being placed in the objective table and carry out ellipsometric measurement.
Described amplifier is general integrated transporting discharging, and model is LM6162.
Described objective table is the objective table of copper material.
A kind of said apparatus that utilizes carries out the method that the accurate alternating temperature of wide warm area is measured, and step is as follows:
1. sample is placed on the objective table of thermostat, the vacuum valve of opening on the Dewar flask vacuumizes Dewar flask;
2. ellipsometric measurement instrument start, the sample that two measurement window that the incident arm and the outgoing arm of spectrum formula ellipsometer laid respectively at the objective table side are sentenced being placed in the objective table carries out ellipsometric measurement;
3. regulate three-dimensional adjustable platform, make testing sample be in the measuring position of the reflective light intensity maximum of acceptance;
4. open variable valve (liquid nitrogen filler), liquid nitrogen is injected in the Dewar flask by certain injection rate, set in advance single-chip microcomputer institute controlling temperature, electric current by the Single-chip Controlling heating wire, the liquid nitrogen (cold) that injects Dewar flask through variable valve (liquid nitrogen filler) is neutralized, to reach the purpose that the temperature in the Dewar flask is controlled;
5. by being installed in the temperature signal in the temperature sensor collection Dewar flask in the Dewar flask, this temperature signal is converted into electric signal after amplifier amplifies, import then and compare judgement in the single-chip microcomputer, electric current with the control heating wire, promptly the liquid nitrogen (cold) that injects Dewar flask is neutralized, make temperature near set control temperature;
6. when treating that temperature in the Dewar flask is in set control temperature, the ellipsometer test measurement parameter is set, the sample in the objective table is carried out parameter measurement;
7. change sets in advance single-chip microcomputer institute controlling temperature value, and repeating step 4 to 6 carries out the measurement under another preset temperature.
The utility model adopts liquid nitrogen to cooperate with heating wire, realizes that the alternating temperature from 77K to the 423K temperature range is measured.Adopt the automatic temp controller of autonomous Design, realize that precision reaches the accurate temperature controlling of 0.1K.Therefore, the utility model patent has realized the ellipsometric measurement at the accurate alternating temperature of wide warm area.
It is as follows that the utility model utilizes said apparatus to carry out the principle of the accurate alternating temperature ellipsometric measurement of wide warm area: sample is placed on the objective table of vacuum constant temperature device, in thermostat, inject liquid nitrogen, make objective table reach liquid nitrogen temperature 77K, inject the cooperation of flow and heating wire heating current by liquid nitrogen, utilize the temperature control electronic installation to realize accurately controlling automatically from 77K to 423K, thereby realize that sample is at the accurate alternating temperature ellipsometry of wide warm area.
The utlity model has following advantage: the temperature-controlled precision height, the alternating temperature zone is big, and practical, cost is low.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Wherein: 1. incident arm, 2. Dewar flask, 3. vacuum valve, 4. variable valve (liquid nitrogen filler), 5. temperature sensor installing port, 6. temperature-controlling system, 7. outgoing arm, 8. objective table (cold head), 9. measurement window, 10. testing sample, 11. heating wire, 12. three-dimensional adjustable platform, 13. pedestals, 18. watch windows.
Fig. 2 is the circuit side connector frame synoptic diagram of temperature-controlling system of the present utility model.
Wherein: 14. single-chip microcomputers, 15. temperature sensors, 16. amplifiers, 17. heating wire.
Fig. 3 is the circuit connection diagram of amplifier in the temperature-controlling system of the present utility model.
Wherein: the input end that R1 receives LM6162 through positive source is 2 pin, temperature sensor also is connected to the input end of LM6162 through the output terminal of capacitor C1, the output terminal of LM6162 i.e. the 6th pin is received positive source through resistance R 2 on the one hand, is connected to single-chip microcomputer through capacitor C1 on the other hand.
Embodiment
Below in conjunction with drawings and Examples the utility model is described further, but is not limited thereto.
Embodiment:
A kind of device of accurately measuring alternating temperature elliptic polarization at wide warm area, as Figure 1-3, comprise spectrum formula ellipsometer, thermostat and temperature-controlling system 6, it is characterized in that thermostat comprises Dewar flask 2, objective table 8, pedestal 13 and three-dimensional adjustable platform 12, three-dimensional adjustable platform 12 is positioned at pedestal 13 tops, can carry out three-dimensional regulates, objective table 8 side's of being tubbiness, above opening, down wear underseal and close, have four relative windows on its four side, airtight by quartz glass encapsulation respectively, former and later two relative windows are watch window 18, about two windows be measurement window 9; Objective table 8 bottom surfaces have heating wire 11, objective table 8 is positioned at Dewar flask 2 bottoms, be connected in the objective table 8 with in the Dewar flask 2, Dewar flask 2 places above the three-dimensional adjustable platform 12 together with objective table 8, add a cover sealing above the Dewar flask 2, cover and worn variable valve 4(liquid nitrogen filler) (injecting liquid nitrogen by this mouthful is cold), temperature sensor installing port 5 and vacuum valve 3; Temperature-controlling system 6 comprises temperature sensor 15, amplifier 16, single-chip microcomputer 14, wherein temperature sensor 15 is installed on the objective table 8, temperature sensor 15 is connected to the input end of amplifier 16 by lead through temperature sensor installing port 5, the output terminal of amplifier 16 is connected to single-chip microcomputer 14, the control port of single-chip microcomputer 14 connects on the heating wire 11 that is affixed on objective table 8 bottom face producing heat, thereby control heater strip electric current is to adjust the balance control temperature of colds and heat in the Dewar flask 2; The testing samples 10 that two measurement window 9 that the incident arm 1 of spectrum formula ellipsometer and outgoing arm 7 lay respectively at objective table 8 sides are sentenced being placed in the objective table 8 carry out ellipsometric measurement.
