CN103032296B - Piezoelectric stack pump based on disk type sensor valve - Google Patents
Piezoelectric stack pump based on disk type sensor valve Download PDFInfo
- Publication number
- CN103032296B CN103032296B CN201210551291.4A CN201210551291A CN103032296B CN 103032296 B CN103032296 B CN 103032296B CN 201210551291 A CN201210551291 A CN 201210551291A CN 103032296 B CN103032296 B CN 103032296B
- Authority
- CN
- China
- Prior art keywords
- pump
- valve
- piezoelectric
- inlet valve
- outlet valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Reciprocating Pumps (AREA)
Abstract
The invention relates to a piezoelectric stack pump based on a disk type sensor valve, which belongs to the field of microfluid transmission and control. A valve cover is arranged on a pump cover; the pump cover is arranged on a pump body; an outlet valve and an inlet valve are bonded between the valve cover and the pump cover; both the outlet valve and the inlet valve are made by bonding annular piezoelectric films and substrates; the substrates are both provided with through holes; a pump cavity diaphragm is in compression joint between the pump cover and the pump body; a piston and a jacking block are arranged on both sides of the pump cavity diaphragm respectively through screws; the piston, the pump cover, the outlet valve and the inlet valve jointly construct a pump cavity; a piezoelectric stack driver is in compression joint on the jacking block through an anti-torsion chock block by using a bolt; and a piezoelectric stack, the outlet valve and the inlet valve are connected with an electric control unit respectively through lead groups. The piezoelectric stack pump has the characteristics and advantages that a one-way valve having a sensing function is used for directly measuring the output pressure and flow of a piezoelectric pump, so that the piezoelectric stack pump is simple in structure, has higher measuring accuracy and higher reliability, and is suitable for real-time monitoring of the pumping processes of different media such as liquids, gases, gas-liquid mixtures and the like.
Description
Technical field
The utility model belongs to the piezoelectric pump of Micro Fluid Transfer control field application, is specifically related to a kind of piezoelectric stack pump based on disk type sensor valve.
Background technique
Piezoelectric pump has that structure is simple, volume is little, is swift in response, without electromagnetic interference, be easy to the many advantages such as operation, flow and pressure controllable be good, all have wide practical use in the fuel supply, microcomputer electrohydraulic system etc. of medical treatment, chemical analysis, motor car engine and fuel cell, therefore it develops the extensive concern enjoying countries in the world scholar.For meeting the application demand of different field, there has been proposed the piezoelectric pump of various ways structure.Although the piezoelectric pump structural type proposed and performance difference are comparatively large, be all that the bending or dilatation utilizing piezoelectric vibrator to produce under electric field action realizes fluid-operated.Fluid because of each work cycle output of piezoelectric pump is the pump chamber variable quantity caused by piezoelectric vibrator distortion, therefore can realize the accurate control of flow and pressure, is particularly useful for the aspects such as medicine controlled release.But in real work, because piezoelectric pump output flow and pressure are subject to operating infulence comparatively large, except driving voltage, frequency, fluid viscosity, temperature and delivery pressure etc. also have considerable influence to its actual output flow.Therefore, merely adopt the method for adjustment driving voltage and frequency to there is no method and obtain higher output accuracy.Require that flow and the accurate higher occasion of Stress control still need to adopt flow and pressure-measuring instrument to monitor at medicine controlled release, chemical analysis and fuel cell etc., not only increase user cost, too increase system bulk, weight and complexity, seriously hinder piezoelectric pump applying in MEMS and portable product.
