CN202946352U - Self-measurement piezoelectric stack pump - Google Patents
Self-measurement piezoelectric stack pump Download PDFInfo
- Publication number
- CN202946352U CN202946352U CN 201220715293 CN201220715293U CN202946352U CN 202946352 U CN202946352 U CN 202946352U CN 201220715293 CN201220715293 CN 201220715293 CN 201220715293 U CN201220715293 U CN 201220715293U CN 202946352 U CN202946352 U CN 202946352U
- Authority
- CN
- China
- Prior art keywords
- pump
- valve
- piezoelectric
- inlet valve
- outlet valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Reciprocating Pumps (AREA)
Abstract
The utility model relates to a self-measurement piezoelectric stack pump belonging to the field of microfluid transmission and control. The pump is characterized in that a valve cover is mounted on a pump cover; the pump cover is mounted on a pump body; a cantilever type outlet valve and a cantilever type inlet valve are bonded between the valve cover and the pump cover; the outlet valve and the inlet valve are both formed by bonding a piezoelectric film and a base plate; a pump cavity diaphragm is pressed and connected between the pump cover and the pump body; a piston and a jacking block are respectively mounted at two sides of the pump cavity diaphragm; the piston, the pump cover, the outlet valve and the inlet valve together form a pump cavity; a piezoelectric stack is pressed and connected on the jacking block through an anti-torsion stop block by a bolt; and the piezoelectric stack, the outlet valve and the inlet valve are respectively connected with an electric control unit through a wire group I, a wire group II and a wire group III. The self-measurement piezoelectric stack pump has the unique features and advantages that output pressure and flow of the piezoelectric pump is directly measured by a one-way valve with a sensing function, and no extra sensor is required, so that the pump is simple in structure, relatively high in accuracy and reliability of measurement, and applicable to real-time monitoring on the pumping process of different media, such as liquid, gas, and a gas liquid mixture.
Description
Technical field
The utility model belongs to the piezoelectric pump that microfluid transmission control field is used, and is specifically related to a kind of piezometric electricity stack pump of testing oneself.
Background technique
That piezoelectric pump has is simple in structure, volume is little, be swift in response, without the many advantages such as electromagnetic interference, easy operating, flow and pressure controllability be good, all have wide practical use at aspects such as the fuel supply of medical treatment, chemical analysis, motor car engine and fuel cell, microcomputer electrohydraulic systems, so its development enjoys countries in the world scholar's extensive concern.For satisfying the application demand of different field, people have proposed the piezoelectric pump of various ways structure.Although the piezoelectric pump structural type and the performance difference that propose are larger, be all to utilize bending or the dilatation that piezoelectric vibrator produces under electric field action to realize fluid-operated.The fluid of exporting because of each work cycle of piezoelectric pump is the caused pump chamber variable quantity of piezoelectric vibrator distortion, therefore can realize the accurate control of flow and pressure, is particularly useful for the aspects such as medicine controlled release.Yet in real work, because piezoelectric pump output flow and pressure are subjected to operating infulence larger, except driving voltage, frequency, fluid viscosity, temperature and delivery pressure etc. also have considerable influence to its actual output flow.Therefore, merely adopt the method for regulating driving voltage and frequency to there is no method and obtain higher output accuracy.Higher occasion still need adopt flow and pressure-measuring instrument to monitor to require flow and pressure to control accurately at medicine controlled release, chemical analysis and fuel cell etc., not only increased user cost, also increase system bulk, weight and complexity, seriously hindered piezoelectric pump applying in MEMS and portable product.
for improving output accuracy and the controllability of piezoelectric pump, reduce costs, reduce the volume and weight of overall system, people once proposed various structures from the belt sensor piezoelectric pump, need not other pressure and flowrate measuring tool and can realize the automatic measurement of output flow and pressure, as: Chinese patent 201110173933.7, 201110181209.9 and the voltage that produces after the piezoelectric actuator distortion that directly utilizes that 201110181208.4 grades propose characterizes the piezoelectric pump of output performance, the output voltage that the utilization that Chinese patent 201220276952.2 grades propose is placed in the pump chamber pressure sensor characterizes the piezoelectric pump of output performance etc.The metering system that the above-mentioned existing piezometric electric pump of testing oneself adopts belongs to indirect measurement, its measuring accuracy can descend under some special operating conditions, even to measure structure fully invalid, as: when the water fluid Yin Wendu that carries the larger liquid of gas, air content or carry increases and when seriously gasifying, pump chamber internal cause gas content increases and makes pressure decreased, even can not use mouthful valve and open, although piezoelectric actuator distortion this moment is large and higher sensing voltage output arranged, the output flow of pump may be very little or exports without fluid at all; In like manner, when terminal valve self lost efficacy or can not normally open and close, can cause equally the measuring accuracy of piezoelectric pump to reduce, even invalid.As seen, also there is certain deficiency in the existing piezometric electric pump of testing oneself aspect the accuracy of measuring accuracy and reliability.
