CN202925153U - Hollow water cooling shaft for single-crystal furnace - Google Patents
Hollow water cooling shaft for single-crystal furnace Download PDFInfo
- Publication number
- CN202925153U CN202925153U CN 201220659793 CN201220659793U CN202925153U CN 202925153 U CN202925153 U CN 202925153U CN 201220659793 CN201220659793 CN 201220659793 CN 201220659793 U CN201220659793 U CN 201220659793U CN 202925153 U CN202925153 U CN 202925153U
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- China
- Prior art keywords
- water
- spiral groove
- water inlet
- spiral slot
- hole
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- Expired - Fee Related
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Abstract
The utility model discloses a hollow water cooling shaft for a single-crystal furnace. A through hole is formed in a shaft body along the axial line; a water inlet spiral groove and a water return spiral groove are formed on the round wall of the shaft body; the upper ports of the water inlet spiral groove and the water return spiral groove are communicated through a transition groove; the peripheries of the water inlet spiral groove and the water outlet spiral groove are wrapped by an outer cylinder; and a water inlet hole and a water outlet hole are formed at the start positions of the lower ports of the water inlet spiral groove and the water return spiral groove respectively. According to the utility model, the shaft body is in a hollow structure, and the through hole at the middle of the shaft body provides a space for mounting a temperature sensor; and the hollow water cooling shaft is simple in structure, is easy to process and manufacture and safe and reliable, can measure temperature at the bottom of a crucible in water cooling condition, and is widely applied to various artificial crystal growing equipment such as a silicon carbide crystal furnace, a aluminum nitride crystal furnace and a gem furnace.
Description
Technical field
The utility model belongs to mechanical equipment technical field, relates to the hollow water-cooling shaft of a kind of single crystal growing furnace.
Background technology
At present, prior art is when adopting the high temperature artificial crystal growth, and in order to obtain desirable growth technique condition, crucible not only needs to move up and down, rotatablely move under the support of crucible shaft, again the temperature of crucible bottom is measured simultaneously; Because most of artificial crystal growth temperatures are higher, therefore, need to carry out water cooling to crucible shaft, so just be difficult to realize the accurate temperature survey of crucible bottom, become a technical barrier that affects the crystal growth.
Summary of the invention
The purpose of this utility model is to provide the hollow water-cooling shaft of a kind of single crystal growing furnace, and having solved does not have suitable spatial placement in the prior art, can not satisfy in the water-cooled situation the thermometric problem of crucible bottom.
The technical scheme that the utility model adopts is, the hollow water-cooling shaft of a kind of single crystal growing furnace, be included in axis body and be provided with through hole along axial line, have on the round wall of axis body into water spiral slot and backwater spiral slot, water inlet spiral slot and backwater spiral fluted upper port are communicated with by ramp pan, and water inlet spiral slot and backwater spiral fluted periphery are enclosed with urceolus; Have prosopyle and posticum at water inlet spiral slot and backwater spiral fluted lower port zero position.
The beneficial effects of the utility model are: simple in structure, processing and manufacturing is easy, and is safe and reliable
Description of drawings
Fig. 1 is the utility model single crystal growing furnace with the structural representation of hollow water-cooling shaft.
In figure, 1. axis body, 2. urceolus, 3. water inlet spiral slot, 4. backwater spiral slot, 5. ramp pan, 6. posticum, 7. prosopyle, 8. through hole.
Embodiment
With reference to Fig. 1, the hollow water-cooling shaft of single crystal growing furnace of the present utility model, be included in axis body 1 and be provided with through hole 8 along axial line, have on the round wall of axis body 1 into water spiral slot 3 and backwater spiral slot 4, the upper port of water inlet spiral slot 3 and backwater spiral slot 4 is communicated with by ramp pan 5, the periphery of water inlet spiral slot 3 and backwater spiral slot 4 is enclosed with urceolus 2, and urceolus 2 is sealedly and fixedly connected (welding together) with axis body 1, realizes the sealing to water inlet spiral slot 3 and backwater spiral slot 4; Lower port zero position at water inlet spiral slot 3 and backwater spiral slot 4 has prosopyle 7 and posticum 6, and prosopyle 7 and posticum 6 lead to outside urceolus 2 distinguishes UNICOM with inlet and outlet pipe.
Innovation of the present utility model is that axis body 1 is hollow structure, be processed with into water spiral slot 3 and backwater spiral slot 4 and be connected by ramp pan 5 on top on axis body 1 circle wall, water coolant 7 enters from the prosopyle, then flow out from posticum 6 by water inlet spiral slot 3, ramp pan 5, backwater spiral slot 4, realize the cooling of axis body 1; Through hole 8 in the middle of axis body 1 provides temperature sensor mounted space, is convenient to realize the temperature survey to axis body 1.
The utility model device simple in structure, processing and manufacturing is easy, safe and reliable, can satisfy the measurement that realizes the crucible bottom temperature in the water-cooled situation, can be widely used in the various System Design of Crystal Growing Equipments such as carborundum crystals stove, aluminum nitride crystal stove, Gem furnace.
Claims (2)
1. hollow water-cooling shaft of single crystal growing furnace, it is characterized in that: be included in axis body (1) and be provided with through hole (8) along axial line, have on the round wall of axis body (1) into water spiral slot (3) and backwater spiral slot (4), the upper port of water inlet spiral slot (3) and backwater spiral slot (4) is communicated with by ramp pan (5), and the periphery of water inlet spiral slot (3) and backwater spiral slot (4) is enclosed with urceolus (2); Lower port zero position at water inlet spiral slot (3) and backwater spiral slot (4) has prosopyle (7) and posticum (6).
2. the hollow water-cooling shaft of single crystal growing furnace according to claim 1 is characterized in that: described urceolus (2) is sealedly and fixedly connected with axis body (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220659793 CN202925153U (en) | 2012-12-04 | 2012-12-04 | Hollow water cooling shaft for single-crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220659793 CN202925153U (en) | 2012-12-04 | 2012-12-04 | Hollow water cooling shaft for single-crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202925153U true CN202925153U (en) | 2013-05-08 |
Family
ID=48215132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220659793 Expired - Fee Related CN202925153U (en) | 2012-12-04 | 2012-12-04 | Hollow water cooling shaft for single-crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202925153U (en) |
-
2012
- 2012-12-04 CN CN 201220659793 patent/CN202925153U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130508 Termination date: 20151204 |
|
| EXPY | Termination of patent right or utility model |