CN104549597B - A kind of refrigeration structure for integrated form Dewar component temperature variation testing - Google Patents
A kind of refrigeration structure for integrated form Dewar component temperature variation testing Download PDFInfo
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- CN104549597B CN104549597B CN201510029336.5A CN201510029336A CN104549597B CN 104549597 B CN104549597 B CN 104549597B CN 201510029336 A CN201510029336 A CN 201510029336A CN 104549597 B CN104549597 B CN 104549597B
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Abstract
The invention discloses a kind of refrigeration structure for integrated form Dewar component temperature variation testing, this structure comprises that epoxy bull drilling and backward pulls, epoxy pull bar, liquid nitrogen chamber seal cover board, shell, liquid nitrogen storage chamber, Dewar one support small end seal cover board, stem stem, fixed pole cap, liquid nitrogen pallet, cold head, thermometric RTD, lead-in wire, feed-through collar, Dewar one support seal base, heating resistor, the large end of Dewar one support seal cover board. Refrigeration structure of the present invention and implementation method are simple, and highly versatile is with low cost; The present invention has designed a kind of by regulating liquid nitrogen surface and cold platform different distance amount to reach the refrigeration structure of 85-130K to realize probe temperature, is realized probe temperature is accurately controlled by heat compensation.
Description
Technical field
The present invention relates to integrated form Dewar component encapsulation technology, specifically refer to a kind of for infrared Jiao of integrated form super long alignmentThe refrigeration structure that in plane Dewar component encapsulation process, detector is carried out temperature variation testing, it is applicable to adopt linear pattern pulseDetector performance procedural test in the integrated manifold type Dewar component of pipe refrigeration machine and detector.
Background technology
Along with the raising that spatial resolution and detector sensitivity etc. are required, infrared focal plane detector usually adopts lineThe mode of row or array splicing detector chip module is to improve resolution ratio. For adopting, infrared Jiao of this class connecting method is flatSurface detector is had relatively high expectations to operating temperature and temperature homogeneity, therefore usually adopts Dewar component and linear pattern pulse tube integratedCoupled modes are to meet the refrigeration demand of large cold, profound hypothermia.
In integrated form Dewar detector encapsulation process, be generally that Dewar, detector and linear pattern pulse tube refrigerating machine are completeBecome after encapsulation, adopt refrigeration machine start test probe performance, the shortcoming that test brings is in this way exactly: 1) cannot be trueDetermine the each module of detector after the multiple tracks techniques such as assembling, encapsulation, performance indications when its low-temperature working whether can with encapsulationBe consistent before; 2) if find in test process that certain detector module has problem, also need to complete seal weldConnect Dewar and the weld seam at refrigeration machine cold finger two ends open by machining mode milling, this not only can be because producing in repair processStress refrigeration machine cold finger and other parts are caused to damage, also can extend the detector encapsulation cycle; 3) adopt linear pattern arteries and veinsWhen washing pipe refrigeration machine is started shooting test, also can bring other problem: in the refrigerator compressor course of work, can produceRaw sustained vibration; The rotation of refrigerator compressor coil can cause electromagnetic interference, can increase the noise of detector, may affect testThe accuracy of result.
Summary of the invention
The refrigeration structure that the object of this invention is to provide temperature variation testing in a kind of integrated form Dewar component, has solved detectorWith the glitch-free test of detector performance in refrigeration machine coupling package process and shortening encapsulation periodic problem, meet detector performanceIn the requirement of encapsulation process performance control.
