CN202957280U - Loading and unloading mechanical arm - Google Patents
Loading and unloading mechanical arm Download PDFInfo
- Publication number
- CN202957280U CN202957280U CN2012206656082U CN201220665608U CN202957280U CN 202957280 U CN202957280 U CN 202957280U CN 2012206656082 U CN2012206656082 U CN 2012206656082U CN 201220665608 U CN201220665608 U CN 201220665608U CN 202957280 U CN202957280 U CN 202957280U
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- loading
- unloading manipulator
- scratch
- sucker
- hardness
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model provides a loading and unloading mechanical arm. The loading and unloading mechanical arm comprises sucking units, wherein each sucking unit comprises a sucking disc provided with a sucking port, and the sucking disc comprises a scratching preventing structure for preventing parts to be transmitted from being scratched. The loading and unloading mechanical arm can prevent the sucking discs from scratching the surfaces of the parts to be transmitted.
Description
Technical field
The utility model relates to the grass-hopper field, relates to particularly a kind of loading and unloading manipulator.
Background technology
In the production process of polycrystalline silicon solar cell, need to reduce sunlight, on surface, reflect the deposition of the silicon face after diffusion one deck antireflection film layer.The characteristics such as silicon nitride film has high chemical stability, high resistivity, good insulating, hardness is high, optical property is good are widely used on solar cell.As antireflective coating, silicon nitride film has good optical property, and its refractive index, in 2.0 left and right, has better anti-reflective effect than traditional silicon dioxide antireflective coating.Simultaneously, silicon nitride film also has good passivation effect, to second-rate silicon chip, can play the passivation in surface and body.
At present, flat-plate type PECVD and tubular type PECVD are widely applied in industrial production.PECVD(PlasmaEnhanced Chemical Vapor Deposition wherein, plasma enhanced chemical vapor deposition) be to make by microwave the gas ionization that contains the film composed atom, form plasma in part, and the plasma chemical activity is very strong, be easy to react, thereby deposit desired film on substrate.Relative flat-plate type PECVD, tubular type PECVD has better passivation effect, and the solar cell conversion efficiency is had to better effect.
In prior art, during polycrystal silicon cell is produced, in the loading and unloading of tubular type PECVD operation silicon chip, with manipulator, automatically complete.Silicon chip picks up silicon chip and put down by three on the tubular type PECVD manipulator suckers with air entry.Yet, during silicon chip after tubular type PECVD manipulator unloading cvd nitride silicon thin film, due to unloading, get silicon chip in the sheet process and place the reason such as improper and often occur that the silicon chip of indivedual positions can not inhale, but the silicon nitride film surface has produced cut in getting sheet, uninstall process, caused the silicon nitride film surface of this operation defective, not only affect product yield, also waste chemicals and personnel man-hour.
The utility model content
The utility model aims to provide a kind of loading and unloading manipulator, can avoid sucker to produce cut on the surface for the treatment of transfer unit.
To achieve these goals, the utility model provides a kind of loading and unloading manipulator, comprises suction unit, and each suction unit comprises the sucker with air entry, and sucker comprises the anti-scratch structure for the treatment of that for preventing transfer unit scratches.
Further, sucker comprises body and is arranged at the anti-scratch layer for preventing from treating that transfer unit scratches on body, and the anti-scratch structure comprises the anti-scratch layer.
Further, the hardness of anti-scratch layer is lower than body or treat the hardness of transfer unit.
Further, the anti-scratch layer is plastic layer or rubber layer.
Further, the thickness of anti-scratch layer is 2mm ~ 4mm.
Further, the anti-scratch layer is bonded in the absorption surface of body.
Further, sucker adopts hardness to make to form the anti-scratch structure lower than the material of the hardness for the treatment of transfer unit.
Further, material is plastic material or elastomeric material.
Further, suction unit also comprises supporting bracket, and two above suckers are set on supporting bracket.
Further, the loading and unloading manipulator comprises a plurality of suction unit, the supporting bracket each interval of each suction unit and setting abreast.
The application the technical solution of the utility model, prevent because sucker has the anti-scratch structure for the treatment of that transfer unit scratches, thereby can avoid sucker to produce cut on the surface for the treatment of transfer unit.
The accompanying drawing explanation
The Figure of description that forms the application's a part is used to provide further understanding of the present utility model, and schematic description and description of the present utility model, for explaining the utility model, does not form improper restriction of the present utility model.In the accompanying drawings:
Fig. 1 shows the structural representation of the loading and unloading manipulator of the utility model embodiment;
Fig. 2 shows the vertical view of Fig. 1.
Embodiment
It should be noted that, in the situation that do not conflict, embodiment and the feature in embodiment in the application can combine mutually.Describe below with reference to the accompanying drawings and in conjunction with the embodiments the utility model in detail.
As depicted in figs. 1 and 2, the present embodiment provides a kind of loading and unloading manipulator.The loading and unloading manipulator comprises suction unit, and each suction unit comprises the sucker 1 with air entry 12 and the air intake duct 3 be communicated with air entry 12.Sucker 1 comprises the anti-scratch structure for the treatment of that for preventing transfer unit scratches.Sucker 1 comprises body and is arranged at the anti-scratch layer 11 for preventing from treating that transfer unit scratches on body, and the anti-scratch structure comprises anti-scratch layer 11.Treat in the present embodiment that transfer unit is in particular the silicon chip with silicon nitride film.
