CN201946576U - Buffer and temporary storage equipment for substrate - Google Patents
Buffer and temporary storage equipment for substrate Download PDFInfo
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- CN201946576U CN201946576U CN2010206816608U CN201020681660U CN201946576U CN 201946576 U CN201946576 U CN 201946576U CN 2010206816608 U CN2010206816608 U CN 2010206816608U CN 201020681660 U CN201020681660 U CN 201020681660U CN 201946576 U CN201946576 U CN 201946576U
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- supporting
- plate buffering
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Abstract
The embodiment of the utility model discloses buffer and temporary storage equipment for a substrate and relates to the field of liquid crystal displays. A substrate conveyed to an oven unit through a developing unit can be temporarily accommodated when an oven unit in a drying process after the developing unit is in failure so as to prevent the substrate from being corroded by a developing solution due to the long-time stay of the substrate in a developing module of the developing unit, therefore, the rejection of the substrate is effectively reduced. The buffer and temporary storage equipment for the substrates comprises a buffer frame and a lifting device, wherein the buffer frame is located below an outlet module of the developing unit and is used for bearing the substrate; and the lifting device is fixedly connected with the buffer frame and is used for controlling the lift of the buffer frame. The buffer and temporary storage equipment for the substrate is applied to developing equipment used for manufacturing the substrates.
Description
Technical field
The utility model relates to field of liquid crystal, relates in particular to the temporary equipment of a kind of base-plate buffering.
Background technology
Liquid crystal panel is a Presentation Function device main in the LCD, liquid crystal panel structure is generally by color membrane substrates and array base palte box is formed, the centre is filled with liquid crystal, its displaying principle is dielectric anisotropy and the electric anisotropy that utilizes liquid crystal molecule to have, forming counter electrode respectively on the two-layer substrate up and down, thereby produce electric field between two substrates, extra electric field makes the ordered state conversion of liquid crystal molecule, makes liquid crystal film produce various photoelectric effect.
Now, Thin Film Transistor-LCD (Thin Film Transistor-Liquid Crystal Display, be called for short TFT-LCD) in liquid crystal market, occupy leading position, as control switch, control is applied to the difference of the voltage on the pixel capacitors and produces different images by thin-film transistor (TFT) for it.
Photoetching process (Photoetching) is a step very important in the liquid crystal panel manufacturing process, and this technology comprises gluing, exposure and development.In this operation, after the exposure, need develop to substrate, remove photoetching (PR) glue after exposing, to form the photoresist pattern, the developer solution that uses at present is Tetramethylammonium hydroxide (TMAH), and the concentration of TMAH has corrosivity to the photoresist of substrate surface and the TFT rete under the photoresist about 2.43%.Developing cell is made up of inlet module (ENTRANCE), the module (DEV1) of developing, develop two modules (DEV2), development three module (DEV3), recirculated water mold cleaning piece (SUBRINSE), pure water mold cleaning piece (DIW), air knife module (AIR KNIFE) and outlet module (EXIT); Wherein, a develop module (DEV1), two modules (DEV2) of developing, development three module (DEV3) can be referred to as visualization module (DEV).During operate as normal, there are three substrates to carry out technical process simultaneously at the disparate modules of developing cell.
Process equipment after the developing cell is the baking box unit, and its effect is that the substrate after having developed is carried out heating and cooling, to remove residual moisture.The baking box unit is mainly by manipulator, heating plate, and cooler pan is formed, and structure is complicated.If the baking box unit breaks down, the programmable logic controller (PLC) of baking box unit (Programmable Logic Controller is called for short PLC) can feed back to developing cell, no longer receives the substrate that has developed.
The inventor finds to adopt prior art to have following problem at least: if the baking box unit breaks down, quit work, the substrate of the outlet module of developing cell can not transmit to the baking box unit more so, can cause the substrate of other module the insides of developing cell can not continue again transmission forward, can only stop at developing cell, if overstand, developer solution not only can erode the photoresist that does not have exposure, also can corrode the TFT rete below the photoresist, cause the monoblock substrate to be scrapped.
The utility model content
Technical problem to be solved in the utility model is to provide a kind of base-plate buffering to keep in equipment, can be when the baking box cell failure of technology after the developing cell, the temporary transient ccontaining substrate that is sent to the baking box unit by developing cell, avoid substrate to be developed corrosion, thereby effectively reduced scrapping of substrate long-time stop of developing cell.
For solving the problems of the technologies described above, the temporary equipment of the utility model base-plate buffering adopts following technical scheme:
A kind of base-plate buffering is kept in equipment, comprising:
Be positioned at the outlet module below of developing cell, be used for the bumper bracket of bearing substrate;
With described bumper bracket Joint, be used to control the lowering or hoisting gear of the lifting of described bumper bracket.
