CN202841518U

CN202841518U - MEMS (micro electro mechanical systems) microphone wiring board

Info

Publication number: CN202841518U
Application number: CN 201220537483
Authority: CN
Inventors: 万景明; 杨少军; 张继栋
Original assignee: Shandong Gettop Acoustic Co Ltd
Current assignee: Gettop Acoustic Co Ltd
Priority date: 2012-10-20
Filing date: 2012-10-20
Publication date: 2013-03-27
Anticipated expiration: 2022-10-20

Abstract

The utility model relates to an MEMS (micro electro mechanical systems) microphone wiring board which comprises a base plate and an MEMS chip installed thereon. An MEMS vibrating diaphragm is arranged on the MEMS chip. A limiting device for limiting excessive deformation of the MEMS vibrating diaphragm is arranged above the same. The limiting device comprises welding substrates and at least one welding gold wire, wherein the welding substrates are arranged on the base plate on two sides of the MEMS chip and the welding gold wires welded between the two welding substrates cross over the MEMS vibrating diaphragm. Two welding gold wires intersect, or multiple welding gold wires are disposed in parallel at intervals. The limiting device can comprise a limit plate crossing over the MEMS vibrating diaphragm and limit plate support protrusions arranged on the base plate on two sides of the MEMS chip and used for mounting the limit plate. The limiting device can further be a limiting cover covering above the MEMS vibrating diaphragm. The MEMS microphone wiring board is simple in structure and elaborate in design, and the service life of the MEMS vibrating diaphragm is prolonged as damage of the MEMS vibrating diaphragm caused by excessive deformation is avoided.

Description

MEMS microphone terminal block

Technical field

The utility model design MEMS microphone field, specifically a kind of MEMS microphone terminal block.

Background technology

The MEMS microphone is a kind of special microphone that adopts new material, new structure, on its terminal block Primary Component is installed---MEMS chip, i.e. vibration component.The MEMS chip is responded to acoustic pressure by MEMS vibrating diaphragm mounted thereto, and the MEMS vibrating diaphragm is made by monocrystalline or polycrystalline silicon material.In the terminal block of MEMS microphone; the MEMS chip is over against sound hole; there is not protective device; outside sound (gas) straightening connects and is applied on the MEMS chip; the MEMS vibrating diaphragm of the semiconductor silicon material that uses is not only thin but also fragile membrane structure of one deck; depressing at loud (gas) can fragmentation because excessive deformation occuring, and can cause thus whole microphone to be exported because vibration component damages the voiceless sound signal.

The above-mentioned chip damage problem that causes because of the excessive deformation of MEMS vibrating diaphragm is the ubiquitous integrity problem in present MEMS microphone field, also is the insoluble difficult problem of MEMS chip.On the product line of MEMS microphone and in the concrete use procedure the client, all can owing to the breakage of MEMS chip causes a certain amount of wasting of resources, affect quality and the useful life of product.

The utility model content

The technical problems to be solved in the utility model provides a kind of MEMS microphone terminal block, thereby this terminal block can avoid the MEMS vibrating diaphragm because of the broken phenomenon of excessive deformation by the Oscillation Amplitude of restriction MEMS vibrating diaphragm, the vibration of MEMS vibrating diaphragm is stable, reliable, so that product can adapt to various harsh environment, thereby can increase product useful life.

For solving the problems of the technologies described above, MEMS microphone terminal block of the present utility model comprises substrate and the MEMS chip that is installed on the substrate, the MEMS chip is provided with the MEMS vibrating diaphragm, and its design feature is that the top of described MEMS vibrating diaphragm is provided be used to the stopping means that limits its excessive deformation.

Described stopping means comprises the welding substrate on the substrate that is located at MEMS chip both sides and is welded between the two welding substrates and across at least one root bead of crossing MEMS vibrating diaphragm top and connects gold thread.

Two arranged in a crossed manner of described welding gold thread.

Described welding gold thread parallel interval arranges many.

Described stopping means comprises across the limiting plate above the MEMS vibrating diaphragm and is located at the substrate of MEMS chip both sides for the limiting plate brace table of mounting limit plate.

Described stopping means is the position-limiting cover that is buckled in MEMS vibrating diaphragm top.

The beneficial effects of the utility model are: above the MEMS vibrating diaphragm stopping means is set, has effectively limited the excessive deformation of MEMS vibrating diaphragm, the phenomenon of having avoided the MEMS vibrating diaphragm to damage because deformation quantity is excessive; The structure of stopping means employing welding gold thread, the gold thread bonding is the procedure that the MEMS microphone is produced, and can utilize the welding gold thread that the MEMS vibrating diaphragm is carried out position limitation protection under this operation, technological operation is convenient, realization is simple; Welding gold thread two or parallel interval arranged in a crossed manner arrange many, and the position limitation protection scope is larger, better effects if, and the terminal block overall structure is more attractive in appearance; Stopping means adopts the version of limiting plate or position-limiting cover, not only can play spacing effect can also protect to a certain extent the MEMS vibrating diaphragm avoid producing or use procedure in physics touch damage.The utility model is simple in structure, deft design, and the phenomenon of effectively having avoided the MEMS vibrating diaphragm to damage because of excessive deformation, thus prolonged useful life of MEMS vibrating diaphragm.