Described amplifier 16 is general integrated transporting dischargings, and model is LM6162.
Described objective table 8 is objective tables of copper material.
Claims (3)
1. device of accurately measuring alternating temperature elliptic polarization at wide warm area, comprise spectrum formula ellipsometer, thermostat and temperature-controlling system, it is characterized in that thermostat comprises Dewar flask, objective table, pedestal and three-dimensional adjustable platform, three-dimensional adjustable platform is positioned at the pedestal top, can carry out three-dimensional regulates, the objective table side of being tubbiness, top opening, under wear underseal and close, have four relative windows on its four side, airtight by the quartz glass encapsulation respectively, former and later two relative windows are watch window, about two windows be measurement window; The objective table bottom surface has heating wire, objective table is positioned at the Dewar flask bottom, is connected in the objective table with in the Dewar flask, and Dewar flask places above the three-dimensional adjustable platform together with objective table, add a cover sealing above the Dewar flask, cover and worn variable valve, temperature sensor installing port and vacuum valve; Temperature-controlling system comprises temperature sensor, amplifier, single-chip microcomputer, wherein temperature sensor is installed on the objective table, temperature sensor is connected to amplifier input terminal through the temperature sensor installing port by lead, the output terminal of amplifier is connected to single-chip microcomputer, the control port of single-chip microcomputer connects on the heating wire that is affixed on the objective table bottom face producing heat, thereby control heater strip electric current is to adjust the balance control temperature of cold and heat in the Dewar flask; The incident arm of spectrum formula ellipsometer and outgoing arm lay respectively at the testing sample that two measurement window of objective table side sentence being placed in the objective table and carry out ellipsometric measurement.
2. as claimed in claim 1ly a kind ofly accurately measure the device of alternating temperature elliptic polarization at wide warm area, it is characterized in that described amplifier is general integrated transporting discharging, model is LM6162.
3. as claimed in claim 1ly a kind ofly accurately measure the device of alternating temperature elliptic polarization, it is characterized in that described objective table is the objective table of copper material at wide warm area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320061547 CN203083705U (en) | 2013-02-04 | 2013-02-04 | Device for accurately measuring temperature-change elliptic polarization in wide-temperature range |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320061547 CN203083705U (en) | 2013-02-04 | 2013-02-04 | Device for accurately measuring temperature-change elliptic polarization in wide-temperature range |
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| CN203083705U true CN203083705U (en) | 2013-07-24 |
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| CN 201320061547 Expired - Fee Related CN203083705U (en) | 2013-02-04 | 2013-02-04 | Device for accurately measuring temperature-change elliptic polarization in wide-temperature range |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103256984A (en) * | 2013-02-04 | 2013-08-21 | 山东大学 | Device and method for accurately measuring temperature-varying elliptical polarization in wide temperature range |
| CN110132925A (en) * | 2019-06-03 | 2019-08-16 | 河海大学 | A kind of pumping-detection time-resolved fluorescence system sample environment temperature regulating device |
| CN110376136A (en) * | 2019-07-19 | 2019-10-25 | 华中科技大学 | The device and method of the lower measurement thin-film optical constant of high temperature load and structural parameters |
-
2013
- 2013-02-04 CN CN 201320061547 patent/CN203083705U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103256984A (en) * | 2013-02-04 | 2013-08-21 | 山东大学 | Device and method for accurately measuring temperature-varying elliptical polarization in wide temperature range |
| CN103256984B (en) * | 2013-02-04 | 2014-11-26 | 山东大学 | Device and method for accurately measuring temperature-varying elliptical polarization in wide temperature range |
| CN110132925A (en) * | 2019-06-03 | 2019-08-16 | 河海大学 | A kind of pumping-detection time-resolved fluorescence system sample environment temperature regulating device |
| CN110376136A (en) * | 2019-07-19 | 2019-10-25 | 华中科技大学 | The device and method of the lower measurement thin-film optical constant of high temperature load and structural parameters |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130724 Termination date: 20150204 |
|
| EXPY | Termination of patent right or utility model |