Described bumper bracket comprises:
The rectangle underframe;
At least four columns lay respectively on four jiaos of the described underframes;
Be arranged on the supporting on the described column.
The quantity of supporting equates on each column, is at least one; A supporting on a supporting on column and other column constitutes of accepting a substrate and accepts layer, and the same supporting of accepting layer is positioned at same horizontal plane.
Has the protection projection on the described supporting.
The material of described protection projection is the material of flexibility and antistatic.
Described lowering or hoisting gear comprises:
With elevating lever described bumper bracket Joint and that guide rail is housed;
Control the motor of described elevating lever along described lifting rail.
Described motor is electrically connected with Programmable Logic Controller.
In the technical scheme of present embodiment, the temporary equipment of base-plate buffering is placed the outlet module below of developing cell, next unit at developing cell, when being the baking box cell failure, rise the temporary equipment of base-plate buffering, the substrate that will be in the outlet module position of developing cell lifts, temporary this substrate, the feasible substrate that is positioned at the visualization module of developing cell can further be sent to the outlet module place, after treating that the baking box cell failure is removed, fall the temporary equipment of base-plate buffering, temporary substrate is relay the outlet module position of getting back to developing cell, so that further be sent to the baking box unit, carry out heating and cooling, avoided since the substrate that the baking box cell failure causes at the visualization module overstand of developing cell, thereby further avoided effectively having reduced the quantity of scrapping of substrate because the substrate that the developer solution corrosion causes is scrapped.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, the accompanying drawing of required use is done to introduce simply in will describing embodiment below, apparently, accompanying drawing in describing below only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of the outlet module in the utility model embodiment developing cell;
Fig. 2 is the structural representation of the temporary equipment of the utility model embodiment base-plate buffering;
Fig. 3 is temporary equipment of the utility model embodiment base-plate buffering and outlet module cooperating schematic diagram one;
Fig. 4 is temporary equipment of the utility model embodiment base-plate buffering and outlet module cooperating schematic diagram two.
Description of reference numerals:
The 1-substrate; The 21-outlet module; The 4-base-plate buffering is kept in equipment;
The 41-bumper bracket; The 42-lowering or hoisting gear; The 411-underframe;
The 412-column; The 413-supporting; 414-protects projection.
Embodiment
The utility model embodiment provides a kind of base-plate buffering to keep in equipment, can be when the baking box cell failure of technology after the developing cell, the temporary transient ccontaining substrate that is sent to the baking box unit by developing cell, avoid substrate to be developed corrosion, thereby effectively reduced scrapping of substrate long-time stop of developing cell.
Below in conjunction with accompanying drawing the temporary equipment of the utility model embodiment base-plate buffering is described in detail.
When operate as normal, there are three substrates to carry out technical process successively at least simultaneously at the disparate modules of developing cell.Fig. 1 is the schematic diagram of the outlet module of developing cell, as shown in Figure 1, through the substrate 1 after the preparation of developing at the outlet module 21 of developing cell to next unit, promptly the baking box unit transmits.If this moment, the baking box unit broke down, outlet module 21 must stop to transmit substrate to the baking box unit, at this moment, the substrate that does not arrive outlet module 21 through developing the preparation back can't further transmit to outlet module 21, can only be retained in other module before the outlet module 21, if overstand, developer solution not only can erode not have the photoresist that exposes, also can corrode the TFT rete below the photoresist, cause the monoblock substrate to be scrapped.
The utility model embodiment provides a kind of base-plate buffering to keep in equipment at the problems referred to above, and as shown in Figure 2, this equipment comprises: be positioned at the outlet module below of developing cell, be used for the bumper bracket 41 of bearing substrate; With described bumper bracket 41 Joints, be used to control the lowering or hoisting gear 42 of the lifting of described bumper bracket 41.The material of the temporary equipment 4 of base-plate buffering is a metal, can be directly installed on ground, and can oscilaltion.
In the technical scheme of present embodiment, the temporary equipment of base-plate buffering is placed the outlet module below of developing cell, next unit at developing cell, when being the baking box cell failure, rise the temporary equipment of base-plate buffering, the substrate that will be in the outlet module position of developing cell lifts, temporary this substrate, the feasible substrate that is positioned at the visualization module of developing cell can further be sent to the outlet module place of developing cell, after treating that the baking box cell failure is removed, fall the temporary equipment of base-plate buffering, temporary substrate is relay the outlet module position of getting back to developing cell, so that further be sent to the baking box unit, carry out heating and cooling, avoided since the substrate that the baking box cell failure causes at the developing cell overstand, thereby further avoided effectively having reduced the quantity of scrapping of substrate because the substrate that the developer solution corrosion causes is scrapped.