The refrigeration structure of a kind of integrated form Dewar component temperature variation testing of the present invention, as shown in Figure 1, comprises epoxy pull barHandle 1, epoxy pull bar 2, liquid nitrogen chamber seal cover board 3, shell 4, liquid nitrogen storage chamber 5, Dewar one support small end seal cover board 6, corePost 7, fixed pole cap 8, liquid nitrogen pallet 9, cold head 10, thermometric RTD 11, lead-in wire 12, feed-through collar 13, Dewar one support the sealing endPlate 14, heating resistor 15, Dewar one support large end seal cover board 16, Dewar to be tested 17. Epoxy bull drilling and backward pulls 1 and epoxy pull barGlued joint by low temperature glue 2 upper end, and liquid nitrogen chamber seal cover 3 is realized close with shell 4 is middle by liquid nitrogen seal cover board rubber ring 301Envelope, shell 4 supports small end seal cover board 6 and seals by laser weld with 5 upper ends, liquid nitrogen storage chamber, Dewar one respectively,Liquid nitrogen storage chamber 5 seals by laser weld mode with stem stem 7, and the screw thread of fixed pole cap 8 is by epoxy pull bar 2 lower ends and liquid nitrogen pallet9 is fixing, between stem stem 7 and cold head 10, adopts vacuum brazing mode to be connected, and uses low temperature epoxy glue glue respectively on cold head 10 surfacesConnect thermometric RTD 11, heating resistor 15, thermometric RTD 11, heating resistor 15 all connect by lead-in wire 12, feed-through collar 13 withDewar one supports seal base 14 and connects by laser weld, and Dewar one supports large end seal cover board 16 and Dewar 17 to be measuredOne support between 1702 bottom small end faces and to support large end seal cover board rubber ring 1601 by Dewar one and realize sealing, to be measuredExamination Dewar 17 interior cold chain 1701 lower surfaces and cold head 10 fixedly make its close contact.
Implementation method of the present invention is as follows:
The blast pipe of Dewar to be tested 1704 is connected by flange with exhaust unit, its cavity is vacuumized, make testDevice internal vacuum reaches 1 × 10-4When Pa. Liquid nitrogen is slowly injected in liquid nitrogen storage chamber, through after a period of time, in DewarDetector cold platform reaches thermal balance gradually, and now Dewar internal vacuum reaches 1 × 10-5Pa. Can realize with this understanding DuWatt and the radiation of temperature variation testing refrigeration structure internal solids conductive heat leakage and each parts to leak heat constant. Therefore can be public by heat conductionFormulaDerive, obtainWherein, λ is the thermal conductivity factor of stem stem 7, and A is stem stem 7 thin-walledsCross-sectional area, QLeak heatFor Dewar 17 leaks heat, Δ L is the length variations amount of epoxy pull bar 2 push-and-pulls. As shown in Figure 2, T1For ringWhen oxygen pull bar 2 is shifted liquid nitrogen pallet 9 bottom of stem stem 7 onto by diode measured temperature value on Dewar 17 cold platforms to be measured, T2ForWhen on epoxy pull bar 2 is moved liquid nitrogen pallet 9 to stem stem 7 the top by diode measured temperature value on Dewar 17 cold platforms to be measured, because ofThis, Δ T=(T2-T0)-(T1-T0)＝T2-T1,T0For liquid nitrogen temperature. Can be learnt length Δ L and the Δ of epoxy pull bar 2 by formulaΤ is linear relationship. Therefore engrave certain scale division value in 201 regions, upper end of epoxy pull bar 2, this scale division value has representedCalibration, by regulating liquid nitrogen surface and cold platform different distance amount, realize larger temperature-measuring range.
In order to ensure required temperature measurement accuracy, on cold head 10, paste thermometric RTD 11 and heating resistor 15, wherein surveyTemperature RTD 11, for monitoring the temperature of cold head 10, when cold head 10 temperature are when too low, can obtain heat by heating resistor 15 heatingAmount Q compensates heat, i.e. QAlways＝QConduction+QHeating, wherein QHeating＝I2R, in formula, I is that heating resistor 15 passes into electric current, R isThe resistance of heating resistor. By formulaThereby reach required measurement temperature.
