CN202913082U - Closed type cooling water circulation system for high frequency power supply of zone melting single-crystal furnace - Google Patents
Closed type cooling water circulation system for high frequency power supply of zone melting single-crystal furnace Download PDFInfo
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- CN202913082U CN202913082U CN 201220548081 CN201220548081U CN202913082U CN 202913082 U CN202913082 U CN 202913082U CN 201220548081 CN201220548081 CN 201220548081 CN 201220548081 U CN201220548081 U CN 201220548081U CN 202913082 U CN202913082 U CN 202913082U
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Abstract
The utility model relates to a closed type cooling water circulation system for a high frequency power supply of a zone melting single-crystal furnace. The closed type cooling water circulation system comprises a water tank, a rack, a heat exchanger and a circulating water pump, wherein the water tank is mounted on the rack, and an water inlet connected with a circulating cooling water return pipe and a water outlet connected with the circulating water pump are arranged on the water tank; a cooled medium outlet connected with a circulating cooling water inlet pipe, a cooled medium inlet connected with the circulating water pump, a cooled medium outlet connected with an external cooling water return pipe and a cooled medium inlet connected with an external cooling water inlet pipe are formed in the heat exchanger; and the heat exchanger is a plate heat exchanger. According to the closed type cooling water circulation system, the flow of external cooling water is controlled, so that the temperature of the circulating cooling water is adjusted automatically according to a crystal pulling technique; and the closed type cooling water circulation system has the advantages of convenience in use, simple structure, small size, low energy consumption and low cost.
Description
Technical field
The utility model is about cooling water recirculation system, particularly a kind of enclosed cooling water recirculation system for zone melting single-crystal stove high frequency electric source.
Background technology
Zone melting method (FZ) manufacture order crystal silicon is a kind of novel method for monocrystal growth that is different from vertical pulling method (CZ), it utilizes the high-frequency induction heating coil with the local thawing of highly purified polycrystal, the melting zone relies on the surface tension of molten silicon and magnetic supporting power that heater coil provides and is in suspended state, then utilizes seed crystal will melt silicon from the below in melting zone and is drawn into monocrystalline.The energy, traffic, large-scale integrated circuit etc. are affected the support of the bottleneck industry of the national economic development along with country, power electronic devices to large electric current needs increasing, require also more and more highlyer, require silicon single-crystal to major diameter, large charging capacity, high purity, high uniformity future development.
Zone melting single-crystal stove high frequency electric source is the key equipment of zone melting furnace, and its quality directly determines material, becomes brilliant effect, and also directly zone of influence smelting furnace crystal pulling is stable for its stability.In the crystal pulling process, because the high-frequency induction heating transfer efficiency is lower, high frequency electric source especially high-frequency induction heating coil can produce very large heat, needs water coolant that it is cooled off.As water coolant, water loss is large on the one hand with general tap water, and pipeline and coil in the perishable power supply of tap water affect equipment life on the other hand.The existing cooling-water machine structure in market is complicated, bulky in addition, energy consumption is high, cost is high, and it is uneconomical to be used for the cooling of zone melting furnace high frequency electric source.
The utility model content
Main purpose of the present utility model is to overcome deficiency of the prior art, provides a kind of water coolant to adopt pure water, can according to crystal pulling technique, realize the enclosed cooling water recirculation system that temperature of cooling water is regulated automatically.For solving the problems of the technologies described above, solution of the present utility model is:
A kind of enclosed cooling water recirculation system for zone melting single-crystal stove high frequency electric source is provided, comprises water tank, described enclosed cooling water recirculation system also comprises frame, interchanger, water circulating pump; Described water tank is installed on the frame, is provided with a water-in and a water outlet on the water tank, and water-in is connected with the cooling water return pipe, and water outlet is connected with water circulating pump; Described interchanger is provided with the media outlet that is cooled, the medium import that is cooled, a heat-eliminating medium outlet and a cooling medium inlet, the media outlet that is cooled is connected with the recirculated cooling water water inlet pipe, the medium import that is cooled is connected with water circulating pump, the heat-eliminating medium outlet is connected with exterior cooling water return water pipe, and cooling medium inlet is connected with exterior cooling water water inlet pipe; Described interchanger is plate-type heat exchanger.
