CN202937430U - Disc-shaped sensor valve-based piezoelectric stack pump - Google Patents
Disc-shaped sensor valve-based piezoelectric stack pump Download PDFInfo
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- CN202937430U CN202937430U CN 201220715333 CN201220715333U CN202937430U CN 202937430 U CN202937430 U CN 202937430U CN 201220715333 CN201220715333 CN 201220715333 CN 201220715333 U CN201220715333 U CN 201220715333U CN 202937430 U CN202937430 U CN 202937430U
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- pump
- valve
- inlet valve
- cover
- outlet valve
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Abstract
The utility model relates to a disc-shaped sensor valve-based piezoelectric stack pump, and belongs to the field of the transmission and control of microfluid. According to the piezoelectric stack pump, a valve cover is arranged on a pump cover; the pump cover is arranged on a pump body; an outlet valve and an inlet valve are bonded between the valve cover and the pump cover; the outlet valve and the inlet valve are formed by bonding annular piezoelectric films and substrates, and the substrates are provided with through holes; a pump cavity diaphragm is pressed between the pump cover and the pump body; two sides of the pump cavity diaphragm are provided with a piston and a top block respectively by screws; the piston, the pump cover, the outlet valve and the inlet valve form a pump cavity; a bolt presses a piezoelectric stack driver on the top block by a torsion-proof check block; and a piezoelectric stack, the outlet valve and the inlet valve are connected with an electronic control unit by a wire group respectively. The disc-shaped sensor valve-based piezoelectric stack pump has the advantage that the output pressure and flow of the piezoelectric pump are measured directly by utilizing a check valve with a sensing function, so that the piezoelectric stack pump is simple in structure and high in measuring accuracy and reliability and is suitable for the real-time monitoring of different media of liquid, gas, gas-liquid mixtures and the like in the pumping process.
Description
Technical field
The invention belongs to the piezoelectric pump that microfluid transmission control field is used, be specifically related to a kind of piezoelectric stack pump based on dish-like sensor valve.
Background technique
That piezoelectric pump has is simple in structure, volume is little, be swift in response, without the many advantages such as electromagnetic interference, easy operating, flow and pressure controllability be good, all have wide practical use at aspects such as the fuel supply of medical treatment, chemical analysis, motor car engine and fuel cell, microcomputer electrohydraulic systems, so its development enjoys countries in the world scholar's extensive concern.For satisfying the application demand of different field, people have proposed the piezoelectric pump of various ways structure.Although the piezoelectric pump structural type and the performance difference that propose are larger, be all to utilize bending or the dilatation that piezoelectric vibrator produces under electric field action to realize fluid-operated.The fluid of exporting because of each work cycle of piezoelectric pump is the caused pump chamber variable quantity of piezoelectric vibrator distortion, therefore can realize the accurate control of flow and pressure, is particularly useful for the aspects such as medicine controlled release.Yet in real work, because piezoelectric pump output flow and pressure are subjected to operating infulence larger, except driving voltage, frequency, fluid viscosity, temperature and delivery pressure etc. also have considerable influence to its actual output flow.Therefore, merely adopt the method for regulating driving voltage and frequency to there is no method and obtain higher output accuracy.Higher occasion still need adopt flow and pressure-measuring instrument to monitor to require flow and pressure to control accurately at medicine controlled release, chemical analysis and fuel cell etc., not only increased user cost, also increase system bulk, weight and complexity, seriously hindered piezoelectric pump applying in MEMS and portable product.
for improving output accuracy and the controllability of piezoelectric pump, reduce costs, reduce the volume and weight of overall system, people once proposed various structures from the belt sensor piezoelectric pump, need not other pressure and flowrate measuring tool and can realize the automatic measurement of output flow and pressure, as: Chinese patent 201110173933.7, 201110181209.9 and the voltage that produces after the piezoelectric actuator distortion that directly utilizes that 201110181208.4 grades propose characterizes the piezoelectric pump of output performance, the output voltage that the utilization that Chinese patent 201220276952.2 grades propose is placed in the pump chamber pressure sensor characterizes the piezoelectric pump of output performance etc.The metering system that the above-mentioned existing piezometric electric pump of testing oneself adopts belongs to indirect measurement, its measuring accuracy can descend under some special operating conditions, even to measure structure fully invalid, as: when the water fluid Yin Wendu that carries the larger liquid of gas, air content or carry increases and when seriously gasifying, pump chamber internal cause gas content increases and makes pressure decreased, even can not use mouthful valve and open, although piezoelectric actuator distortion this moment is large and higher sensing voltage output arranged, the output flow of pump may be very little or exports without fluid at all; In like manner, when terminal valve self lost efficacy or can not normally open and close, can cause equally the measuring accuracy of piezoelectric pump to reduce, even invalid.As seen, also there is certain deficiency in the existing piezometric electric pump of testing oneself aspect the accuracy of measuring accuracy and reliability.
