CN104549597A - Refrigeration structure for temperature change test of integrated type Dewar assembly - Google Patents
Refrigeration structure for temperature change test of integrated type Dewar assembly Download PDFInfo
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- CN104549597A CN104549597A CN201510029336.5A CN201510029336A CN104549597A CN 104549597 A CN104549597 A CN 104549597A CN 201510029336 A CN201510029336 A CN 201510029336A CN 104549597 A CN104549597 A CN 104549597A
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- dewar
- liquid nitrogen
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Abstract
The invention discloses a refrigeration structure for a temperature change test of an integrated type Dewar assembly. The structure comprises an epoxy pull rod handle, an epoxy pull rod, a liquid nitrogen cavity sealing cover plate, a shell, a liquid nitrogen storage cavity, a Dewar integrated supporting small end sealing cover plate, a core column, a fixed rod cap, a liquid nitrogen tray, a cold head, a temperature measuring platinum resistor, a lead wire, a lead wire ring, a Dewar integrated supporting sealing bottom plate, a heating resistor and a Dewar integrated supporting large end sealing cover plate. The refrigeration structure and a realization method are simple, the commonality is high and the cost is low; and the invention discloses the refrigeration structure which can be used for achieving a testing temperature being 85-130K by adjusting different distances between a liquid nitrogen surface and a cold platform, and the testing temperature is accurately controlled by heat compensation.
Description
Technical field
The present invention relates to integrated form Dewar component encapsulation technology, specifically refer to a kind of refrigeration structure for carrying out temperature variation testing in integrated form super long alignment infrared focus plane Dewar component encapsulation process to detector, it is applicable to have employed detector performance procedural test in linear pattern pulse tube refrigerating machine and the integrated manifold type Dewar component of detector.
Background technology
Along with the raising required spatial resolution and detector sensitivity etc., infrared focal plane detector usually adopts the mode of alignment or array splicing detector chip module to improve resolution.For adopting the infrared focal plane detector of this kind of connecting method to require higher to working temperature and temperature homogeneity, therefore usually adopt Dewar component and the integrated coupling scheme of linear pattern pulse tube to meet the refrigeration demand of High cooling power, profound hypothermia.
In integrated form Dewar detector encapsulation process, generally Dewar, after detector and linear pattern pulse tube refrigerating machine complete encapsulation, adopt refrigeration machine start test probe performance, testing the shortcoming brought in this way is exactly: 1) cannot determine that each module of detector is after the multiple tracks techniques such as assembling, encapsulation, performance index during its low-temperature working whether can with encapsulate before be consistent; 2) if find in test process that certain detector module has problem, also need by complete seal welding Dewar and the weld seam at refrigeration machine cold finger two ends opened by machining mode milling, this not only can cause damage because of the stress produced in repair process to refrigeration machine cold finger and other parts, also can extend the detector encapsulation cycle; 3), when adopting linear pattern pulse tube refrigerating machine to carry out start test, also other problem can be brought: in the such as refrigerator compressor course of work, sustained vibration can be produced; The rotation of refrigerator compressor coil can cause electromagnetic interference (EMI), can increase the noise of detector, may affect the accuracy of test result.
Summary of the invention
The object of this invention is to provide the refrigeration structure of temperature variation testing in a kind of integrated form Dewar component, to solve in detector and refrigeration machine coupling package process the glitch-free test of detector performance and shorten and encapsulate periodic problem, meet the requirement of detector performance Properties Control in encapsulation process.
