CN202905673U - Wire bonder's XY workbench structure - Google Patents
Wire bonder's XY workbench structure Download PDFInfo
- Publication number
- CN202905673U CN202905673U CN2012206122456U CN201220612245U CN202905673U CN 202905673 U CN202905673 U CN 202905673U CN 2012206122456 U CN2012206122456 U CN 2012206122456U CN 201220612245 U CN201220612245 U CN 201220612245U CN 202905673 U CN202905673 U CN 202905673U
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- China
- Prior art keywords
- linear motor
- crossed roller
- pedestal
- direction linear
- screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacture Of Motors, Generators (AREA)
Abstract
A wire bonder's XY workbench structure belongs to the semiconductor integrated circuit manufacturing field. According to the wire bonder's XY workbench structure, an X-directional linear motor at the left side of a traditional structure is saved; and a space, in which a substrate is used to support a structure below a traditional X substrate, is ingeniously utilized such that all the weight of a bonding head part is loaded on an X-directional linear motor substrate above an active cell of the X-directional linear motor. As additional mechanical connection is not required, machine stiffness and strength in the X direction can be increased. Another advantage of the structure provided by the utility model lies in that: gravity center of the workbench will offset towards the center, which is beneficial to stability of the whole workbench. Therefore, machine welding stability is greatly increased.
Description
Technical field
This new utility model relates to semiconductor integrated circuit and makes the field, particularly relates to the structural design of the core component XY worktable of rear road equipment wire bonder.
Background technology
At all being by the complicated motion at a high speed of chopper guide wire lead-in wire do in three dimensions to form the distinct line arc shape of various satisfied different packing forms needs of Bonding equipment.X, Y, precision and the speed of the coordinated movement of various economic factors on three directions of Z are the keys that guarantees bonding apparatus wire welding precision, reliability, consistency and efficient.
The X-direction linear electric motors of traditional bonder XY worktable are installed in the left side of binding head, tying up subfacies also needs pedestal to support X to the linear electric motors pedestal, Y-direction linear electric motors pedestal and bonding head, to cause so the whole XY worktable area that takes up space large, and need the precision-fit of pedestal and X-direction linear motor rotor to add the technical problem of high-precision Machine Design and assembling guarantee XY workbench assembly precision.
Summary of the invention
In order to improve better speed, precision and the reliability in the wire bonder Manufacturing Automated process, this new utility model provides a kind of novel lead wire bonder XY worktable.
The technical scheme that this new utility model adopts is: a kind of wire bonder XY worktable structure, formed by Bonding mechanism, mineral matter foundry goods pedestal, mineral matter supporting leg and base steel plates, mineral matter foundry goods pedestal is the step shape pedestal that artificial marble is cast three layers of ladder that form, and wherein the ground floor step has the cable hole of vertical direction for the wire installation; Second layer step horizontal surface provides X-direction crossed roller installed surface, second layer step horizontal surface also has X-direction linear motor stator electric installing hole, X-direction crossed roller installing hole, also have the X-direction linear electric motors on the second layer step horizontal surface groove is installed, the side that groove is installed at the X-direction linear electric motors has the cabling groove; Have Y-direction linear motor stator electric installing hole on the 3rd layer of step horizontal surface; The vertical plane of second layer step have level to wire guide; Four jiaos of installing holes that leave the mineral matter supporting leg of mineral matter foundry goods pedestal, four king-bolts pass through mineral matter supporting leg installing hole with mineral matter foundry goods pedestal, and mineral matter supporting leg and base steel plates are fixed together, and have several cable holes at the mineral matter supporting leg;
Bonding mechanism is by the Y-direction linear motor stator electric, the Y-direction linear motor rotor, and the X-direction linear motor stator electric, the X-direction linear motor rotor, the X-direction pedestal, the Y-direction pedestal, bonding head, the Y-direction crossed roller, X-direction crossed roller and Y-direction linear motor rotor radiator form:
With the crossed roller full dog point socket set X-direction crossed roller is installed on the X-direction crossed roller installed surface by X-direction crossed roller installing hole;
By the X-direction linear motor rotor on the X-direction pedestal screw hole being installed with screw is fixed together X-direction linear motor rotor and X-direction pedestal;
The Y-direction linear motor stator electric is fixed on the mineral matter foundry goods pedestal by Y-direction linear motor stator electric installing hole with screw;
The X-direction linear motor stator electric is installed screw with the X-direction linear motor stator electric be installed into X-direction linear electric motors installation groove the inside by X-direction linear motor stator electric installing hole;
With the X-direction crossed roller screw being installed is installed in the X-direction crossed roller on the X-direction crossed roller installed surface of being cast by mineral material by X-direction crossed roller screw installing hole;
With the X-direction crossed roller screw being installed connects together X-direction crossed roller and X-direction pedestal;
Be installed on the Y-direction pedestal with the side of Y-direction crossed roller installation screw with the Y-direction crossed roller, be fixed on the X-direction pedestal with the opposite side of Y-direction crossed roller installation screw with the Y-direction crossed roller, with Y-direction linear motor rotor radiator and Y-direction linear motor rotor edging is alignd, with the Y-direction linear motor rotor screw is installed and is fixed on the Y-direction pedestal.
The beneficial effect of this new utility model is: this wire bonder XY worktable structure incomplete structure falls the traditional structure left side X-direction linear electric motors is installed, the all wt of bonding head part all is carried on the X of X-direction linear motor rotor top above the linear electric motors pedestal like this, because do not need extra mechanical connection, so can increase mechanical rigid and the intensity of directions X; Another benefit of this structure of this new utility model is exactly that the center of gravity of board can be offset to the centre, is beneficial to the stable of whole board, thereby has greatly increased the stability of machine welding.
Description of drawings
Fig. 1 is the structural representation of this new utility model wire bonder XY worktable structure.
Among the figure: 1, Y-direction linear motor stator electric, 2, the Y-direction linear motor rotor, 3, the X-direction linear motor stator electric, 4, X-direction linear motor rotor, 5, the X-direction pedestal, 6, the Y-direction pedestal, 7, X-direction linear electric motors mineral matter foundry goods pedestal, 8, the X-direction linear electric motors install groove, 9, bonding head.
Fig. 2 is this new utility model mineral matter basis base construction schematic diagram.
Among the figure: 21-24, X-direction linear motor stator electric installing hole, 51-56, Y-direction linear motor stator electric installing hole, 70-79, X-direction crossed roller installing hole, 8, the X-direction linear electric motors install groove, 10, the X linear motor rotor walks line groove.
Fig. 3 is this new utility model wire bonder XY worktable structural group assembling structure exploded view.
Among the figure: 1, the Y-direction linear motor stator electric, 2, the Y-direction linear motor rotor, 3, the X-direction linear motor stator electric, 4, the X-direction linear motor rotor, 5, the X-direction pedestal, 6, the Y-direction pedestal, 7, X-direction linear electric motors mineral matter foundry goods pedestal, 8, the X-direction linear electric motors are installed the groove groove, 10, the X linear motor rotor is walked line groove, 70-79, X-direction crossed roller installing hole, 80-89, X-direction crossed roller screw installing hole, 90-99, the X-direction crossed roller is installed screw 1(and is installed to 70-79), 101, the X-direction linear motor stator electric is installed screw, 101, the X-direction linear motor stator electric is installed screw, 102, the X-direction linear motor rotor is installed screw, 103, the X-direction crossed roller is installed screw 2(and is installed to X-direction crossed roller screw installing hole 80-89 by X-direction pedestal 5), 104-105, the Y-direction crossed roller is installed screw, 106, the Y-direction linear motor rotor is installed screw, 111, the Y-direction crossed roller, 112, Y-direction linear motor rotor radiator, 113, X-direction crossed roller installed surface, 114-115, the X-direction crossed roller, 116, X-direction linear motor rotor installing hole.
