CN202945321U - Planar moving target mechanism - Google Patents
Planar moving target mechanism Download PDFInfo
- Publication number
- CN202945321U CN202945321U CN 201220096742 CN201220096742U CN202945321U CN 202945321 U CN202945321 U CN 202945321U CN 201220096742 CN201220096742 CN 201220096742 CN 201220096742 U CN201220096742 U CN 201220096742U CN 202945321 U CN202945321 U CN 202945321U
- Authority
- CN
- China
- Prior art keywords
- pole shoe
- moving target
- rail mechanisms
- permanent magnet
- planar moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 38
- 230000005540 biological transmission Effects 0.000 claims abstract description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 239000013077 target material Substances 0.000 abstract 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to a planar moving target mechanism. The planar moving target mechanism comprises a frame, a reciprocating transmission mechanism, two linear guide rail mechanisms, a pole shoe, a permanent magnet as well as a cathode and a target material which are arranged in a vacuum box body, wherein the reciprocating transmission mechanism is arranged at the middle part of the frame, the two linear guide rail mechanisms are respectively arranged at the upper part and the lower part of the frame, the two linear guide rail mechanisms are respectively provided with at least one sliding block, the pole shoe is arranged at the middle part of the reciprocating transmission mechanism, the upper end and the lower end of the pole shoe are respectively fixed on the sliding blocks of the two linear guide rail mechanisms, the permanent magnet is arranged on the pole shoe, the cathode is arranged at the bottom of the vacuum box body above the permanent magnet, and the target material is arranged above the cathode. According to the planar moving target mechanism provided by the utility model, a magnetic field moves, so that an electron runway in a discharge region is expanded; utilization rate of the target material can be increased to 40-45%; and the effects of saving energy and reducing cost can be achieved.
Description
Technical field
The utility model relates to the plated film sputtering target, specifically a kind of planar moving target mechanism.
Background technology
At present, Rectangular Planar Magnetron Sputtering Target is because it is simple in structure, there are higher deposition, low substrate temperature, rete to be combined with substrate and firmly are easy to maximize and not found broad application on industrial plated film by the advantages such as the substrate kind affects, but this system is due to the non-homogeneous utilization ratio (general utilization is at 10%-20%) that can reduce target of degrading of target surface in process of production, affect the homogeneity of plated film, the arcing of target and poisoning be can cause, product quality and production cycle had a strong impact on.Novel movable planar target Structural Development can be brought up to 40%-45% with the utilization ratio of target, has great significance to improving product quality and reducing the generation cost.
Summary of the invention
The purpose of this utility model is that the utilization ratio for the existing target of Rectangular Planar Magnetron Sputtering Target is low, the not high problem of plated film homogeneity, proposes a kind of planar moving target mechanism; Movement by magnetic field makes electronics runway expansion in region of discharge, and target utilization can be brought up to 40%-45%.Play the effect of energy saving and cost lowering.
The technical solution of the utility model is:
a kind of planar moving target mechanism, it comprises framework, come and go transmission rig, two guiding rail mechanisms, pole shoe, permanent magnet and the negative electrode and the target that are positioned at vacuum chamber, described round transmission rig is arranged on the middle part of framework, two guiding rail mechanisms are arranged on respectively the top and the bottom of framework, at least one slide block is housed respectively on two guiding rail mechanisms, pole shoe is arranged on the middle part that comes and goes transmission rig, pole shoe upper, lower two ends are separately fixed on the slide block of two guiding rail mechanisms, permanent magnet is arranged on pole shoe, vacuum chamber bottom installation negative electrode above permanent magnet, target is arranged on the top of negative electrode.
Negative electrode of the present utility model is the copper backboard.
Water-cooled tube is equipped with in the inside of negative electrode of the present utility model.
Slide block of the present utility model is four, and two slide blocks are installed respectively on two guiding rail mechanisms, and four jiaos of pole shoe are separately fixed on four slide blocks.
Permanent magnet of the present utility model is three, evenly is arranged on pole shoe.
Round transmission rig of the present utility model comprises servomotor and ball-screw, drives by servomotor the pole shoe that is fixed on ball-screw and makes at the uniform velocity back and forth movement.
The beneficial effects of the utility model:
The utility model makes electronics runway expansion in region of discharge by the movement in magnetic field, and the target utilization can be brought up to 40%-45%.Play the effect of energy saving and cost lowering.
In the degree membrane process, adopt running target of the present utility model, can improve membrane uniformity; Effectively extend the life cycle of target.
Description of drawings
Fig. 1 is main TV structure schematic diagram of the present utility model.
Fig. 2 is cross-sectional view of the present utility model.