The refrigeration structure of a kind of integrated form Dewar component temperature variation testing of the present invention, as shown in Figure 1, epoxy bull drilling and backward pulls 1, epoxy pull bar 2, liquid nitrogen chamber seal cover board 3, shell 4, liquid nitrogen storage chamber 5, Dewar integral support small end seal cover board 6, stem stem 7, fixed pole cap 8, liquid nitrogen pallet 9, cold head 10, thermometric platinum resistance 11, lead-in wire 12, feed-through collar 13, Dewar integral support seal base 14, heating resistor 15, Dewar integral support large end seal cover board 16, Dewar to be tested 17 is comprised.Epoxy bull drilling and backward pulls 1 is gluedd joint by low temperature glue with the upper end of epoxy pull bar 2, realized sealing by liquid nitrogen seal cover board rubber ring 301 in the middle of liquid nitrogen chamber gland bonnet 3 and shell 4, shell 4 stores upper end, chamber 5 with liquid nitrogen respectively, Dewar integral support small end seal cover board 6 is sealed by laser bonding, liquid nitrogen is stored chamber 5 and is sealed by laser bonding mode with stem stem 7, epoxy pull bar 2 lower end and liquid nitrogen pallet 9 are fixed by the screw thread of fixed pole cap 8, vacuum brazing mode is adopted to be connected between stem stem 7 with cold head 10, Low-temperature epoxy glue is used to glued joint thermometric platinum resistance 11 respectively on cold head 10 surface, heating resistor 15, thermometric platinum resistance 11, heating resistor 15 is all connected by lead-in wire 12, feed-through collar 13 is connected by laser bonding with Dewar integral support seal base 14, realized sealing by Dewar integral support large end seal cover board rubber ring 1601 between the integral support 1702 bottom small end face of Dewar integral support large end seal cover board 16 and Dewar to be measured 17, in Dewar 17 to be tested, cold chain 1701 lower surface and cold head 10 fixedly make its close contact.
Implementation method of the present invention is as follows:
The gas outlet 1704 of Dewar to be tested and exhaust unit are passed through Flange joint, its cavity is vacuumized, makes proving installation internal vacuum reach 1 × 10
-4during Pa.Liquid nitrogen is slowly injected liquid nitrogen to store in chamber, through after a period of time, in Dewar, detector cold platform reaches thermal equilibrium gradually, and now Dewar internal vacuum reaches 1 × 10
-5pa.The radiation that can realize Dewar and temperature variation testing refrigeration structure internal solids conductive heat leakage and each parts is with this understanding leaked hot constant.Therefore can by heat transfer formula
derive, obtain
wherein, λ is the coefficient of heat conductivity of stem stem 7, and A is the cross-sectional area of stem stem 7 thin-walled, Q
leak heatfor Dewar 17 leaks heat, Δ L is the length variations amount of epoxy pull bar 2 push-and-pull.As shown in Figure 2, T
1for when liquid nitrogen pallet 9 to be shifted onto the bottom of stem stem 7 by epoxy pull bar 2 by diode measured temperature value on Dewar 17 cold platform to be measured, T
2for when liquid nitrogen pallet 9 to be moved to the top of stem stem 7 by epoxy pull bar 2 by diode measured temperature value on Dewar 17 cold platform to be measured, therefore, Δ T=(T
2-T
0)-(T
1-T
0)=T
2-T
1, T
0for liquid nitrogen temperature.Can learn that the length Δ L of epoxy pull bar 2 and Δ Τ is linear relationship by formula.Therefore engrave certain scale division value in the region, upper end 201 of epoxy pull bar 2, this scale division value represents
calibration, by regulating liquid nitrogen surface and cold platform different distance amount, realize larger temperature-measuring range.
In order to ensure required temperature measurement accuracy, cold head 10 has pasted thermometric platinum resistance 11 and heating resistor 15, and wherein thermometric platinum resistance 11 is for monitoring the temperature of cold head 10, when cold head 10 temperature is too low, obtain heat Q by heating resistor 15 heating to compensate heat, i.e. Q
always=Q
conduction+ Q
heating, wherein Q
heating=I
2r, in formula, I is that heating resistor 15 passes into electric current, and R is the resistance of heating resistor.By formula
thus reach required measuring tempeature.