Embodiment
The utility model is described in further detail below in conjunction with drawings and Examples.
Fig. 1,2,3 shows the structure chart of wire bonder XY worktable
Below in conjunction with accompanying drawing this new utility model is further described
A kind of wire bonder XY worktable structure, formed by Bonding mechanism, mineral matter foundry goods pedestal (7), mineral matter supporting leg (117) and base steel plates (118), the step shape pedestal of three layers of ladder that mineral matter foundry goods pedestal (7) forms for artificial marble casting, wherein the ground floor step cable hole that has a vertical direction is used for wire and installs; Second layer step horizontal surface provides X-direction crossed roller installed surface (113), second layer step horizontal surface also has X-direction linear motor stator electric installing hole (41-44), X-direction crossed roller installing hole (70-79), also have the X-direction linear electric motors on the second layer step horizontal surface groove (8) is installed, the side that grooves (8) are installed at the X-direction linear electric motors has cabling groove (10), the vertical plane of second layer step have level to wire guide; Have Y-direction linear motor stator electric installing hole (51-56) on the 3rd layer of step horizontal surface; Four jiaos of installing holes (31-34) that leave mineral matter supporting leg (117) of mineral matter foundry goods pedestal (7), four king-bolts pass through mineral matter supporting leg installing hole (31-34) with mineral matter foundry goods pedestal (7), mineral matter supporting leg (117) and base steel plates (118) are fixed together, and have several cable holes at mineral matter supporting leg (117).
Bonding mechanism comprises: Y-direction linear motor stator electric (1), Y-direction linear motor rotor (2), X-direction linear motor stator electric (3), X-direction linear motor rotor (4), X-direction pedestal (5), Y-direction pedestal (6), bonding head (9), crossed roller is installed screw, Y-direction crossed roller (111), X-direction crossed roller (114-115) and Y-direction linear motor rotor radiator (112);
With the crossed roller full dog point socket set X-direction crossed roller (114-115) is installed on the X-direction crossed roller installed surface (113) by X-direction crossed roller installing hole (70-79);
By the X-direction linear motor rotor on the X-direction pedestal (5) screw hole (116) being installed with screw (102) is fixed together X-direction linear motor rotor (4) and X-direction pedestal (5);
Y-direction linear motor stator electric (1) is fixed on the mineral matter basis pedestal (Fig. 2) by Y-direction linear motor stator electric installing hole (51-56) with screw;
X-direction linear motor stator electric (3) is installed screw (101) with the X-direction linear motor stator electric be installed into X-direction linear electric motors installation grooves (10) the inside by X-direction linear motor stator electric installing hole (41-44);
With the X-direction crossed roller screw (90-99) being installed is installed in X-direction crossed roller (114-115) on the X-direction crossed roller installed surface (113) of being cast by mineral material by X-direction crossed roller screw installing hole (80-89);
With the X-direction crossed roller screw (103) being installed connects together X-direction crossed roller (114-115) and X-direction pedestal (5);
Be installed on the Y-direction pedestal (6) with the side of Y-direction crossed roller installation screw (104) with Y-direction crossed roller (111), be fixed on the X-direction pedestal (5) with the opposite side of Y-direction crossed roller installation screw (105) with Y-direction crossed roller (111), with Y-direction linear motor rotor radiator (112) and Y-direction linear motor rotor (2) edging is alignd, with the Y-direction linear motor rotor screw (106) is installed and is fixed on the Y-direction pedestal (6).
