CN202828949U - Transfer component and transfer device and equipment with transfer device - Google Patents
Transfer component and transfer device and equipment with transfer device Download PDFInfo
- Publication number
- CN202828949U CN202828949U CN201220462531.9U CN201220462531U CN202828949U CN 202828949 U CN202828949 U CN 202828949U CN 201220462531 U CN201220462531 U CN 201220462531U CN 202828949 U CN202828949 U CN 202828949U
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- glass substrate
- transfer assembly
- transfer
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Abstract
The utility model discloses a transfer component which comprises a main body support, a transfer roller and a transfer girdle, wherein the transfer roller which loads and unloads a glass base plate is arranged on the upper surface of the main body support. The transfer girdle is arranged on the lateral face of the main body support. The utility model further discloses a transfer device which comprises the transfer component, and the number of the transfer component is at least one. The utility model further discloses equipment with the transfer device. The equipment comprises equipment such as wet etching, cleaning and peeling. Relative displacement between the glass base plate and the transfer roller can be effectively avoided in the process of transfer of the glass base plate, and thus damage on the glass base plate is avoided.
Description
Technical field
The utility model relates to field of mechanical technique, relates in particular to a kind of transfer assembly, conveyer and uses the equipment of this conveyer.
Background technology
At present at TFT Liquid Crystal Display (TFT-LCD, Thin Film Transistor-Liquid Crystal Display) in array (Array) the substrate manufacture process, usually adopt wet etching (wet etch) to carry out the etching of metal level, comprising grid line (Gate) layer, source/drain (S/D, Source/Drain) etching of layer, tin indium oxide (ITO, Indium Tin Oxides) layer etc.
Existing wet-method etching equipment adopts structure shown in Figure 1, glass substrate 11 is that delivery roller 12 rotates the mode that the glass substrate on the roller is forwarded at wet-method etching equipment and the load mode of peeling off cleaning (strip cleaning) device interior, finish successively each technological process, mainly comprise the wet etching process, clean spray (shower) process, dry run etc.Because the glass substrate that adopts mostly is greatly 0.5 millimeter, 0.6 millimeter and 0.7 millimeter substrate, so has relative displacement between glass substrate and the roller, is easy to cause the breakage of glass substrate.
The utility model content
In view of this, the equipment that main purpose of the present utility model is to provide a kind of transfer assembly, conveyer and uses this conveyer, there is relative displacement to solve in the existing wet etching process between the glass substrate and roller, is easy to cause the problem of glass substrate breakage.
For achieving the above object, the technical solution of the utility model is achieved in that
The utility model provides a kind of transfer assembly, and this assembly comprises: main body rack, delivery roller, transmission cingulum, wherein,
The upper surface of described main body rack is provided with the described delivery roller of loading and unloading glass substrate, and the side of described main body rack is provided with described transmission cingulum.
Wherein, around the zone of the upper surface placing glass substrate of described main body rack, except the position, gangway of glass substrate, be provided with inhibiting device.
Wherein, the inhibiting device that is positioned at the dual-side on the described glass substrate direction of transfer is side roller, and described side roller limits the position of glass substrate, and the rotation of described side roller provides power for the transmission of glass substrate.
Wherein, also comprise the side that is arranged at described main body rack, the cingulum support that supports described transmission cingulum.
The utility model also provides a kind of conveyer, and this installs above-mentioned each described transfer assembly, and the quantity of described transfer assembly is at least one.
Wherein, this device also is included as transmission cingulum in the described transfer assembly gear combination that transmits power is provided.
Wherein, described gear combination is comprised of at least two gears.
Wherein, this device also comprises the servomotor by programmable logic controller (PLC) PLC control, and the gear in the described servomotor pinion combination rotates.
The utility model also provides a kind of equipment, comprises above-mentioned each described conveyer.
A kind of transfer assembly provided by the utility model, conveyer and use the equipment of this conveyer, replace glass substrate in the operation of device interior by transfer assembly in the operation of device interior, replaced existing the rotation with roller and transmitted the transfer mode that glass substrate advances or retreats; Compare with traditional transfer mode, the utility model has reduced the relative motion of glass substrate at device interior, can greatly avoid the loss (Glass Broken) of glass substrate in production link.