The rate-determining steps of measuring tempeature of the present invention is as follows:
1) seal chamber be made up of Dewar to be tested and temperature variation testing refrigeration structure is vacuumized, reach 1 × 10 in this inside cavity vacuum
-4after Pa, graduated for quarter epoxy glue pull bar 2 is shifted onto bottom stem stem 7, now start to pour into liquid nitrogen, and the numerical value of thermometric diode (diode that Dewar 17 chip substrate to be measured has gluedd joint) on real time record Dewar cold platform can monitor whole temperature-fall period, through t
1after the cooled with liquid nitrogen of Min time, in Dewar 17 to be measured, reach thermal equilibrium state, now record temperature T on Dewar cold platform
1with scale L
1;
2) after liquid nitrogen vaporization in liquid nitrogen storage chamber 5 is complete, by the temperature return of Dewar cold platform to room temperature state, then start to test next time, move epoxy pull bar 2 to L2 scale, and continue to pour into liquid nitrogen, until t
2after min, Dewar inside reaches thermal equilibrium, now records the temperature T of Dewar detector substrate
2. as shown in Figure 1, when L2 scale moved to by epoxy pull bar 2, whole liquid nitrogen stores in chamber 7 and is full of liquid nitrogen, and stem stem 7 is divided into two parts by liquid nitrogen pallet 9, the gap of 0.2mm is there is between liquid nitrogen pallet 9 side wall surface and stem stem 7 internal face, both the push-and-pull of epoxy bar 2 had been beneficial to, also liquid nitrogen can be stoped to flow downward due to capillary action, therefore stem stem 7 upper part is full of liquid nitrogen, lower part does not have liquid nitrogen, now cold quantity transmission approach is that liquid nitrogen cold is transferred to cold head 10 by liquid nitrogen pallet 9 side and stem stem 7 thin-walled, by cold chain 1701 by cold quantity transmission to Dewar cold platform and detector, thus reach the object of cooled detector,
3) be linear relationship by the length Δ L of epoxy pull bar 2 and Δ Τ, namely
t in formula
0for liquid nitrogen temperature.Therefore engrave certain scale division value in region, epoxy pull bar 2 upper end 201, this scale division value represents
calibration, by pulling different scale to regulate different cooled with liquid nitrogen amount, realize the cryogenic temperature needed for accurately controlling.
4) in order to ensure required temperature measurement accuracy, cold head 10 has pasted thermometric platinum resistance 11 and heating resistor 15, wherein thermometric platinum resistance 11 is for monitoring the temperature of cold head 10, when cold head 10 temperature is too low, obtain heat Q by heating resistor 15 heating, heat is compensated, i.e. Q
always=Q
conduction+ Q
heating, wherein Q
heating=I
2rt, in formula, I is that heating resistor 15 passes into electric current, and R is the resistance of heating resistor, and t is the heating resistor electrified regulation time.By formula
thus reach accurate control survey temperature.
Advantage of the present invention is:
1) refrigeration structure of the present invention and implementation method are simply, and highly versatile is with low cost;
2) alternating temperature refrigeration structure of the present invention is easy to install and dismounting, can not affect the laser welding process of subsequent line vascular refrigerator cold finger and Dewar integral support;
3) the present invention adopts liquid nitrogen refrigerating mode to cool detector module on cold platform, devise a kind of structure by regulating liquid nitrogen surface and cold platform different distance amount to realize refrigeration temperature levels 85-130K, expand temperature-measuring range, realized the preliminary control of measuring tempeature by the push-and-pull of epoxy pull bar 2, heat compensated achieve temperature by glueing joint heating resistor 15 mode on cold head 10 and accurately control;
4) the present invention is owing to have employed liquid nitrogen test, and whole test process is not by refrigeration machine vibration of compressor and electromagnetic interference (EMI), and measuring accuracy is high, and result is stablized;
5) the present invention is applicable to the detector performance procedural test that have employed linear pattern pulse tube refrigerating machine and detector coupling integration formula Dewar component.
Accompanying drawing explanation
Fig. 1 is a kind of for temperature variation testing refrigeration structure schematic diagram in integrated form Dewar component.