Summary of the invention
Test oneself the piezometric electric pump in the accuracy of measuring accuracy and the deficiency aspect reliability for existing, and the present invention proposes a kind ofly to realize output flow and tonometric piezoelectric stack pump based on the valve block Measuring opening, is called for short a kind of piezoelectric pump based on dish-like sensor valve.
The technological scheme that the present invention takes is: valve gap is arranged on pump cover by screw, and described pump cover is arranged on the pump housing by screw; Be bonded with outlet valve and inlet valve between described valve gap and pump cover, described outlet valve and inlet valve are all formed by ring piezoelectric film and substrate bonding, and described substrate all has through hole; Be crimped with the pump chamber barrier film between described pump cover and the pump housing, be separately installed with piston and jacking block in the both sides of described pump chamber barrier film by screw; Piston and the seal ring, pump cover, outlet valve and the inlet valve that are installed on described piston consist of pump chamber jointly; The bolt that is arranged on pump housing end is turned round block piezoelectricity fold stack driver is crimped on described jacking block by anti-; Described piezoelectricity fold stack driver, outlet valve and inlet valve are connected with ECU (Electrical Control Unit) by wire group one, wire group two and wire group three respectively.
After described ECU (Electrical Control Unit) is opened and is entered steady operation and driving voltage by 0 to V
0During increase, piezoelectricity fold stack driver begins to extend and promotes jacking block, pump chamber barrier film and piston and moves right, cause the volume of pump chamber to reduce, hydrodynamic pressure increases, ever-increasing hydrodynamic pressure forces outlet valve unlatching, inlet valve to be closed, fluid is discharged from pump chamber through outlet valve, and this is discharge process; After the output voltage commutation of ECU (Electrical Control Unit), namely voltage is by V
0When reducing to 0, piezoelectricity fold stack driver begins to shrink under the effect of pump chamber barrier film, causes volume increase, the cavity fluid pressure of pump chamber to reduce, the hydrodynamic pressure that constantly reduces forces inlet valve to be opened, outlet valve cuts out, and fluid enters pump chamber through inlet valve, and this is suction process.
In the suction process and discharge process of above-described embodiment piezoelectric pump, all be accompanied by alternately opening and closing and having voltage signal to generate of inlet valve and outlet valve, so inlet valve and outlet valve also has the function of sensor; The magnitude of voltage that produces because of inlet valve and outlet valve and output flow and the pressure of piezoelectric pump all are directly proportional to the aperture of valve, therefore the delivery pressure P of piezoelectric pump and flow Q are the output voltage V of outlet valve
G, cAnd inlet valve output voltage V
G, rFunction, can adopt the output voltage V of outlet valve
G, cOr the output voltage V of inlet valve
G, rCharacterize piezoelectric pump delivery pressure and flow, namely have: pressure is that P=k1|Vg|, flow are Q=k2|Vg|, and wherein k1, k2 are respectively the calibration coefficient of piezoelectric pump delivery pressure and flow, and Vg is the output voltage V of outlet valve
G, cOr the output voltage V of inlet valve
G, r
Characteristic of the present invention and advantage are: utilize the one-way valve with sensing function directly to measure delivery pressure and the flow of pump, need not extra sensor, therefore degree of accuracy and reliability simple in structure, measuring accuracy are higher, and be suitable for Real-Time Monitoring in the pumping procedure of the different mediums such as liquid, gas and gas-liquid mixture.
Description of drawings
Fig. 1 is the structure cut-away view when in a preferred embodiment of the present invention, piezoelectric stack pump is discharged fluid;
Fig. 2 is the structure cut-away view after piezoelectric stack pump suction fluid in a preferred embodiment of the present invention;
Fig. 3 is the A-A sectional view of Fig. 2;
Fig. 4 is piezoelectric stack pump input voltage waveform in a preferred embodiment of the present invention;
Fig. 5 is the output voltage waveforms of a preferred embodiment of the present invention middle outlet valve;
Fig. 6 is the output voltage waveforms of inlet valve in a preferred embodiment of the present invention;
Embodiment:
After described ECU (Electrical Control Unit) 15 is opened and is entered steady operation and driving voltage by 0 to V
0During increase, piezoelectricity fold stack driver 11 begins to extend and promotes jacking block 9, pump chamber barrier film 8 and piston 7 and moves right, cause the volume of pump chamber 5 to reduce, hydrodynamic pressure increases, ever-increasing hydrodynamic pressure forces outlet valve 1 unlatching, inlet valve 3 to be closed, fluid is discharged from pump chamber 5 through outlet valve 1, and this is discharge process; After the output voltage commutation of ECU (Electrical Control Unit) 15, namely voltage is by V
0When reducing to 0, piezoelectricity fold stack driver 11 begins to shrink under the effect of pump chamber barrier film 8, causes volume increase, the cavity fluid pressure of pump chamber 5 to reduce, the hydrodynamic pressure that constantly reduces forces inlet valve 3 to be opened, outlet valve 1 cuts out, and fluid enters pump chamber 5 through inlet valve 3, and this is suction process.
