CN202994313U - Quick response film thermocouple temperature sensor - Google Patents
Quick response film thermocouple temperature sensor Download PDFInfo
- Publication number
- CN202994313U CN202994313U CN201220554814.6U CN201220554814U CN202994313U CN 202994313 U CN202994313 U CN 202994313U CN 201220554814 U CN201220554814 U CN 201220554814U CN 202994313 U CN202994313 U CN 202994313U
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- China
- Prior art keywords
- film
- thermocouple
- hot junction
- film thermocouple
- sensor
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Abstract
The utility model discloses a film thermocouple temperature sensor which is quick in temperature test response and high in test precision. The quick response film thermocouple temperature sensor comprises a substrate, a buffer layer disposed on the substrate, and a film thermocouple and a hot junction disposed on the buffer layer. The film thermocouple comprises a lead pad. An insulating protection film layer is disposed on areas except the lead pad on the film thermocouple and a surface of the hot junction. The arrangement of the insulating protection film layer protects the film thermocouple and the hot junction from influences of mechanical damage and environment erosion in a test process. The thermocouple protected by the insulating film is formed by sputtering deposit, and compared with a conventional thermocouple with a ceramic post sintering protection film layer, the thermocouple is advantaged by fast response speed and high test precision. The sensor prevents the hot junction from test errors and slow response speeds caused by large size and extremely thickness of a sintering protection layer, so that temperature test precision and response speed of the sensor are improved.
Description
Technical field
The utility model relates to a kind of thermocouple temperature sensor of quick response film-type.
Background technology
Existing film type temperature sensor structure is the mode with the ceramic glaze sintering, forms at the thermometric patterned surface protective layer structure that thickness reaches 1mm～2mm, and the temperature-measuring thin film figure is protected.The shortcoming that this protection structure exists is that because the thickness of sintering is thicker, volume is larger, has had a strong impact on quick, the accurately conduction of temperature, has increased the test error of temperature sensor, has reduced the speed of temperature-responsive.
The utility model content
The utility model is intended to overcome the deficiencies in the prior art, and the film-type thermocouple temperature sensor that a kind of temperature test response is fast, measuring accuracy is high is provided.
In order to achieve the above object, the technical scheme that provides of the utility model is:
As shown in Figure 1, described quick response thin-film thermocouple temperature sensor comprises substrate 11, is located at the cushion 12 on substrate 11, is located at film thermocouple 13 and hot junction 14 on cushion 12; Described film thermocouple 13 comprises lead pad 19; Zone on film thermocouple 13 except lead pad 19 and hot junction 14 surfaces are provided with insulation protection rete 15.
Wherein, insulation protection rete 15 thickness are 10 μ m～100 μ m; Described sensor also comprises the lead-in wire 16 that is connected with lead pad 19 by cohering electrocondution slurry 17; The described electrocondution slurry 17 that coheres is provided with glaze layer 18.Described insulation protection rete 15 materials are Al
2O
3, AlN or SiO
2
The utility model is described in further detail below in conjunction with manufacturing process and principle:
The utility model is protected the lead pad of sensor surface film thermocouple with photoresist, and lead pad is not covered by Direct precipitation when the sputtering sedimentation insulating protective film, but it is surperficial to be deposited on its photoresist; Then, utilize thin film technique, at the surface sputtering of thin film thermoelectric even summation hot junction deposition one deck insulation protection rete, when making the sensor thermometric, temperature can be delivered to rapidly the film thermocouple surface, realizes the quick response measurement of temperature; Adopt again the method peel off, with the photoresist lift off at lead pad place, the dielectric film on lead pad surface is broken away from, and other zones comprise that the insulating protective film on thin film thermoelectric even summation hot junction surface stays, and completes the membrane structure figure deposition of insulation protection rete; At last, be sintered to fix at lead pad place's connecting lead wire of film pattern and to the pad lead-in wire.
The thermocouple temperature sensor manufacturing that sputtering sedimentation is high temperature resistant, method corrosion-resistant and the resistance to erosion insulating protective film is applicable to various membrane structures.The insulation protection film material of sputtering sedimentation is Al
2O
3, but be not limited only to this, and also can replace with other insulating material with high temperature resistant, corrosion-resistant and resistance to erosion, such as AlN, SiO
2Deng.The insulating protective film of high temperature resistant, the corrosion-resistant and resistance to erosion that deposits is not mechanically damaged in test process with the environment erosion for the protection of film thermocouple figure and hot junction to be affected.