The control step of measurement temperature of the present invention is as follows:
1) seal chamber being made up of Dewar to be tested and temperature variation testing refrigeration structure is vacuumized, at this cavityInner vacuum reaches 1 × 10-4After Pa, shift graduated quarter epoxy glue pull bar 2 onto stem stem 7 bottoms, now start to pour into liquid nitrogen,And the numerical value of thermometric diode (diode having gluedd joint on Dewar 17 chip substrates to be measured) on real time record Dewar cold platformCan monitor whole temperature-fall period, at process t1After the cooled with liquid nitrogen of Min time, in Dewar 17 to be measured, reach thermal equilibrium state,Now record temperature T on Dewar cold platform1With scale L1；
2) after liquid nitrogen storage chamber 5 interior liquid nitrogen vaporization are complete, the temperature of Dewar cold platform returned to room temperature state, then startTest, moves epoxy pull bar 2 to L2 scale, and continues to pour into liquid nitrogen, until t next time2After min, it is flat that Dewar inside reaches heatWeigh, now record the temperature T of Dewar detector substrate2. as shown in Figure 1, in the time that epoxy pull bar 2 is moved L2 scale to, whole liquid nitrogenStorage is full of liquid nitrogen in chamber 7, and stem stem 7 is divided into two parts by liquid nitrogen pallet 9, liquid nitrogen pallet 9 side wall surfaces and stem stem 7 internal faces itBetween there is the gap of 0.2mm, be both beneficial to the push-and-pull of epoxy bar 2, also can flow downward because capillarity stops liquid nitrogen, therefore coreOn post 7, part is full of liquid nitrogen, and lower part does not have liquid nitrogen, and now cold quantity transmission approach is that liquid nitrogen cold is by liquid nitrogen pallet 9 sidesAnd stem stem 7 thin-walleds are transferred to cold head 10, by cold chain 1701 by cold quantity transmission to Dewar cold platform and detector, thereby reach coldBut the object of detector;
3) be linear relationship by length Δ L and the Δ Τ of epoxy pull bar 2,T in formula0For liquid nitrogen temperatureDegree. Therefore engrave certain scale division value in 201 regions, epoxy pull bar 2 upper end, this scale division value has represented'sCalibration, by pulling different scales to regulate different cooled with liquid nitrogen amounts, realizes and accurately controls required cryogenic temperature.
4) in order to ensure required temperature measurement accuracy, thermometric RTD 11 and heating resistor 15 on cold head 10, have been pasted, whereinThermometric RTD 11 is for monitoring the temperature of cold head 10, when cold head 10 temperature are when too low, can obtain by heating resistor 15 heatingHeat Q, compensates heat, i.e. QAlways＝QConduction+QHeating, wherein QHeating＝I2Rt, in formula, I is that heating resistor 15 passes into electricityStream, the resistance that R is heating resistor, t is the heating resistor energising heat time. By formulaThereby reachAccurately control survey temperature.
Advantage of the present invention is:
1) refrigeration structure of the present invention and implementation method are simple, and highly versatile is with low cost;
2) alternating temperature refrigeration structure of the present invention is easy to install and dismounting, can not affect follow-up linearity vascular refrigerator cold fingerLaser welding process with the support of Dewar one;
3) the present invention adopts the detector module on the cooling cold platform of liquid nitrogen refrigerating mode, has designed one and has passed through regulator solutionNitrogen face and cold platform different distance amount realize the structure of cryogenic temperature scope 85-130K, have expanded temperature-measuring range, draw by epoxyThe push-and-pull of bar 2 realizes the preliminary control of measuring temperature, by glued joint heating resistor 15 modes on cold head 10, heat is mendedRepay and realized temperature and accurately control;
4) the present invention is owing to having adopted liquid nitrogen test, and whole test process is not done by refrigeration machine vibration of compressor and electromagnetismDisturb, measuring accuracy is high, and result is stable;
5) the present invention has been applicable to adopt the spy of linear pattern pulse tube refrigerating machine and detector coupling integration formula Dewar componentSurvey the procedural test of device performance.
Brief description of the drawings
Fig. 1 is a kind of for temperature variation testing refrigeration structure schematic diagram in integrated form Dewar component.
In figure:
1-epoxy bull drilling and backward pulls;
2-epoxy pull bar;
201-epoxy pull bar scale part
3-liquid nitrogen seal cover board;
301-liquid nitrogen seal cover board rubber ring
4-shell;
5-liquid nitrogen storage chamber;
6-Dewar one supports small end seal cover board;
601-Dewar one supports small end seal cover board rubber ring;
7-stem stem;
8-fixed pole cap;
9-liquid nitrogen pallet;
10-cold head;
11-thermometric RTD;
12-lead-in wire;
13-feed-through collar;
14-Dewar one supports seal base;
15-heating resistor;
16-Dewar one supports large end seal cover board;
1601-Dewar one supports large end seal cover board rubber ring;
17-Dewar to be tested;
1701-Dewar cold chain to be tested;
1702-Dewar one to be tested supports;
1703-Dewar cold platform to be tested;
1704-Dewar blast pipe to be tested;
Fig. 2 is epoxy pull bar 2 and liquid nitrogen pallet 9 push-and-pull change in location schematic diagrames, and what Fig. 2 (A) moved for epoxy pull bar 2 risesBeginning position; Fig. 2 (B) moves to needed temperature control position for epoxy pull bar 2; .
