CN203007482U - Sintering furnace for preparing alpha-Al2O3 by using gamma-Al2O3 - Google Patents
Sintering furnace for preparing alpha-Al2O3 by using gamma-Al2O3 Download PDFInfo
- Publication number
- CN203007482U CN203007482U CN 201220724555 CN201220724555U CN203007482U CN 203007482 U CN203007482 U CN 203007482U CN 201220724555 CN201220724555 CN 201220724555 CN 201220724555 U CN201220724555 U CN 201220724555U CN 203007482 U CN203007482 U CN 203007482U
- Authority
- CN
- China
- Prior art keywords
- raw material
- al2o3
- sintering oven
- nozzle
- material pail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a sintering furnace for preparing alpha-Al2O3 by using gamma-Al2O3. The sintering furnace comprises a rack, wherein a raw material conveying device, a nozzle, a furnace core of the sintering furnace and a lifting tray of an alpha-Al2O3 crystal column are sequentially arranged on the rack from top to bottom; the raw material conveying device comprises a raw material bucket for holding the gamma-Al2O3 as well as an oxygen conveying pipe and a hydrogen conveying pipe which are respectively connected with the raw material bucket for holding the gamma-Al2O3; the nozzle comprises an oxygen spray nozzle and a hydrogen spray nozzle sleeved on the oxygen spray nozzle; the inlet of the oxygen spray nozzle is connected with the raw material bucket of the gamma-Al2O3 and the oxygen conveying pipe; the inlet of the hydrogen spray nozzle is connected with the hydrogen conveying pipe; the nozzle extends into the cavity of the furnace core of the sintering furnace; the lifting tray of the alpha-Al2O3 crystal column is capable of lifting the alpha-Al2O3 crystal column to ensure that the alpha-Al2O3 crystal column is capable of going in or out of the cavity of the furnace core of the sintering furnace; a filter screen is arranged at the bottom of the raw material bucket for holding the gamma-Al2O3; and the raw material bucket is provided with a device for adjusting the gamma-Al2O3 conveying speed through enabling the filter screen to generate different vibration. The alpha-Al2O3 single crystal manufactured by utilizing the sintering furnace disclosed by the utility model is good in fineness and adjustable in size.
Description
Technical field
The utility model relates to α-Al
2o
3the Preparation equipment of single crystal, relate in particular to a kind of with γ-Al
2o
3preparation α-Al
2o
3the sintering oven of single crystal.
Background technology
Sapphire is widely used in window material, the high pressure material of substrate material, special optical components and parts, high energy detection and the high power strong laser of substrate material, precision instrument bearing, large-scale integrated circuit SOI and the SOS of high-brightness LED.
But the growth method of growing sapphire crystal mainly contains at present: heat-exchanging method, kyropoulos, the terraced method of resistive heating temperature, falling crucible method.But heat-exchanging method adopts helium to make cooling gas, costs dearly, and can not the axial crystal of direct growth C; The kyropoulos process repeatability is poor, energy consumption is high; The terraced method process repeatability of resistive heating temperature is poor, yield rate is low.Induction heating iridium crucible crystal pulling method, have high input, cost is high.Traditional falling crucible method, the thermograde setting range is limited, and the thermograde that provides the growing large-size sapphire crystal required is provided, and causes the ability of crystal impurity removal and bubble low simultaneously, and matter crystal internal defect is more, and the crystal yield rate is 50% left and right only.
The current equipment for growing sapphire is mainly sintering oven in addition, yet sintering oven of the prior art can not effectively be controlled and make sapphire raw material γ-Al
2o
3and the concentration between oxygen and hydrogen, that is to say and be difficult to control oxygen, hydrogen and γ-Al
2o
3mass ratio between powder, and, because oxygen and hydrogen are gas, only need on their transfer line, load onto flowrate control valve, just can well control the ratio of combustion of hydrogen and oxygen, this just shows needs control γ-Al
2o
3, the mass ratio between oxygen, hydrogen key be to control γ-Al well
2o
3the quality of powder.
Summary of the invention
In order to overcome the deficiencies in the prior art, the purpose of this utility model is to provide a kind ofly can effectively regulate γ-Al
2o
3transfer rate, and then control γ-Al
2o
3powder, oxygen is the mass ratio between hydrogen very easily, the α-Al of generation
2o
3use γ-Al that crystal mass is good, yield rate is high
2o
3make α-Al
2o
3the sintering oven of single crystal.
