CN203071139U - Stereoscopic display electrode - Google Patents
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- CN203071139U CN203071139U CN 201320020750 CN201320020750U CN203071139U CN 203071139 U CN203071139 U CN 203071139U CN 201320020750 CN201320020750 CN 201320020750 CN 201320020750 U CN201320020750 U CN 201320020750U CN 203071139 U CN203071139 U CN 203071139U
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Abstract
The utility model discloses a stereoscopic display electrode. The stereoscopic display electrode comprises a transparent tin-film display electrode and a stereoscopic auxiliary electrode connected with the transparent tin-film display electrode. The stereoscopic display electrode is characterized in that the stereoscopic auxiliary electrode includes a molded insulating layer and a closed insulating layer fixed on the upper end of the molded insulating layer; a groove used for accommodating an electric conduction portion is arranged inside the molded insulating layer; and the stereoscopic auxiliary electrode is communicated with the transparent tin-film display electrode through at least one communication hole arranged at the lower end of the molded insulating layer. According to the stereoscopic display electrode of the utility model which has low resistance and high transparency, through adjusting the thickness and property of materials of the stereoscopic auxiliary electrode, low resistance and minimization in width, uniformity in conductivity, bendability, and complete isolation from display materials can be realized with easiness. With the stereoscopic display electrode of the utility model adopted, the resistance of the electrode can be effectively reduced; redundant space of electrodes inside a display can be fully utilized; the resolution, refresh rate and contrast of the display can be improved.
Description
Technical field
The utility model relates to a kind of stereo display electrode.The structure of this stereo display electrode can be applied to liquid crystal display device, electric paper display and electroluminescent display, particularly active-matrix liquid crystal display, passive cholesteric type liquid crystal electron paper, passive twisted-nematic phase (TN, Twisted Nematic) and the back plate electrode part of supertwist nematic phase (STN, Super Twisted Nematic) display, active electrochromic display device (ECD), electrophoretype Electronic Paper and organic light emission.
Background technology
Since the application popularization of flat-panel monitor, its display quality improves year by year, and contrast, response speed and resolution are brought more and more abundanter visual enjoyment to people.These progressive with improve except outside the Pass the innovation with display mode has, also the performance boost with show electrode has very close and complicated relation.Be accompanied by the objective demand of the flexibility of flat-panel monitor, also more and more higher to the expectation of the low temperatureization of show electrode manufacturing process, simplification that manufacturing equipment is abandoned vacuum environment.The low resistance high permeability of show electrode performance and the requirement of miniaturization are also more and more urgent.Up to now, the electrode that obtains to widely apply in display has a variety of, as the inorganic, metal oxide transparency electrode (as ITO, Indium Tin Oxides, the mixture of indium oxide and tin oxide), metal film electrode (as aluminium, chromium and copper), organic film electrode are (as CNT, Carbon Nanotube, carbon nano-tube, Graphene and poly-3,4-enedioxy thiophene: poly styrene sulfonate, (PEDOT:PSS, Poly(2,3-dihydrothieno-1,4-dioxin)-poly(styrenesulfonate)).The show electrode that these materials are produced, because of technology, structural difference, performance difference is very big, and different types of monitor resolution, response speed, brightness and contrast are had significant effects.
In different flat-panel monitors, show electrode is required also different.Mention (patent publication No. is CN101393362A) in the utility model patent of Hitachi Display unit Co., Ltd., a substrate in the centre in a pair of substrate that liquid crystal layer disposes relatively has pixel electrode and opposite electrode, by special electrode structure, improve viewing angle characteristic and the response speed of display.Concrete structure is to have used metal and inorganic, metal oxide membrane electrode in active array type LCD, many drain signal line of forming many signal lines and being set up in parallel across with these signal lines.Secondly, each pixel region has: by the sweep signal from the signal line make its action thin-film transistor, be provided to from the pixel electrodes of the picture signal of the holding wire that drains and be provided the above-mentioned opposite electrode that becomes the signal of benchmark with respect to this picture signal through this thin-film transistor.
In recent years, along with the quick progress of new material research and development, organic components and parts receive increasing concern, and pure organic electronic devices and components also constantly come out.Organic electronic device has excellent flexibility and portability, therefore expects that the practical value of organic based device will further improve.In the demonstration field, also the device that energetically organic material has been constituted is studied, as organic thin-film transistor (OTFT, Organic thin-film transistor), Organic Light Emitting Diode (OLED, Organic Light-emitting Diode) with machine electrode is arranged.Early stage synthetic organic material, great majority are insulating material, but the organic substance of some special constructions shows good conductivity.This provides solid foundation for the characteristic of utilizing organic compound such as flexibility and portability, therefore, has machine electrode to be come out by active development.The utility model patent of Kyushu University (publication number is CN102194998A) provides a kind of organic semiconductor device and structure and the manufacture method of machine electrode is arranged, the flexible that has the use of machine electrode to improve device.But have machine electrode that its extremely difficult improved shortcoming is also arranged, be difficult to form the membrane electrode that compares favourably with metal electrode, formation rule and uniform distribution of resistance and existing display material compatibility are bad.These all limit the extensive use of machine electrode.
