CN202735677U - 用于激光直写曝光机内层电路板打标的装置 - Google Patents
用于激光直写曝光机内层电路板打标的装置 Download PDFInfo
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- CN202735677U CN202735677U CN 201220271159 CN201220271159U CN202735677U CN 202735677 U CN202735677 U CN 202735677U CN 201220271159 CN201220271159 CN 201220271159 CN 201220271159 U CN201220271159 U CN 201220271159U CN 202735677 U CN202735677 U CN 202735677U
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103324037A (zh) * | 2013-07-04 | 2013-09-25 | 北京京东方光电科技有限公司 | 一种曝光装置及其曝光方法 |
CN103529660A (zh) * | 2013-10-29 | 2014-01-22 | 天津芯硕精密机械有限公司 | 一种多光路曝光设备的内层对位装置 |
CN106896653A (zh) * | 2017-01-24 | 2017-06-27 | 苏州微影激光技术有限公司 | 一种应用于直写曝光机制作内层无孔对位板的方法 |
CN111505916A (zh) * | 2020-05-25 | 2020-08-07 | 江苏迪盛智能科技有限公司 | 激光直接成像设备 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103324037A (zh) * | 2013-07-04 | 2013-09-25 | 北京京东方光电科技有限公司 | 一种曝光装置及其曝光方法 |
CN103324037B (zh) * | 2013-07-04 | 2015-01-07 | 北京京东方光电科技有限公司 | 一种曝光装置及其曝光方法 |
CN103529660A (zh) * | 2013-10-29 | 2014-01-22 | 天津芯硕精密机械有限公司 | 一种多光路曝光设备的内层对位装置 |
CN106896653A (zh) * | 2017-01-24 | 2017-06-27 | 苏州微影激光技术有限公司 | 一种应用于直写曝光机制作内层无孔对位板的方法 |
CN111505916A (zh) * | 2020-05-25 | 2020-08-07 | 江苏迪盛智能科技有限公司 | 激光直接成像设备 |
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