CN202757891U - Observation system - Google Patents
Observation system Download PDFInfo
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- CN202757891U CN202757891U CN 201220371849 CN201220371849U CN202757891U CN 202757891 U CN202757891 U CN 202757891U CN 201220371849 CN201220371849 CN 201220371849 CN 201220371849 U CN201220371849 U CN 201220371849U CN 202757891 U CN202757891 U CN 202757891U
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Abstract
An observation system is applicable to observing a to-be-observed object and comprises a coaxial lamp source, a linear lamp source, a trans-reflective lens and an observation unit. The coaxial lamp source, the linear lamp source, the trans-reflective lens and the observation unit are arranged on one side of the to-be-observed object. The coaxial lamp source comprises a luminous surface and a first optical axis parallel to a to-be-observed plane of the to-be-observed object. The linear lamp source comprises a second optical axis, and an incidence angle is formed between the second optical axis and a normal of the to-be-observed plane. An included angle of 45 degrees is formed between the trans-reflective lens and the luminous surface, and an opening at the included angle faces the to-be-observed plane. The observation unit faces the to-be-observed object and captures images along a third optical axis, the third optical axis penetrates through the to-be-observed object, and a reflection angle with the size the same with that of the incidence angle is formed between the third optical axis and the normal. Accordingly, when the linear lamp source and the coaxial lamp source are used, the observation unit can observe the to-be-observed object in a bright field.
Description
Technical field
The utility model relates to a kind of recording geometry, particularly relates to a kind of recording geometry with coaxial lights source and linear modulation source.
Background technology
Image detection equipment or optical microscope have a recording geometry, the characteristic of the determinand that this recording geometry can be observed because of the institute wish, and adopt different lighting devices.
As shown in Figure 1, a kind of recording geometry 92 for a determinand 91 of observation comprises a coaxial lights source 93 of a side that is positioned at this determinand 91, anti-lens 95 and an observing unit 96 are worn in linear modulation source 94, one and half.
This coaxial lights source 93 is area source, has a light-emitting area T1 and first an optic axis M1 parallel with a plane T2 to be measured of this determinand 91, and this partly wears anti-lens 95 and this light-emitting area T1 folder 45 degree, and the angle opening is towards this plane T2 to be measured.Consult in the lump Fig. 2, the light that sends in this coaxial lights source 93 is partly worn anti-lens 95 through this first and is reflexed to this determinand 91, and after these determinand 91 reflections again transmission partly wear anti-lens 95 and arrive this observing unit 96 through this.
This linear modulation source 94 has one by the second optic axis M2 of this determinand 91, this second optic axis M2 and the incident angle δ 1 of method wire clamp by this determinand 91 and vertical this plane T2 to be measured.Consult in the lump Fig. 3, the transmission of the light that sends in this linear modulation source 94 elder generation is partly worn anti-lens 95 and is shone this determinand 91 through this, and after these determinand 91 reflections again transmission partly wear anti-lens 95 and arrive this observing unit 96 through this.This observing unit 96 for example is an image capture unit, and it is towards this determinand 91 and along one by this determinand 91 and be parallel to the 3rd optic axis M3 capture of this normal.
Supplementary notes be that this coaxial lights source 93 cooperates this partly to wear anti-lens 95 provides the illumination parallel with the 3rd optic axis M3, can have than other types light source for the shortcoming of sky weldering (missing solder) type and better detect effect.94 in linear modulation source is to carry out general detection.So, the user can emit beam by this coaxial lights source 93 of choice for use or this linear modulation source 94, carries out different observation for this observing unit 96.
Yet, for a long time, (for example Application No. 09/605 in use as the design of above-mentioned recording geometry 92,613 and Taiwan patent publication No. 201024711), when using linear modulation source 94, because the 3rd optic axis M3 of this observing unit 96 and the normal parallel of this plane T2 to be measured, namely angle is zero degree, but the linear modulation source 94 directly direct of travel of the light of reflection is the reflection angle δ 2 of the non-zero identical with one of the method wire clamp of plane T2 to be measured and incident angle δ 1, therefore directly the light of reflection can't enter this observing unit 96, and so that this observing unit 96 can only observe with the dark field of Indirect reflection image formation by rays.
Summary of the invention
Therefore, the purpose of this utility model provides a kind of recording geometry that all can bright-field observation when using coaxial lights source and linear modulation source.