As further improvement, between described water outlet and the water circulating pump ball valve is housed.
As further improvement, between described water outlet and the water circulating pump strainer is housed.
As further improvement, also be connected with control valve between described heat-eliminating medium outlet and the exterior cooling water return water pipe.
As further improvement, a ball valve respectively is equipped with in the end of described exterior cooling water return water pipe, exterior cooling water water inlet pipe, recirculated cooling water water inlet pipe, cooling water return pipe.
Compared with prior art, the beneficial effects of the utility model are:
By the flow of control exterior cooling water, can realize that the circulating cooling water temp regulates automatically according to crystal pulling technique, and have advantage easy to use, simple in structure, that volume is little, energy consumption is low, cost is low.
Description of drawings
Fig. 1 is tomograph of the present utility model.
Fig. 2 is partial 3 d structure iron of the present utility model.
Fig. 3 is the interchanger outside view in the utility model.
Fig. 4 is PLC(programmable logic controller of the present utility model) control principle drawing.
Reference numeral among the figure is: 1 water tank; 2 water circulating pumps; 3 ball valves; 4 strainers; 5 frames; 6 interchanger; 7 control valves; 8 exterior cooling water return water pipes; 9 exterior cooling water water inlet pipes; 10 recirculated cooling water water inlet pipes; 11 cooling water return pipes; 12 media outlets that are cooled; The 13 medium imports that are cooled; The outlet of 14 heat-eliminating mediums; 15 cooling medium inlets; 16 temperature sensors; 17PLC; 18 zone melting furnace high frequency electric sources.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is described in further detail:
The enclosed cooling water recirculation system that is used for zone melting single-crystal stove high frequency electric source among Fig. 1-4 comprises water tank 1, frame 5, interchanger 6, water circulating pump 2.Described water tank 1 is installed on directly over the frame 5, a water-in is arranged at water tank 1 top, and water-in is connected with cooling water return pipe 11, and a water outlet is arranged at water tank 1 bottom, water outlet is connected with water circulating pump 2, and ball valve 3 and strainer 4 also are housed between water outlet and water circulating pump 2 successively.Described water circulating pump 2 is used for providing the power of recirculated cooling water, and in the specific implementation, water circulating pump 2 is the multi-stage pipeline impeller pump.
Described interchanger 6 is plate-type heat exchanger, is the core of whole system, and recirculated cooling water and exterior cooling water are in described interchanger 6 interior generation heat exchanges.Interchanger 6 is provided with the media outlet 12 that is cooled, the medium import 13 that is cooled, 14 and cooling medium inlets 15 of a heat-eliminating medium outlet.The media outlet 12 that is cooled is connected with recirculated cooling water water inlet pipe 10, be cooled that medium import 13 is connected with water circulating pump 2, heat-eliminating medium outlet 14 is connected with exterior cooling water return water pipe 8, cooling medium inlet 15 exterior cooling water water inlet pipes 9 connect, and make the exterior cooling medium and be cooled medium in interchanger 6 interior countercurrent flows.
Also be connected with control valve 7 between heat-eliminating medium outlet 14 on the interchanger 6 and the exterior cooling water return water pipe 8, be used for the flow of control exterior cooling water.In specific implementation, control valve 7 is electronic control flow valve, the Temperature Feedback of zone melting furnace high frequency electric source 18 water-ins that can detect according to crystal pulling technique and temperature sensor 16, by the PLC(programmable logic controller) aperture of 17 control control valves 7 spools, thus the flow of control exterior cooling water.Exterior cooling discharge is larger, and just more with the heat of interchanger 6 internal recycle water coolants, the circulating cooling water temp is just lower, and vice versa, has so just consisted of a temperature closed loop control.
A ball valve 3 respectively is equipped with in the end of described exterior cooling water return water pipe 8, exterior cooling water water inlet pipe 9, recirculated cooling water water inlet pipe 10, cooling water return pipe 11.