In figure:
1-epoxy bull drilling and backward pulls;
2-epoxy pull bar;
201-epoxy pull bar scale part
3-liquid nitrogen seal cover board;
301-liquid nitrogen seal cover board rubber ring
4-shell;
5-liquid nitrogen stores chamber;
6-Dewar integral support small end seal cover board;
601-Dewar integral support small end seal cover board rubber ring;
7-stem stem;
8-fixed pole cap;
9-liquid nitrogen pallet;
10-cold head;
11-thermometric platinum resistance;
12-lead-in wire;
13-feed-through collar;
14-Dewar integral support seal base;
15-heating resistor;
The large end seal cover board of 16-Dewar integral support;
1601-Dewar integral support large end seal cover board rubber ring;
17-Dewar to be tested;
1701-Dewar cold chain to be tested;
1702-Dewar integral support to be tested;
1703-Dewar cold platform to be tested;
1704-Dewar gas outlet to be tested;
Fig. 2 is epoxy pull bar 2 and liquid nitrogen pallet 9 push-and-pull change in location schematic diagram, the reference position that Fig. 2 (A) is epoxy pull bar 2 movement; The temperature control position that Fig. 2 (B) is required for epoxy pull bar 2 moves to; .
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail:
Embodiment is the test of certain super long alignment infrared detector focal plane integrated form Dewar component detector performance, and as shown in Figure 1, its main implementation method is as follows:
1, in this patent for the preparation method of each parts of the refrigeration structure of temperature variation testing in a kind of integrated form Dewar component and assemble sequence as follows:
A) stem stem 7 is stainless steel 304 L material, and wall thickness is 0.15mm, and outside surface polishing, this part plays liquid nitrogen and stores refrigeration and lower solid conduction leakage heat and act on.Cold head 10 material is oxygen-free high conductivity type copper, and outside surface carries out polishing.The lower end of stem stem 7 is connected with adopting vacuum brazing mode between cold head 10, and after welding, leak detection leak rate reaches 7.0 × 10
-11torrl/s magnitude meets request for utilization;
B) liquid nitrogen stores the material in chamber 5 is stainless steel 304 L, and this piece surface carries out polishing and leaks heat to reduce radiation.By step a) in completed the stem stem 7 of vacuum welding top adopt laser bonding mode to be connected with the lower end that liquid nitrogen stores chamber 5, after welding, leak rate need reach 7.0 × 10
-11torrl/s magnitude meets request for utilization;
C) material of shell 4 is stainless steel 304 L, and this accessory inner surface carries out polishing and leaks heat to reduce radiation.Shell 4 and liquid nitrogen store between chamber 5 and adopt laser seal welding, and after welding, leak rate need reach 7.0 × 10
-11torrl/s magnitude;
D), on the lower surface using low temperature glue that thermometric platinum resistance 11 and heating resistor 15 are pasted cold head 10 respectively and side, thermometric platinum resistance 11 selects thermometric Pt resistance; Heating resistor adopts the resistance of 430 Ω.And with the copper-manganese of 0.1mm lead-in wire 12, carry out of temperature probe 11 with heating resistor 15 is connected, the copper-manganese of 0.1mm go between 12 one end be connected with heating resistor 15 with temperature probe 11 respectively, the other end wouldn't with feed-through collar 13 bonding wire.
E) material of epoxy pull bar 2 is epoxy bar, and the scale division value of certain length is carved with in the region, upper end 201 of epoxy pull bar 2, and this scale division value represents the relation that pull bar pulls length and the temperature difference.Liquid nitrogen pallet 9 material is that the lower part of epoxy pull bar 2 is processed boss by stainless steel 304 L., the lower boss of epoxy pull bar 2 is embedded in the center pit of liquid nitrogen pallet 9, and is fixed by the external thread in the middle of liquid nitrogen pallet with fixed pole cap 8.
F) by step e) the epoxy pull bar that assembles 2 slowly pushes in stem stem 7 with liquid nitrogen pallet 9 assembly;
G) be stainless steel material by the material of liquid nitrogen seal cover board 3, the liquid nitrogen filling orifice of a diameter 4mm is dug on this part left side, and there is a diameter centre slightly larger than the through hole of epoxy pull bar 2 so that epoxy pull bar 2 inserts.The vent port after liquid nitrogen volatilization is dug on right side, mainly plays a part to reduce liquid nitrogen vaporization amount.Diameter 3mm liquid nitrogen seal cover board rubber ring 301 is loaded to realize sealing in the draw-in groove of liquid nitrogen gland bonnet 3 lower surface;
H) feed-through collar 13 forms for kovar and beaded glass sinter, and Dewar integral support seal base 14 material is stainless steel 304 L, and it is towards suction surface polishing.Adopt laser bonding mode to be connected between feed-through collar 13 with Dewar integral support seal base 14, after welding, leak rate need reach 7.0 × 10
-11torrl/s magnitude;
I) epoxy bull drilling and backward pulls 1 material is epoxy bar, and epoxy bull drilling and backward pulls 1 is connected by low temperature bonding mode with epoxy pull bar 2.