In figure: 1, framework; 2, come and go transmission rig; 3, guiding rail mechanism; 4, pole shoe;
5, permanent magnet; 6, negative electrode; 7, water-cooled tube; 8, target; 9, vacuum chamber;
10, slide block; 11, servomotor; 12, ball-screw.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described.
as shown in Figure 1, a kind of planar moving target mechanism, it comprises framework 1, come and go transmission rig 2, two guiding rail mechanisms 3, pole shoe 4, permanent magnet 5 and the negative electrode 6 and the target 8 that are positioned at vacuum chamber 9, described round transmission rig 2 is arranged on the middle part of framework 1, two guiding rail mechanisms 3 are arranged on respectively the top and the bottom of framework 1, at least one slide block 10 is housed respectively on two guiding rail mechanisms 3, pole shoe 4 is arranged on the middle part that comes and goes transmission rig 2, pole shoe 4 upper, lower two ends are separately fixed on the slide block 10 of two guiding rail mechanisms 3, permanent magnet 5 is arranged on pole shoe 4, vacuum chamber 9 bottoms installation negative electrodes 6 above permanent magnet 5, target 8 is arranged on the top of negative electrode 6.
As shown in Figure 2, slide block 10 of the present utility model is four,, two slide blocks 10 are installed respectively on two guiding rail mechanisms 3, four jiaos of pole shoe 4 are separately fixed on four slide blocks 10.
Permanent magnet 5 of the present utility model is three, evenly is arranged on pole shoe 4.
Round transmission rig 2 of the present utility model comprises servomotor 11 and ball-screw 12, drives by servomotor 11 pole shoe that is fixed on ball-screw 12 and makes at the uniform velocity back and forth movement.
Negative electrode water-cooled of the present utility model is directly accomplished in copper backboard that target binds, magnet evenly is arranged on the pole shoe pure iron plate,, utilize the to-and-fro movement of servomotor to drive the ball-screw that is fixed on pure iron plate and make at the uniform velocity back and forth movement with the fixing pure iron plate of line slideway in the direction that is parallel to target surface.
The utility model does not relate to partly all, and the prior art that maybe can adopt same as the prior art is realized.
Claims (6)
1. planar moving target mechanism, it is characterized in that it comprises framework (1), come and go transmission rig (2), two guiding rail mechanisms (3), pole shoe (4), permanent magnet (5) and be positioned at negative electrode (6) and the target (8) of vacuum chamber (9), described round transmission rig (2) is arranged on the middle part of framework (1), two guiding rail mechanisms (3) are arranged on respectively the top and the bottom of framework (1), at least one slide block (10) is housed respectively on two guiding rail mechanisms (3), pole shoe (4) is arranged on the middle part of round transmission rig (2), pole shoe (4) upper, lower two ends are separately fixed on the slide block (10) of two guiding rail mechanisms (3), permanent magnet (5) is arranged on pole shoe (4), vacuum chamber (9) bottom installation negative electrode (6) in permanent magnet (5) top, target (8) is arranged on the top of negative electrode (6).
2. planar moving target mechanism according to claim 1, is characterized in that described negative electrode (6) is the copper backboard.
3. planar moving target mechanism according to claim 1, is characterized in that water-cooled tube (7) is equipped with in the inside of described negative electrode (6).
4. planar moving target mechanism according to claim 1, is characterized in that described slide block (10) is four,, two slide blocks (10) are installed respectively on two guiding rail mechanisms (3), four jiaos of pole shoe (4) are separately fixed on four slide blocks (10).
5. planar moving target mechanism according to claim 1, is characterized in that described permanent magnet (5) is three, is to be arranged on pole shoe (4).
6. planar moving target mechanism according to claim 1, it is characterized in that described round transmission rig (2) comprises servomotor (11) and ball-screw (12), drive by servomotor (11) pole shoe (4) that is fixed on ball-screw (12) and make at the uniform velocity back and forth movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220096742 CN202945321U (en) | 2012-03-14 | 2012-03-14 | Planar moving target mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220096742 CN202945321U (en) | 2012-03-14 | 2012-03-14 | Planar moving target mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202945321U true CN202945321U (en) | 2013-05-22 |
Family
ID=48421028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220096742 Expired - Lifetime CN202945321U (en) | 2012-03-14 | 2012-03-14 | Planar moving target mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202945321U (en) |
-
2012
- 2012-03-14 CN CN 201220096742 patent/CN202945321U/en not_active Expired - Lifetime
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Planar moving target mechanism Effective date of registration: 20161107 Granted publication date: 20130522 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd new sub branch Pledgor: Wuxi Kangli Electronic Co., Ltd. Registration number: 2016990000950 |
|
| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20191029 Granted publication date: 20130522 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd new sub branch Pledgor: Wuxi Kangli Electronic Co., Ltd. Registration number: 2016990000950 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Planar moving target mechanism Effective date of registration: 20191029 Granted publication date: 20130522 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd new sub branch Pledgor: Wuxi Kangli Electronic Co., Ltd. Registration number: Y2019990000425 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20210521 Granted publication date: 20130522 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd. new sub branch Pledgor: WUXI KANGLI ELECTRONIC Co.,Ltd. Registration number: Y2019990000425 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Planar moving target mechanism Effective date of registration: 20210521 Granted publication date: 20130522 Pledgee: Jiangsu Yixing rural commercial bank Limited by Share Ltd. new sub branch Pledgor: WUXI KANGLI ELECTRONIC Co.,Ltd. Registration number: Y2021990000453 |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130522 |