Resistance and transmitance are two of paramount importance parameters of show electrode, and constituting the electrode film of various flat-panel monitors and the performance of flat-panel display device has very close contacting.Improve switching effect as needing to approach zero contact resistance among the OTFT, amorphous silicon (a-Si, amorphous Silicon) TFT of Zhi Zuoing needs lithography performance to improve aperture opening ratio and response speed well, OLED needs and each dielectric layer mates to improve the work function of luminous efficiency, particularly electrode layer and the coupling of each layer mutually.For satisfying these requirements, using multiple material structure compound or that improve electrode is efficient ways.As nanometer stereo electrod or metal material and organic material, metal and the combination of ITO electrode etc., below the brief overview once structure of these methods and the limitation of existence.In novel flat-plate displays such as Electronic Paper, the performance of low resistance and high permeability is one of important channel that promotes display performance.Mention in the encapsulated electrodes publication number that is used for organic device is the utility model patent of CN101300690A, contain the multilayer conductive film, but this encapsulated electrodes can't use in the display device, main cause is transmitance and stability.In present low resistance electrode research, all can not possess the characteristic of low resistance and high permeability two aspects simultaneously, also there are a lot of limitation in existing method.Many electrodes are difficult to form the membrane electrode that compares favourably with metal electrode, and formation rule and uniform distribution of resistance and existing display material compatibility are bad.
About stereo electrod, existing utility model is that nanometer scale material growth aspect is innovated.Use simple ito thin film to prepare stereo electrod, see that publication number is the utility model patent of CN101931053A.Its practical novel point is to comprise a conductive layer and plural ITO electrically conductive nano-column, be formed at the surface of conductive layer, and the tuning range of its tin indium oxide nano-pillar is 10nm to 1500nm, and the optimum length tuning range that is applied to organic solar batteries is 50nm to 200nm.When its practical novel indium-tin oxide electrode with stereochemical structure is applied to organic photoelectric assembly (as: organic solar batteries, Organic Light Emitting Diode etc.), can increase the contact area of active layers and electrode, effectively promote the efficient that electric current injects or derives.
Stereo electrod in that nano level yardstick is made also can be used for improving the electron-hole pair number, makes the minimization of loss of electron-hole pair and the charge storage of ultracapacitor and charging response speed are improved.Electrode system and the electric equipment that comprises described electrode system by described method manufacturing.The step that described method comprises: have the porous templates of nano-pore in the formation of first electrode, wherein the diameter of nano-pore is that 5nm is to 500nm; In nano-pore, form shaft-like/tubulose second electrode that is connected with first electrode.The deficiency that exists is the contact area that kind electrode is merely able to improve the interface, can't effectively utilize the space of flat-panel monitor, produces low-resistance show electrode.
Although these utility models in other field such as organic solar cell and organic diode of giving out light can improve derivation efficient, need extremely low-resistance lead portion to use in demonstration fields such as liquid crystal, Electronic Paper.Main cause is that the resistance of ITO show electrode is still very big, is difficult to make the electrode of micron dimension thickness in actual applications, can't reduce lead resistance.The shortcoming that unrestrictedly increases ito thin film thickness is: significantly lengthen along with ito thin film thickness increases the plated film time, precision and the Production Time of photo-mask process all be difficult to control, can't reach volume production.
Fast development along with electronic technology, the resolution of various flat-panel monitors, reaction speed all constantly promote and improve, therefore need transmission and the semaphore that receives to increase thereupon, but the overall dimensions of display can't increase, even needs on the contrary to do littler and littler in the part of display thickness.So on limited space, the signal that transmission is a large amount of with reception, the service wire electrode that is provided between display and external circuit requires more and more meticulousr.The conductivity of these electrodes requires more and more higher, and particularly picture needs high speed to switch in video demonstration and 3D demonstration.