Further, described bumper bracket 41 comprises: rectangle underframe 411; At least four columns 412 lay respectively on 411 4 jiaos of the described underframes; Be arranged on the supporting 413 on the described column 412.Need to prove, the situation that column 412 is set on 411 4 jiaos of the underframes that present embodiment provides is only for for example, make four jiaos at substrate fulcrum is arranged, thereby substrate 1 is undertaken on the bumper bracket 41, in actual design, the position of column 412 and quantity can be provided with according to actual needs, for example, at least one column 412 can be set between two columns 412 again, also have supporting 413 on the column of setting up 412, can assist and accept substrate, make accept more stable.
Further, the quantity of supporting 413 equates on each column 412, is at least one; Supporting 413 on column 412 and a supporting 413 on other column 412 constitute of accepting a substrate and accept layer, and the same supporting 413 of accepting layer is positioned at same horizontal plane.The supporting 413 that is positioned at same horizontal plane on 413 of supportings on each column 412 and other column 412 constitutes accepts layer with one deck, have a plurality of supportings 413 on each column 412, thereby this bumper bracket 41 has a plurality of layers of accepting of accepting substrate, the quantity of supporting 413 on each column 412, promptly accept the number of plies of layer and determine, do not limited in the present embodiment according to the temporary number of substrates of concrete needs buffering.
Further, scratch, have protection projection 414 on the described supporting 413 in order to prevent substrate.The material of described protection projection 414 can be for having elasticity, and is flexible and can prevent from the material of static to be preferably nylon or rubber in this example.
Particularly, bumper bracket 41, be positioned at when falling state, whole bumper bracket be positioned at developing cell outlet module 21 under, when bumper bracket 41 rose, column 412 passed the framework of outlet module 21, the supporting 413 that makes one deck or which floor accept layer exceeds the plane that outlet module 21 is accepted substrate 1, thereby with 1 jack-up of the substrate on the outlet module 21, at this moment, substrate 1 buffering is temporarily stored on the temporary equipment of base-plate buffering
Further, described lowering or hoisting gear 42 comprises: with described bumper bracket elevating lever 41 Joints and that guide rail is housed; Control the motor (not shown) of described elevating lever along described lifting rail.
Further, described motor is electrically connected with Programmable Logic Controller.The function of motor and Programmable Logic Controller can be realized that then this system comprises motor, PLC servo module, servo controller and associated connections by servo electrical machinery system.
Below need to cushion temporary three substrates with the temporary equipment of base-plate buffering be example, the technical scheme of present embodiment is described.
When the baking box unit takes place unusual and quits work, the control PLC communication of the control PLC of baking box unit and developing cell, the PLC of the out-of-work feedback information in baking box unit to developing cell, the substrate of the PLC control outlet module of developing cell no longer continues to transmit to the baking box unit, and control developing cell inlet module no longer receives the substrate of preparing to enter developing cell; Simultaneously, the PLC control basal plate of developing cell cushions temporary equipment action, three substrates inside the developing cell is received in the temporary equipment of base-plate buffering successively and keeps in, in order to avoid substrate is developed corrosion.
Need to prove that PLC control distinct device unit action involved in the present invention all is that each unit of driven by motor moves by PLC control motor action.
Detailed process is as follows:
At first, as shown in Figure 3, after substrate 1 arrives the outlet module 21 of developing cell, the transmission of the PLC control outlet module 21 of developing cell stops, and next unit transmits substrate 1 no longer forward, and this moment, the PLC of developing cell can carry out communication with the PLC of baking box unit, judge the baking box location mode, if the baking box unit is normal, the transmission forward of the PLC of developing cell control outlet module 21, substrate 1 can be conveyed into the baking box unit; If baking box unit exception, can not receive substrate 1, the PLC transmission information of baking box unit is given the PLC of developing cell, the PLC of developing cell carries out BUF: at first, the temporary equipment 4 of PLC control basal plate buffering rises, and the supporting that ground floor is accepted layer passes the framework of outlet module 21, the plane that is higher than outlet module 21 bearing substrates, thereby lift and place ground floor to accept on the layer first substrate, at this moment, the outlet module 21 of outlet port unit prepares to receive second substrate.
Next, as shown in Figure 4, after first substrate 1 lifted by the temporary equipment 4 of base-plate buffering, second substrate of PLC control of developing cell imports outlet module 21 into, after second substrate enters outlet module 21 fully, the temporary equipment 4 of PLC control basal plate buffering continues to rise to the second layer and accepts the framework that the supporting of layer also passes outlet module 21, the plane that is higher than outlet module 21 bearing substrates, thereby also lift and place the second layer to accept on the layer second substrate, at this moment, the outlet module 21 of outlet port unit is accepted the 3rd substrate.So far, the substrate of developing cell all enters into the temporary equipment 4 of base-plate buffering and outlet module 21 (one place at outlet module 21 places, keep in for two in addition) in the temporary equipment 4 of base-plate buffering.
