CN202786420U - 制备热解氮化硼制品用的有多方位进气口的气相沉积炉 - Google Patents
制备热解氮化硼制品用的有多方位进气口的气相沉积炉 Download PDFInfo
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- CN202786420U CN202786420U CN 201220429023 CN201220429023U CN202786420U CN 202786420 U CN202786420 U CN 202786420U CN 201220429023 CN201220429023 CN 201220429023 CN 201220429023 U CN201220429023 U CN 201220429023U CN 202786420 U CN202786420 U CN 202786420U
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CN 201220429023 CN202786420U (zh) | 2012-08-27 | 2012-08-27 | 制备热解氮化硼制品用的有多方位进气口的气相沉积炉 |
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CN 201220429023 CN202786420U (zh) | 2012-08-27 | 2012-08-27 | 制备热解氮化硼制品用的有多方位进气口的气相沉积炉 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190613 Address after: 101101 No. 108 Binhe Road, Tongzhou District, Beijing Co-patentee after: Bo Yu (Chaoyang) semiconductor technology Co., Ltd. Patentee after: Beijing Boyu Semiconductor Process Containers Technology Co., Ltd. Co-patentee after: Bo Yu (Tianjin) semiconductor materials Co., Ltd. Address before: 101101 No. 108 Binhe Road, Tongzhou District, Beijing Patentee before: Beijing Boyu Semiconductor Process Containers Technology Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20200827 |