CN202808933U - Heating plate for substrate of heterojunction solar battery - Google Patents
Heating plate for substrate of heterojunction solar battery Download PDFInfo
- Publication number
- CN202808933U CN202808933U CN201220302784XU CN201220302784U CN202808933U CN 202808933 U CN202808933 U CN 202808933U CN 201220302784X U CN201220302784X U CN 201220302784XU CN 201220302784 U CN201220302784 U CN 201220302784U CN 202808933 U CN202808933 U CN 202808933U
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- Prior art keywords
- heating
- substrate
- heating plate
- plate
- heating source
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 89
- 239000000758 substrate Substances 0.000 title claims abstract description 44
- 239000010409 thin film Substances 0.000 abstract description 5
- 238000000151 deposition Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 6
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- CVOFKRWYWCSDMA-UHFFFAOYSA-N 2-chloro-n-(2,6-diethylphenyl)-n-(methoxymethyl)acetamide;2,6-dinitro-n,n-dipropyl-4-(trifluoromethyl)aniline Chemical compound CCC1=CC=CC(CC)=C1N(COC)C(=O)CCl.CCCN(CCC)C1=C([N+]([O-])=O)C=C(C(F)(F)F)C=C1[N+]([O-])=O CVOFKRWYWCSDMA-UHFFFAOYSA-N 0.000 description 1
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Surface Heating Bodies (AREA)
Abstract
本实用新型目的一种用于异质结太阳能电池衬底的加热板，包括一加热板，该加热板以阶梯形状被分隔形成三个加热区域；加热源，其被嵌设在三个加热区域中；加热板下方设置一外盖与加热板紧密锁固，电源控制器，其与加热源耦合连接；其中，所述的加热板设置为阶梯形状，不同加热源对应不同辐射热距离，可藉由调整个别的加热功率达到衬底上温度梯度的调整，使衬底中间区域与边缘区域的温度均匀，本实用新型所提供的一种用于异质结太阳能电池衬底的加热板，尤其适用于在大尺寸的衬底上沉积薄膜，在加热过程中提供衬底极好的温度均匀性，使得沉积的薄膜因此具有良好的均匀性。
The purpose of the utility model is a heating plate for heterojunction solar cell substrates, including a heating plate, which is divided into three heating areas in a stepped shape; a heating source, which is embedded in the three heating areas middle; under the heating plate, there is an outer cover tightly locked with the heating plate, and a power controller, which is coupled to the heating source; wherein, the heating plate is set in a stepped shape, and different heating sources correspond to different radiant heat distances, which can be borrowed By adjusting the individual heating power to adjust the temperature gradient on the substrate, the temperature in the middle region and the edge region of the substrate is uniform. The utility model provides a heating plate for heterojunction solar cell substrates, which is especially suitable for For depositing thin films on large-sized substrates, it provides excellent temperature uniformity of the substrate during the heating process, so that the deposited thin films have good uniformity.
Description
Affiliated technical field
The utility model relates to a kind of hot-plate for the heterojunction solar battery substrate, particularly a kind ofly heats for physical vapor deposition sputtering equipment substrate.
Background technology
Pvd equipment (PVD) is a kind of key equipment of making thin-film solar cells.See also Fig. 1, be the diagrammatic cross-section of the PVD equipment of prior art.This PVD equipment comprises a cavity 11, is arranged at the magnetron cathode target utmost point 12 in the cavity 11, and faces the hot-plate 15 that the magnetron cathode target utmost point 12 arranges.During sputtered film, substrate 14 is transmitted device 13 and transmits through heating unit 15 and the magnetron cathode target utmost point 12, and hot-plate 15 is heated to certain temperature with substrate 14, and keeps the temperature of substrate 14.After the sputtering target utmost point sputtered target atom, the substrate 14 that arranges to the opposite splashed, and finishes the deposition of thin film on its surface.