Summary of the invention
Test oneself the piezometric electric pump in the accuracy of measuring accuracy and the deficiency aspect reliability for existing, the utility model proposes and a kind ofly realize output flow and tonometric piezoelectric pump based on the valve block Measuring opening, is called for short the electric stack pump of a kind of piezometric of testing oneself.
The technological scheme that the utility model is taked is: valve gap is arranged on pump cover by screw, and described pump cover is arranged on the pump housing by screw; Be bonded with cantilever beam type outlet valve and inlet valve between described valve gap and pump cover, described outlet valve and inlet valve form by piezoelectric film and substrate bonding; Be crimped with the pump chamber barrier film between described pump cover and the pump housing, be separately installed with piston and jacking block in the both sides of described pump chamber barrier film by screw; Piston and the seal ring, pump cover, outlet valve and the inlet valve that are installed on described piston consist of pump chamber jointly; The bolt that is arranged on pump housing end is turned round block piezoelectricity fold stack driver is crimped on described jacking block by anti-; Described piezoelectricity fold stack driver, outlet valve and inlet valve are connected with ECU (Electrical Control Unit) by wire group one, wire group two and wire group three respectively.
After described ECU (Electrical Control Unit) is opened and is entered steady operation and driving voltage by 0 to V
0During increase, piezoelectricity fold stack driver begins to extend and promotes jacking block, pump chamber barrier film and piston and moves right, cause the volume of pump chamber to reduce, hydrodynamic pressure increases, ever-increasing hydrodynamic pressure forces outlet valve unlatching, inlet valve to be closed, fluid is discharged from pump chamber through outlet valve, and this is discharge process; After the output voltage commutation of ECU (Electrical Control Unit), namely voltage is by V
0When reducing to 0, piezoelectricity fold stack driver begins to shrink under the effect of pump chamber barrier film, causes volume increase, the cavity fluid pressure of pump chamber to reduce, the hydrodynamic pressure that constantly reduces forces inlet valve to be opened, outlet valve cuts out, and fluid enters pump chamber through inlet valve, and this is suction process.
In the suction process and discharge process of above-described embodiment piezoelectric pump, all be accompanied by alternately opening and closing and having voltage signal to generate of inlet valve and outlet valve, so inlet valve and outlet valve also has the function of sensor; The magnitude of voltage that produces because of inlet valve and outlet valve and output flow and the pressure of piezoelectric pump all are directly proportional to the aperture of valve, therefore the delivery pressure P of piezoelectric pump and flow Q are the function of outlet valve and inlet valve output voltage, can adopt the output voltage of outlet valve or inlet valve to characterize piezoelectric pump delivery pressure and flow, and have:
Wherein: a=1-h
p/ h, b=E
m/ E
p, h, L are respectively total thickness and the length of piezoelectric cantilever, h
pBe piezoelectric chip thickness, g
31Piezoelectric voltage constant, E
pAnd E
mRespectively the Young's modulus of piezoelectric material and metal substrate, 1
pWith 1
qBe respectively the calibration coefficient of pressure and flow, f is the driving voltage frequency, V
gOutput voltage for outlet valve or inlet valve.
Characteristic of the present utility model and advantage are: utilize the one-way valve with sensing function directly to measure delivery pressure and the flow of pump, need not extra sensor, therefore degree of accuracy and reliability simple in structure, measuring accuracy are higher, and be suitable for Real-Time Monitoring in the pump course of conveying of the different mediums such as liquid, gas and gas-liquid mixture.