Description of drawings
Fig. 1 is the planar structure schematic diagram of existing wet-method etching equipment conveyer;
Fig. 2 is the perspective view of a kind of transfer assembly of the utility model embodiment;
Fig. 3 is the front elevation of a kind of transfer assembly of the utility model embodiment;
Fig. 4 is the driving schematic diagram of a kind of transfer assembly of the utility model embodiment;
Fig. 5 is the planar structure schematic diagram of a kind of conveyer of the utility model embodiment.
Description of reference numerals:
11: glass substrate; 12: delivery roller; 13: main body rack; 14: delivery roller; 15: inhibiting device; 16: transmit cingulum; 17: the cingulum support; 18: glass substrate; 19: gear; 20: gateway unit; 21: the ultraviolet light cleaning unit; 22: load units; 23: the etching unit; 24: the first spray unit; 25:U shape steering unit; 26: the second spray unit; 27: unloading unit; 28: the air knife drying unit; 29: outlet port unit; 30: wait for the unit.
The specific embodiment
Below in conjunction with the drawings and specific embodiments the technical solution of the utility model is further elaborated.
Be first technical scheme of the present utility model, a kind of transmission (Transfer) assembly comprises: main body rack, delivery roller, transmission cingulum, wherein, the upper surface of main body rack is provided with the delivery roller of loading and unloading glass substrate, and the side of main body rack is provided with the transmission cingulum.
As second technical scheme of the present utility model, on the basis of first technical scheme, around the zone of the upper surface placing glass substrate of main body rack, except the position, gangway of glass substrate, be provided with inhibiting device.
As the 3rd technical scheme of the present utility model, on the basis of second technical scheme, the inhibiting device that is positioned at the dual-side on the glass substrate direction of transfer is side roller (Side roller), described side roller limits the position of glass substrate, and the rotation of described side roller provides power for the transmission of glass substrate.
As the 4th technical scheme of the present utility model, on the basis of first, second or the 3rd technical scheme, this transfer assembly also comprises the side that is arranged at described main body rack, supports the cingulum support that transmits cingulum.
As the 5th technical scheme of the present utility model, a kind of conveyer, this device comprises the transfer assembly of aforementioned arbitrary technical scheme, and the quantity of described transfer assembly is at least one.
As the 6th technical scheme of the present utility model, on the basis of the 5th technical scheme, the transmission cingulum that this device also is included as in the described transfer assembly provides the gear combination that transmits power.
As the 7th technical scheme of the present utility model, on the basis of the 6th technical scheme, described gear combination is comprised of at least two gears.
As the 8th technical scheme of the present utility model, on the basis of the 6th technical scheme, this conveyer also comprises by programmable logic controller (PLC) (PLC, Programmable Logic Controller) servomotor of control, the gear in the described servomotor pinion combination rotates.
As the 9th technical scheme of the present utility model, a kind of equipment comprises the conveyer of aforementioned arbitrary technical scheme.
The below further elaborates the technical solution of the utility model more in conjunction with specific embodiments.
As shown in Figure 2, Fig. 2 is the perspective view of a kind of transfer assembly of the utility model embodiment, this transfer assembly mainly comprises: main body rack 13, delivery roller 14, inhibiting device 15, transmission cingulum 16, wherein, upper surface at main body rack 13 is provided with loading and unloading glass substrate 18 delivery roller 14 of (18 among Fig. 2 represents the glass substrate of transfer assembly under loading condition), and delivery roller 14 plays the transmission effect when loading and unloading glass substrate 18; (be the glass substrate 18 that loaded shown in Fig. 2 around) around the zone of the upper surface placing glass substrate 18 of main body rack 13, except the position, gangway of glass substrate 18, be provided with inhibiting device 15, inhibiting device 15 can play to the position of glass substrate the effect of restriction standard, and the glass substrate 18 that prevents from loading after complete is mobile at main body rack 13; The side of main body rack 13 is provided with transmits cingulum 16.All be provided with transmission cingulum 16 in four sides of main body rack 13, can realize transfer assembly transmission in different directions.