Detailed description of the invention
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail:
Embodiment is certain super long alignment infrared detector focal plane integrated form Dewar component detector performance test, as accompanying drawingShown in 1, its main implementation method is as follows:
1, in this patent for the preparation of each parts of the refrigeration structure of temperature variation testing in a kind of integrated form Dewar componentMethod and assemble sequence are as follows:
A) stem stem 7 is stainless steel 304 L material, and wall thickness is 0.15mm, and outer surface polishing, and this part plays liquid nitrogenStorage refrigeration and lower solid conduction are leaked heat and effect. Cold head 10 materials are oxygen-free high conductivity type copper, and outer surface carry out polishing placeReason. Between the lower end of stem stem 7 and cold head 10, adopt vacuum brazing mode to be connected, after welding, leak detection leak rate reaches 7.0 × 10- 11Torrl/s magnitude meets instructions for use;
B) material in liquid nitrogen storage chamber 5 is stainless steel 304 L, and this piece surface carries out polishing and leaks heat to reduce radiation.The top of stem stem 7 and the lower end in liquid nitrogen storage chamber 5 that step have been completed to vacuum welding in a) adopt laser weld mode to be connected,After welding, leak rate need reach 7.0 × 10-11Torrl/s magnitude meets instructions for use;
C) material of shell 4 is stainless steel 304 L, and this accessory inner surface carries out polishing and leaks heat to reduce radiation. Shell4 and liquid nitrogen storage chamber 5 between adopt laser seal welding, welding after leak rate need reach 7.0 × 10-11Torrl/s magnitude;
D) use low temperature glue thermometric RTD 11 and heating resistor 15 to be pasted respectively to lower surface and the side of cold head 10Upper, thermometric RTD 11 is selected thermometric Pt resistance; Heating resistor adopts the resistance of 430 Ω. And with the copper-manganese lead-in wire 12 of 0.1mm willTemperature transducer 11 is connected with heating resistor 15, one end of the copper-manganese of 0.1mm lead-in wire 12 respectively with temperature transducer 11Be connected with heating resistor 15, the other end wouldn't with feed-through collar 13 bonding wires.
E) material of epoxy pull bar 2 is epoxy bar, and dividing of certain length is carved with in 201 regions, upper end of epoxy pull bar 2Degree value, this scale division value has represented that pull bar pulls the relation of length and the temperature difference. Liquid nitrogen pallet 9 materials are that stainless steel 304 L. is by epoxyThe lower part processing boss of pull bar 2, embeds the lower boss of epoxy pull bar 2 in the centre bore of liquid nitrogen pallet 9, and uses fixed pole cap8 fix the external screw thread in the middle of liquid nitrogen pallet.
F) the epoxy pull bar 2 and liquid nitrogen pallet 9 assemblies that step e) are assembled slowly push in stem stem 7;
G) be stainless steel material by the material of liquid nitrogen seal cover board 3, the liquid nitrogen note of a diameter 4mm is dug on this part left sideHand-hole, there is through hole that a diameter is slightly larger than epoxy pull bar 2 centre so that epoxy pull bar 2 inserts. Right side is dug after liquid nitrogen volatilizationSteam vent, mainly plays a part to reduce liquid nitrogen vaporization amount. In the draw-in groove of liquid nitrogen seal cover 3 lower surfaces, pack diameter 3mm liquid nitrogen intoSeal cover board rubber ring 301 is to realize sealing;
H) feed-through collar 13 is for kovar and bead sintering form, and it is stainless steel that Dewar one supports seal base 14 materials304L, it is towards suction surface polishing. Feed-through collar 13 and Dewar one support between seal base 14 and adopt laser weld mode to connectConnect, after welding, leak rate need reach 7.0 × 10-11Torrl/s magnitude;
I) epoxy bull drilling and backward pulls 1 material is epoxy bar, and epoxy bull drilling and backward pulls 1 connects by low temperature bonding mode with epoxy pull bar 2Connect.