For achieving the above object, the technical solution of the utility model is:
A kind of with γ-Al
2o
3preparation α-Al
2o
3the sintering oven of single crystal comprises frame, on this frame, from top to bottom sequentially is provided with lower device:
Raw material conveying device, affiliated raw material conveying device comprises splendid attire γ-Al
2o
3raw material pail, and with splendid attire γ-Al
2o
3the Raw material pail oxygen conveying pipe and the hydrogen delivery tube that connect respectively;
Nozzle, described nozzle comprises oxygen nozzle and is set in the hydrogen shower nozzle on oxygen nozzle, the import of oxygen nozzle and γ-Al
2o
3raw material pail with oxygen conveying pipe, be connected, the import of hydrogen shower nozzle is connected with hydrogen delivery tube;
The combustion chamber of sintering oven;
And α-Al
2o
3the lifting tray of crystallization post;
Described nozzle extends in the cavity of combustion chamber of sintering oven, α-Al
2o
3the lifting tray liftable α-Al of crystallization post
2o
3the crystallization post, make α-Al
2o
3the cavity of the combustion chamber of crystallization post turnover sintering oven, described splendid attire γ-Al
2o
3raw material pail bottom be provided with filter screen, and this Raw material pail is provided with and makes filter screen produce different vibrations to regulate γ-Al
2o
3the device of transfer rate.
The described vibrative device of filter screen that makes is the described γ-Al that impacts be arranged on frame
2o
3the lever construction of Raw material pail, the top that is positioned at Raw material pail is held in impacting of lever construction, the cam that the other end of lever construction and is arranged on the camshaft on frame coordinates, when the other end of lever construction coordinates with the cam base circle of this camshaft, the end that impacts of lever construction impacts described Raw material pail, when the other end of lever construction coordinates with other parts of the cam of this camshaft, impacting of lever construction held away from described Raw material pail, and this camshaft is by the variable-frequency motor drive of the rotating speed that can change camshaft.
Described lever construction is provided with the elevating lever for the height of the fulcrum of adjustment (adjusting) lever structure.Described elevating lever can the adjustment (adjusting) lever structure the height of fulcrum, and then the adjustment (adjusting) lever structure impacts γ-Al
2o
3the dynamics of Raw material pail, realize regulating the Oscillation Amplitude of filter screen.
On the frame of described sintering oven, slip is provided with the combustion chamber of isolation sintering oven and operator's heat insulation protective shield.
The combustion chamber of described sintering oven is provided with vision slit.
The utility model adopts above technical scheme, utilizes the lever construction that arranges and at γ-Al on the frame of sintering oven
2o
3raw material pail bottom filter screen is set, the end that impacts of lever construction impacts sintering oven γ-Al
2o
3raw material pail, thereby cause filter screen vibration, make the γ-Al in filter screen
2o
3powder enters oxygen conveying pipe and oxygen mix, because the camshaft of the other end at lever is driven by variable-frequency motor, and the rotating speed that the rotating speed of regulating variable-frequency motor just can the adjustment cam axle, and then adjustment cam axle drive lever impacts γ-Al
2o
3the frequency of Raw material pail, make the filter screen of Raw material pail produce different vibrations, and then achieve effective control γ-Al
2o
3the influx of powder while participating in oxygen and combustion of hydrogen, controlled γ-Al well
2o
3the influx of powder while participating in oxygen and combustion of hydrogen, also just realized γ-Al
2o
3during burning and the concentration of oxygen and hydrogen can adjust and control, α-A1 that sintering oven of the present utility model is made
2o
3single crystal is of good quality, the big or small controllable adjustable of crystalline size.
The accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail:
The perspective view that Fig. 1 is the utility model sintering oven;
The raw material conveying device that Fig. 2 is the utility model sintering oven and nozzle arrangements analyse and observe connection diagram.