Description of drawings
Fig. 1 is the structure cut-away view when in preferred embodiment of the utility model, piezoelectric stack pump is discharged fluid;
Fig. 2 is the structure cut-away view after piezoelectric stack pump suction fluid in preferred embodiment of the utility model;
Fig. 3 is the A-A sectional view of Fig. 2;
Fig. 4 is piezoelectric stack pump input voltage waveform in preferred embodiment of the utility model;
Fig. 5 is the output voltage waveforms of a preferred embodiment middle outlet valve of the utility model;
Fig. 6 is the output voltage waveforms of inlet valve in preferred embodiment of the utility model;
Embodiment:
After described ECU (Electrical Control Unit) 15 is opened and is entered steady operation and driving voltage by 0 to V
0During increase, piezoelectricity fold stack driver 11 begins to extend and promotes jacking block 9, pump chamber barrier film 8 and piston 7 and moves right, cause the volume of pump chamber 5 to reduce, hydrodynamic pressure increases, ever-increasing hydrodynamic pressure forces outlet valve 1 unlatching, inlet valve 3 to be closed, fluid is discharged from pump chamber 5 through outlet valve 1, and this is discharge process; After the output voltage commutation of ECU (Electrical Control Unit) 15, namely voltage is by V
0When reducing to 0, piezoelectricity fold stack driver 11 begins to shrink under the effect of pump chamber barrier film 8, causes volume increase, the cavity fluid pressure of pump chamber 5 to reduce, the hydrodynamic pressure that constantly reduces forces inlet valve 3 to be opened, outlet valve 1 cuts out, and fluid enters pump chamber 5 through inlet valve 3, and this is suction process.
In the suction process and discharge process of above-described embodiment piezoelectric pump, all be accompanied by alternately opening and closing and having voltage signal to generate of inlet valve 3 and outlet valve 1, so inlet valve 3 and outlet valve 1 also has the function of sensor; The magnitude of voltage that produces because of inlet valve 3 and outlet valve 1 and output flow and the pressure of piezoelectric pump all are directly proportional to the aperture of valve, therefore the delivery pressure P of piezoelectric pump and flow Q are the output voltage V of outlet valve 1
G, cAnd the output voltage V of inlet valve 3
G, rFunction, can adopt the output voltage V of outlet valve 1
G, cOr the output voltage V of inlet valve 3
G, rCharacterize piezoelectric pump delivery pressure and flow, and have:
Wherein: a=1-h
p/ h, b=E
m/ E
p, h, L are respectively total thickness and the length of piezoelectric cantilever, h
pBe piezoelectric chip thickness, g
31Piezoelectric voltage constant, E
pAnd E
mRespectively the Young's modulus of piezoelectric material and metal substrate, 1
pWith 1
qBe respectively the calibration coefficient of pressure and flow, f is the driving voltage frequency, V
gBe outlet valve 1 output voltage V
G, cOr the output voltage V of inlet valve 3
G, r
Claims (2)
1. piezometric electricity stack pump of testing oneself, it is characterized in that: valve gap is arranged on pump cover by screw, and described pump cover is arranged on the pump housing by screw; Be bonded with cantilever beam type outlet valve and inlet valve between described valve gap and pump cover, described outlet valve and inlet valve form by piezoelectric film and substrate bonding; Be crimped with the pump chamber barrier film between described pump cover and the pump housing, be separately installed with piston and jacking block in the both sides of described pump chamber barrier film by screw; Piston and the seal ring, pump cover, outlet valve and the inlet valve that are installed on described piston consist of pump chamber jointly; The bolt that is arranged on pump housing end is turned round block piezoelectricity fold stack driver is crimped on described jacking block by anti-; Described piezoelectricity fold stack driver, outlet valve and inlet valve are connected with ECU (Electrical Control Unit) by wire group one, wire group two and wire group three respectively.
