CN202893722U - 一种用于去除硅片表面硅酸钠残留的喷淋装置 - Google Patents
一种用于去除硅片表面硅酸钠残留的喷淋装置 Download PDFInfo
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102873042A (zh) * | 2012-09-27 | 2013-01-16 | 奥特斯维能源(太仓)有限公司 | 一种用于去除硅片表面硅酸钠残留的喷淋装置 |
CN104353653A (zh) * | 2014-11-05 | 2015-02-18 | 东晶锐康晶体(成都)有限公司 | 一种用于晶片提篮的挂钩 |
CN105170521A (zh) * | 2015-08-31 | 2015-12-23 | 衢州市依科达节能技术有限公司 | 一种酸碱设备吊装冲洗防护装置 |
CN106884166A (zh) * | 2015-12-16 | 2017-06-23 | 浙江鸿禧能源股份有限公司 | 一种清洗制绒水洗槽喷淋装置的设计方法 |
CN109585345A (zh) * | 2018-12-29 | 2019-04-05 | 无锡琨圣科技有限公司 | 一种改善黑硅机台工艺稳定性的雾化喷淋结构 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102873042A (zh) * | 2012-09-27 | 2013-01-16 | 奥特斯维能源(太仓)有限公司 | 一种用于去除硅片表面硅酸钠残留的喷淋装置 |
CN104353653A (zh) * | 2014-11-05 | 2015-02-18 | 东晶锐康晶体(成都)有限公司 | 一种用于晶片提篮的挂钩 |
CN105170521A (zh) * | 2015-08-31 | 2015-12-23 | 衢州市依科达节能技术有限公司 | 一种酸碱设备吊装冲洗防护装置 |
CN106884166A (zh) * | 2015-12-16 | 2017-06-23 | 浙江鸿禧能源股份有限公司 | 一种清洗制绒水洗槽喷淋装置的设计方法 |
CN109585345A (zh) * | 2018-12-29 | 2019-04-05 | 无锡琨圣科技有限公司 | 一种改善黑硅机台工艺稳定性的雾化喷淋结构 |
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C14 | Grant of patent or utility model | ||
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C53 | Correction of patent for invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Chen Tongyin Inventor after: Liu Renzhong Inventor after: Xing Guoqiang Inventor after: Zhang Bin Inventor before: Wu Yajun Inventor before: Feng Lixue Inventor before: Liang Huining Inventor before: Hu Yuanqing Inventor before: Li Huaen |
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COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: WU YAJUN FENG LIXUE LIANG HUINING HU YUANQING LI HUAEN TO: CHEN TONGYIN LIU RENZHONG XING GUOQIANG ZHANG BIN |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130424 Termination date: 20180927 |