2, in the present invention for the refrigeration structure of temperature variation testing in a kind of integrated form Dewar component and the assembling process of Dewar to be tested 17 as follows:
A) the rubber band seal groove of the lower surface of Dewar integral support small end seal cover board 6 is embedded in diameter 3mm Dewar integral support small end seal cover board rubber ring 601;
B) Dewar cold chain 1701 lower surface to be tested is placed the indium sheet of the 0.1mm thickness of a slice and cold head 10 lower surface size;
C) cold head 10 completing the temperature variation testing refrigeration structure of assembling is inserted by Dewar integral support 1702 small end of Dewar 17 to be tested, and Dewar cold chain 1701 lower surface to be tested and cold head 10 are fixed, need in the process to ensure that smooth and two the face close contacts of indium sheet are to reach good heat conductivility;
D) upper surface of Dewar integral support small end seal cover board 6 with Dewar integral support 1701 to be tested is sealed;
E) large for Dewar integral support end seal cover board 16 is realized sealing with the lower surface Dewar integral support large end seal cover board rubber ring of Dewar integral support 1701 to be tested;
F) heating plate 15 and temperature probe 11 are drawn out on feed-through collar 13 by the lead-in wire 12 of 0.1mm respectively, carry out heat compensation for cold head 10 place's temperature survey and employing type of heating;
G) Dewar integral support seal base 14 is carried out sealing with the bottom of Dewar integral support 1702 to assemble, now completed Dewar 17 to be measured and assembled with the sealing of temperature variation testing refrigeration structure.
3, to certain Dewar 17 to be measured carry out alternating temperature refrigeration test process as follows:
1) temperature variation testing implementation process calculates:
Region, epoxy pull bar 2 upper end 201 engraves certain scale division value, this scale division value
the calibration represented, in this refrigeration structure, stem stem 7 material is stainless steel 304 L, and the cross-sectional area of its average thermal conductivity at 77K-130K to be 5.9W.m/K, A be stem stem 7 thin-walled is 1.02 × 10
-3m
2, the length Δ L that Q is total leakage heat of Dewar 17 to be measured is 2.1W. epoxy pull bar 2 and Δ Τ is linear relationship, namely can be obtained by formula
Namely the scale part overall length of epoxy pull bar 2 is 129mm, by pulling different scale value to regulate different cooled with liquid nitrogen amount, and the preliminary cryogenic temperature realized needed for control; When 2 push-and-pull of epoxy pull bar due to minimum scale is millimeter and the 2 significant digits of reading time can not round up time, its probe temperature precision does not meet the demands, now can carry out heat compensation by the heating resistor 15 that cold head 10 pastes, because heating resistor resistance is 430 Ω, then by calculating known required heating current.In temperature variation testing process probe temperature and epoxy pull bar 2 length variations amount and heating resistor heat compensation amount as shown in table 1:
2) as follows for certain super long alignment integrated form Dewar 90K thermometric implementation process:
A) seal chamber that Dewar 17 to be tested and alternating temperature refrigeration structure form is vacuumized, treat that this inside cavity vacuum reaches 1 × 10
-4after Pa, graduated for quarter epoxy pull bar 2 is shifted onto bottom stem stem 7, now start slowly to pour into liquid nitrogen, and the numerical value of thermometric diode (diode that the substrate of Dewar 17 cold platform 1703 to be measured has gluedd joint) on real time record Dewar cold platform can monitor the whole temperature-fall period of cold platform, through t
1after the cooled with liquid nitrogen of Min time, in Dewar 17 to be measured, reach thermal equilibrium state, now record temperature T on Dewar cold platform
1for 85K and scale are 0mm;
Epoxy pull bar 2 physical length variable quantity and heating resistor heat compensation amount under table 1 different temperatures
| Probe temperature (K) | Epoxy pull bar length variations amount (mm) | Heating resistor adds heat (W) |
| 85 | 0 | 0 |
| 90 | 14 | 0.82 |
| 95 | 28 | 0.41 |
| 100 | 43 | 0 |
| 105 | 57 | 0.84 |
| 110 | 71 | 0.42 |
| 115 | 86 | 0 |
| 120 | 100 | 0.873 |
| 125 | 114 | 0.423 |
| 130 | 129 | 0 |
B) after liquid nitrogen vaporization in liquid nitrogen storage chamber 5 is complete, by Dewar cold platform temperature return to room temperature state, start again to test next time, in order to reach the working temperature of the 90K needed for test Dewar cold platform, need epoxy pull bar 2 be moved to 14mm position by calculating, and continuing to pour into liquid nitrogen, until after t2min, Dewar inside reaches thermal equilibrium, and the temperature T2 now recording Dewar detector substrate is 89.2K, and Δ L is 14mm.