Claims (1)
1. wire bonder XY worktable structure, by mineral matter foundry goods pedestal, Y-direction linear motor stator electric (1), Y-direction linear motor rotor (2), X-direction linear motor stator electric (3), X-direction linear motor rotor (4), X-direction pedestal (5), Y-direction pedestal (6), Y-direction crossed roller (111), X-direction crossed roller (114-115), Y-direction linear motor rotor radiator (112) forms; Mineral matter foundry goods pedestal is the step shape pedestal that artificial marble is cast three layers of ladder that form, and wherein the ground floor step has the cable hole of vertical direction for the wire installation; Second layer step horizontal surface provides X-direction crossed roller installed surface (113), and second layer step horizontal surface also has X-direction linear electric motors crossed roller installing hole (70-79) and reserves the X-direction linear electric motors groove (8) is installed; The bottom of groove (8) is installed at the X-direction linear electric motors reserves X-direction linear motor stator electric installing hole (21-24), have the X-direction linear motor rotor in groove (8) side and walk line groove (10); Have Y-direction linear motor stator electric installing hole (51-56) on the 3rd layer of step horizontal surface; It is characterized in that:
Bonding mechanism is by Y-direction linear motor stator electric (1), Y-direction linear motor rotor (2), X-direction linear motor stator electric (3), X-direction linear motor rotor (4), X-direction pedestal (5), Y-direction pedestal (6), crossed roller is installed screw, Y-direction crossed roller (111), X-direction crossed roller (114-115), Y-direction linear motor rotor radiator (112) forms;
Y-direction linear motor stator electric (1) is fixed on the mineral matter foundry goods pedestal by Y-direction linear motor stator electric installing hole (51-56) with screw;
X-direction linear motor stator electric (3) is installed screw (101) with the X-direction linear motor stator electric and is installed into X-direction linear electric motors installation grooves (8) the inside by X-direction linear motor stator electric installing hole (21-24);
By the X-direction linear motor rotor on the pedestal (5) screw hole (116) being installed with screw (102) is fixed together X-direction linear motor rotor (4) and X-direction pedestal (5);
The X-direction crossed roller is installed screw (90-99) and is fixed on the X-direction crossed roller installed surface (113) of being cast by mineral material by the side of X-direction crossed roller screw installing hole (80-89) with X-direction crossed roller (114-115);
Be fixed together with opposite side and the X-direction pedestal (5) of X-direction crossed roller installation screw (103) with X-direction crossed roller (114-115), so just formed the X-direction movable machinery structure of XY worktable;
Be installed on the Y-direction pedestal (6) with the side of Y-direction crossed roller installation screw (104) with Y-direction crossed roller (111), be fixed on the X-direction pedestal (5) with the opposite side of Y-direction crossed roller installation screw (105) with Y-direction crossed roller (111), with Y-direction linear motor rotor radiator (112) and Y-direction linear motor rotor (2) edging is alignd, with the Y-direction linear motor rotor screw (106) is installed and is fixed on the Y-direction pedestal (6), so just realized mechanically decoupled on X and Y-direction of XY worktable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012206122456U CN202905673U (en) | 2012-11-19 | 2012-11-19 | Wire bonder's XY workbench structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012206122456U CN202905673U (en) | 2012-11-19 | 2012-11-19 | Wire bonder's XY workbench structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202905673U true CN202905673U (en) | 2013-04-24 |
Family
ID=48126307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012206122456U Expired - Fee Related CN202905673U (en) | 2012-11-19 | 2012-11-19 | Wire bonder's XY workbench structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202905673U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102956516A (en) * | 2012-11-19 | 2013-03-06 | 大连佳峰电子有限公司 | XY workbench structure of lead bonder |
-
2012
- 2012-11-19 CN CN2012206122456U patent/CN202905673U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102956516A (en) * | 2012-11-19 | 2013-03-06 | 大连佳峰电子有限公司 | XY workbench structure of lead bonder |
| CN102956516B (en) * | 2012-11-19 | 2015-01-14 | 大连佳峰电子有限公司 | XY workbench structure of lead bonder |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130424 Termination date: 20131119 |