In modern flat-panel display device, TFT is the infrastructure component that is most widely used.For some application, especially for large area display, with the backboard switching circuit, adopt the TFT circuit of main flow amorphous silicon technology may cost too high such as the not high display of switching speed.Expensive capital-intensive silicon production equipment input and complicated high temperature, the high vacuum photoetching preparation technology under the required strict controlled environment of these circuits of preparation of mainly coming from of a-Si.Because adopt conventional photoetching process to prepare the complexity of the expensive and production process of a-Si circuit, people grow with each passing day to the interest of OTFT.Organic material not only provides the possibility that adopts solution cheaply or liquid production technology, but also attractive engineering properties is provided, such as in the densification aspect the physics, lightweight and flexible.The particularly simplification of production process, the environmentally friendly characteristic that the device that expires is handled is by industry is favored.
Have much about improving and improve the utility model of electrode material and the electrode structure of OTFT performance, as following patent US2006273303A1, US2009121618A1, disclosed content among the CN101228645A.The structure of these OTFT, usually by be positioned at conductive grid, source electrode and drain electrode on the substrate, with source electrode and grid with drain separated electric insulation gate dielectric layer and contact with gate dielectric layer and the semiconductor layer of source electrode and the bridge joint that drains is formed.Material for the preparation of source electrode and drain electrode is influential to the performance of OTFT.Under the situation of the work function P type semiconductor of these materials should with semi-conductive highest occupied molecular orbital (HOMO, Highest Occupied Molecular Orbital) identical or very approaching, under the semi-conductive situation of n type should with semi-conductive lowest unoccupied molecular orbital (LUMO, Lowest Unoccupied Molecular Orbital) identical or very approaching, should be identical with semi-conductive LUMO or very approaching under the semi-conductive situation of n type, so that electric charge injects and do not have potential barrier when extracting.In order to obtain optimized running, require contact resistance ground or do not have, if the resistance of contact electronics, so in order to inject and to extract charge carrier, in the high electric field strength of electrode place needs.Empirical evidence, conducting polymer are that organic semi-conductor is effectively selected.
For above-mentioned appositional pattern organic molecule used for electronic device material, because organic material has many advantages, as can ink jet printing and work function matching height, adopted by many utility models, a lot of utility models being arranged in the effect of attempting improving film forming, is the utility model patent of CN102318450A referring to publication number.Particularly in the OLED display device, in order to use PEDOT:PSS for above-mentioned appositional pattern organic molecule used for electronic device material, because organic material has many advantages, as can ink jet printing and work function matching height, adopted by many utility models, a lot of utility models are arranged in the effect of improving film forming, by provide many negative electrode undercutting dividing plates in substrate, determine a plurality of wells to separate adjacent cathode line by memory bank, around each well, construct and stay the cathode layer in the base position exposure of well.The edge of memory bank or face are gradually reduced to the angle of 10 to 40 degree on substrate surface.Memory bank presents hydrophobic surface, so that the solution-wet of the organic material that they are not deposited, and therefore assist and hold deposition materials in well.Although this have machine electrode to improve well, the performance of OLED display, but owing to adopt laminated construction, can not be applied in the liquid display devices such as LCD, its reason one be its electrode structure be opaque or transmitance very low, the 2nd, electrode material form to pollute liquid crystal easily in memory bank.
Introduce the low resistance show electrode that a kind of transparent ITO electrode and metal electrode are formed at last.In the Japan Patent of publication number JP4171420A, provide the concrete manufacture method of kind electrode, at the two ends of transparency electrode metal film electrode is set.The subject matter that kind electrode brings is that the common luminance factor of metal electrode is higher, and metal film uses different etching materials with ITO in photoetching process, the Environmental costs height, and technology difficulty is big.In many displays, need add the contrast that light shield layer is avoided its reflections affect display.In addition, for fear of the metallic pollution liquid crystal material, can only be by the method for whole protective mulch, or select the metal more stable to liquid crystal, as copper, aluminium etc.Require film to have very high hardness simultaneously, prevent the damage in the course of processing.Utilizing the metallic film method is the process of subtractive processes, and raw material, environmental pressure and energy consumption are all very high.Simultaneously because the physical characteristic of film self, the thickness of tens of or hundreds of nanometers has strict requirement to the clean level of electrode and the shape of lines, only in this way could guarantee the reliability of electrode, prevents the generation of galvanic corrosion phenomenon.
In order to address the above problem, further improve the performance of display, not only need the improvement of display material, device architecture self, the performance of show electrode also needs further lifting.Therefore, this area is needed a kind of electrode technology of novelty badly, realizes the show electrode that the low resistance height sees through, to satisfy the demonstration field to the high standard requirement of the more and more polynary change of show electrode.
The utility model content
According to the technical problem of above-mentioned proposition, and provide a kind of stereo display electrode and manufacture method thereof.
