CN202814357U - Indicating value compensation system of two-color differential autocollimator - Google Patents
Indicating value compensation system of two-color differential autocollimator Download PDFInfo
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- CN202814357U CN202814357U CN201220431724.8U CN201220431724U CN202814357U CN 202814357 U CN202814357 U CN 202814357U CN 201220431724 U CN201220431724 U CN 201220431724U CN 202814357 U CN202814357 U CN 202814357U
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Abstract
The utility model relates to the technology field of geometric quantity measuring and testing equipment, and specially discloses an indicating value compensation system of a two-color differential autocollimator. The system comprises a detected reflective mirror, a two-color spectroscope and an autocollimator, wherein the autocollimator and the detected reflective mirror are directly and fixedly provided with the two-color spectroscope, the two-color spectroscope is close to the detected reflective mirror, the autocollimator can emit the mixing light of a light with a wavelength of a and b light with a wavelength of b simultaneously, the two-color spectroscope possesses a high reflectivity to a light and a high transmissivity to b light. According to the utility model, two colors are employed, two kinds of light are respectively reflected and transmitted through the two-color spectroscope, the detected reflective mirror is close to the two-color spectroscope, the indicating value drift to the detected reflective mirror and the two-color spectroscope is the same, thereby the indicating value drift of the autocollimator is effectively reduced after differential process, and simultaneously, indicating value jumping caused by air flow and the equipment itself is well inhibited.
Description
Technical field
The utility model belongs to geometric sense metrology and measurement Instrument technology field, is specifically related to the differential autocollimator indicating value of a kind of bi-coloured light bucking-out system.
Background technology
Autocollimator is most widely used small angle measurement instrument, be used for measuring the small angular displacement of reflective mirror, the drift of its indicating value is caused that by environmental influence and instrument internal reason the heat in the heat of light source for instrument, the electronic component work, drift, the stability that machinery is fixed, the variation of environment temperature all can cause the indicating value drift.Drift Process is slower, although can take many kinds of measures to improve from apparatus structure and environmental baseline, but still be difficult to satisfy the requirement of precision measurement, and measuring error increases, measurement data does not return zero thereby make.
Summary of the invention
The purpose of this utility model is to provide the differential autocollimator indicating value of a kind of bi-coloured light bucking-out system, can carry out auto-compensation to autocollimator, to reduce indicating value drift and the indicating value jerk value of photoelectric auto-collimator.
The technical solution of the utility model is as follows: a kind of double-colored differential autocollimator indicating value bucking-out system, this system comprises tested reflective mirror, bi-color branch light microscopic and autocollimator, wherein, directly be fixed with the bi-color branch light microscopic at autocollimator and tested reflective mirror, and the bi-color branch light microscopic will be near tested reflective mirror, it is the mixed light of the b light of b that autocollimator can penetrate a light and the wavelength that wavelength is a simultaneously, and the bi-color branch light microscopic has high reflectance to a light, and b light is had high thoroughly rate.
The structure that can produce simultaneously a light and b light in the described autocollimator comprises Amici prism 4, a radiant and b radiant, wherein, the b radiant places the Amici prism light splitting surface to the low one side of b light transmission high reflectance, the a radiant places the Amici prism light splitting surface to the low another side of a light reflectivity high-transmission rate, the a radiant is vertical with the b radiant, and on the light path of a radiant and b radiant incident Amici prism, be respectively equipped with a light condenser group and b light condenser group respectively.
The a light that described a light condenser group can be sent a radiant forms directional light; The b light that described b light condenser group can be sent the b radiant forms directional light.
Remarkable result of the present utility model is: in a kind of bi-coloured light differential autocollimator indicating value bucking-out system described in the utility model and the method, the bi-coloured light that can utilize autocollimator to produce, and the bi-color branch light microscopic reflects respectively and transmission two kinds of light, because tested reflective mirror is close with double-colored spectroscopical position, the reason of instrument own, the indicating value drift that the factors such as the reliability that machinery is fixing and variation of ambient temperature cause is identical to two mirrors, therefore can effectively reduce the indicating value drift of autocollimator after the difference, simultaneously to air-flow, the indicating value that the reason of instrument own causes is beated, and has preferably inhibiting effect.