As a kind of better embodiment on the architecture basics of transfer assembly shown in Figure 2, the inhibiting device 15 that is arranged in the dual-side (being the dual-side on the direction shown in Fig. 2 arrow) on glass substrate 18 direction of transfers (direction as shown by the arrows in Figure 2) can be side roller.On the one hand, this side roller limits and standard the position of glass substrate 18; On the other hand, when loading and unloading glass substrate 18, the rotation of this side roller can provide power for the transmission of glass substrate 18.
In addition, transfer assembly shown in Figure 2 also comprises the side that is arranged at main body rack 13, the cingulum support 17 that is used for supporting transmission cingulum 16.
Again as shown in Figure 3, Fig. 3 is the front elevation of a kind of transfer assembly of the utility model embodiment, the main body rack of 13 expression transfer assemblies, 14 expression delivery rollers, 15 expression inhibiting device, 16 expressions transmit cingulum, 17 expression cingulum supports, the glass substrate of 18 expression transfer assemblies under loading condition.Wherein, the structure of each constituent elements is identical with the description in the aforementioned spatial structure with effect, repeats no more herein.
Again as shown in Figure 4, Fig. 4 is the driving schematic diagram of a kind of transfer assembly of the utility model embodiment, and in Fig. 4,16 expressions transmit cingulum, 17 expression cingulum supports, 19 expression gears; Several gears 19 form gear combination, by programmed logic controller (PLC, Programmable Logic Controller) servomotor of control provides power for the rotation of gear 19, the rotation of gear 19 drives and transmits cingulum 16 transmission, and then driving delivery roller 14 rotations, the rotation of delivery roller 14 provides power for the loading and unloading glass substrate.
The conveyer of the utility model embodiment comprises above-described transfer assembly, and the quantity of described transfer assembly is at least one; The transmission cingulum that this device also is included as in the described transfer assembly provides the gear combination that transmits power.Described gear combination is comprised of at least two gears.This conveyer also comprises the servomotor by PLC control, and described servomotor pinion rotates.
Need to prove, the transfer assembly of the utility model embodiment and conveyer are not only applicable in the equipment of wet etching, are applicable to clean, peel off etc. in the equipment yet.Below in conjunction with specific embodiment to conveyer at wet etching, the working process that cleans, peel off etc. in the equipment is elaborated.
As shown in Figure 5, Fig. 5 is the planar structure schematic diagram of the conveyer of the utility model embodiment, and the operational process of conveyer specifically comprises:
Step 1, glass substrate enters ultraviolet light cleaning unit (EUV unit) 21 from gateway unit (in unit) 20 and carries out the ultraviolet light cleaning procedure, the oxygenous cognition of UV-irradiation produces ozone, utilize the organic matter that the strong oxidizing property of ozone can the oxidation glass baseplate surface, reach and remove organic purpose; After substrate enters the ultraviolet cleaning unit, in load units 22, have a transfer assembly and waiting for loading, behind validation of information, (confirm that namely glass substrate is in place, can load), under the control of PLC, the wheeled transmission of ultraviolet light cleaning unit 21 and load units 22 (FW) process that begins to advance, glass substrate begins to load on transfer assembly, after glass substrate enters transfer assembly fully, the wheeled FW of PLC control ultraviolet light cleaning unit 21 and load units 22 transmits and stops, and glass substrate loads at transfer assembly and finishes.
Step 2, under the effect of the driven wheel combination in etching unit (ETCH unit) 23, transfer assembly enters (ETCH Chamber) between etched area, and the beginning according to preset program advance or retreat (BW) operation, like this, glass substrate just can be finished the technique of etching under static state relative to transfer assembly.
Step 3, finish etching technics after, transfer assembly continues to forward under the effect of driven wheel combination, arrives the first spray unit (being called for short Showerl unit) 24 and finishes and clean spray process for the first time; Subsequently, the driven wheel of vertical direction is combined under the effect of cylinder and rises, and with transfer assembly on the contact of corresponding transmission cingulum, the height of the driven wheel combination of vertical direction will be higher than the height of the driven wheel combination of horizontal direction, thereby so that the driven wheel of vertical direction makes up transfer assembly jack-up, the transmission cingulum of transfer assembly separates with the combination of the driven wheel of horizontal direction.