The technological means that the utility model adopts is as follows:
A kind of stereo display electrode, comprise transparent membrane show electrode and the three-dimensional auxiliary electrode that is connected with described transparent membrane show electrode, it is characterized in that: described three-dimensional auxiliary electrode comprises the profiled insulation layer and is fixed on the sealing insulating barrier of described profiled insulation layer upper end, is provided be used to the groove that holds conductive part in the described profiled insulation layer; Described three-dimensional auxiliary electrode is connected with described transparent membrane show electrode by at least one intercommunicating pore that described profiled insulation layer lower end arranges.
Preferably, described conductive part is made of metal nanoparticle or conducting polymer composite.
Preferably, but the material of described profiled insulation layer is the rigid organic material of photoetching.
Preferably, the material of described sealing insulating barrier is printable and with the material of described profiled insulation layer the cohesive material of good adhesion is arranged.
The auxiliary stereo electrod that the utility model provides is connected with the transparent membrane show electrode by the bottom of profiled insulation layer, constitutes the stereo display electrode of low resistance high permeability.The electric conducting material of finalizing the design at last in the profiled insulation layer is nano metal class or macromolecule conducting material, and the material in the electrode forming process is nano metal printing ink or the organic conductive macromolecule solution of ink-jet printable.The purpose of profiled insulation layer is the overall dimension of molded electrode material, constitutes the three-dimensional auxiliary electrode of three-dimensional shape, and prevents electrode material pollution displaying material jointly with the sealing insulating barrier, as liquid display materials such as liquid crystal.But the material of profiled insulation layer is the rigid organic material of photoetching, but but but the rigid organic material of photoetching refer to be formed by positivity photoetching material or negativity photoetching material, the profiled insulation layer must be to become to be grouped into by solidifying the stable colloid in back, material self will have the effect that stops moisture to stop oxygen to infiltrate, prevent auxiliary stereo electrod moisture, oxygen through the time change, the galvanic corrosion phenomenon appears.Prevent that simultaneously display from machining in back and the use moisture, oxygen and separating out, make display material aging, avoid influencing display performance, as the PSA030 of Taiwan Da Xing Materials Co., Ltd production, PSA031 and PSA032 etc.Described profiled insulation layer is got through the bottom by photoetching process as required makes the electrode in the profiled insulation layer be connected with transparent membrane show electrode or display unit.The negativity photoetching material needs repeatedly photoetching moulding in formation moulding insulating barrier bottom.The positivity photoetching material only needs a photoetching to realize when forming the bottom of moulding insulating barrier, but needs the gray scale light shield, and the pattern light transmittance difference of each several part forms the bottom of the profiled insulation layer that thickness do not wait.
When identical or wiring condition is identical when the aperture opening ratio of display, because the thickness of electrode is to count to tens of microns magnitude and the width of electrode can be compared, exceed two or three orders of magnitude than tens nanometer thickness or hundreds of nanometer of general membrane electrode.According to the resistance formula, the resistance that can estimate signal electrode or data electrode will hang down two or three orders of magnitude.If keep resistance constant, the effective width of stereo display electrode can reduce tens times or hundred times, ignores the thickness of profiled insulation layer sidewall here.
In order to reduce the bulk of stereo display electrode, promote the performance of stereo display electrode, except using high-precision exposure machine, outside equipment such as reduced projection type exposure machine, step-scan type exposure machine, the geometry of profiled insulation layer is very crucial.In order to realize that the moulding insulating barrier has good sealing to contact with the sealing insulating barrier, the whole cross-sectional structure of profiled insulation layer is that wide (side of contact substrate is D score to the narrow under shed of upper shed, away from substrate one side be " on ") time best results, and reduce wall thickness easily and realize auxiliary stereo electrod cross-sectional area maximum.This profiled insulation layer, the densification of liquid conductive material curing molding, the electrode conduction characteristic is best.
Photoetching process theoretical according to traditional semiconductor technology and this area display manufacture craft is put into practice, negative photoresist is made the wide structure of the narrow under shed of upper shed easily, this is because energy is accepted than lower floor's photoresist height in the photoresist upper strata, makes that the most figure of negative photoresist imaging is that the narrow under shed of upper shed is wide.And positive photoresist is made the narrow structure of the wide under shed of upper shed easily, and this is because energy is accepted than lower floor's photoresistance height in the photoresist upper strata, makes that the most of figure of positive photoresist imaging is that the wide under shed of upper shed is narrow.When negative photoresist is manufactured with the profiled insulation layer of step, need repeatedly photoetching to realize, and positive photoresist once both can be realized the ledge structure of moulding insulating barrier.