Description of drawings
Fig. 1 is the differential autocollimator indicating value of a kind of bi-coloured light bucking-out system synoptic diagram;
Fig. 2 is bi-coloured light source structure synoptic diagram in the differential autocollimator indicating value of the bi-coloured light bucking-out system among Fig. 1;
Fig. 3 is autocollimator indicating value drift value correlation curve figure after the employing bucking-out system described in the utility model;
Fig. 4 is for adopting bucking-out system autocollimator indicating value jerk value correlation curve figure described in the utility model;
Among the figure: 1, tested reflective mirror; 2, bi-color branch light microscopic; 3, autocollimator; 4, Amici prism; 5, a light condenser group; 6, a radiant; 7, b light condenser group; 8, b radiant; 9, do not adopt the indicating value drift value empirical curve of bucking-out system and method; 10, adopt the indicating value drift value empirical curve of bucking-out system and method; 11, do not adopt the indicating value jerk value empirical curve of bucking-out system and method; 12, adopt the indicating value jerk value empirical curve of bucking-out system and method.
Embodiment
Below in conjunction with drawings and the specific embodiments the utility model is described in further detail.
As shown in Figure 1 and Figure 2, the differential autocollimator indicating value of a kind of bi-coloured light bucking-out system, comprise tested reflective mirror 1, bi-color branch light microscopic 2, autocollimator 3, tested reflective mirror 1 place in as close as possible autocollimator 3 dead aheads, firmly fix a motionless bi-color branch light microscopic 2, wherein, it is that a light of a directly reflects that bi-color branch light microscopic 2 can penetrate wavelength simultaneously to autocollimator 3, and correlation goes out the b light transmission that wavelength is b; The structure that produces simultaneously wavelength and be a and b in autocollimator 3 comprises Amici prism 4, a radiant 6 and b radiant 8, wherein, b radiant 8 emission b light, and behind the b light condenser group 7 formation directional lights through the 8 front placements of b radiant, a face of vertical incidence Amici prism 4, the light splitting surface of Amici prism 4 is to b light transmission height and emissivity is low, and therefore, b light is mainly by Amici prism 4 transmissions; Another vertical plane the place ahead at Amici prism, be provided with successively a light condenser group 7 and a radiant, behind a light process a light condenser assembly 7 that a radiant produces, vertical incidence Amici prism 4, the light splitting surface of Amici prism 4 is to a luminous emissivity height and transmissivity is low, therefore, a light through the reflection of Amici prism 4 light splitting surfaces after, after the b light of process Amici prism 4 light splitting surface transmissions mixes, penetrate from autocollimator 3; A light, behind the b light mixed light process bi-color branch light microscopic 2, overwhelming majority a light directly reflexes to autocollimator 3 via bi-color branch light microscopic 2, behind the overwhelming majority b light transmission bi-color branch light microscopic 2, after tested reflective mirror 1 reflection, transmission is injected autocollimator 3 after crossing bi-color branch light microscopic 2, the different back light of two bundles, through autocollimator 3 object lens formation autocollimation picture separately, be imaged on photo-electric conversion element (CCD) diverse location of autocollimator, because the position of tested reflective mirror 1 and bi-color branch light microscopic 2 is close, the reason of instrument own, the indicating value drift that the factors such as the reliability that machinery is fixing and variation of ambient temperature cause is identical to two mirrors, therefore can effectively reduce the indicating value drift of autocollimator after the difference, simultaneously to air-flow, the indicating value that the reason of instrument own causes is beated, and inhibiting effect is also arranged.