In real work, recirculated cooling water is flowed out by water tank 1 water outlet, through ball valve 3 and strainer 4, flows into water circulating pump 2.Water circulating pump 2 opposite sides connect interchanger 6, and interchanger 6 is divided into the two media passage: medium channel and cooling medium pass are cooled.The recirculated cooling water that water circulating pump 2 is higher with temperature pumps into the interchanger 6 medium import 13 that is cooled, and becomes the lower recirculated cooling water of temperature after giving birth to heat exchange by interchanger 6 and exterior cooling steeping in water for reconstitution.Then the recirculated cooling water that temperature is lower reenters zone melting furnace high frequency electric source 18 via recirculated cooling water water inlet pipe 10 it is heated up, and finally by the water-in that is flowed into water tank 1 by cooling water return pipe 11, so far, finishes a refrigeration cycle.On the other hand, exterior cooling water is by exterior cooling water water inlet pipe 9 inflow heat exchangers 6 cooling medium inlets 15, and flows out from interchanger 6 heat-eliminating mediums outlet 14 after the recirculated cooling water generation heat exchange, flowed out by exterior cooling water return water pipe 8 through control valve 7.Wherein, described recirculated cooling water is pure water, resistance value 〉=1.5M Ω.
Claims (5)
1. an enclosed cooling water recirculation system that is used for zone melting single-crystal stove high frequency electric source comprises water tank, it is characterized in that described enclosed cooling water recirculation system also comprises frame, interchanger, water circulating pump; Described water tank is installed on the frame, is provided with a water-in and a water outlet on the water tank, and water-in is connected with the cooling water return pipe, and water outlet is connected with water circulating pump; Described interchanger is provided with the media outlet that is cooled, the medium import that is cooled, a heat-eliminating medium outlet and a cooling medium inlet, the media outlet that is cooled is connected with the recirculated cooling water water inlet pipe, the medium import that is cooled is connected with water circulating pump, the heat-eliminating medium outlet is connected with exterior cooling water return water pipe, and cooling medium inlet is connected with exterior cooling water water inlet pipe; Described interchanger is plate-type heat exchanger.
2. enclosed cooling water recirculation system according to claim 1 is characterized in that, between described water outlet and the water circulating pump ball valve is housed.
3. enclosed cooling water recirculation system according to claim 1 is characterized in that, between described water outlet and the water circulating pump strainer is housed.
4. enclosed cooling water recirculation system according to claim 1 is characterized in that, also is connected with control valve between described heat-eliminating medium outlet and the exterior cooling water return water pipe.
5. according to claim 1 to the described enclosed cooling water recirculation system of 5 any one, it is characterized in that a ball valve respectively is equipped with in the end of described exterior cooling water return water pipe, exterior cooling water water inlet pipe, recirculated cooling water water inlet pipe, cooling water return pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220548081 CN202913082U (en) | 2012-10-24 | 2012-10-24 | Closed type cooling water circulation system for high frequency power supply of zone melting single-crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220548081 CN202913082U (en) | 2012-10-24 | 2012-10-24 | Closed type cooling water circulation system for high frequency power supply of zone melting single-crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202913082U true CN202913082U (en) | 2013-05-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220548081 Withdrawn - After Issue CN202913082U (en) | 2012-10-24 | 2012-10-24 | Closed type cooling water circulation system for high frequency power supply of zone melting single-crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202913082U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102912420A (en) * | 2012-10-24 | 2013-02-06 | 浙江晶盛机电股份有限公司 | Closed cooling water circulation system for high-frequency power source of zone-melting single crystal furnace |
-
2012
- 2012-10-24 CN CN 201220548081 patent/CN202913082U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102912420A (en) * | 2012-10-24 | 2013-02-06 | 浙江晶盛机电股份有限公司 | Closed cooling water circulation system for high-frequency power source of zone-melting single crystal furnace |
| CN102912420B (en) * | 2012-10-24 | 2015-03-18 | 浙江晶盛机电股份有限公司 | Closed cooling water circulation system for high-frequency power source of zone-melting single crystal furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130501 Effective date of abandoning: 20150318 |
|
| RGAV | Abandon patent right to avoid regrant |