In sum, narrow under shed is wide if positive photoresist can be realized upper shed, has bigger convenience and practicality.By change photoetching material, adjust technological parameters such as exposure light intensity and time for exposure, technological parameters such as the concentration of time of the concentration of optimizing existing developing time, developer solution and temperature, post bake and temperature, etching period and etching solution and temperature, the shape that obtains is the narrow profiled insulation layer shape of the wide under shed of upper shed.Find that through experiment the positive photoresist film after the exposure is handled through between high temperature, short time, adjust temperature height and stoving time, can obtain the satisfied wide profiled insulation layer shape of the narrow under shed of upper shed.The main technique flow process that positive photoresist forms the moulding insulating barrier is: flow processs such as processing between photoresist film forming, high temperature desolventizing, exposure, high temperature, short time, development, etching, wherein handle particularly crucial between high temperature, short time.
Aspect the selection of sealing insulating barrier, mainly consider 2 factors: the one, material self will have the effect that stops moisture to stop oxygen, and this requirement with the profiled insulation layer is the same; The 2nd, the sealing insulating barrier is cohesive material, can closely be connected with the profiled insulation layer after curing, produces XN-5A, XN-21 etc. as Mitsui KCC.Usually, the manufacture method of sealing insulating barrier can adopt the method for whole coating, but this method material use amount is big, shape control difficulty, and photoetching process pollutes three-dimensional auxiliary electrode easily.So in the utility model, take full advantage of the greatest differences of the thickness of the height of profiled insulation layer and film show electrode, by the method for letterpress, adjust contacting apart from forming the sealing insulating barrier of relief printing plate and substrate.
According to different types of display, also can adopt the method for ink jet printing, by ink dot is being set, fill the colloidal materials of sealing insulating barrier.A kind of method requirement in back, about one micron of the profiled insulation layer depth that the depth ratio toppan printing of the profiled insulation layer that forms with ink ejecting method forms.This solid auxiliary electrode can effectively reduce the resistance of electrode, takes full advantage of the redundant space of display interior electrode, improves exploration on display resolution ratio, refresh rate and contrast.
The design size size of transparent membrane show electrode is to calculate according to the requirement of resolution to determine, is the shared area of pixel after removing the surface area that the profiled insulation layer occupies.The transparent membrane show electrode does not here comprise lead portion, and the function of lead-in wire sees through the stereo display electrode and realizes.According to the material of different transparent display electrode, select the refractive index that best thickness mates substrate to increase the show electrode transmitance.The most frequently used material is the ITO conductive film.
Stereo display electrode of the present utility model owing to assist the existence of stereo electrod, has increased the volume of entire electrode, and the thickness of transparency electrode can be reduced to below 100 dusts, also can not influence refresh rate and contrast.The reflectivity of this thickness electrode is compared fully and can be ignored with the reflectivity of substrate.As seen auxiliary stereo electrod can effectively increase the transmitance of display pixel and the overall electrical resistance of reduction stereo display electrode.
The transparent membrane show electrode can be adjusted according to the different of selected material with the sequencing that the profiled insulation layer is made, and both can make the moulding insulating barrier earlier, also can be made into the type insulating barrier later on.The utility model provides profiled insulation layer bottom opening and transparent membrane show electrode ways of connecting.On this utility model basis, those skilled in the art is easy to design and makes the moulding insulating barrier earlier, pass through series of process processes such as thin film deposition, photoetching then, from the top of profiled insulation layer or the middle part transparent membrane show electrode and the auxiliary stereo electrod that is formed between profiled insulation layer and the sealing insulating barrier are afterwards coupled together.Therefore this kind structure ought to be in scope of the present utility model.
For transparent membrane show electrode that can not photoetching, in bottom and the outside of the profiled insulation layer that is used for auxiliary stereo electrod.The blocking unit of additional definite shape, and the transparent membrane show electrode of injection electric conducting material film forming also relates in the utility model scope of the present utility model.Essential structure of the present utility model is profiled insulation layer, sealing insulating barrier, transparent membrane show electrode and is closed in the profiled insulation layer and the auxiliary stereo electrod four of sealing between the insulating barrier is most of constitutes.The simple replacement of the wherein variation of material, the change of making sequencing and method of attachment is all within coverage of the present utility model.
The stereo display electrode that the utility model provides compared with prior art can reduce the resistance in the unit are, improve visible light transmissivity, and the material range of choice is extensive.Be not limited only to metal materials such as gold, silver, copper and aluminium, organic materials such as CNT, PEDOT:PSS and Graphene also can obtain to use.Owing to can adopt print process production, production cost and equipment investment are all very low, the improved properties and the cost reduction that not only are fit to improve the performance of existing electrode but also are applicable to emerging displays such as organic display spare.The display that the stereo electrod that uses the utility model to provide is made has higher contrast ratio, brightness and refresh rate.Particularly be more suitable for the application at next-generations such as Electronic Paper and flexible displays.
