CN207016892U - A kind of polycrystalline cast ingot furnace body for oversize silicon ingot - Google Patents

A kind of polycrystalline cast ingot furnace body for oversize silicon ingot Download PDF

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Publication number
CN207016892U
CN207016892U CN201720428123.4U CN201720428123U CN207016892U CN 207016892 U CN207016892 U CN 207016892U CN 201720428123 U CN201720428123 U CN 201720428123U CN 207016892 U CN207016892 U CN 207016892U
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CN
China
Prior art keywords
cooling
shaft
heat sink
furnace
furnace body
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Expired - Fee Related
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CN201720428123.4U
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Chinese (zh)
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不公告发明人
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Friends Of Lianyungang Qing Amperex Technology Ltd
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Friends Of Lianyungang Qing Amperex Technology Ltd
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Priority to CN201720428123.4U priority Critical patent/CN207016892U/en
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Abstract

A kind of polycrystalline cast ingot furnace body for oversize silicon ingot, including the cooling heat sink being located in polycrystalline ingot furnace shaft, thermometric thief hole is provided with the center of cooling heat sink, cooling pipe is paved with the lower surface of cooling heat sink, cooling pipe is provided with an import and one outlet, the protective plate I to connect with shaft is surrounded by the lower surface of cooling heat sink, the thermometric thief hole in cooling heat sink upper surface is surrounded by protective plate II.For the utility model by setting cooling heat sink in polycrystalline ingot furnace shaft, the lower surface for cooling down heat sink is provided with cooling pipe, and liquid is passed through in cooling pipe or inert gas is used to cool down, its cooling capacity is strong, and cooling velocity is accelerated;By protective plate I is set and protective plate II can prevent crucible rupture after feed liquid from warm thief hole or cool down the surrounding of heat sink and flow out, so as to strengthen protection, improve its security.