In the thin film sputtering deposition process, the homogeneity of temperature will directly affect the homogeneity of deposit film on the substrate 14.Along with continuous progress and the development of heterojunction solar battery technology, the size of substrate 14 is also increasing.Yet in the prior art, adopt subregion thermal resistance wire mode to heat, because distributing distance, radiant heat energy can't effectively keep certain, therefore in heat-processed, can non-uniform temperature get phenomenon, and owing to the outer edge area radiating rate at substrate 14 is fast than its middle zone, therefore in heat-processed, can cause non-uniform temperature and then the direct homogeneity that affects the film that on substrate 14, deposits of region intermediate and the fringe region of substrate 14.
The utility model content
The utility model main purpose system provides a kind of hot-plate for the heterojunction solar battery substrate, solves the problem of the non-uniform temperature of the region intermediate that can cause substrate in the heat-processed that exists in the prior art and fringe region.
In order to reach above-mentioned utility model purpose, the technical solution of the utility model provides a kind of hot-plate for the heterojunction solar battery substrate, comprises a hot-plate, and this hot-plate is separated to form three heating regions with stairstepping; Heating source, it is embedded in three heating regions; One enclosing cover is set in the hot-plate below and hot-plate closely locks, power-supply controller of electric, and itself and heating source are of coupled connections.
Described three district's heating sources are thermal resistance wire.
Described power-supply controller of electric respectively with each first heating source and, the second heating source and the 3rd heating source be connected.
Further, the utility model heating source all arranges the surface of the different ladders of hot-plate, and wherein second surface is nearest apart from first surface; The 3rd surface distance first surface takes second place; The 4th surface distance first surface farthest, for substrate: it is peripheral that second surface arranges the first heating source heated substrate; The 3rd surface arranges the second heating source heated substrate inner ring; The 4th surface arranges the 3rd heating source heated substrate innermost circle.
Compared with prior art, the utlity model has following advantage:
The utility model hot-plate is set to stairstepping, and the corresponding different radiant heat distances in different heating source can reach by adjustment other heating power the adjustment of thermograde on the substrate, make the temperature of substrate region intermediate and fringe region even.
Further, the utility model is adopting described power-supply controller of electric independently to control respectively first, second and third heating source that is arranged in central authorities, inner ring and the edge heating zone, to carry out heating in various degree, further guaranteed the homogeneity of substrate regional heating.
A kind of hot-plate for the heterojunction solar battery substrate provided by the utility model, be particularly useful for deposit film on large-sized substrate, in heat-processed, provide substrate fabulous temperature homogeneity, so that therefore the film of deposition has good homogeneity.
Description of drawings
Fig. 1 is the utility model PVD cross-sectional view.
Fig. 2 is the utility model hot-plate cross-sectional view.
The primary clustering nomenclature.
11... cavity.
12... the magnetron cathode target utmost point.
13... transport unit.
14... substrate.
15... hot-plate.
20... the 4th surface.
21... hot-plate enclosing cover.
22... heating upper plate.
23... the first heating source.
24... the second heating source.
25... the 3rd heating source.
26... power-supply controller of electric.
27... first surface.
28... second surface.
29... the 3rd surface.
Embodiment
By other features of making convenient simple and direct understanding the present invention and advantage and the effect reached thereof can more manifest, below in conjunction with Fig. 1 Fig. 2, describe embodiment of the present utility model in detail, Xiang Xi Said is bright as follows:
Please read Fig. 1 by Ginseng, be the diagrammatic cross-section of PVD equipment of the present utility model.It comprises: be arranged at the magnetron cathode target utmost point 12 in the cavity 11, and face the hot-plate 15 that the magnetron cathode target utmost point 12 arranges.
See also shown in Figure 2ly, it has shown the cross-sectional view of described hot-plate 15.This hot-plate 15 comprises stepped heating upper plate 22, hot-plate enclosing cover 21, some heating sources and a power-supply controller of electric 26.Wherein, this heating upper plate 22 forms three surfaces with stairstepping, specifically comprises second surface 28, the 3rd surface 29, the 4th surface 20.Described heating source comprises the first heating source 23, the second heating source 24 and the 3rd heating source 25, its respectively one by one correspondence be embedded in above-mentioned stepped surfaces.
