CN202917460U - Film separating device of wafer mucosa group separating equipment - Google Patents
Film separating device of wafer mucosa group separating equipment Download PDFInfo
- Publication number
- CN202917460U CN202917460U CN 201220582536 CN201220582536U CN202917460U CN 202917460 U CN202917460 U CN 202917460U CN 201220582536 CN201220582536 CN 201220582536 CN 201220582536 U CN201220582536 U CN 201220582536U CN 202917460 U CN202917460 U CN 202917460U
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- China
- Prior art keywords
- wafer
- mucous membrane
- frame
- matrix
- equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 210000004877 mucosa Anatomy 0.000 title 1
- 210000004400 mucous membrane Anatomy 0.000 claims description 73
- 239000011159 matrix material Substances 0.000 claims description 33
- 230000000994 depressogenic effect Effects 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- 238000013459 approach Methods 0.000 abstract description 5
- 238000001179 sorption measurement Methods 0.000 abstract description 3
- 238000007664 blowing Methods 0.000 abstract 3
- 239000002313 adhesive film Substances 0.000 abstract 2
- 230000004308 accommodation Effects 0.000 description 7
- 230000001012 protector Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241000222712 Kinetoplastida Species 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Abstract
The utility model relates to a film separating device of wafer film group separating equipment, which comprises a frame body, a bearing frame, an air blowing mechanism and an adsorption mechanism, wherein the bearing frame is arranged inside the frame body; the blowing mechanism is arranged above the bearing frame; the adsorption mechanism is arranged below the bearing frame. When the carrier is arranged on the bearing frame, the air blowing mechanism approaches the carrier and blows air between the frame and the wafer adhesive film group at the same time, so that the frame of the carrier and the wafer adhesive film group are separated, the aim of production automation is fulfilled, labor is saved, the manufacturing cost is reduced, and the production efficiency is improved.
Description
Technical field
The utility model is relevant for a kind of semiconductor production equipment, especially refer to a kind of wafer mucous membrane component from equipment from film device.
Background technology
In semiconductor production; because of the undercapacity of thin as a piece of paper wafer own; be difficult for even because distortion causes embrittlement producing or transport to move in the process for fear of wafer, usually can temporaryly stick the special substance mucous membrane or stick one deck glass or the loading material of silicon material as fixing solution with strengthening thin wafer.
Yet, traditional manually carries out wafer mucous membrane group (being wafer and the mucous membrane that bonding way connects) and the common employing of mode that framework is peeled off, it needs carefully wafer mucous membrane group to be taken off from metal framework, keeping the planarization of mucous membrane, and avoid causing meeting with because of mucous membrane fold the situation generation such as client's return of goods; Therefore, said method easily divests efficient because of artificial fatigue and inhomogeneous impact of the application of force, and need to expend more manpower, causes manpower to waste, and cost is also higher.
The utility model content
In order to address the above problem, inventor of the present utility model is for the defective of above-mentioned prior art, and the spy concentrates on studies and cooperates the utilization of scientific principle, provide a kind of wafer mucous membrane component from equipment from film device.
A kind of wafer mucous membrane component that the utility model provides from equipment from film device, utilize carrier to be placed in when bearing frame, inflatable body can be blown into gas between framework and the wafer mucous membrane group, framework and wafer mucous membrane group are produced separates, reaching the production automation, and then save manpower, reduce manufacturing cost and enhance productivity.
A kind of wafer mucous membrane component that the utility model provides from equipment from film device, comprising: a support body; One bears frame, and it is inner to be arranged on this support body; One inflatable body is configured in the top that this bears frame; And an adsorbing mechanism, be configured in the below that this bears frame.
Preferably, should also comprise a support body from film device, this inflatable body is fixed on this support body.
Preferably, this adsorbing mechanism comprises a vacuum cup device and connects a lifter of this vacuum cup device.
Preferably, this inflatable body comprises a matrix and is installed in a wind outlet device of this matrix, and this matrix is provided with a plurality of air channels, and the both-side opening in each air channel bears the configuration of frame direction towards this wind outlet device and this respectively.
Preferably, this inflatable body comprises a matrix and is installed in a wind outlet device and a lifter of this matrix, and this matrix is provided with a plurality of air channels, and the both-side opening in each this air channel bears the configuration of frame direction towards this wind outlet device and this respectively.
Preferably, this matrix bears the frame direction towards this and is provided with a depressed part.