Description of drawings

Below in conjunction with the drawings and specific embodiments the utility model is described in further detail:

Fig. 1 is the structural representation of the first execution mode of the present utility model;

Fig. 2 is the structural representation of the second execution mode of the present utility model;

Fig. 3 is the structural representation of the third execution mode of the present utility model;

Fig. 4 is the upward view of Fig. 1, Fig. 2 and Fig. 3;

Fig. 5 is the structural representation of the 4th kind of execution mode of the present utility model;

Fig. 6 is the structural representation of the 5th kind of execution mode of the present utility model.

Embodiment

With reference to accompanying drawing, MEMS microphone terminal block of the present utility model comprises substrate 1 and the MEMS chip 2 that is installed on the substrate 1, and MEMS chip 2 is provided with MEMS vibrating diaphragm 3, and the top of MEMS vibrating diaphragm 3 is provided be used to the stopping means that limits its excessive deformation.The effect of stopping means is in the situation that do not affect the excessive deformation of MEMS vibrating diaphragm 3 normal vibration limiters, makes MEMS vibrating diaphragm 3 all the time in the safe range internal vibration.

With reference to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, stopping means comprises the welding substrate 4 on the substrate 1 that is located at MEMS chip 2 both sides and is welded between the two welding substrates 4 and across at least one root bead of crossing MEMS vibrating diaphragm 3 tops and connects gold thread 5.Because gold thread bonding (Wire Bonding) is the procedure that the MEMS microphone is produced, can under this operation, utilize 5 pairs of MEMS vibrating diaphragms of welding gold thread 3 to carry out position limitation protection, the technological operation of stopping means can realize easily.Wherein, magnitude setting and the welding position of welding gold thread 5 can arrange according to the needs of actual process, as shown in Figure 1, can only arrange one, and the effect that can play the 3 excessive deformation of restriction MEMS vibrating diaphragm gets final product.In addition, for better protection MEMS vibrating diaphragm 3 with for consideration attractive in appearance, also can connect gold thread 5 by two root beads arranged in a crossed manner, can also parallel interval many root beads be set and connect gold thread 5, above-mentioned two kinds of execution modes are distinguished as shown in Figures 2 and 3.

The another kind of version of stopping means has been shown among Fig. 5, and the stopping means of this kind execution mode comprises across the limiting plate 6 above MEMS vibrating diaphragm 3 and is located at the substrate 1 of MEMS chip 2 both sides for the limiting plate brace table 7 of mounting limit plate 6.Adopt the structure realization of mounting limit plate 6 on the limiting plate brace table 7 to the protection of MEMS vibrating diaphragm 3, the bottom surface of limiting plate 6 is close to MEMS vibrating diaphragm 3, and both gaps can guarantee the normal vibration of MEMS vibrating diaphragm 3 and can limit its excessive deformation.This kind structure also can be avoided MEMS vibrating diaphragm 3 to avoid artificial physics touching and damage to a certain extent.

Another version of stopping means has been shown among Fig. 6, and the stopping means of this kind execution mode is the position-limiting cover 8 that is buckled in MEMS vibrating diaphragm 3 tops.Stopping means adopts the structure of position-limiting cover 8, is in order more fully to protect MEMS vibrating diaphragm 3 when playing position-limiting action.The concrete structure of position-limiting cover 8 can adopt with the net blanket of sieve aperture or use the form of non-tight radome structure with holes.

In sum, the utility model is not limited to above-mentioned embodiment.Those skilled in the art under the prerequisite that does not break away from spirit and scope of the present utility model, can do some changes and modification.Protection range of the present utility model should be as the criterion with claim of the present utility model.

Claims

1. MEMS microphone terminal block, comprise substrate (1) and be installed in MEMS chip (2) on the substrate (1), MEMS chip (2) is provided with MEMS vibrating diaphragm (3), it is characterized in that the top of described MEMS vibrating diaphragm (3) is provided be used to the stopping means that limits its excessive deformation.

2. MEMS microphone terminal block as claimed in claim 1 is characterized in that described stopping means comprises the welding substrate (4) on the substrate (1) that is located at MEMS chip (2) both sides and is welded between the two welding substrates (4) and across at least one root bead of crossing MEMS vibrating diaphragm (3) top to connect gold thread (5).

3. MEMS microphone terminal block as claimed in claim 2 is characterized in that two arranged in a crossed manner of described welding gold thread (5).

4. MEMS microphone terminal block as claimed in claim 2 is characterized in that described welding gold thread (5) parallel interval arranges many.

5. MEMS microphone terminal block as claimed in claim 1 is characterized in that described stopping means comprises across at the limiting plate (6) of MEMS vibrating diaphragm (3) top be located at the substrate (1) of MEMS chip (2) both sides for the limiting plate brace table (7) of mounting limit plate (6).

6. MEMS microphone terminal block as claimed in claim 1 is characterized in that described stopping means is for being buckled in the position-limiting cover (8) above the MEMS vibrating diaphragm (3).