In the present embodiment, described the first heating source 23, the second heating source 24 and the 3rd heating source 25 are thermal resistance wire.The material of described heating upper plate 22 is metallic substance, so that the heat of heated the first heating source 23, the second heating source 24 and the 3rd heating source 25 can conduct to described heating upper plate 22.Particularly, the material of described heating upper plate 22 can adopt the alloy aluminium in the present embodiment, and described the first heating source 23, the second heating source 24 and the 3rd heating source 25 are heated to 300-350 degree centigrade usually.
Described power-supply controller of electric 26 is connected with the first heating source 23, the second heating source 24 and the 3rd heating source 25 respectively, it independently controls respectively outer ring, inner ring and the innermost circle that is positioned at the heating upper plate, thereby has different degree of heat so that be positioned at the heating source of different zones.It is general because the radiating rate of outer edge zone may is fast than region intermediate, therefore can control the 3rd heating source 25 has stronger degree of heat compared to the first heating source 23 and the second heating source 24, effective compensation heats upper plate 21 outer edge zone may and the non-uniform temperature of middle section in heat-processed, and then guarantees the temperature homogeneity of whole substrate 14 surperficial different zones.
Further, heating upper plate 22 of the present utility model has the stepped surfaces of different heights, this stepped surfaces difference is corresponding different heating source one by one, by the power-supply controller of electric 26 different heating source of independent control and because the different heights of stepped surfaces respectively, becoming thermograde in various degree to be presented on the first surface 27 that heats upper plate 22, indirectly with in various degree radiant heat source heated substrate 14, make the temperature of substrate region intermediate and fringe region even.
In sum, the utility model is being broken through under the previous technical pattern, really reached the effect of institute's wish enhancement, and also non-be familiar with this skill person institute easily full of beard and, the progressive of its tool, practicality, the aobvious application important document that has met utility model, only the bright system of above-listed Xiang Xi Said is bright for the Ju Ti Said of one of the utility model possible embodiments, this embodiment is not the claim that limits the utility model, and all do not take off From the utility model skill spirit institute for it equivalence implement or change, all should be contained in the claim of this case.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220302784XU CN202808933U (en) | 2012-06-27 | 2012-06-27 | Heating plate for substrate of heterojunction solar battery |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220302784XU CN202808933U (en) | 2012-06-27 | 2012-06-27 | Heating plate for substrate of heterojunction solar battery |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202808933U true CN202808933U (en) | 2013-03-20 |
Family
ID=47867848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220302784XU Expired - Fee Related CN202808933U (en) | 2012-06-27 | 2012-06-27 | Heating plate for substrate of heterojunction solar battery |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202808933U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103710664A (en) * | 2013-12-27 | 2014-04-09 | 江苏宇天港玻新材料有限公司 | Vacuum coating heating device |
| CN103938159A (en) * | 2012-04-27 | 2014-07-23 | 奥昱公司 | Inverted Evaporation Apparatus |
| CN104282611A (en) * | 2013-07-09 | 2015-01-14 | 中微半导体设备(上海)有限公司 | Plasma processing cavity and static chuck thereof |
| CN110994077A (en) * | 2019-12-30 | 2020-04-10 | 福建省汽车工业集团云度新能源汽车股份有限公司 | Uniform temperature heating method for power battery pack and storage medium |
| CN119767870A (en) * | 2025-03-07 | 2025-04-04 | 浙江晶科能源有限公司 | Photovoltaic module manufacturing process |
-
2012
- 2012-06-27 CN CN201220302784XU patent/CN202808933U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103938159A (en) * | 2012-04-27 | 2014-07-23 | 奥昱公司 | Inverted Evaporation Apparatus |
| CN104282611A (en) * | 2013-07-09 | 2015-01-14 | 中微半导体设备(上海)有限公司 | Plasma processing cavity and static chuck thereof |
| CN103710664A (en) * | 2013-12-27 | 2014-04-09 | 江苏宇天港玻新材料有限公司 | Vacuum coating heating device |
| CN110994077A (en) * | 2019-12-30 | 2020-04-10 | 福建省汽车工业集团云度新能源汽车股份有限公司 | Uniform temperature heating method for power battery pack and storage medium |
| CN119767870A (en) * | 2025-03-07 | 2025-04-04 | 浙江晶科能源有限公司 | Photovoltaic module manufacturing process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130320 Termination date: 20150627 |
|
| EXPY | Termination of patent right or utility model |