The utility model also has following beneficial effect:
Carrier is placed in when bearing frame, inflatable body and adsorbing mechanism approach towards carrier synchronously, and when inflatable body descends, inflatable body can be blown into gas between framework and the wafer mucous membrane group, framework and wafer mucous membrane group are produced separates, wafer mucous membrane group after will separating again is adsorbed on the adsorbing mechanism, framework after the separation is taken in to reclaiming frame via mobile device, so that the mode that framework and wafer mucous membrane group are peeled off reaches the purpose of automated production, and then save manpower, reduce manufacturing cost and enhance productivity.
In addition, wind outlet device blows to the seam crossing between framework and the wafer mucous membrane group via the inflatable mouth guiding, the extraction and application gas uniform of framework and wafer mucous membrane group is filled between the two, and then allow the stressed of mucous membrane also evenly distribute, mucous membrane under avoiding peeling off produces fold or distortion, make the utility model from film device in stripping process, it can keep the planarization of mucous membrane effectively.
Moreover, when inflatable body descends, inflatable body can continue gas is blown between framework and the wafer mucous membrane group, make distribution of gas between matrix and wafer mucous membrane group, allow and have a clearance space between matrix and the mucous membrane, therefore can avoid matrix to touch mucous membrane, more strengthen keeping the planarization of mucous membrane.
Moreover the depressed part of matrix and mucous membrane are enclosed to form accommodation space jointly, and wafer is contained in the accommodation space, allow in the automated production that framework and wafer mucous membrane group peel off, and wafer is protected by matrix, are damaged in producing to avoid wafer.
Description of drawings
Fig. 1 is that the utility model wafer mucous membrane component is from the combination schematic diagram of equipment.
Fig. 2 is that the utility model is from the combination schematic diagram of film device.
Fig. 3 is that the utility model is from the three-dimensional combination figure of film device.
Fig. 4 is that the utility model uses view from first of film device.
Fig. 5 is that the utility model uses view from second of film device.
Fig. 6 is that the utility model uses view from the 3rd of film device.
Fig. 7 is that the utility model uses view from the 4th of film device.
Fig. 8 is that the utility model uses view from the 5th of film device.
Fig. 9 is that the utility model is from the combination schematic diagram of another embodiment of film device.
Figure 10 is that the utility model is from another combination schematic diagram of another embodiment of film device.
The main element symbol description:
100 ... carrier; 101 ... framework;
102 ... wafer mucous membrane group; 1021 ... mucous membrane;
1022 ... wafer; 10 ... wafer mucous membrane component is from equipment;
1 ... from film device; 11 ... support body;
12 ... bear frame; 13 ... inflatable body;
131 ... matrix; 1311 ... the air channel;
1312 ... inflatable mouth; 1313 ... depressed part;
132 ... wind outlet device; 133 ... lifter;
134 ... accommodation space; 14 ... adsorbing mechanism;
141 ... the vacuum cup device; 142 ... lifter;
2 ... feeding rack; 3 ... reclaim frame;
4 ... mobile device; 41 ... slide rail;
41 ' ... rotating disk; 42 ... holder;
5 ... paste the protector device; 6 ... paste the strippable paper device;
7 ... label sticking machine.
Embodiment
Relevant detailed description of the present utility model and technology contents will cooperate graphic being described as follows, but appended graphic only purposes as an illustration is not for limitation the utility model.
Please refer to Fig. 1 to shown in Figure 8, the utility model provide a kind of wafer mucous membrane component from equipment from film device, be used for a carrier 100, carrier 100 comprises a framework 101 and a wafer mucous membrane group 102 of mutual gluing, wafer mucous membrane group 102 comprises a mucous membrane 1021 and sticks in wafer 1022 on the mucous membrane 1021, and this wafer mucous membrane component comprises mainly that from equipment 10 one reclaims frame 3 and a mobile device 4 from film device 1, a feeding rack 2.
Comprise that from film device 1 support body 11, bears frame 12, an inflatable body 13 and an adsorbing mechanism 14, bear frame 12 and be arranged on support body 11 inside, this bears frame 12 and can be a hollow sheeting or be made of two stands as shown in Figure 1, and bear frame 12 be provided with location notch can be for framework 101 location; Inflatable body 13 is fixed on support body 11 and is configured in the top that bears frame 12; Adsorbing mechanism 14 is configured in the below that bears frame 12.