So recording geometry of the present utility model is applicable to observe a determinand, wherein: this recording geometry comprises a coaxial lights source of a side that is positioned at this determinand, anti-lens and an observing unit are worn in linear modulation source, one and half; This coaxial lights source is area source, comprises parallel plane first optic axis to be measured of a light-emitting area and one and this determinand, and emits beam towards this determinand along this first optic axis; This linear modulation source comprises one by the second optic axis of this determinand, this second optic axis and the incident angle of method wire clamp by this determinand and vertical this plane to be measured; This partly wears anti-lens and this light-emitting area folder 45 degree, and the angle opening is towards this plane to be measured; This observing unit is towards this determinand and along the 3rd an optic axis capture, the 3rd optic axis by this determinand and with the big or small identical reflection angle of one of this method wire clamp and this incident angle, the light that sends in this coaxial lights source is partly worn anti-reflection from lens to this determinand through this first, and after this determinand reflection again transmission partly wear anti-lens and arrive this observing unit through this; This linear modulation source emits beam along this second optic axis, and the transmission of this light elder generation is partly worn anti-lens and arrived this determinand through this, and after this determinand reflection again transmission partly wear anti-lens and arrive this observing unit through this.
Preferably, the angle of the 3rd optic axis of this observing unit capture and this normal is less than or equal to 10 degree.
Preferably, also comprise a controller that is electrically connected with this coaxial lights source and this linear modulation source, switch this two lamps source and emit beam.
The beneficial effects of the utility model are: when this linear modulation source of use, the light in this linear modulation source directly reflexes to this observing unit and this observing unit is observed with bright-field.When this coaxial lights source of use, owing to the divergence of the light that is sent by this light-emitting area is higher, thus in its range of exposures, comprising the light of more different angles, so this observing unit also can be observed with bright-field.
Description of drawings
Figure is a system configuration synoptic diagram, shows a kind of recording geometry of prior art;
Fig. 2 is a light path synoptic diagram, shows this coaxial lights source of recording geometry use;
Fig. 3 is a light path synoptic diagram, shows this linear modulation source of recording geometry use;
Fig. 4 is a system configuration synoptic diagram, shows the recording geometry of a preferred embodiment of the utility model;
Fig. 5 is a system block diagrams, shows the coaxial lights source of this embodiment, a linear modulation source and a controller;
Fig. 6 is a light path synoptic diagram, shows that this embodiment uses this coaxial lights source; And
Fig. 7 is a light path synoptic diagram, shows that this embodiment uses this linear modulation source.
Embodiment
For above-mentioned purpose of the present utility model, feature and advantage can be become apparent, below in conjunction with accompanying drawing embodiment of the present utility model is elaborated.At first need to prove, the utility model is not limited to following embodiment, those skilled in the art should understand the utility model from the spirit that following embodiment embodies, and each technical term can be done the most wide in range understanding based on Spirit Essence of the present utility model.Same or analogous member uses the same reference numerals to represent among the figure.
Consult Fig. 4 and Fig. 5, the recording geometry 2 of a preferred embodiment of the utility model, be applicable to observe a determinand 1, and comprise a coaxial lights source 3 of a side that is positioned at this determinand 1, anti-lens 5, an observing unit 6 and a controller 7 are worn in linear modulation source 4, one and half.
This coaxial lights source 3 is area source, comprises the first optic axis L1 that a light-emitting area S1 and one and this determinand 1 one planar S to be measured 2 is parallel, and emits beam along this first optic axis L1.
This linear modulation source 4 comprises one by the second optic axis L2 of this determinand 1, this second optic axis L2 and the incidence angle θ 1 of normal L4 folder by this determinand 1 and vertical this planar S 2 to be measured.
This partly wears anti-lens 5 and this light-emitting area S1 folder 45 degree, and the angle opening is towards this planar S 2 to be measured.
This observing unit 6 is towards this determinand 1 and along the 3rd an optic axis L3 capture.The 3rd optic axis L3 by this determinand 1 and with one on this normal L4 folder and this incidence angle θ 1 big or small identical reflection angle θ 2.
This controller 7 is electrically connected with this coaxial lights source 3 and this linear modulation source 4, switches this two lamps source and emits beam.
Consult in the lump Fig. 6, the light that sends in this coaxial lights source 3 is partly worn anti-lens 5 through this first and is reflexed to this determinand 1, and after this determinand 1 reflection again transmission partly wear anti-lens 5 and arrive this observing unit 6 through this.Owing to the divergence of the light that is sent by this light-emitting area S1 is higher, thus the light of more different angles in its range of exposures, comprised, so this observing unit 6 also can be observed with bright-field.
Consult in the lump Fig. 7, this linear modulation source 4 emits beam along this second optic axis L2, the transmission of this light elder generation is partly worn anti-lens 5 and is arrived this determinand 1 through this, and after this determinand 1 reflection again transmission partly wear anti-lens 5 and arrive this observing unit 6 through this, and this observing unit 6 is observed with bright-field.