Description

A kind of polycrystalline cast ingot furnace body for oversize silicon ingot
Technical field
Production of polysilicon equipment technical field is the utility model is related to, it is more particularly to a kind of for the more of oversize silicon ingot Brilliant ingot casting furnace body.
Background technology
Photovoltaic industry development is rapid, market scale sustainable growth, but Market competition simultaneously, to realize as early as possible Par is surfed the Net, and realizes larger range of popularization and application, each link of the whole industry lays siege to and obtained high efficiency, inexpensive battery. Crystal silicon link in upstream, acquisition high-quality, the crystal of low cost are extremely important, at present large scale(G6)Polycrystal silicon ingot turns into row Owner flows, and oversize silicon ingot G7 or G8 of future generation turn into current trend and postponed the only way of development, can lift silicon ingot weight Amount, productivity ratio is improved, reduce unit consumption, improve crystal quality.
Polycrystalline silicon ingot or purifying furnace is the equipment for manufacturing polycrystal silicon ingot, produces polycrystal silicon ingot using directional solidification method, first The crucible for having installed silicon material is fitted into furnace chamber, is then evacuated, heated, melted, growing the processing steps such as brilliant, annealing, cooling.
Existing polycrystalline ingot furnace furnace binding is not suitable for the use of oversize silicon ingot, it is therefore desirable to which one kind is used to surpass The ingot casting furnace body of large scale silicon ingot, to overcome the defect of the prior art.
The content of the invention
Technical problem to be solved in the utility model is in view of the shortcomings of the prior art, there is provided it is a kind of rational in infrastructure, make With the convenient and safe polycrystalline cast ingot furnace body for oversize silicon ingot.
Technical problem to be solved in the utility model is realized by following technical scheme, and the utility model is A kind of polycrystalline cast ingot furnace body for oversize silicon ingot, it is characterized in, including shaft and bell, the inwall of shaft and bell Water-cooling sandwich is respectively provided between outer wall;Furnace cover lifting post is provided with the side of shaft, is set with and leads on furnace cover lifting post To sleeve, the drive mechanism that driving furnace cover lifting post moves up and down is provided with the lower end of furnace cover lifting post, the bell passes through axle Set is installed in the upper end of furnace cover lifting post;The bell is provided with detection mouth, reserved opening and some air inlets;The shaft is provided with The open furnace chamber in upper end, some cooling devices are provided with the bottom of furnace chamber, are provided with the bottom centre of shaft and are connected with furnace chamber Detection hole, the bottom of shaft be provided with two it is outwardly, for heat exchange controller motion accommodating cavities, accommodating cavity with Furnace chamber is connected as a single entity, be additionally provided with the bottom of shaft two it is symmetrically arranged vacuumize gas outlet, in the sidepiece and bell of shaft On be respectively equipped with several ingot furnace heating component wiring placed cavities.
The ectonexine material of shaft and bell water-cooling sandwich is same metal or two kinds of metals.Detection hole is used for detection temperature Or leak water detdction etc..
Technical problem to be solved in the utility model can also be realized by following technical scheme, the furnace chamber For square, the accommodating cavity is symmetrically arranged at the both sides of shaft.
Technical problem to be solved in the utility model can also be realized by following technical scheme, it is described take out it is true Vacate gas port and be located at the shaft both sides relative with accommodating cavity.
Technical problem to be solved in the utility model can also be realized by following technical scheme, the air inlet Mouth is provided with 1-4.When quantity be 1 when, it is arranged at the center of bell, when for 2-4 when, be uniformly arranged on bell.
Technical problem to be solved in the utility model can also be realized by following technical scheme, the bell Gross thickness be 40mm-100mm, the gross thickness of shaft is 40-60mm.
Technical problem to be solved in the utility model can also be realized by following technical scheme, the driving Mechanism includes the screw mandrel of motor driving rotation, and screw mandrel is vertically arranged, and the furnace cover lifting post is provided with hollow cylinder, in cylinder Provided with the nut coordinated with screw mandrel.The mode of motor drive screw rotation can realize this function to be any in the prior art Technical scheme, such as worm-and-wheel gear.
Technical problem to be solved in the utility model can also be realized by following technical scheme, the cooling Device is provided with 1-4, and when quantity is 1, it is arranged at the bottom centre of furnace chamber, when for 2-4 when, be uniformly arranged on stove The bottom of chamber.Each cooling device is equipped with cooling heat sink, thermometric thief hole is provided with the center of cooling heat sink, cold But cooling pipe is paved with the lower surface of heat sink, cooling pipe is provided with an import and one outlet, in cooling heat sink Lower surface is surrounded by the protective plate I to connect with shaft bottom wall, and the thermometric thief hole in cooling heat sink upper surface is surrounded by Protective plate II.
Technical problem to be solved in the utility model can also be realized by following technical scheme, the protection Plate I and protective plate II are thermal-insulation hard felt plate, ceramic wafer, alumina plate, zirconium oxide plate or graphite cake, are highly 20mm-60mm.
Technical problem to be solved in the utility model can also be realized by following technical scheme, the cooling Heat sink is molybdenum plate or copper coin, and its thickness is 20mm-60mm.
Technical problem to be solved in the utility model can also be realized by following technical scheme, the cooling Pipeline is molybdenum tube or copper pipe, and its internal diameter is 20mm-60mm.