C) due to epoxy pull bar 2 draw the scale of 14mm when operating time, required probe temperature fails to reach 90K, therefore heat compensation is needed to be 0.82W, by passing into the electric current of 0.044A to heating resistor 15 and monitoring the temperature of cold head 10 in case over-heating causes temperature to raise by thermometric platinum resistance 11.
Below just complete the refrigeration structure of temperature variation testing in a kind of integrated form Dewar component and achieve the method for integrated form Dewar process performance test, solving the detector performance procedural test problem of linear pattern pulse tube refrigerating machine and detector coupling integration formula Dewar component.
Claims (1)
1. the refrigeration structure for integrated form Dewar component temperature variation testing, it comprises epoxy bull drilling and backward pulls (1), epoxy pull bar (2), liquid nitrogen chamber seal cover board (3), shell (4), liquid nitrogen stores chamber (5), Dewar integral support small end seal cover board (6), stem stem (7), fixed pole cap (8), liquid nitrogen pallet (9), cold head (10), thermometric platinum resistance (11), lead-in wire (12), feed-through collar (13), Dewar integral support seal base (14), heating resistor (15), the large end seal cover board (16) of Dewar integral support, Dewar to be tested (17), it is characterized in that:
Described epoxy bull drilling and backward pulls (1) is gluedd joint by low temperature glue with the upper end of epoxy pull bar (2), realized sealing by liquid nitrogen seal cover board rubber ring (301) in the middle of liquid nitrogen chamber gland bonnet (3) and shell (4), shell (4) stores chamber (5) upper end with liquid nitrogen respectively, Dewar integral support small end seal cover board (6) is sealed by laser bonding, liquid nitrogen is stored chamber (5) and is sealed by laser bonding mode with stem stem (7), epoxy pull bar (2) lower end and liquid nitrogen pallet (9) are fixed by the screw thread of fixed pole cap (8), vacuum brazing mode is adopted to be connected between stem stem (7) with cold head (10), Low-temperature epoxy glue is used to glued joint thermometric platinum resistance (11) respectively on cold head (10) surface, heating resistor (15), thermometric platinum resistance (11) and heating resistor (15) are all connected by lead-in wire (12), feed-through collar (13) is connected by laser bonding with Dewar integral support seal base (14), realized sealing by Dewar integral support large end seal cover board rubber ring (1601) between integral support (1702) the bottom small end face of Dewar integral support large end seal cover board (16) and Dewar to be measured (17), Dewar to be tested (17) interior cold chain (1701) lower surface and cold head (10) fixedly make its close contact.
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| CN112198468A (en) * | 2020-09-11 | 2021-01-08 | 中国科学院金属研究所 | Waveguide method microwave dielectric material ultralow temperature complex electromagnetic parameter testing device |
| CN113410332A (en) * | 2021-05-27 | 2021-09-17 | 中国电子科技集团公司第十一研究所 | Chip bonding heating device and method thereof |
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| CN113410332B (en) * | 2021-05-27 | 2022-08-19 | 中国电子科技集团公司第十一研究所 | Chip bonding heating device and method thereof |
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| CN104549597B (en) | 2016-05-18 |
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