As shown in Figure 3, adopt this bi-coloured light differential autocollimator indicating value bucking-out system and method to the compensation of indicating value drift through 6 hours test after, do not adopt in the empirical curve 9 of indicating value drift of auto-compensation, indicating value drift peak-to-valley value (PV) is 0.31 "; in the empirical curve 10 of the indicating value drift of employing auto-compensation, indicating value drift peak-to-valley value (PV) is 0.13 "; Shown in Figure 4, adopt this bi-coloured light differential autocollimator indicating value bucking-out system and method in the test that reduces the indicating value jerk value, 1000 indicating values of continuous sampling.About 25ms of sampling interval time, the standard deviation of indicating value jerk value be by 0.0863 " be reduced to compensation after 0.0278 " that does not add compensation, and peak-to-valley value (PV) is by 0.7212 " be reduced to compensation after 0.2373 " that does not add compensation.
Claims (3)
1. double-colored differential autocollimator indicating value bucking-out system, it is characterized in that: this system comprises tested reflective mirror (1), bi-color branch light microscopic (2) and autocollimator (3), wherein, directly be fixed with bi-color branch light microscopic (2) at autocollimator (3) and tested reflective mirror (1), and bi-color branch light microscopic (2) will be near tested reflective mirror (1), it is the mixed light of the b light of b that autocollimator (3) can penetrate a light and the wavelength that wavelength is a simultaneously, and bi-color branch light microscopic (2) has high reflectance to a light, and b light is had high thoroughly rate.
2. a kind of double-colored differential autocollimator indicating value bucking-out system according to claim 1, it is characterized in that: the structure that can produce simultaneously a light and b light in the described autocollimator (3) comprises Amici prism 4, a radiant (6) and b radiant (8), wherein, b radiant (8) places Amici prism (4) light splitting surface to the low one side of b light transmission high reflectance, a radiant (6) places Amici prism (4) light splitting surface to the low another side of a light reflectivity high-transmission rate, a radiant (6) is vertical with b radiant (8), and on the light path of a radiant (6) and b radiant (8) incident Amici prism (4), be respectively equipped with a light condenser group (5) and b light condenser group (7) respectively.
3. a kind of double-colored differential autocollimator indicating value bucking-out system according to claim 2 is characterized in that: a light formation directional light that described a light condenser group (5) can be sent a radiant (6); The b light that described b light condenser group (7) can be sent b radiant (8) forms directional light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220431724.8U CN202814357U (en) | 2012-08-28 | 2012-08-28 | Indicating value compensation system of two-color differential autocollimator |
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| CN201220431724.8U CN202814357U (en) | 2012-08-28 | 2012-08-28 | Indicating value compensation system of two-color differential autocollimator |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103630089A (en) * | 2012-08-28 | 2014-03-12 | 北京航天计量测试技术研究所 | Indicating value compensation system and method of double-color differential autocollimator |
| CN109579778A (en) * | 2019-01-11 | 2019-04-05 | 哈尔滨工业大学 | One kind being based on dual wave length spectrophotometry auto-collimation three-dimensional perspective measuring device and method |
-
2012
- 2012-08-28 CN CN201220431724.8U patent/CN202814357U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103630089A (en) * | 2012-08-28 | 2014-03-12 | 北京航天计量测试技术研究所 | Indicating value compensation system and method of double-color differential autocollimator |
| CN103630089B (en) * | 2012-08-28 | 2017-01-25 | 北京航天计量测试技术研究所 | Indicating value compensation system and method of double-color differential autocollimator |
| CN109579778A (en) * | 2019-01-11 | 2019-04-05 | 哈尔滨工业大学 | One kind being based on dual wave length spectrophotometry auto-collimation three-dimensional perspective measuring device and method |
| CN109579778B (en) * | 2019-01-11 | 2021-05-11 | 哈尔滨工业大学 | Device and method for measuring three-dimensional angle based on dual-wavelength light splitting auto-collimation |
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Granted publication date: 20130320 |