Further, under the effect of transfer assembly driven wheel combination in the vertical direction, in first spray unit 24 → U-shaped steering unit (U-TURN) 25 → the second spray unit (being called for short Shower2 unit) 26 operations, finally arrive the second spray unit 26 and finish and clean spray process for the second time.Wherein, because the conveyer among the utility model embodiment is the U-shaped structure, therefore need to processes (Process) process by U-shaped steering unit 25 transfer assembly is turned to; What the second spray unit 26 was carried out is Process process cleaning spray process afterwards.
Also need to prove, the driven wheel combination of above-mentioned horizontal direction, the driven wheel combination of vertical direction refer to horizontal direction and vertical direction among the figure, in actual applications, might not be horizontal direction and the vertical direction with respect to ground.The utility model is described like this, just for the vertical relation between these two kinds of driven wheel combinations is described.
Step 4, transfer assembly bearing glass substrate arrive the second spray unit 26 and finish clean spray process for the second time after, the driven wheel of vertical direction is combined under the effect of cylinder and descends, and the height after descending is lower than the height of the driven wheel combination of horizontal direction, thereby the transmission cingulum of transfer assembly is separated with the driven wheel combination of vertical direction, the driven wheel combination of horizontal direction contacts with the transmission cingulum of transfer assembly, and the horizontal direction that provides power to finish transfer assembly transmits.
Need to prove, the driven wheel combination of the combination of the driven wheel of above-mentioned horizontal direction, vertical direction refers to horizontal direction and vertical direction among the figure, in actual applications, might not be with respect to the horizontal reverse on ground to and vertical direction.The utility model is described like this, just for the vertical relation between these two kinds of driven wheel combinations is described.
Step 5, transfer assembly arrives unloading unit (unload unit) 27 o'clock, and the roller convey system of unloading unit 27 and air knife drying unit (AK unit) 28 carries out the FW action, and glass substrate is unloaded; Glass substrate is finished drying process in air knife drying unit 28 after, from outlet port unit (out unit) 29 outputs.
Step 6, the transfer assembly of finishing the glass substrate unloading in the unloading unit 27 is parked in waits for unit (Wait unit) 30 waits, at this moment, if there are not other transfer assemblies in the load units 22, wait for that then the transfer assembly in the unit 30 enters load units 22 interior waits loading glass substrates; If there are other transfer assemblies waiting for the loading glass substrate in the load units 22, wait for that then the transfer assemblies in the unit 30 are being waited for unit 30 interior continuation waits.In addition, if the transfer assembly of rear bearing glass substrate moves in the unloading unit 27, whether this moment no matter load units 22 bearing glass substrate, all begins to carry out next link in the circulation process shown in Figure 5.
In sum, embodiment of the present utility model replaces glass substrate in the operation of device interior by transfer assembly in the operation of device interior, has replaced existing the rotation with roller and has transmitted the transfer mode that glass substrate advances or retreats; Compare with traditional transfer mode, the utility model has reduced the relative motion of glass substrate at device interior, more and more under the market environment of thinning, can greatly avoid the loss (Glass Broken) of glass substrate in production link at current glass substrate.
In addition, embodiment of the present utility model compares traditional transfer mode, can omit a large amount of roller bearings, like this, will greatly simplify on the structure of equipment, and the fault rate of equipment also will reduce greatly, and the care and maintenance cost of equipment also will reduce greatly.
Also need to prove, transfer assembly of the present utility model and conveyer not only are applicable in the equipment of wet etching, also are applicable to clean, peel off etc. in the equipment.
The above is preferred embodiment of the present utility model only, is not be used to limiting protection domain of the present utility model.
Claims (9)
1. a transfer assembly is characterized in that, this assembly comprises: main body rack, delivery roller, transmission cingulum, wherein,
The upper surface of described main body rack is provided with the described delivery roller of loading and unloading glass substrate, and the side of described main body rack is provided with described transmission cingulum.