The stereo display electrode that the utility model provides has the characteristic of low resistance and high permeability, and the mechanism of realization is the space that its structure can optimization be utilized display interior.Because the thickness of auxiliary stereo electrod can utilize the non-display space of display interior according to the demand adjustment of resistance design, and is very favourable to the electric property that promotes whole stereo display electrode.The conductivity of transparent membrane show electrode is required to reduce tens of times to hundreds of times and realization.By adjusting auxiliary stereo electrod thickness and the material character that the moulding insulating barrier retrains, realize extremely easily that low resistance, width minimize, conductivity is even, flexible and isolate fully with display material.The stereo display electrode is a kind of electrode structure and method that flexible display is made that extremely be fit to, and meets now the requirement to electrode.
About showing that the research with electrode covers field very widely, from metal electrode, to inorganic oxide, to machine electrode is arranged, has obtained metal electrode and the inorganic oxide of extensive use in the demonstration field.Consider the exploitation present situation of current association area, the purpose of this utility model provide have high-performance, the stereo display electrode of low temperature process, it can use multiple material simultaneously, with the sputter of minimum operation vacuum film or deposition process, the stereo display electrode that produces low resistance high reliability high permeability mates and is connected with driver element.The conduction of stereo display electrode and display part both can organic polymers, also can use inorganic conductive nano ink composition, selected flexibly according to the different needs that production technology and product are used.Lithographic accuracy to material itself does not have strict restriction, and the uniformity of electrode and spatial accuracy only depend on the precision of profiled insulation layer.
The auxiliary stereo electrod of the micron dimension that the profiled insulation layer constraint that provides in the utility model made, it is strong to have applicability, and electric conducting material is selected advantage widely.Except the profiled insulation layer is made, only need printing equipment can finish the electrode manufacturing.It is simple to have process equipment, and the production process energy consumption is low, compare with the electrode manufacturing method of existing vacuum film deposition and subtractive lithography, and be environmental protection.The stereo display electrode that the auxiliary stereo electrod that sealing insulating barrier and profiled insulation layer form and transparent membrane show electrode are formed in the subsequent machining technology of display, has good anti-solvent, high temperature resistant to the little premium properties of display material pollution.
The beneficial effect of the stereo display electrode that the utility model provides is as follows:
The stereo display electrode that the utility model provides compared with prior art, have low resistance and high transparent characteristic, the width of auxiliary electrode, height and length can both be adjusted according to the big freedom in minor affairs in the space of display interior, and the conductivity that constitutes the show electrode material is required to reduce and realizes high permeability.By adjusting the formed auxiliary electrode thickness of moulding insulating barrier and material character, realize very easily that low resistance, width minimize, conductivity is even, flexible and isolate fully with display material.This stereo display electrode can effectively reduce the resistance of electrode, takes full advantage of the redundant space of display interior electrode, improves exploration on display resolution ratio, refresh rate and contrast.When the transparent membrane show electrode adopts organic material, can realize low temperature coated technique completely, do not need the metal deposition, realize flexible the demonstration easily.
The stereo display electrode that the utility model provides because having the high characteristic of resistance low transmission, all has advantage in many demonstrations field.If be used in six layers of electrode of full color cholesteryl liquid crystal Electronic Paper of 3-tier architecture, the lead resistance of entire electrode is dropped to several ohm the order of magnitude even littler, the transparency electrode transmissivity of viewing area is increased, reflectivity reduces, thereby the contrast and the brightness that have improved the cholesteryl liquid crystal Electronic Paper.The use of the stereo display electrode that low resistance and high permeability have both at the same time declines to a great extent the lead resistance of entire electrode, has solved the passive drive capacitance-resistance problem of display size more than 30 inches.
The utility model will provide a good structural support for the large scale manufacturing of full color liquid crystal electron paper and the display performance that improves full-colorization cholesteryl liquid crystal Electronic Paper.Six layers of transparency electrode still can have the transmitance more than 70%, if use the structure of three laminar substrates, the transmitance of electrode can be kept more than 80%.This transmitance than the ITO electrode improves more than 30%, and this color electric paper demonstration for high brightness creates conditions.This is one of strong evidence of stereo display electrode lifting display performance.
The stereo display electrode that the utility model provides or auxiliary stereo electrod are used in signal electrode, gate electrode and the show electrode of TFT, can effectively improve aperture opening ratio and the transmitance of TFT display.Aperture opening ratio can improve 10%, and the electrode transmitance can improve more than 15%.The stereo display electrode can be any in the three kinds of combinations mixing of inorganic conductive material, organic conductive material and organic-inorganic electric conducting material.