After the baking box cell failure is removed, the information that the PLC transmitting apparatus of baking box unit recovers is to the PLC of developing cell, the action of PLC control outlet module, the 3rd substrate is sent to the baking box unit, the temporary equipment of control basal plate buffering descends then, second substrate is placed on the outlet module 21, and control outlet module 21 passes away second substrate, in like manner, first substrate is passed away.So far, the 3rd substrate, second substrate, first substrate are sent out outlet module 21 successively, develop then and recover normal, begin to receive the substrate that developing cell is prepared to enter in the back.
In the technical scheme of present embodiment, the temporary equipment of base-plate buffering is placed the outlet module below of developing cell, next unit at developing cell, be that the baking box unit is when breaking down, rise the temporary equipment of base-plate buffering, the substrate that will be in developing cell outlet module position lifts, temporary substrate, the feasible substrate that is positioned at the visualization module of developing cell can further be sent to the outlet module place of developing cell, and then by the temporary equipment of base-plate buffering substrate is lifted from outlet module that (last piece substrate need not to be lifted, only need be sent to the outlet module place gets final product), after treating that the baking box cell failure is removed, fall the temporary equipment of base-plate buffering, temporary substrate relay get back to developing cell outlet module position, so that further be sent to the baking box unit, carry out heating and cooling, the temporary device structure of this base-plate buffering is simple, only need carry out less improvement to existing equipment can realize, avoided since the substrate that the baking box cell failure causes at the visualization module overstand of developing cell, thereby further avoided effectively having reduced the quantity of scrapping of substrate because the substrate that the developer solution corrosion causes is scrapped.
The above; it only is embodiment of the present utility model; but protection range of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the variation that can expect easily or replacement all should be encompassed within the protection range of the present utility model.Therefore, protection range of the present utility model should be as the criterion with the protection range of described claim.
Claims (7)
1. the temporary equipment of base-plate buffering is characterized in that, comprising:
Be positioned at the outlet module below of developing cell, be used for the bumper bracket of bearing substrate;
With described bumper bracket Joint, be used to control the lowering or hoisting gear of the lifting of described bumper bracket.
2. base-plate buffering according to claim 1 is kept in equipment, it is characterized in that described bumper bracket comprises:
The rectangle underframe;
At least four columns lay respectively on four jiaos of the described underframes;
Be arranged on the supporting on the described column.
3. base-plate buffering according to claim 2 is kept in equipment, it is characterized in that,
The quantity of supporting equates on each column, is at least one; A supporting on a supporting on column and other column constitutes of accepting a substrate and accepts layer, and the same supporting of accepting layer is positioned at same horizontal plane.
4. base-plate buffering according to claim 3 is kept in equipment, it is characterized in that,
Has the protection projection on the described supporting.
5. base-plate buffering according to claim 4 is kept in equipment, it is characterized in that,
The material of described protection projection is the material of flexibility and antistatic.
6. base-plate buffering according to claim 2 is kept in equipment, it is characterized in that,
Described lowering or hoisting gear comprises:
With elevating lever described bumper bracket Joint and that guide rail is housed;
Control the motor of described elevating lever along described lifting rail.
7. base-plate buffering according to claim 6 is kept in equipment, it is characterized in that,
Described motor is electrically connected with Programmable Logic Controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206816608U CN201946576U (en) | 2010-12-24 | 2010-12-24 | Buffer and temporary storage equipment for substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206816608U CN201946576U (en) | 2010-12-24 | 2010-12-24 | Buffer and temporary storage equipment for substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201946576U true CN201946576U (en) | 2011-08-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206816608U Expired - Lifetime CN201946576U (en) | 2010-12-24 | 2010-12-24 | Buffer and temporary storage equipment for substrate |
Country Status (1)
| Country | Link |
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| CN (1) | CN201946576U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108511361A (en) * | 2017-02-24 | 2018-09-07 | 中芯国际集成电路制造(上海)有限公司 | Wafer transfer device and its application process |
-
2010
- 2010-12-24 CN CN2010206816608U patent/CN201946576U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108511361A (en) * | 2017-02-24 | 2018-09-07 | 中芯国际集成电路制造(上海)有限公司 | Wafer transfer device and its application process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150709 Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150709 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150709 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE Technology Group Co., Ltd. Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd. Address before: 100176 Beijing economic and Technological Development Zone, West Central Road, No. 8 Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110824 |