In the suction process and discharge process of above-described embodiment piezoelectric pump, all be accompanied by alternately opening and closing and having voltage signal to generate of inlet valve 3 and outlet valve 1, so inlet valve 3 and outlet valve 1 also has the function of sensor; The magnitude of voltage that produces because of inlet valve 3 and outlet valve 1 and output flow and the pressure of piezoelectric pump all are directly proportional to the aperture of valve, therefore the delivery pressure P of piezoelectric pump and flow Q are the output voltage V of outlet valve 1
G, cAnd the output voltage V of inlet valve 3
G, rFunction, can adopt the output voltage V of outlet valve 1
G, cOr the output voltage V of inlet valve 3
G, rCharacterize piezoelectric pump delivery pressure and flow, namely have: pressure is that P=k1|Vg|, flow are Q=k2|Vg|, and wherein k1, k2 are respectively the calibration coefficient of piezoelectric pump delivery pressure and flow, and wherein Vg is the output voltage V of outlet valve 1
G, cOr the output voltage V of inlet valve 3
G, r
Claims (1)
1. based on the piezoelectric stack pump of dish-like sensor valve, it is characterized in that: valve gap is arranged on pump cover by screw, and described pump cover is arranged on the pump housing by screw; Be bonded with outlet valve and inlet valve between described valve gap and pump cover; Described outlet valve and inlet valve are all formed by ring piezoelectric film and substrate bonding, and described substrate all has through hole; Be crimped with the pump chamber barrier film between described pump cover and the pump housing, be separately installed with piston and jacking block in the both sides of described pump chamber barrier film by screw; Piston and the seal ring, pump cover, outlet valve and the inlet valve that are installed on described piston consist of pump chamber jointly; The bolt that is arranged on pump housing end is turned round block piezoelectricity fold stack driver is crimped on described jacking block by anti-; Described piezoelectricity fold stack driver, outlet valve and inlet valve are connected with ECU (Electrical Control Unit) by wire group one, wire group two and wire group three respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220715333 CN202937430U (en) | 2012-12-06 | 2012-12-06 | Disc-shaped sensor valve-based piezoelectric stack pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220715333 CN202937430U (en) | 2012-12-06 | 2012-12-06 | Disc-shaped sensor valve-based piezoelectric stack pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202937430U true CN202937430U (en) | 2013-05-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220715333 Expired - Fee Related CN202937430U (en) | 2012-12-06 | 2012-12-06 | Disc-shaped sensor valve-based piezoelectric stack pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202937430U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103032296A (en) * | 2012-12-06 | 2013-04-10 | 浙江师范大学 | Piezoelectric stack pump based on disk type sensor valve |
| CN109882388A (en) * | 2019-03-01 | 2019-06-14 | 浙江师范大学 | A kind of accumulation compression mini air compressor |
| CN113669239A (en) * | 2020-05-14 | 2021-11-19 | 研能科技股份有限公司 | Reinforcement method for thin pump |
| US11326588B2 (en) * | 2018-08-08 | 2022-05-10 | Seiko Epson Corporation | Diaphragm-type compressor, projector, cooler, and method for compressing fluid |
-
2012
- 2012-12-06 CN CN 201220715333 patent/CN202937430U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103032296A (en) * | 2012-12-06 | 2013-04-10 | 浙江师范大学 | Piezoelectric stack pump based on disk type sensor valve |
| CN103032296B (en) * | 2012-12-06 | 2015-05-13 | 浙江师范大学 | Piezoelectric stack pump based on disk type sensor valve |
| US11326588B2 (en) * | 2018-08-08 | 2022-05-10 | Seiko Epson Corporation | Diaphragm-type compressor, projector, cooler, and method for compressing fluid |
| CN109882388A (en) * | 2019-03-01 | 2019-06-14 | 浙江师范大学 | A kind of accumulation compression mini air compressor |
| CN113669239A (en) * | 2020-05-14 | 2021-11-19 | 研能科技股份有限公司 | Reinforcement method for thin pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130515 Termination date: 20131206 |