In the utility model, arrange protective film thermopair and the hot junction of insulation protection rete are not mechanically damaged in test process with the environment erosion and affect.This thermopair by sputtering sedimentation insulation film protection is compared to the thermopair of traditional ceramic post sintering protective film, has fast response time, advantage that measuring accuracy is high.Sensor of the present utility model avoided hot junction because of the volume of sintered protecting layer the large and too thick test error that causes of thickness and response speed slow, temperature test precision and the response speed of sensor be improved.
Description of drawings
Fig. 1 is film type temperature sensor structural representation of the present utility model.
In figure: 11, substrate; 12, cushion; 13, film thermocouple; 14, hot junction; 15, insulation protection rete; 16, lead-in wire; 17, cohere electrocondution slurry; 18, glaze layer; 19, lead pad.
Embodiment
Referring to Fig. 1, described quick response thin-film thermocouple temperature sensor comprises substrate 11, is located at the cushion 12 on substrate 11, is located at film thermocouple 13 and hot junction 14 on cushion 12; Described film thermocouple 13 comprises lead pad 19; Zone on film thermocouple 13 except lead pad 19 and hot junction 14 surfaces are provided with insulation protection rete 15.
Wherein, insulation protection rete 15 thickness are 10 μ m～100 μ m; Described sensor also comprises the lead-in wire 16 that is connected with lead pad 19 by cohering electrocondution slurry 17; The described electrocondution slurry 17 that coheres is provided with glaze layer 18.Described insulation protection film material is Al
2O
3
Claims (4)
1. one kind responds thin-film thermocouple temperature sensor fast, comprises substrate (11), is located at the cushion (12) on substrate (11), is located at film thermocouple (13) and hot junction (14) on cushion (12); Described film thermocouple (13) comprises lead pad (19); Be characterised in that, film thermocouple (13) upper zone and hot junction (14) surface except lead pad (19) is provided with insulation protection rete (15).
2. sensor as claimed in claim 1, is characterized in that, the thickness of described insulation protection rete (15) is 10 μ m～100 μ m.
3. sensor as claimed in claim 1, is characterized in that, described sensor also comprises the lead-in wire (16) that is connected with lead pad (19) by cohering electrocondution slurry (17); The described electrocondution slurry (17) that coheres is provided with glaze layer (18).
4. sensor as claimed in claim 1, is characterized in that, described insulation protection rete (15) material is Al
2O
3, AlN or SiO
2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220554814.6U CN202994313U (en) | 2012-10-26 | 2012-10-26 | Quick response film thermocouple temperature sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220554814.6U CN202994313U (en) | 2012-10-26 | 2012-10-26 | Quick response film thermocouple temperature sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202994313U true CN202994313U (en) | 2013-06-12 |
Family
ID=48565485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220554814.6U Expired - Lifetime CN202994313U (en) | 2012-10-26 | 2012-10-26 | Quick response film thermocouple temperature sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202994313U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108007595A (en) * | 2017-11-21 | 2018-05-08 | 西北工业大学 | A kind of sonde-type thin-film thermocouple temperature sensor and preparation method thereof |
| CN109916526A (en) * | 2019-03-11 | 2019-06-21 | 西北工业大学 | A kind of the back pin configuration and preparation method of the extraction of the ito thin film thermocouple electric signal on turbo blade |
| CN113008399A (en) * | 2021-01-26 | 2021-06-22 | 松诺盟科技有限公司 | High-temperature corrosion-resistant thermocouple and processing method thereof |
-
2012
- 2012-10-26 CN CN201220554814.6U patent/CN202994313U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108007595A (en) * | 2017-11-21 | 2018-05-08 | 西北工业大学 | A kind of sonde-type thin-film thermocouple temperature sensor and preparation method thereof |
| CN109916526A (en) * | 2019-03-11 | 2019-06-21 | 西北工业大学 | A kind of the back pin configuration and preparation method of the extraction of the ito thin film thermocouple electric signal on turbo blade |
| CN113008399A (en) * | 2021-01-26 | 2021-06-22 | 松诺盟科技有限公司 | High-temperature corrosion-resistant thermocouple and processing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130612 |
|
| CX01 | Expiry of patent term |