Be described in detail as follows, inflatable body 13 comprises a matrix 131 and is installed in a wind outlet device 132 and a lifter 133 of matrix 131, the outside peripheral dimension of matrix 131 is less than the inner peripheral size of framework 101 and be provided with a plurality of air channels 1311, the both-side opening in each air channel 1311 is respectively towards wind outlet device 132 and bear frame 12 directions configurations, and each air channel 1311 is formed with an inflatable mouth 1312 at matrix 131, each inflatable mouth 1312 is towards the seam crossing configuration of framework 101 and wafer mucous membrane group 102, matrix 131 is provided with a depressed part 1313, depressed part 1313 and wafer mucous membrane group 102 form an accommodation space 134, and wafer 1022 is contained in the accommodation space 134; In addition, adsorbing mechanism 14 comprises a vacuum cup device 141 and connects a lifter 142 of vacuum cup device 141 that this adsorbing mechanism 14 also can be made by ceramic material.
Feeding rack 2 and reclaim frame 3 and be configured in respectively the left and right sides that bears frame 12, and feeding rack 2 is provided with a plurality of standing grooves and takes in for carrier 100 reclaims frame 3 and is provided with a plurality of standing grooves and takes in for framework 101.
The utility model wafer mucous membrane component is from device combination, it utilizes from what film device 1 comprised support body 11 and was arranged on support body 11 inside and bears frame 12, inflatable body 13 and adsorbing mechanism 14, inflatable body 13 is configured in the top that bears frame 12, and adsorbing mechanism 14 is configured in the below that bears frame 12; Feeding rack 2 and recovery frame 3 are configured in respectively the both sides that bear frame 12; Mobile device 4 fixing frameworks 101 also are displaced into feeding rack 2, bear frame 12 and reclaim between the frame 3.
The utility model makes up from film device, and its utilization bears frame 12 and is arranged on support body 11 inside; Inflatable body 13 is configured in the top that bears frame 12; Adsorbing mechanism 14 is configured in the below that bears frame 12.
The utility model wafer mucous membrane component is as follows from the use state from film device of equipment, and at first as shown in Figure 4, mobile device 4 is placed on carrier 100 and bears on the frame 12 by feeding rack 2; Again as shown in Figure 5, the lifter 133 band kinetoplast 131 of inflatable body 13 approach towards carrier 100 directions, the lifter 142 of adsorbing mechanism 14 also drives synchronously vacuum cup device 141 and approaches towards carrier 100 directions, and when matrix 131 descends, wind outlet device 132 produces gas and is blown into air channel 1311, and blow to the seam crossing between framework 101 and the wafer mucous membrane group 102 via inflatable mouth 1312 guiding, make the seam crossing between framework 101 and the wafer mucous membrane group 102 produce the slit, again because of distribution of gas between matrix 131 and wafer mucous membrane group 102, so can avoid matrix 131 to touch mucous membrane 1021; And for example shown in Figure 6, the gas that inflatable mouth 1312 blows out is covered with between framework 101 and the mucous membrane 1021 gradually, causes framework 101 and wafer mucous membrane group 102 to be separated; At last, as shown in Figure 7 and Figure 8, the wafer mucous membrane group 102 after the separation is adsorbed on the adsorbing mechanism 14, and 101 of frameworks after separating are in addition taken in to reclaiming frame 3 via mobile device 4.
In addition, wind outlet device 132 blows to the seam crossing between framework 101 and the wafer mucous membrane group 102 by inflatable mouth 1312 guiding, the separation that makes framework 101 and wafer mucous membrane group 102 is to utilize gas uniform to be filled between the two, and then allow the stressed of mucous membrane 1021 also evenly distribute, mucous membrane 1021 under avoiding peeling off produces fold or distortion, make the utility model from film device in stripping process, can effectively keep the planarization of mucous membrane 1021.
Moreover, when inflatable body 13 descends, inflatable body 13 can continue gas is blown between framework 101 and the wafer mucous membrane group 102, make distribution of gas between matrix 131 and wafer mucous membrane group 102, allow and have a clearance space between matrix 131 and the mucous membrane 1021, so can avoid matrix 131 to touch mucous membrane 1021, more strengthen keeping the planarization of mucous membrane 1021.
Moreover; form accommodation space 134 between the depressed part 1313 of matrix 131 and the mucous membrane 1021; wafer 1022 is contained in the accommodation space 134; allow in the automated production that framework 101 and wafer mucous membrane group 102 peel off; wafer 1022 is protected by matrix 131, is damaged in producing to avoid wafer 1022.
Please refer to Fig. 9 and shown in Figure 10; for the utility model from another embodiment of film device; the utility model comprises also that from film device one pastes protector device 5, a subsides strippable paper device 6 and a label sticking machine 7; mobile device 4 comprises the holder 42 that a rotating disk 41 ' and corresponding rotating disk 41 ' move; this rotating disk 41 ' correspondence bears frame 12, pastes protector device 5, pastes strippable paper device 6 and label sticking machine 7 configurations, and holder 42 fixing frameworks 101 also are displaced into and bear frame 12, paste protector device 5, paste between strippable paper device 6 and the label sticking machine 7.Wherein, paste protector device 5 in order to protector is affixed on the wafer 1022, and then protection wafer 1022; Paste strippable paper device 6 in order to corresponding mucous membrane 1021 gummeds of strippable paper, and then encapsulation wafer 1022; Label sticking machine 7 is in order to being affixed on label on the strippable paper, and then the model of signable wafer 1022 and item number.