For improving output accuracy and the controllability of piezoelectric pump, reduce costs, reduce the volume and weight of overall system, people once proposed various structures from belt sensor piezoelectric pump, the automatic measurement of output flow and pressure can be realized without the need to other pressure and flowrate measuring tool, as: Chinese patent 201110173933.7, 201110181209.9 and 201110181208.4 etc. propose directly utilize piezoelectric actuator to be out of shape after the voltage that produces characterize the piezoelectric pump of output performance, the utilization that Chinese patent 201220276952.2 grade proposes is placed in the piezoelectric pump etc. of the output voltage sign output performance of pump chamber pressure sensor.The metering system that above-mentioned existing measurement piezoelectric pump adopts belongs to indirect inspection, under the operating conditions that some is special, its measuring accuracy can decline, even measurement structure is completely invalid, as: when carry the larger liquid of gas, air content or the water fluid Yin Wendu that carries increase and seriously gasify time, pump chamber internal cause gas content increases and pressure is reduced, even can not use mouthful valve and open, although now piezoelectric actuator distortion is comparatively large and have higher sensing voltage to export, the output flow of pump may be very little or to export without fluid at all; In like manner, when terminal valve itself fail or when can not normally open and close, the measuring accuracy of piezoelectric pump can be caused equally to reduce, even invalid.Visible, also there is certain deficiency in existing measurement piezoelectric pump in the accuracy and reliability of measuring accuracy.
Summary of the invention
For the deficiency of existing measurement piezoelectric pump in the accuracy and reliability of measuring accuracy, the utility model proposes one and realize output flow and tonometric piezoelectric stack pump based on valve block Measuring opening, be called for short a kind of piezoelectric pump based on disk type sensor valve.
The technological scheme that the utility model is taked is: valve gap is arranged on pump cover by screw, and described pump cover is arranged on the pump housing by screw; Between described valve gap and pump cover, be bonded with outlet valve and inlet valve, described outlet valve and inlet valve are all formed by ring piezoelectric film and substrate bonding, and described substrate all has through hole; Between described pump cover and the pump housing, be crimped with pump chamber barrier film, be separately installed with piston and jacking block in the both sides of described pump chamber barrier film by screw; Piston and seal ring, pump cover, outlet valve and the inlet valve be installed on described piston form pump chamber jointly; Be arranged on the bolt of pump housing end by preventing that turning round block is crimped on piezoelectricity fold stack driver on described jacking block; Described piezoelectricity fold stack driver, outlet valve and inlet valve are connected with ECU (Electrical Control Unit) respectively by wire group one, wire group two and wire group three.
After described ECU (Electrical Control Unit) is opened and is entered steady operation and driving voltage by 0 to V
0during increase, piezoelectricity fold stack driver starts to extend and promotes jacking block, pump chamber barrier film and piston and moves right, cause that the volume of pump chamber reduces, hydrodynamic pressure increases, ever-increasing hydrodynamic pressure forces outlet valve unlatching, inlet valve cuts out, fluid is discharged from pump chamber through outlet valve, and this is discharge process; After the output voltage commutation of ECU (Electrical Control Unit), namely voltage is by V
0when reducing to 0, piezoelectricity fold stack driver starts to shrink under the effect of pump chamber barrier film, causes that the volume of pump chamber increases, cavity fluid pressure reduction, the hydrodynamic pressure of continuous reduction forces inlet valve to be opened, outlet valve cuts out, and fluid enters pump chamber through inlet valve, and this is suction process.
In the suction process and discharge process of above-described embodiment piezoelectric pump, alternately opening and closing and having voltage signal to generate all along with inlet valve and outlet valve, therefore inlet valve and outlet valve also have the function of sensor; The magnitude of voltage produced because of inlet valve and outlet valve and the output flow of piezoelectric pump and pressure are all directly proportional to the aperture of valve, therefore the delivery pressure P of piezoelectric pump and flow Q is the output voltage V of outlet valve
g, cand inlet valve output voltage V
g, rfunction, the output voltage V of outlet valve can be adopted
g, cor the output voltage V of inlet valve
g, rcharacterize piezoelectric pump delivery pressure and flow, namely have: pressure is P=k1|Vg|, flow is Q=k2|Vg|, and wherein k1, k2 are respectively the calibration coefficient of piezoelectric pump delivery pressure and flow, Vg is the output voltage V of outlet valve
g, cor the output voltage V of inlet valve
g, r.