Description of drawings
Below in conjunction with the drawings and specific embodiments the utility model is described in further detail.
Fig. 1 is structural representation of the present utility model.
Fig. 2 is vertical view of the present utility model.
Fig. 3 is front view of the present utility model.
Embodiment
As shown in Figure 1 to Figure 3, a kind of stereo display electrode, comprise transparent membrane show electrode 4 and the three-dimensional auxiliary electrode that is connected with described transparent membrane show electrode 4, described three-dimensional auxiliary electrode comprises profiled insulation layer 1 and is fixed on the sealing insulating barrier 2 of described profiled insulation layer 1 upper end, be provided be used to the groove that holds conductive part 5 in the described profiled insulation layer 1, described conductive part 5 is made of metal nanoparticle or conducting polymer composite.Described three-dimensional auxiliary electrode is connected with described transparent membrane show electrode 4 by at least one intercommunicating pore 3 that described profiled insulation layer 1 lower end arranges.
For those skilled in the art being understood better and realizing the utility model, below in conjunction with specific embodiment embodiment of the present utility model is described in detail.A kind of is that inorganic stereo display electrode another kind is the stereo display electrode that organic-inorganic mixes.Design other scheme easily according to these two case study on implementation, protection range of the present utility model is not limited to this two described scopes of specific embodiment.
Embodiment one
On glass substrate, make inorganic stereo display electrode, the profiled insulation layer material uses homemade auspicious red RZJ304 positive photoresist, and the sealing insulating barrier adopts the epoxy resin of SW-B ultra-violet curing.Inorganic conductive material uses Nano silver grain printing ink (SEINTRONICS INK), this printing ink has the ink jet printing circuit is formed necessary good dispersiveness and conductivity, can form high-quality auxiliary stereo electrod because not condensing and stopping up characteristics such as few.The transparent membrane show electrode uses ito thin film.
Its concrete technical process is:
The glass substrate plated film, the ITO thickness of transparent membrane show electrode is 100 dusts;
Scrub with cleaning fluid, water temperature is 40 ° of C, and clear liquid concentration is 10%;
The ultra-pure water rinsing is also dry, and water temperature is 40 ° of C;
UV-irradiation is removed organic substance;
The roller coat photoresist, THICKNESS CONTROL is at 1-2 μ m;
Exposure, 20mj/cm
2
Develop, developer solution uses 1% potassium hydroxide solution, and solution temperature is 30 ° of C, and the time is 20s;
The ultra-pure water rinsing is also dry, and water temperature is 40 ° of C;
Post bake, 15min, temperature is 130 ° of C;
Etching, the saturated hydrochloric acid of 47%()+47%(DI water)+6%(nitric acid), solution temperature is 50 ° of C, etching 30s;
Peel off photoresist, 10% potassium hydroxide solution, 50 ° of C of temperature, 200s;
The ultra-pure water rinsing is also dry, and water temperature is 40 ° of C;
Photoresist evenly is coated onto on the substrate by whirl coating, forms the uniform photosensitive film layer of 5 μ m;
Remove solvent through prebake conditions, temperature is 90 ° of C, and the time is 30min;
Exposure, 90mj/cm
2, photomask is the printing opacity difference everywhere, and the maximum transmission amount is and the electrode ITO junction that shows transparency 150 ° of C bakings, time 300s;
RZX-3038 handles, and time 90s obtains needed space pattern;
Ultra-pure water cleans, drying, obtains pure profiled insulation layer;
According to design in advance ink dot, with the method for ink jet printing silver nanoparticle printing ink is sprayed onto counterpart in the profiled insulation layer;
Heating makes its planarization and removes solvent in the electrode material, 30 ° of C and 50s, 40 ° of C and 50s, 50 ° of C and 50s, 80 ° of C and 150s;
Method with letterpress is printed onto the SW-B epoxide-resin glue on the profiled insulation layer of projection, and ultraviolet irradiation solidifies, and forms the enclosed type insulating barrier.
Embodiment two
On pet substrate, make the stereo display electrode of inorganic organic mixing, the profiled insulation layer material uses homemade auspicious red RZJ304 positive photoresist, and the sealing insulating barrier adopts the epoxy resin of SW-B ultra-violet curing.Organic conductive material uses PEDOT:PSS solution, forms high-quality auxiliary stereo electrod.The transparent membrane show electrode uses ito thin film.