Compared with prior art, the utility model body of heater is applied to ingot casting high quality, low unit consumption, the crystal of low cost, especially It may be cast as oversize polycrystal silicon ingot, improves production capacity and productivity ratio, oversize polycrystal silicon ingot refer mainly to G7 silicon ingots(7*7)、 G8 silicon ingots(8*8);Device structure optimizes layout, provided with air inlet, vacuumizes gas outlet and for heat exchange controller fortune Dynamic accommodating cavity etc., this is advantageous to each element of thermal field coordinated with it and technique plays more preferable flexibility, such as:Detection, air inlet, Heating, evacuate, directional solidification etc., so as to obtain the crystal of high quality;It is inclined compared with other type of furnace probabilities that leakage silicon occurs in operation in addition It is low, designed plus special bell, substantially increase security.Simultaneously using open, simple to operate, maintenance, dimension in structure It is convenient to protect, and sets many places reserved opening, and the upgrading improvement potentiality of body of heater platform are big.
Brief description of the drawings
Fig. 1 is a kind of main structure diagram of the present utility model.
Fig. 2 is a kind of side structure schematic view of the present utility model.
Fig. 3 is the structural representation of cooling device.
Fig. 4 is Fig. 3 present invention looks up structural representation.
Embodiment
Referring to the drawings, concrete technical scheme of the present utility model is further described, in order to those skilled in the art Member is further understood that the present invention, without forming the limitation to its right.
Referring to Figures 1 and 2, a kind of polycrystalline cast ingot furnace body for oversize silicon ingot, including shaft 5 and bell 3, stove Water-cooling sandwich is respectively provided between the inner and outer wall of body 5 and bell 3;Inner and outer wall is made up of material of the same race, bell 3 Gross thickness is 60mm, and the gross thickness of shaft 5 is 50mm.
Furnace cover lifting post 1 is provided with the side of shaft 5, pilot sleeve 2 is set with furnace cover lifting post 1, pilot sleeve 2 is logical Cross support frame to be fixed, the drive mechanism that driving furnace cover lifting post 1 moves up and down, institute are provided with the lower end of furnace cover lifting post 1 State the upper end that bell 3 is arranged on furnace cover lifting post 1 by axle sleeve, it is possible to achieve the rotation of bell 3, away from shaft 5.It is described Drive mechanism includes the screw mandrel of motor driving rotation, and screw mandrel is vertically arranged, and the furnace cover lifting post 1 is provided with hollow cylinder, The nut coordinated with screw mandrel is provided with cylinder.
In use, motor drive screw is around nut positive and negative rotation, so as to realize the up and down motion of furnace cover lifting post 1, far From or cover on shaft 5, the direction of motion of furnace cover lifting post 1 can be controlled using pilot sleeve 2.
The bell 3 is provided with detection mouth, reserved opening and 4 air inlets 9;4 air inlets 9 are symmetricly set on bell 3 four Week;
The shaft 5 is provided with the open furnace chamber in upper end, and furnace chamber is square, and 2 cooling devices are provided with the bottom of furnace chamber 7, the detection hole that connect with furnace chamber is provided with the bottom centre of shaft 5, the bottom of shaft 5 provided with two it is outwardly, For the accommodating cavity 8 of heat exchange controller motion, heat exchange controller may be in accommodating cavity 8 when opening, accommodating cavity 8 and stove Chamber is connected as a single entity, and accommodating cavity 8 is symmetrically arranged at the both sides of shaft 5, and two are additionally provided with the bottom of shaft 5 and symmetrically arranged is vacuumized Gas outlet 7, vacuumize gas outlet 7 and be located at shaft 5 both sides relative with accommodating cavity 8.
2 ingot furnace heating component wiring placed cavities 4 are provided with the sidepiece of shaft 5, bell 3 adds provided with 1 ingot furnace Hot component wiring placed cavity 4.Ingot furnace heating component wiring placed cavity 4 is used for the binding post for placing heating field.
With reference to figure 3 and Fig. 4, each cooling device 7 is equipped with cooling heat sink 72, and cooling heat sink 72 passes through support Frame is fixed in shaft 5, and cooling heat sink 72 is molybdenum plate or copper coin, is shaped as square, its thickness is 30mm.Radiated in cooling Thermometric thief hole is provided with the center of plate 72, cooling pipe 75, cooling pipe 75 are paved with the lower surface of cooling heat sink 72 It is arranged in three-back-shaped spiral on cooling heat sink 72, cooling pipe 75 is provided with an import and one outlet.The cooling tube Road 75 with some strength, the metal material that fusing point is high and thermal conductivity is good by being made, and such as molybdenum tube or copper pipe, its internal diameter is 40mm, the cross-sectional shape of cooling pipe 75 can be triangle, square, semicircle, circular or rectangle.Cooling pipe 75 and cooling The form that is connected of heat sink 72 is connected for directly welding or by external fastening, with guarantee fully connecing between the two Touch, make conduction good.Cooling pipe 75 is connected with cooling device 7, and the medium flowed through inside it is liquid or inert gas, pressure For 0.1bar-6bar.
The protective plate I 73 to connect with shaft 5 is surrounded by the lower surface of cooling heat sink 72, on cooling heat sink 72 The thermometric thief hole 74 on surface is surrounded by protective plate II 71.Protective plate I 73 and protective plate II 71 are thermal-insulation hard felt plate, ceramics Plate, alumina plate, zirconium oxide plate or graphite cake, the height of protective plate II 71 is 30mm, and the height of protective plate I 73 is 50mm.Make With protective plate I 73 and protective plate II 71 can prevent crucible rupture after feed liquid from warm thief hole or cool down heat sink 72 four circumfluences Go out.