When using dark field, owing to mostly only have by the light of planar S 2 diffusions to be measured and enter this observing unit 6, directly the light of reflection does not enter, therefore most of range brightness of planar S 2 to be measured is lower, though and higher being identified of part brightness of the irregular easy diffusion such as defective, but some more smooth heterochromatic defectives, the light of diffusion is originally just less, with the situation of the brightness contrast deficiency of this planar S 2 to be measured under, be difficult to be identified the more unfavorable personnel's of this kind situation detection.When using bright-field, the reflection ray of most of scope of planar S 2 to be measured all enters this observing unit 6 and brightness is higher, except the reflected light of the part of the irregular easy diffusions such as defective is less enter this observing unit 6 and brightness is low easily be identified, more smooth heterochromatic defective is on the higher planar S to be measured 2 of brightness, larger with the brightness contrast of this planar S 2 to be measured, whether relatively easily distinguish and to be conducive to defectiveness personnel and to detect.
Experimental result shows, the 3rd optic axis L3 of observing unit 6 captures and the angle of this normal L4 are advisable with interior with 10 degree, so observing unit 6 can be observed with bright-field, therefore only need the first optic axis L1 in linear modulation source 4 to cooperate 10 degree identical with this normal L4 folder with interior angle, this observing unit 6 all can be observed with bright-field when this coaxial lights source 3 of use and this linear modulation source 4.
In sum, when this linear modulation source 4 of use, the light in this linear modulation source 4 directly reflexes to this observing unit 6 and this observing unit 6 is observed with bright-field.When this coaxial lights source 3 of use, owing to the divergence of the light that is sent by this light-emitting area S1 is higher, so in its range of exposures, comprising the light of more different angles, so this observing unit 6 also can observe with bright-field, so really can reach the purpose of this utility model.
Should be understood that those skilled in the art can make various changes or modifications the utility model after having read above-mentioned instruction content of the present utility model, these equivalent form of values fall within the application's appended claims limited range equally.
Claims (3)
1. a recording geometry is applicable to observe a determinand, it is characterized in that: this recording geometry comprises a coaxial lights source of a side that is positioned at this determinand, anti-lens and an observing unit are worn in linear modulation source, one and half;
This coaxial lights source is area source, comprises parallel plane first optic axis to be measured of a light-emitting area and one and this determinand, and emits beam towards this determinand along this first optic axis;
This linear modulation source comprises one by the second optic axis of this determinand, this second optic axis and the incident angle of method wire clamp by this determinand and vertical this plane to be measured;
This partly wears anti-lens and this light-emitting area folder 45 degree, and the angle opening is towards this plane to be measured;
This observing unit is towards this determinand and along the 3rd an optic axis capture, the 3rd optic axis by this determinand and with the big or small identical reflection angle of one of this method wire clamp and this incident angle, the light that sends in this coaxial lights source is partly worn anti-reflection from lens to this determinand through this first, and after this determinand reflection again transmission partly wear anti-lens and arrive this observing unit through this; This linear modulation source emits beam along this second optic axis, and the transmission of this light elder generation is partly worn anti-lens and arrived this determinand through this, and after this determinand reflection again transmission partly wear anti-lens and arrive this observing unit through this.
2. recording geometry as claimed in claim 1 is characterized in that: the 3rd optic axis of this observing unit capture and the angle of this normal are less than or equal to 10 degree.
3. recording geometry as claimed in claim 1 is characterized in that: also comprise a controller that is electrically connected with this coaxial lights source and this linear modulation source, switch this two lamps source and emit beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220371849 CN202757891U (en) | 2012-07-30 | 2012-07-30 | Observation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220371849 CN202757891U (en) | 2012-07-30 | 2012-07-30 | Observation system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202757891U true CN202757891U (en) | 2013-02-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220371849 Expired - Fee Related CN202757891U (en) | 2012-07-30 | 2012-07-30 | Observation system |
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| Country | Link |
|---|---|
| CN (1) | CN202757891U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114184138A (en) * | 2020-08-24 | 2022-03-15 | 深圳中科飞测科技股份有限公司 | Detection device and detection method |
-
2012
- 2012-07-30 CN CN 201220371849 patent/CN202757891U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114184138A (en) * | 2020-08-24 | 2022-03-15 | 深圳中科飞测科技股份有限公司 | Detection device and detection method |
| CN114184138B (en) * | 2020-08-24 | 2024-06-04 | 深圳中科飞测科技股份有限公司 | Detection device and detection method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130227 Termination date: 20150730 |
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| EXPY | Termination of patent right or utility model |