Characteristic of the present utility model and advantage are: utilize the one-way valve with sensing function directly to measure the delivery pressure of pump and flow, without the need to extra sensor, therefore structure is simple, the degree of accuracy of measuring accuracy and reliability higher, and be suitable for the Real-Time Monitoring in the pumping procedure of the different mediums such as liquid, gas and gas-liquid mixture.
Accompanying drawing explanation
Structure cut-away view when Fig. 1 is piezoelectric stack pump displacement fluids in model utility preferred embodiment;
Fig. 2 is the structure cut-away view in model utility preferred embodiment after piezoelectric stack pump suction fluid;
Fig. 3 is the A-A sectional view of Fig. 2;
Fig. 4 is piezoelectric stack pump input voltage waveform in model utility preferred embodiment;
Fig. 5 is the output voltage waveforms of a model utility preferred embodiment middle outlet valve;
Fig. 6 is the output voltage waveforms of inlet valve in model utility preferred embodiment;
Embodiment:
Valve gap 2 is arranged on pump cover 4 by screw, and described pump cover 4 is arranged on the pump housing 10 by screw; Outlet valve 1 and inlet valve 3 is bonded with between described valve gap 2 and pump cover 4, described outlet valve 1 bondingly to be formed by ring piezoelectric film 1-2 and substrate 1-1, inlet valve 3 is by ring piezoelectric film 3-2 and substrate 3-1 is bonding forms, and described substrate 1-1 and 3-1 has through hole; Between described pump cover 4 and the pump housing 10, be crimped with pump chamber barrier film 8, be separately installed with piston 7 and jacking block 9 in the both sides of described pump chamber barrier film 8 by screw; Piston 7 and seal ring 6, pump cover 4, outlet valve 1 and the inlet valve 3 be installed on described piston 7 form pump chamber 5 jointly; Be arranged on the bolt 13 of the pump housing 10 end by preventing that turning round block 12 is crimped on piezoelectricity fold stack driver 11 on described jacking block 9; Described piezoelectricity fold stack driver 11, outlet valve 1 and inlet valve 3 are connected with ECU (Electrical Control Unit) 15 respectively by wire group 1, wire group 2 17 and wire group 3 16.
After described ECU (Electrical Control Unit) 15 is opened and is entered steady operation and driving voltage by 0 to V
0during increase, piezoelectricity fold stack driver 11 starts to extend and promotes jacking block 9, pump chamber barrier film 8 and piston 7 and moves right, cause that the volume of pump chamber 5 reduces, hydrodynamic pressure increases, ever-increasing hydrodynamic pressure forces that outlet valve 1 is opened, inlet valve 3 cuts out, fluid is discharged from pump chamber 5 through outlet valve 1, and this is discharge process; After the output voltage commutation of ECU (Electrical Control Unit) 15, namely voltage is by V
0when reducing to 0, piezoelectricity fold stack driver 11 starts to shrink under the effect of pump chamber barrier film 8, causes that the volume of pump chamber 5 increases, cavity fluid pressure reduction, the hydrodynamic pressure of continuous reduction forces inlet valve 3 to be opened, outlet valve 1 cuts out, and fluid enters pump chamber 5 through inlet valve 3, and this is suction process.
In the suction process and discharge process of above-described embodiment piezoelectric pump, alternately opening and closing and having voltage signal to generate all along with inlet valve 3 and outlet valve 1, therefore inlet valve 3 and outlet valve 1 also have the function of sensor; The magnitude of voltage produced because of inlet valve 3 and outlet valve 1 and the output flow of piezoelectric pump and pressure are all directly proportional to the aperture of valve, therefore the delivery pressure P of piezoelectric pump and flow Q is the output voltage V of outlet valve 1
g, cand the output voltage V of inlet valve 3
g, rfunction, the output voltage V of outlet valve 1 can be adopted
g, cor the output voltage V of inlet valve 3
g, rcharacterize piezoelectric pump delivery pressure and flow, namely have: pressure is P=k1|Vg|, flow is Q=k2|Vg|, and wherein k1, k2 are respectively the calibration coefficient of piezoelectric pump delivery pressure and flow, wherein Vg is the output voltage V of outlet valve 1
g, cor the output voltage V of inlet valve 3
g, r.