The above embodiment is the preferred embodiment that proves absolutely that the utility model is lifted, and protection range of the present utility model is not limited to this.Being equal to that those skilled in the art do on the utility model basis substitutes or conversion, all within protection range of the present utility model.Protection range of the present utility model is as the criterion with claims.
Claims (6)
- A wafer mucous membrane component from equipment from film device, it is characterized in that, comprising:One support body;One bears frame, and it is inner to be arranged on this support body;One inflatable body is configured in the top that this bears frame; AndOne adsorbing mechanism is configured in the below that this bears frame.
- Wafer mucous membrane component as claimed in claim 1 from equipment from film device, it is characterized in that, should also comprise a support body from film device, this inflatable body is fixed on this support body.
- Wafer mucous membrane component as claimed in claim 1 from equipment from film device, it is characterized in that this adsorbing mechanism comprises a vacuum cup device and connects a lifter of this vacuum cup device.
- Wafer mucous membrane component as claimed in claim 1 from equipment from film device, it is characterized in that, this inflatable body comprises a matrix and is installed in a wind outlet device of this matrix, and this matrix is provided with a plurality of air channels, and the both-side opening in each air channel bears the configuration of frame direction towards this wind outlet device and this respectively.
- Wafer mucous membrane component as claimed in claim 1 from equipment from film device, it is characterized in that, this inflatable body comprises a matrix and is installed in a wind outlet device and a lifter of this matrix, this matrix is provided with a plurality of air channels, and the both-side opening in each this air channel bears the configuration of frame direction towards this wind outlet device and this respectively.
- As claim 4 or 5 described wafer mucous membrane components from equipment from film device, it is characterized in that this matrix bears the frame direction towards this and is provided with a depressed part.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101206865U TWM435713U (en) | 2012-04-13 | 2012-04-13 | Wafer film set disengaging apparatus is and release film device |
| TW101206865 | 2012-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202917460U true CN202917460U (en) | 2013-05-01 |
Family
ID=47048203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220582536 Expired - Lifetime CN202917460U (en) | 2012-04-13 | 2012-11-07 | Film separating device of wafer mucosa group separating equipment |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN202917460U (en) |
| TW (1) | TWM435713U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016179892A1 (en) * | 2015-05-14 | 2016-11-17 | 浙江中纳晶微电子科技有限公司 | Wafer separation method |
| CN110620068A (en) * | 2019-09-27 | 2019-12-27 | 江西兆驰半导体有限公司 | Automatic production equipment for separating film ring of light-emitting diode wafer |
| CN114476676A (en) * | 2021-06-18 | 2022-05-13 | 广东聚华印刷显示技术有限公司 | Method and apparatus for aligning film material |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI806587B (en) * | 2022-05-03 | 2023-06-21 | 迅得機械股份有限公司 | Peeling mechanism |
-
2012
- 2012-04-13 TW TW101206865U patent/TWM435713U/en not_active IP Right Cessation
- 2012-11-07 CN CN 201220582536 patent/CN202917460U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016179892A1 (en) * | 2015-05-14 | 2016-11-17 | 浙江中纳晶微电子科技有限公司 | Wafer separation method |
| CN110620068A (en) * | 2019-09-27 | 2019-12-27 | 江西兆驰半导体有限公司 | Automatic production equipment for separating film ring of light-emitting diode wafer |
| CN110620068B (en) * | 2019-09-27 | 2023-04-07 | 江西兆驰半导体有限公司 | Automatic production equipment for separating film rings of light-emitting diode wafer |
| CN114476676A (en) * | 2021-06-18 | 2022-05-13 | 广东聚华印刷显示技术有限公司 | Method and apparatus for aligning film material |
Also Published As
| Publication number | Publication date |
|---|---|
| TWM435713U (en) | 2012-08-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20160909 Address after: China Taiwan Taoyuan District of Zhongli City ZTE in Ring Road No. 323 9 floor Patentee after: SHIQI TECHNOLOGY Co.,Ltd. Address before: Jhubei City, Hsinchu County Zhuang Jing Road No. 140 Patentee before: SHIGUANG TECHNOLOGY Co.,Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20130501 |
|
| CX01 | Expiry of patent term |