2, in the present invention for the refrigeration structure of temperature variation testing in a kind of integrated form Dewar component and Dewar to be tested 17Assembling process is as follows:
A) the elastic tape seal groove of the lower surface of Dewar one support small end seal cover board 6 is embedded in to diameter 3mm DewarOne supports small end seal cover board rubber ring 601;
B) by the indium of the 0.1mm thickness of Dewar cold chain 1701 lower surfaces placement a slices to be tested and cold head 10 lower surface sizesSheet;
C) cold head 10 of the temperature variation testing refrigeration structure that completes assembling is propped up by the Dewar one of Dewar 17 to be testedSupport 1702 small ends and insert, and Dewar cold chain to be tested 1701 lower surfaces and cold head 10 are fixed, in this process, need to ensureSmooth and two the face close contacts of indium sheet are to reach good heat conductivility;
D) Dewar one being supported to small end seal cover board 6 carries out close with the upper surface of Dewar one support 1701 to be testedEnvelope;
E) Dewar one is supported to large end seal cover board 16 and support 1701 lower surface Dewar with Dewar one to be testedOne supports large end seal cover board rubber ring and realizes sealing;
F) heating plate 15 and temperature transducer 11 are drawn out to respectively on feed-through collar 13 by the lead-in wire 12 of 0.1mm, forCold head 10 places temperature survey and employing mode of heating carry out heat compensation;
G) Dewar one is supported to seal base 14 and seal assembling with the bottom of Dewar one support 1702, nowCompleting Dewar 17 to be measured assembles with the sealing of temperature variation testing refrigeration structure.
3, certain Dewar 17 to be measured is carried out to the process of alternating temperature refrigeration test as follows:
1) temperature variation testing implementation process is calculated:
201 regions, epoxy pull bar 2 upper end engrave certain scale division value, this scale division valueRepresented pointDegree, in this refrigeration structure, stem stem 7 materials are stainless steel 304 L, and its average thermal conductivity at 77K-130K is 5.9W.m/K, and A isThe cross-sectional area of stem stem 7 thin-walleds is 1.02 × 10-3m2, Q is the total length of heat for 2.1W. epoxy pull bar 2 of leaking of Dewar 17 to be measuredΔ L and Δ Τ are linear relationship, can be obtained by formula The scale part overall length that is epoxy pull bar 2 is 129mm, by pulling different scale values to regulate different cooled with liquid nitrogen amounts, preliminaryRealize and control required cryogenic temperature; In the time of 2 push-and-pull of epoxy pull bar, be after millimeter and the decimal point of reading two due to minimum scaleCan not round up time, its probe temperature precision does not meet the demands, now can be by the thermoelectricity that adds pasting on cold head 10 when the positionHeat compensation is carried out in resistance 15, because heating resistor resistance is 430 Ω, by calculating known required heating current. Temperature variation testingIn process, probe temperature and epoxy pull bar 2 length variations amounts and heating resistor heat compensation amount are as shown in table 1:
2) as follows for certain super long alignment integrated form Dewar 90K thermometric implementation process:
A) seal chamber Dewar 17 to be tested and alternating temperature refrigeration structure being formed vacuumizes, and treats this inside cavity vacuumReach 1 × 10-4After Pa, shift graduated quarter epoxy pull bar 2 onto stem stem 7 bottoms, now start slowly to pour into liquid nitrogen, and in real timeRecord the number of the thermometric diode (diode having gluedd joint on the substrate of Dewar 17 cold platforms 1703 to be measured) on Dewar cold platformValue can be monitored the whole temperature-fall period of cold platform, at process t1After the cooled with liquid nitrogen of Min time, in Dewar 17 to be measured, reach heatPoised state, now records temperature T on Dewar cold platform1For 85K and scale are 0mm;
Epoxy pull bar 2 physical length variable quantities and heating resistor heat compensation amount under table 1 different temperatures
| Probe temperature (K) | Epoxy pull bar length variations amount (mm) | Heating resistor adds heat (W) |
| 85 | 0 | 0 |
| 90 | 14 | 0.82 |
| 95 | 28 | 0.41 |
| 100 | 43 | 0 |
| 105 | 57 | 0.84 |
| 110 | 71 | 0.42 |
| 115 | 86 | 0 |
| 120 | 100 | 0.873 |
| 125 | 114 | 0.423 |
| 130 | 129 | 0 |
B) after liquid nitrogen storage chamber 5 interior liquid nitrogen vaporization are complete, Dewar cold platform temperature is returned to room temperature state, then under startingOnce test, in order to reach the operating temperature of the required 90K of test Dewar cold platform, need move epoxy pull bar 2 to by calculating14mm position, and continue to pour into liquid nitrogen, until after t2min, Dewar inside reaches thermal balance, now record Dewar detector substrateTemperature T 2 be 89.2K, Δ L is 14mm.