Claims (1)
1. based on the piezoelectric stack pump of disk type sensor valve, it is characterized in that: valve gap is arranged on pump cover by screw, described pump cover is arranged on the pump housing by screw; Outlet valve and inlet valve is bonded with between described valve gap and pump cover; Described outlet valve and inlet valve are all formed by ring piezoelectric film and substrate bonding, and described substrate all has through hole; Between described pump cover and the pump housing, be crimped with pump chamber barrier film, be separately installed with piston and jacking block in the both sides of described pump chamber barrier film by screw; Piston and seal ring, pump cover, outlet valve and the inlet valve be installed on described piston form pump chamber jointly; Be arranged on the bolt of pump housing end by preventing that turning round block is crimped on piezoelectricity fold stack driver on described jacking block; Described piezoelectricity fold stack driver, outlet valve and inlet valve are connected with ECU (Electrical Control Unit) respectively by wire group one, wire group two and wire group three; Adopt the output voltage V of outlet valve or inlet valve
gcharacterize piezoelectric pump delivery pressure P and flow Q, i.e. P=k
1| V
g|, Q=k
2| V
g|, wherein k
1and k
2be respectively the calibration coefficient of piezoelectric pump delivery pressure and flow.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210551291.4A CN103032296B (en) | 2012-12-06 | 2012-12-06 | Piezoelectric stack pump based on disk type sensor valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210551291.4A CN103032296B (en) | 2012-12-06 | 2012-12-06 | Piezoelectric stack pump based on disk type sensor valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103032296A CN103032296A (en) | 2013-04-10 |
| CN103032296B true CN103032296B (en) | 2015-05-13 |
Family
ID=48019569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210551291.4A Expired - Fee Related CN103032296B (en) | 2012-12-06 | 2012-12-06 | Piezoelectric stack pump based on disk type sensor valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103032296B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103291578B (en) * | 2013-05-06 | 2015-11-18 | 南京航空航天大学 | Giant magnetostrictive hydraulic pump and method of work thereof |
| CN108180135B (en) * | 2018-03-09 | 2023-09-26 | 南昌工程学院 | Piezoelectric stack micropump based on two-stage symmetrical flexible hinge amplifying mechanism |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4344743A (en) * | 1979-12-04 | 1982-08-17 | Bessman Samuel P | Piezoelectric driven diaphragm micro-pump |
| US5816780A (en) * | 1997-04-15 | 1998-10-06 | Face International Corp. | Piezoelectrically actuated fluid pumps |
| CN101054967A (en) * | 2007-05-25 | 2007-10-17 | 吉林大学 | Piezoelectric oscillator active valve type piezoelectric pump |
| DE102008033153A1 (en) * | 2008-07-15 | 2010-01-21 | Siemens Aktiengesellschaft | Diaphragm pump i.e. micromechanical diaphragm pump for transportation of predefined fluid amount to sensor element for e.g. bio analytics in analysis system, has intake valve and/or outlet valve provided with drive component |
| CN102192135A (en) * | 2011-06-24 | 2011-09-21 | 浙江师范大学 | Piezoelectric stack pump provided with sensor |
| CN202937430U (en) * | 2012-12-06 | 2013-05-15 | 浙江师范大学 | Disc-shaped sensor valve-based piezoelectric stack pump |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001221166A (en) * | 2000-02-10 | 2001-08-17 | Furuyama Akimi | Displacement type pump with spiral pipes and fluid transfer method |
| US7484940B2 (en) * | 2004-04-28 | 2009-02-03 | Kinetic Ceramics, Inc. | Piezoelectric fluid pump |