2. a kind of piezometric electricity stack pump of testing oneself according to claim 1 is further characterized in that: can adopt the output voltage of outlet valve or inlet valve to characterize piezoelectric pump delivery pressure and flow, namely have:
Wherein: a=1-h
p/ h, b=E
m/ E
p, h, L are respectively total thickness and the length of piezoelectric cantilever, h
pBe piezoelectric chip thickness, g
31Piezoelectric voltage constant, E
pAnd E
mRespectively the Young's modulus of piezoelectric material and metal substrate, l
pAnd l
qBe respectively the calibration coefficient of pressure and flow, f is the driving voltage frequency, V
gOutput voltage for outlet valve or inlet valve.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201220715293 CN202946352U (en) | 2012-12-06 | 2012-12-06 | Self-measurement piezoelectric stack pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201220715293 CN202946352U (en) | 2012-12-06 | 2012-12-06 | Self-measurement piezoelectric stack pump |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202946352U true CN202946352U (en) | 2013-05-22 |
Family
ID=48422059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 201220715293 Expired - Fee Related CN202946352U (en) | 2012-12-06 | 2012-12-06 | Self-measurement piezoelectric stack pump |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN202946352U (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102979707A (en) * | 2012-12-06 | 2013-03-20 | 浙江师范大学 | Self-measurement piezoelectric stack pump |
CN104614196A (en) * | 2015-02-11 | 2015-05-13 | 重庆大学 | Device for measuring rigidity of piezoelectric ceramic stacking actuator |
CN109821098A (en) * | 2019-03-01 | 2019-05-31 | 浙江师范大学 | A kind of piezoelectric stack drive-type infusion device |
CN109882379A (en) * | 2019-03-03 | 2019-06-14 | 浙江师范大学 | A kind of high viscosity self-acting lubricator of piezoelectric stack driving |
-
2012
- 2012-12-06 CN CN 201220715293 patent/CN202946352U/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102979707A (en) * | 2012-12-06 | 2013-03-20 | 浙江师范大学 | Self-measurement piezoelectric stack pump |
CN104614196A (en) * | 2015-02-11 | 2015-05-13 | 重庆大学 | Device for measuring rigidity of piezoelectric ceramic stacking actuator |
CN104614196B (en) * | 2015-02-11 | 2017-11-10 | 重庆大学 | Piezoelectric element actuator stiffness measurement device |
CN109821098A (en) * | 2019-03-01 | 2019-05-31 | 浙江师范大学 | A kind of piezoelectric stack drive-type infusion device |
CN109821098B (en) * | 2019-03-01 | 2021-05-28 | 浙江师范大学 | Piezoelectric stack driving type infusion device |
CN109882379A (en) * | 2019-03-03 | 2019-06-14 | 浙江师范大学 | A kind of high viscosity self-acting lubricator of piezoelectric stack driving |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103016319B (en) | Self-measuring piezoelectric pump | |
CN102979707B (en) | Self-measurement piezoelectric stack pump | |
CN102192135B (en) | Piezoelectric stack pump provided with sensor | |
CN202108708U (en) | Piezoelectric stack pump with sensor | |
CN203051061U (en) | Self-measurement piezoelectric pump | |
CN202946352U (en) | Self-measurement piezoelectric stack pump | |
CN102374158A (en) | Self-sensing piezoelectric diaphragm pump | |
CN202149012U (en) | Self-sensing piezoelectric membrane pump | |
CN202937430U (en) | Disc-shaped sensor valve-based piezoelectric stack pump | |
CN102213210A (en) | Driving-sensing integral piezoelectric chip pump | |
CN108331576B (en) | One-way flow monitoring device | |
CN103032297B (en) | Piezoelectric pump based on disk type sensor valve | |
CN100439895C (en) | Oil elastic modulus detector based on volume elastic modulus definition | |
CN202579119U (en) | Novel self-induced piezoelectric membrane pump | |
CN105043927B (en) | It is a kind of can accurate pressure control gas absorption analysis method and device | |
CN101762307B (en) | Gas flow calibrating device based on bell shape-column shape dual piston structure | |
CN103032296B (en) | Piezoelectric stack pump based on disk type sensor valve | |
CN105300570B (en) | Zero strain soil pressure sensor | |
CN2901296Y (en) | Oil-liquid elasticity modulus detector based on volume elasticity modules definition | |
CN201650537U (en) | Microcomputer high-precision fuel-measuring test-bed for fuel injection pump | |
CN209115238U (en) | Marine low speed diesel engine Cylinder lubricating system test platform | |
CN202673640U (en) | Intelligent piezoelectric stack pump based on pump chamber liquid pressure measurement | |
CN104100606A (en) | Pneumatic drive and process for gathering the performance of a pneumatic drive | |
CN202348633U (en) | Portable oil leakage testing device of air compressor | |
CN205209663U (en) | Zero strain soil pressure sensor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130522 Termination date: 20131206 |