Its concrete technical process is:
Low temperature plated film on pet substrate, the ITO thickness of transparent membrane show electrode is 100 dusts;
Use the cleaning fluid rinsing, water temperature is 40 ° of C, and clear liquid concentration is 10%;
The ultra-pure water rinsing is also dry, and water temperature is 40 ° of C;
Ultraviolet light slightly shines the removal organic substance;
The rotation resist coating, THICKNESS CONTROL is at 0.5 μ m;
Exposure, 10mj/cm
2
Develop, developer solution uses 1% potassium hydroxide solution, and temperature is 30 ° of C, and the time is 15s;
The ultra-pure water rinsing is also dry, and water temperature is 40 ° of C;
Post bake, 15min, temperature is 100 ° of C;
Etching, the saturated hydrochloric acid of 7%()+92%(DI water)+1%(nitric acid), etching 60s, temperature is 50 ° of C;
Peel off photoresist, 1% potassium hydroxide solution, 50 ° of C of temperature, 200s;
The ultra-pure water rinsing is also dry, and water temperature is 40 ° of C;
Photoresist evenly is coated onto on the substrate by whirl coating, forms the uniform photosensitive film layer of 5 μ m;
Remove solvent through prebake conditions, temperature is 80 ° of C, and the time is 30min;
Exposure, 90mj/cm2, photomask be the printing opacity difference everywhere, and the maximum transmission amount is and the electrode ITO junction that shows transparency 100 ° of C bakings, time 300s;
RZX-3038 handles, and time 90S obtains needed space pattern;
Ultra-pure water cleans, drying, obtains pure profiled insulation layer;
According to design in advance ink dot, with the method for ink jet printing PEDOT-PSS solution is sprayed onto counterpart in the profiled insulation layer;
Heating makes its planarization and removes solvent in the electrode material, 30 ° of C and 50s, 40 ° of C and 50s, 50 ° of C and 50s, 80 ° of C and 150s;
Method with ink jet printing is printed onto SW-B on the profiled insulation layer of projection, and ultraviolet irradiation solidifies, and forms the enclosed type insulating barrier.Because PET film heatproof is low, high-temperature shrinkage, above material has the many places adjustment, can realize the making of low temperature stereo display electrode.
The above; it only is the preferable embodiment of the utility model; but protection range of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; be equal to replacement or change according to the technical solution of the utility model and utility model design thereof, all should be encompassed within the protection range of the present utility model.
Claims (4)
1. stereo display electrode, comprise transparent membrane show electrode (4) and the three-dimensional auxiliary electrode that is connected with described transparent membrane show electrode (4), it is characterized in that: described three-dimensional auxiliary electrode comprises profiled insulation layer (1) and is fixed on the sealing insulating barrier (2) of described profiled insulation layer (1) upper end, is provided be used to the groove that holds conductive part (5) in the described profiled insulation layer (1); Described three-dimensional auxiliary electrode is connected with described transparent membrane show electrode (4) by at least one intercommunicating pore (3) that described profiled insulation layer (1) lower end arranges.
2. a kind of stereo display electrode according to claim 1, it is characterized in that: described conductive part (5) is made of metal nanoparticle or conducting polymer composite.
3. a kind of stereo display electrode according to claim 1 is characterized in that: described profiled insulation layer (1) but material be the rigid organic material of photoetching.
4. a kind of stereo display electrode according to claim 1 is characterized in that: the material of described sealing insulating barrier (2) is printable and with the material of described profiled insulation layer (1) cohesive material of good adhesion is arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320020750 CN203071139U (en) | 2013-01-15 | 2013-01-15 | Stereoscopic display electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320020750 CN203071139U (en) | 2013-01-15 | 2013-01-15 | Stereoscopic display electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203071139U true CN203071139U (en) | 2013-07-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320020750 Withdrawn - After Issue CN203071139U (en) | 2013-01-15 | 2013-01-15 | Stereoscopic display electrode |
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| Country | Link |
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| CN (1) | CN203071139U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103107285A (en) * | 2013-01-15 | 2013-05-15 | 大连东方科脉电子有限公司 | Stereo display electrode and manufacturing method thereof |
| CN106886116A (en) * | 2015-12-15 | 2017-06-23 | 乐金显示有限公司 | Light control device, the transparent display including it and its manufacture method |
-
2013
- 2013-01-15 CN CN 201320020750 patent/CN203071139U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103107285A (en) * | 2013-01-15 | 2013-05-15 | 大连东方科脉电子有限公司 | Stereo display electrode and manufacturing method thereof |
| CN103107285B (en) * | 2013-01-15 | 2015-08-26 | 大连龙宁科技有限公司 | A kind of stereo display electrode and manufacture method thereof |
| CN106886116A (en) * | 2015-12-15 | 2017-06-23 | 乐金显示有限公司 | Light control device, the transparent display including it and its manufacture method |
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Granted publication date: 20130717 Effective date of abandoning: 20150826 |
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