-
2012
- 2012-12-06 CN CN201210551291.4A patent/CN103032296B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4344743A (en) * | 1979-12-04 | 1982-08-17 | Bessman Samuel P | Piezoelectric driven diaphragm micro-pump |
| US5816780A (en) * | 1997-04-15 | 1998-10-06 | Face International Corp. | Piezoelectrically actuated fluid pumps |
| CN101054967A (en) * | 2007-05-25 | 2007-10-17 | 吉林大学 | Piezoelectric oscillator active valve type piezoelectric pump |
| DE102008033153A1 (en) * | 2008-07-15 | 2010-01-21 | Siemens Aktiengesellschaft | Diaphragm pump i.e. micromechanical diaphragm pump for transportation of predefined fluid amount to sensor element for e.g. bio analytics in analysis system, has intake valve and/or outlet valve provided with drive component |
| CN102192135A (en) * | 2011-06-24 | 2011-09-21 | 浙江师范大学 | Piezoelectric stack pump provided with sensor |
| CN202937430U (en) * | 2012-12-06 | 2013-05-15 | 浙江师范大学 | Disc-shaped sensor valve-based piezoelectric stack pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103032296A (en) | 2013-04-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103016319B (en) | Self-measuring piezoelectric pump | |
| CN102192135B (en) | Piezoelectric stack pump provided with sensor | |
| CN102979707B (en) | Self-measurement piezoelectric stack pump | |
| CN202108708U (en) | Piezoelectric stack pump with sensor | |
| CN102374158A (en) | Self-sensing piezoelectric diaphragm pump | |
| CN103032297B (en) | Piezoelectric pump based on disk type sensor valve | |
| CN202149012U (en) | Self-sensing piezoelectric membrane pump | |
| CN102213210A (en) | Driving-sensing integral piezoelectric chip pump | |
| CN106014907B (en) | A kind of plunger pump of piezoelectric chip oscillator driving | |
| EP2296724B1 (en) | Applications of pump performance monitoring | |
| CN103557143B (en) | Closed-loop piezoelectric film pump and flow control method thereof | |
| CN202937430U (en) | Disc-shaped sensor valve-based piezoelectric stack pump | |
| CN203051061U (en) | Self-measurement piezoelectric pump | |
| Zhang et al. | Flow rate self-sensing of a pump with double piezoelectric actuators | |
| CN202579119U (en) | Novel self-induced piezoelectric membrane pump | |
| CN103032296B (en) | Piezoelectric stack pump based on disk type sensor valve | |
| Kim et al. | A fully integrated high-efficiency peristaltic 18-stage gas micropump with active microvalves | |
| CN202946352U (en) | Self-measurement piezoelectric stack pump | |
| CN202100824U (en) | Piezoelectric drive type micro-flow valve | |
| CN210949012U (en) | Piston type metering pump | |
| CN207894552U (en) | A kind of durability test apparatus of vehicle exhaust pressure sensor | |
| RU2511638C2 (en) | Piston flow metre | |
| CN106884780A (en) | A kind of plunger membrance formula measuring pump | |
| CN203925952U (en) | Closed-loop piezoelectric film pump | |
| CN104792972A (en) | Portable device for testing air content of hydraulic system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information |
Inventor after: Wen Jianming Inventor after: Wang Shuyun Inventor after: Han Junwu Inventor after: Zhang Zhonghua Inventor after: Yang Can Inventor after: Wen Huan Inventor before: Zhang Zhonghua Inventor before: Han Junwu Inventor before: Wang Shuyun Inventor before: Ma Zehui Inventor before: Cheng Guangming |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: ZHANG ZHONGHUA KAN JUNWU WANG SHUYUN MA ZEHUI CHENG GUANGMING TO: WEN JIANMING WANG SHUYUN KAN JUNWU ZHANG ZHONGHUA YANG CAN WEN HUAN |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150513 Termination date: 20151206 |
|
| EXPY | Termination of patent right or utility model |