Embodiment
As shown in one of Fig. 1-2, the utility model is a kind of with γ-Al
2o
3preparation α-Al
2o
3the sintering oven of single crystal comprises frame 1, on this frame 1, from top to bottom sequentially is provided with lower device:
Raw material conveying device 2, affiliated raw material conveying device 2 comprises splendid attire γ-Al
2o
3 raw material pail 21, and with splendid attire γ-Al
2o
3 raw material pail 21 oxygen conveying pipe 22 and the hydrogen delivery tube 23 that connect respectively;
The combustion chamber 4 of sintering oven;
And α-Al
2o
3the lifting tray 6 of crystallization post 5;
Described nozzle 3 extends in the cavity of combustion chamber 4 of sintering oven, α-Al
2o
3the lifting tray 6 liftable α-Al of crystallization post 5
2o
3 crystallization post 5, make α-Al
2o
3the cavity of the combustion chamber 4 of crystallization post 5 turnover sintering ovens, described splendid attire γ-Al
2o
3 raw material pail 21 bottoms be provided with filter screen 7, and this Raw material pail 21 is provided with and makes filter screen 7 produce different vibrations to regulate γ-Al
2o
3the device 8 of transfer rate.
The described vibrative device 8 of filter screen 7 that makes is for being arranged on the described γ-Al that impacts on frame 1
2o
3the lever construction of Raw material pail 21, lever construction 8 impact the top that end 81 is positioned at Raw material pail 21, the cam 91 that the other end 82 and of lever construction 8 is arranged on the camshaft 9 on frame 1 coordinates, when the other end 82 of lever construction 8 coordinates with cam 91 basic circles of this camshaft 9, the end 81 that impacts of lever construction 8 impacts described Raw material pail 21, when the other end 82 of lever construction 8 coordinates with the cam of this camshaft 9 91 other parts, impacting of lever construction 8 holds 81 away from described Raw material pail 21, and this camshaft 9 is driven by the variable-frequency motor (not shown in FIG.) of the rotating speed that can change camshaft 9.
Described lever construction 8 is provided with the elevating lever 84 for the height of the fulcrum 83 of adjustment (adjusting) lever structure 8.Described elevating lever 84 can adjustment (adjusting) lever structure 8 the height of fulcrum 83, and then adjustment (adjusting) lever structure 8 impacts γ-Al
2o
3the dynamics of Raw material pail 21, realize regulating the Oscillation Amplitude of filter screen 7.
Slide on the frame 1 of described sintering oven and be provided with the combustion chamber 4 of isolation sintering oven and operator's's (not shown in FIG.) heat insulation protective shield 10.
The combustion chamber 4 of described sintering oven is provided with vision slit 41.
Claims (5)
1. one kind with γ-Al
2o
3preparation α-Al
2o
3the sintering oven of single crystal, comprise frame, on this frame, from top to bottom sequentially is provided with lower device:
Raw material conveying device, affiliated raw material conveying device comprises splendid attire γ-Al
2o
3raw material pail, and with splendid attire γ-Al
2o
3the Raw material pail oxygen conveying pipe and the hydrogen delivery tube that connect respectively;
Nozzle, described nozzle comprises oxygen nozzle and is set in the hydrogen shower nozzle on oxygen nozzle, the import γ-Al of oxygen nozzle
2o
3raw material pail with oxygen conveying pipe, be connected, the import of hydrogen shower nozzle is connected with hydrogen delivery tube;
The combustion chamber of sintering oven;
And α-Al
2o
3the lifting tray of crystallization post;
Described nozzle extends in the cavity of combustion chamber of sintering oven, α-Al
2o
3the lifting tray liftable α-Al of crystallization post
2o
3the crystallization post, make α-Al
2o
3the cavity of the combustion chamber of crystallization post turnover sintering oven, is characterized in that: described splendid attire γ-Al
2o
3raw material pail bottom be provided with filter screen, and this Raw material pail is provided with and makes filter screen produce different vibrations to regulate γ-Al
2o
3the device of transfer rate.
2. according to claim 1 with γ-Al
2o
3preparation α-Al
2o
3the sintering oven of single crystal is characterized in that: the described vibrative device of filter screen that makes is the described γ-Al that impacts be arranged on frame
2o
3the lever construction of Raw material pail, the top that is positioned at Raw material pail is held in impacting of lever construction, the cam that the other end of lever construction and is arranged on the camshaft on frame coordinates, when the other end of lever construction coordinates with the cam base circle of this camshaft, the end that impacts of lever construction impacts described Raw material pail, when the other end of lever construction coordinates with other parts of the cam of this camshaft, impacting of lever construction held away from described Raw material pail, and this camshaft is by the variable-frequency motor drive of the rotating speed that can change camshaft.