Claims (10)

  1. A kind of 1. polycrystalline cast ingot furnace body for oversize silicon ingot, it is characterised in that:Including shaft and bell, shaft and stove Water-cooling sandwich is respectively provided between the inner and outer wall of lid;Furnace cover lifting post is provided with the side of shaft, on furnace cover lifting post Pilot sleeve is set with, the drive mechanism that driving furnace cover lifting post moves up and down, the stove are provided with the lower end of furnace cover lifting post Lid is arranged on the upper end of furnace cover lifting post by axle sleeve;The bell is provided with detection mouth, reserved opening and some air inlets;It is described Shaft is provided with the open furnace chamber in upper end, and some cooling devices are provided with the bottom of furnace chamber, at the bottom centre of shaft provided with The detection hole of furnace chamber connection, two accommodating cavities outwardly, for heat exchange controller motion are provided with the bottom of shaft, are held Chamber is put to be connected as a single entity with furnace chamber, be additionally provided with the bottom of shaft two it is symmetrically arranged vacuumize gas outlet, in the sidepiece of shaft With several ingot furnace heating component wiring placed cavities are respectively equipped with bell.
  2. 2. the polycrystalline cast ingot furnace body according to claim 1 for oversize silicon ingot, it is characterised in that:The furnace chamber For square, the accommodating cavity is symmetrically arranged at the both sides of shaft.
  3. 3. the polycrystalline cast ingot furnace body according to claim 2 for oversize silicon ingot, it is characterised in that:It is described to take out very Vacate gas port and be located at the shaft both sides relative with accommodating cavity.
  4. 4. the polycrystalline cast ingot furnace body according to claim 1 for oversize silicon ingot, it is characterised in that:The air inlet Mouth is provided with 1-4.
  5. 5. the polycrystalline cast ingot furnace body according to claim 1 for oversize silicon ingot, it is characterised in that:The bell Gross thickness be 40mm-100mm, the gross thickness of shaft is 40-60mm.
  6. 6. the polycrystalline cast ingot furnace body according to claim 1 for oversize silicon ingot, it is characterised in that:The driving Mechanism includes the screw mandrel of motor driving rotation, and screw mandrel is vertically arranged, and the furnace cover lifting post is provided with hollow cylinder, in cylinder Provided with the nut coordinated with screw mandrel.
  7. 7. the polycrystalline cast ingot furnace body according to claim 1 for oversize silicon ingot, it is characterised in that:The cooling Device is provided with 1-4, and each cooling device is equipped with cooling heat sink, and thermometric is provided with the center of cooling heat sink and is sampled Hole, cooling pipe is paved with the lower surface of cooling heat sink, cooling pipe is provided with an import and one outlet, is dissipated in cooling The lower surface of hot plate is surrounded by the protective plate I to connect with shaft bottom wall, the thermometric thief hole four in cooling heat sink upper surface Week is provided with protective plate II.
  8. 8. the polycrystalline cast ingot furnace body according to claim 7 for oversize silicon ingot, it is characterised in that:The protection Plate I and protective plate II are thermal-insulation hard felt plate, ceramic wafer, alumina plate, zirconium oxide plate or graphite cake, are highly 20mm-60mm.
  9. 9. the polycrystalline cast ingot furnace body according to claim 7 for oversize silicon ingot, it is characterised in that:The cooling Heat sink is molybdenum plate or copper coin, and its thickness is 20mm-60mm.
  10. 10. the polycrystalline cast ingot furnace body according to claim 7 for oversize silicon ingot, it is characterised in that:It is described cold But pipeline is molybdenum tube or copper pipe, and its internal diameter is 20mm-60mm.
CN201720428123.4U 2017-04-23 2017-04-23 A kind of polycrystalline cast ingot furnace body for oversize silicon ingot Expired - Fee Related CN207016892U (en)

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Application Number Priority Date Filing Date Title
CN201720428123.4U CN207016892U (en) 2017-04-23 2017-04-23 A kind of polycrystalline cast ingot furnace body for oversize silicon ingot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720428123.4U CN207016892U (en) 2017-04-23 2017-04-23 A kind of polycrystalline cast ingot furnace body for oversize silicon ingot

Publications (1)

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CN207016892U true CN207016892U (en) 2018-02-16

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106917138A (en) * 2017-04-23 2017-07-04 连云港清友新能源科技有限公司 For the polycrystalline cast ingot furnace body of oversize silicon ingot

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106917138A (en) * 2017-04-23 2017-07-04 连云港清友新能源科技有限公司 For the polycrystalline cast ingot furnace body of oversize silicon ingot

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20180216

Termination date: 20180423