C) due to epoxy pull bar 2 draw the scale of 14mm in when operation time, required probe temperature fails to reach 90K, because ofThis needs heat compensation is 0.82W, by heating resistor 15 being passed into the electric current of 0.044A and monitoring by thermometric RTD 11The temperature of cold head 10 is in case over-heating causes temperature to raise.
Below just completed the refrigeration structure of temperature variation testing in a kind of integrated form Dewar component and realized integrated form DewarThe method of process performance test, has solved the detector of linear pattern pulse tube refrigerating machine and detector coupling integration formula Dewar componentPerformance procedural test problem.
Claims (1)
1. for a refrigeration structure for integrated form Dewar component temperature variation testing, it comprises epoxy bull drilling and backward pulls (1), epoxy pull bar(2), liquid nitrogen chamber seal cover board (3), shell (4), liquid nitrogen storage chamber (5), Dewar one support small end seal cover board (6), stem stem(7), fixed pole cap (8), liquid nitrogen pallet (9), cold head (10), thermometric RTD (11), lead-in wire (12), feed-through collar (13), Dewar oneBody supports seal base (14), heating resistor (15), Dewar one supports large end seal cover board (16), Dewar to be tested (17),It is characterized in that:
Glued joint by low temperature glue described epoxy bull drilling and backward pulls (1) and the upper end of epoxy pull bar (2), liquid nitrogen chamber seal cover board (3) withRealize sealing by liquid nitrogen seal cover board rubber ring (301) in the middle of shell (4), shell (4) respectively with upper end, liquid nitrogen storage chamber (5),Dewar one supports small end seal cover board (6) and seals by laser weld, and liquid nitrogen storage chamber (5) is passed through to swash with stem stem (7)Photocoagulation mode seals, and the screw thread of fixed pole cap (8) is by fixing to epoxy pull bar (2) lower end and liquid nitrogen pallet (9), and stem stem (7) is with coldBetween head (10), adopt vacuum brazing mode to connect, use low temperature epoxy glue to glued joint respectively thermometric RTD on cold head (10) surface(11), heating resistor (15), thermometric RTD (11) and heating resistor (15) are all connected by lead-in wire (12), feed-through collar (13) andDewar one supports seal base (14) and connects by laser weld, and Dewar one supports large end seal cover board (16) with to be testedThe one of Dewar (17) supports between the small end face of (1702) bottom and supports large end seal cover board rubber ring (1601) by Dewar oneRealize sealing, the interior cold chain of Dewar to be tested (17) (1701) lower surface and cold head (10) fixedly make its close contact.
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| CN112198468B (en) * | 2020-09-11 | 2022-01-14 | 中国科学院金属研究所 | Waveguide method microwave dielectric material ultralow temperature complex electromagnetic parameter testing device |
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| JP5033772B2 (en) * | 2008-04-28 | 2012-09-26 | 株式会社日立製作所 | Sample cryopreservation container and biological transport support system |
| CN102507012B (en) * | 2011-11-10 | 2013-04-17 | 中国科学院上海技术物理研究所 | Heat load test method and device for split type dewar at different refrigeration temperatures |
| CN102435321B (en) * | 2011-11-10 | 2014-08-13 | 中国科学院上海技术物理研究所 | High-compatibility multi-functional test Duvel for separate Dewar hot load test |
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