3. according to claim 2 with γ-Al
2o
3preparation α-Al
2o
3the sintering oven of single crystal is characterized in that: described lever construction is provided with the elevating lever for the height of the fulcrum of adjustment (adjusting) lever structure.
4. according to claim 1 with γ-Al
2o
3preparation α-Al
2o
3the sintering oven of single crystal is characterized in that: on the frame of described sintering oven, slip is provided with the combustion chamber of isolation sintering oven and operator's heat insulation protective shield.
5. according to claim 1 with γ-Al
2o
3preparation α-Al
2o
3the sintering oven of single crystal is characterized in that: the combustion chamber of described sintering oven is provided with vision slit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220724555 CN203007482U (en) | 2012-12-25 | 2012-12-25 | Sintering furnace for preparing alpha-Al2O3 by using gamma-Al2O3 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220724555 CN203007482U (en) | 2012-12-25 | 2012-12-25 | Sintering furnace for preparing alpha-Al2O3 by using gamma-Al2O3 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203007482U true CN203007482U (en) | 2013-06-19 |
Family
ID=48599094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220724555 Expired - Fee Related CN203007482U (en) | 2012-12-25 | 2012-12-25 | Sintering furnace for preparing alpha-Al2O3 by using gamma-Al2O3 |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203007482U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103014855A (en) * | 2012-12-25 | 2013-04-03 | 福建鑫磊晶体有限公司 | Preparation method and equipment for preparing alpha-Al2O3 single crystal through gamma-Al2O3 |
-
2012
- 2012-12-25 CN CN 201220724555 patent/CN203007482U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103014855A (en) * | 2012-12-25 | 2013-04-03 | 福建鑫磊晶体有限公司 | Preparation method and equipment for preparing alpha-Al2O3 single crystal through gamma-Al2O3 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102877117B (en) | Ingot furnace thermal field structure based on multi-heater and operation method | |
| CN101580963B (en) | SAPMAC method for preparing sapphire single-crystal with size above 300mm | |
| CN101323978A (en) | Large size sapphire crystal preparing technology and growing apparatus thereof | |
| CN102628184B (en) | Method for growing gem crystals by way of vacuum induction heating and device realizing method | |
| CN102877120B (en) | Automatic seeding technique for growing sapphire crystal by Kyropoulos method | |
| CN102154699B (en) | Method for growing sapphire monocrystal and growth equipment | |
| CN203795018U (en) | Thermal field for producing sapphire single crystal by edge-defined film-fed crystal growth method | |
| CN202989351U (en) | Ingot furnace thermal field structure based on multiple heaters | |
| CN206157273U (en) | Novel single crystal growing furnace | |
| CN203007469U (en) | Thermal field device of czochralski crystal growing furnace | |
| CN203007482U (en) | Sintering furnace for preparing alpha-Al2O3 by using gamma-Al2O3 | |
| CN104264213A (en) | EFG (edge-defined film-fed growth) device of large-size doped sapphire crystals and growth process thereof | |
| CN205382225U (en) | Sapphire crystal growing furnace | |
| CN106149048B (en) | A kind of KY method sapphire low vacuum growing method | |
| CN103422163A (en) | Device and method for growing sapphire single crystals | |
| CN108385089B (en) | A kind of ultrasonic spray pyrolysis precipitation equipment and the method for preparing film using the device | |
| CN203530480U (en) | Equipment for growing sapphire single crystals | |
| CN102154683A (en) | Monocrystal/polycrystal directional solidification system of metal heating body structure | |
| CN206052203U (en) | A kind of single-crystal silicon carbide manufacture device | |
| CN102899724A (en) | Method for eliminating bubbles generated in growth process of sapphire crystals | |
| CN201276609Y (en) | Single crystal growth heating device | |
| CN204251771U (en) | A kind of sapphire crystal growth device | |
| CN102011176B (en) | Silicon single crystal growth furnace with gas cold traps | |
| CN103014855A (en) | Preparation method and equipment for preparing alpha-Al2O3 single crystal through gamma-Al2O3 | |
| CN203992411U (en) | A kind of device of preparing glassy metal particle |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130619 Termination date: 20131225 |