2. described transfer assembly according to claim 1 is characterized in that, around the zone of the upper surface placing glass substrate of described main body rack, except the position, gangway of glass substrate, is provided with inhibiting device.
3. described transfer assembly according to claim 2, it is characterized in that, the inhibiting device that is positioned at the dual-side on the described glass substrate direction of transfer is side roller, and described side roller limits the position of glass substrate, and the rotation of described side roller provides power for the transmission of glass substrate.
4. each described transfer assembly is characterized in that according to claim 1-3, also comprises the side that is arranged at described main body rack, the cingulum support that supports described transmission cingulum.
5. a conveyer is characterized in that, this device comprises each described transfer assembly of claim 1-4, and the quantity of described transfer assembly is at least one.
6. described conveyer according to claim 5 is characterized in that, the transmission cingulum that this device also is included as in the described transfer assembly provides the gear combination that transmits power.
7. described conveyer according to claim 6 is characterized in that, described gear combination is comprised of at least two gears.
8. described conveyer according to claim 6 is characterized in that, this device also comprises the servomotor by programmable logic controller (PLC) PLC control, and the gear in the described servomotor pinion combination rotates.
9. an equipment is characterized in that, comprises each described conveyer of claim 5-8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220462531.9U CN202828949U (en) | 2012-09-11 | 2012-09-11 | Transfer component and transfer device and equipment with transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220462531.9U CN202828949U (en) | 2012-09-11 | 2012-09-11 | Transfer component and transfer device and equipment with transfer device |
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| Publication Number | Publication Date |
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| CN202828949U true CN202828949U (en) | 2013-03-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220462531.9U Expired - Lifetime CN202828949U (en) | 2012-09-11 | 2012-09-11 | Transfer component and transfer device and equipment with transfer device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103332456A (en) * | 2013-06-25 | 2013-10-02 | 浙江三星新材股份有限公司 | Operation unit of electronic glass carrying vehicle frame |
| CN105712079A (en) * | 2014-12-03 | 2016-06-29 | 北大方正集团有限公司 | Anti-jamming board protection device and circuit board transmission device |
| CN106583408A (en) * | 2016-11-22 | 2017-04-26 | 安徽超越环保科技有限公司 | Automatic stripping equipment for glass of door bodies of waste refrigerators |
| CN106976693A (en) * | 2017-05-10 | 2017-07-25 | 京东方科技集团股份有限公司 | Base plate transfer device, apparatus for transporting substrate and its method for dismounting |
| CN108356640A (en) * | 2018-03-10 | 2018-08-03 | 成都金杉玻璃工艺有限公司 | A kind of feeding device of glass edge-grinding machine |
-
2012
- 2012-09-11 CN CN201220462531.9U patent/CN202828949U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103332456A (en) * | 2013-06-25 | 2013-10-02 | 浙江三星新材股份有限公司 | Operation unit of electronic glass carrying vehicle frame |
| CN105712079A (en) * | 2014-12-03 | 2016-06-29 | 北大方正集团有限公司 | Anti-jamming board protection device and circuit board transmission device |
| CN106583408A (en) * | 2016-11-22 | 2017-04-26 | 安徽超越环保科技有限公司 | Automatic stripping equipment for glass of door bodies of waste refrigerators |
| CN106583408B (en) * | 2016-11-22 | 2019-04-09 | 安徽超越环保科技有限公司 | A kind of waste refrigerator door body glass automatic stripping equipment |
| CN106976693A (en) * | 2017-05-10 | 2017-07-25 | 京东方科技集团股份有限公司 | Base plate transfer device, apparatus for transporting substrate and its method for dismounting |
| CN106976693B (en) * | 2017-05-10 | 2019-01-08 | 京东方科技集团股份有限公司 | Base plate transfer device, apparatus for transporting substrate and its method for dismounting |
| CN108356640A (en) * | 2018-03-10 | 2018-08-03 | 成都金杉玻璃工艺有限公司 | A kind of feeding device of glass edge-grinding machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150625 Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150625 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150625 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE TECHNOLOGY GROUP Co.,Ltd. Patentee after: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 100176 Beijing city in Western Daxing District economic and Technological Development Zone, Road No. 8 Patentee before: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130327 |