As shown in Figure 1, suction unit also comprises supporting bracket 4, and two above suckers 1 are set on supporting bracket 4.Each loading and unloading manipulator comprises a plurality of suction unit, supporting bracket 4 each intervals of each suction unit and setting abreast.
In an embodiment of the present utility model, each suction unit of each loading and unloading manipulator comprises three suckers 1, on each sucker 1, is provided with anti-scratch layer 11.
In the present embodiment, the hardness of anti-scratch layer 11 is lower than body or treat the hardness of transfer unit.Anti-scratch layer 11 can be set to plastic spacer or the rubber sheet gasket that thickness is 2mm ~ 4mm particularly.
In the present embodiment, anti-scratch layer 11 is bonded in the absorption surface of body equably, to guarantee sucker 1, in absorption, treats in the process of transfer unit air tight.
In the present embodiment, by body surface binded plastic spacer or the rubber sheet gasket at sucker 1, realized soft contact while contacting with the silicon nitride film of silicon chip surface, avoided sucker 1 when some silicon chip can not take out to slip over the cut that the silicon nitride film surface produces, thereby reduced the generation of the surperficial defective item caused because of cut, save chemicals that defective item processes again and personnel man-hour, also increased product yield simultaneously.
In another embodiment of the present utility model, sucker 1 adopts hardness to make to form the anti-scratch structure lower than the material of the hardness for the treatment of transfer unit.Preferably, this material is plastic material or elastomeric material.Due to the hardness of sucker integral body lower than the case hardness for the treatment of transfer unit, thereby can avoid sucker to produce cut on the surface for the treatment of transfer unit.
The foregoing is only preferred embodiment of the present utility model, be not limited to the utility model, for a person skilled in the art, the utility model can have various modifications and variations.All within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection range of the present utility model.
Claims (10)
1. a loading and unloading manipulator, comprise suction unit, and each described suction unit comprises and it is characterized in that the have air entry sucker (1) of (12), and described sucker (1) comprises the anti-scratch structure for the treatment of that for preventing transfer unit scratches.
2. loading and unloading manipulator according to claim 1, it is characterized in that, described sucker (1) comprises body and is arranged at the anti-scratch layer (11) for preventing from treating that transfer unit scratches on described body, and described anti-scratch structure comprises described anti-scratch layer (11).
3. loading and unloading manipulator according to claim 2, is characterized in that, the hardness of described anti-scratch layer (11) is lower than described body or the described hardness for the treatment of transfer unit.
4. loading and unloading manipulator according to claim 2, is characterized in that, described anti-scratch layer (11) is plastic layer or rubber layer.
5. loading and unloading manipulator according to claim 2, is characterized in that, the thickness of described anti-scratch layer (11) is 2mm ~ 4mm.
6. loading and unloading manipulator according to claim 2, is characterized in that, described anti-scratch layer (11) is bonded in the absorption surface of described body.
7. loading and unloading manipulator according to claim 1, is characterized in that, described sucker (1) adopts hardness to treat that lower than described the material of the hardness of transfer unit makes to form described anti-scratch structure.
8. loading and unloading manipulator according to claim 7, is characterized in that, described material is plastic material or elastomeric material.
9. according to the described loading and unloading manipulator of any one in claim 1 to 8, it is characterized in that, described suction unit also comprises supporting bracket (4), and two the above suckers (1) are set on described supporting bracket (4).
10. loading and unloading manipulator according to claim 9, is characterized in that, described loading and unloading manipulator comprises a plurality of described suction unit, described supporting bracket (4) each interval of each described suction unit and setting abreast.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012206656082U CN202957280U (en) | 2012-12-04 | 2012-12-04 | Loading and unloading mechanical arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012206656082U CN202957280U (en) | 2012-12-04 | 2012-12-04 | Loading and unloading mechanical arm |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202957280U true CN202957280U (en) | 2013-05-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012206656082U Expired - Fee Related CN202957280U (en) | 2012-12-04 | 2012-12-04 | Loading and unloading mechanical arm |
Country Status (1)
| Country | Link |
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| CN (1) | CN202957280U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104516209A (en) * | 2013-10-08 | 2015-04-15 | 上海微电子装备有限公司 | Bearing fixing apparatus used in integrated circuit device |
| CN108493136A (en) * | 2018-04-26 | 2018-09-04 | 武汉华星光电技术有限公司 | Support jig and dry ecthing device structure |
-
2012
- 2012-12-04 CN CN2012206656082U patent/CN202957280U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104516209A (en) * | 2013-10-08 | 2015-04-15 | 上海微电子装备有限公司 | Bearing fixing apparatus used in integrated circuit device |
| CN104516209B (en) * | 2013-10-08 | 2017-01-25 | 上海微电子装备有限公司 | Bearing fixing apparatus used in integrated circuit device |
| CN108493136A (en) * | 2018-04-26 | 2018-09-04 | 武汉华星光电技术有限公司 | Support jig and dry ecthing device structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130529 Termination date: 20161204 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |