CN202712144U - Substrate conveying apparatus and developing machine - Google Patents
Substrate conveying apparatus and developing machine Download PDFInfo
- Publication number
- CN202712144U CN202712144U CN 201220370792 CN201220370792U CN202712144U CN 202712144 U CN202712144 U CN 202712144U CN 201220370792 CN201220370792 CN 201220370792 CN 201220370792 U CN201220370792 U CN 201220370792U CN 202712144 U CN202712144 U CN 202712144U
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- delivery section
- angle
- delivery
- substrate
- base board
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Abstract
The utility module discloses a substrate conveying apparatus and a developing machine, and aims to solve the problem that the linewidth uniformity of various layers of a color filter film is poor when a substrate passes through the conveying apparatus in a developing area. The substrate conveying apparatus comprises a conveyer belt and a drive unit. The drive unit drives the conveyer belt to convey the substrate. The conveyer belt comprises a first conveying portion used for conveying the substrate, and a second conveying portion connected with one end of the fist conveying portion. The conveying apparatus further comprises an angle control device. The angle control device is connected with the first conveying portion and the second conveying portion. The angle control portion makes the first conveying portion form a set angle with a horizontal plane in a first set direction. The angle control device makes the second conveying portion form a set angle with the horizontal plane in a second set direction. The first set direction is the reverse direction of the second set direction. According to the utility model, the linewidth uniformity of the various layers of the color filter film can be improved.
Description
Technical field
The utility model relates to liquid crystal display manufacturing technology field, relates in particular to a kind of base board delivery device and developing machine.
Background technology
Usually, in the manufacturing process of flat display apparatus, form the process of circuitous pattern at glass substrate, the substrate surface coating photoresist that can comprise the operation of cleaning base plate, cleans at oneself and form the operation of light-sensitive surface, by predetermined pattern the develop operation of (developing) of described light-sensitive surface of exposing.
In the manufacturing process of this display, developing procedure utilizes existing developer liquid supply device to come the coating of substrates developer solution.This developing procedure can adopt to the chamber that fills developer solution and carry out to the mode of substrate spray developing liquid by the mode of substrate or employing injection apparatus.And this developing apparatus comprises for developer liquid supply device from developer solution to chamber that supply with for delivery of the conveying device of substrate.
Wherein existing base board delivery device generally adopts the structure of lopsidedness, as shown in Figure 1, comprise: the first delivery section 11, have the second delivery section 12 of angle of inclination a, the first delivery section among the figure is level when starting working, in the time of on substrate being transported to the second delivery section 12, there being the drive unit that is attached thereto to drive the tilt angle of inclination of an angle a and the second delivery section 12 of the first delivery section and being complementary.
Consider in the processing procedure of mating plate film for the colour of advanced lines substrate, substrate remains the angle of inclination conveying in developing machine, in order to improve developer solution in the flowability of substrate surface, but because the inclination of conveying device is always a direction, therefore caused the generation of the live width uniformity poor of each layer of colored filter film.
As shown in Figures 2 and 3, be the wide uniformity overview of advanced lines substrate layer line in the prior art, the circle diameter represents the size of this regional live width among the figure, and among Fig. 3, R1 ~ R9 is the mean value of each regional live width.
Can find out clearly, the live width uniformity of each layer of colored filter film is relatively poor, and the live width of R1 is less than the live width mean value of R9.
The utility model content
For the above-mentioned problems in the prior art, the utility model provides a kind of base board delivery device and developing machine, solved substrate when passing through the conveyer of development and rinsing area, because developer solution is mobile at substrate, and made the relatively poor problem of live width uniformity of each layer of colored filter film.
For realizing addressing the above problem, the utility model provides a kind of base board delivery device on the one hand, is applied to comprise in the developing apparatus: conveyer belt and drive unit, described drive unit drives conveyer belt and transports substrate, and described conveyer belt comprises: for delivery of the first delivery section of described substrate; Be connected the second delivery section with an end of described the first delivery section; Described conveying device also comprises: angle controller,
Described angle controller is connected with described the first delivery section and described the second delivery section, and described angle controller makes described the first delivery section become the first set angle with horizontal plane at the first direction initialization; And
Described angle controller makes described the second delivery section become the second set angle with horizontal plane at the second direction initialization, and described the first direction initialization and described the second direction initialization are reverse.
Preferably, shown in the front end of first delivery section be provided with a transition part, the end of described second delivery section also is provided with a transition part.
Preferably, described conveyer belt also comprises: the 3rd delivery section, be arranged between described the first delivery section and described the second delivery section, and by regulating the angle of inclination of described the 3rd delivery section, make described substrate be transferred to described the second delivery section by described the first delivery section.
Preferably, described the 3rd delivery section is connected with described angle controller.
Preferably, described the 3rd delivery section is provided with position transducer, when described position transducer detects described substrate and arrives on described the 3rd delivery section, regulate the angle of inclination of described the 3rd delivery section and the angle of inclination of described the first delivery section is complementary by described angle controller, and when described substrate is transitioned on described the 3rd delivery section, further regulates the angle of inclination of described the 3rd delivery section and the angle of inclination of described the second delivery section and be complementary.
Preferably, the size of described set angle is 0 ° ~ 10 °.
Preferably, described the first direction initialization is the direction with the perpendicular direction of described board transport.
Preferably, described the 3rd transport unit is provided with to provide and is inclined upwardly or downward-sloping link.
Preferably, described drive unit is specially or combination in free motor, cylinder and the stepping motor.
The utility model embodiment also provides a kind of developing machine on the other hand, comprising: described base board delivery device.
The utility model embodiment compared with prior art has the following advantages:
The base board delivery device and the developing machine that adopt the utility model embodiment to provide drive conveyer belt by drive unit and transport substrate, and wherein conveyer belt comprises: for delivery of the first delivery section of substrate, be connected the second delivery section with an end of described the first delivery section; Described the first delivery section and the second delivery section all are connected with an angle controller, and this angle controller can make described the first delivery section become the first set angle with horizontal plane at the first direction initialization; And described angle controller makes described the second delivery section become the second set angle with horizontal plane at the second direction initialization, and described the first direction initialization and described the second direction initialization are reverse.By conveyer belt being designed to be inclined upwardly and each delivery section of a downward-sloping set angle, the flow direction of developer solution on substrate can be regulated, be unlikely only to a side flow, and cause the relatively poor phenomenon of live width uniformity of colored filter film, prevented the accumulation of developer solution at substrate surface.
Description of drawings
Fig. 1 is developing machine base board delivery device structural representation in the prior art;
Fig. 2 is the wide uniformity presentation graphs of advanced lines substrate CF layer line in the prior art;
Fig. 3 is the curve chart of corresponding diagram 2;
Fig. 4 is the utility model specific embodiment one base board delivery device structural representation;
Fig. 5 is the utility model specific embodiment two base board delivery device structural representations;
Fig. 6 is the wide uniformity presentation graphs of the utility model conveying substrate CF layer line;
Fig. 7 is the curve chart of corresponding diagram 6.
Embodiment
The utility model provides a kind of base board delivery device and developing machine, has solved substrate when passing through the conveyer of development and rinsing area, because developer solution is mobile at substrate, and makes the relatively poor problem of live width uniformity of each layer of colored filter film.
With Figure of description the technical solution of the utility model is described in detail in conjunction with specific embodiments:
As shown in Figure 4, structural representation for the utility model embodiment one base board delivery device, be applied in the developing apparatus, base board delivery device has drive unit and conveyer belt to consist of, and described drive unit is specially or combination in free motor, cylinder and the stepping motor.Wherein conveyer belt comprises: for delivery of the first delivery section 41 of described substrate; Be connected the second delivery section 42 with an end of the first delivery section 41; The position of the second delivery section 42 and the first delivery section 41 can exchange, but adopts generally speaking the second delivery section 42 and first delivery section 41 of equal number, in order to control flowing of developer solution.This base board delivery device also comprises angle controller, and described angle controller is connected with the first delivery section 41 and the second delivery section 42, and described angle controller makes the first delivery section 41 become set angle with horizontal plane at the first direction initialization; Wherein direction initialization is for downward or upward, that is: be inclined upwardly a set angle or a downward-sloping set angle of the first delivery section, corresponding, with the inclination of the second delivery section of a being attached thereto set angle downward or upward, namely described the first direction initialization and the second direction initialization oppositely arrange.The set angle that becomes is generally greater than 0 degree spends less than 10, and more excellent, general set angle adopts 4 ~ 6 degree.
When the beginning conveying substrate, the front end of first delivery section is provided with a transition part 43, substrate is transported in the process of the first delivery section 41, also need to regulate the angle of inclination by angle controller, the set angle a that tilts with the first delivery section 41 is complementary, thereby substrate is transported on the first delivery section 41 by transition part 43.
When substrate is transported to the second delivery section 42 terminal, end in the second delivery section 42 also is provided with a transition part 43, when substrate is transported on the transition part 43 by the second delivery section 42, transition part 43 is regulated the angle of inclination by angle controller, the set angle a that tilts with the second delivery section 42 is complementary, thereby substrate is transported on the transition part 43 by the second delivery section 42.Certainly the utility model also is not limited to and just only has first delivery section and the second delivery section, can be the alternate combinations of a plurality of delivery section, therefore transition part is arranged at the front end of whole conveyer belt with terminal.
As shown in Figure 5, structural representation for the utility model embodiment two, base board delivery device is except the first delivery section 41, the second delivery section 42 and the transition part 43 that comprise among Fig. 4, described conveyer belt also comprises: the 3rd delivery section 44, be arranged between the first delivery section 41 and the second delivery section 42, by regulating the angle of inclination of the 3rd delivery section 44, make described substrate be transferred to described the second delivery section 42 by described the first delivery section 41.
The 3rd delivery section 44 is connected with described angle controller, and by its angle of inclination of described angle controller control adjustment, be provided with position transducer in the 3rd delivery section 44, when described position transducer detects described substrate and arrives on the 3rd delivery section 44, regulate the angle of inclination of the 3rd delivery section 44 and the angle of inclination of the first delivery section 41 is complementary by described angle controller, and when described substrate is transitioned on the 3rd delivery section 44, and when carrying to the second delivery section 42, further regulate the angle of inclination of the 3rd delivery section 44 and the angle of inclination of the second delivery section 42 and be complementary.Be provided with to provide in the 3rd transport unit and be inclined upwardly or downward-sloping link, be complementary so that regulate the angle of inclination of the 3rd delivery section 44 and the first delivery section 41 and the second delivery section 42.
Such as Figure 6 and Figure 7, be the wide uniformity presentation graphs of the utility model conveying substrate CF layer line and corresponding curve chart, circle diameter among the figure represents the size of regional live width, wherein R1 ~ R9 has represented respectively the mean value of the live width in every line zone, as can be seen from Figure 6, because the mobile of developer solution of the substrate of carrying at substrate conveyer belt of the present utility model has to both direction, therefore phenomenon amesiality in the prior art can not appear, and the uniformity of live width is fine in the utility model, simultaneously in Fig. 7 corresponding description the curve chart of live width, by connecting a situation about putting, R1 ~ the R9's of the mean value that can find out the live width that has represented respectively every line zone clearly is big or small identical, namely shown the utility model base board delivery device, improve the live width uniformity of each layer of colored filter film, and effectively improved the quality of display.
The utility model had both realized that developer solution flowed at substrate surface, and avoid the accumulation of developer solution, guaranteed simultaneously the new developer solution of substrate upper and lower side zone contact around, avoid the excessive or too small problem of live width of substrate upper and lower side zone each layer of CF, improved the wide uniformity of each layer line of CF.
Although described preferred embodiment of the present utility model, in a single day those skilled in the art get the basic creative concept of cicada, then can make other change and modification to these embodiment.So claims are intended to all changes and the modification that are interpreted as comprising preferred embodiment and fall into the utility model scope.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (10)
1. base board delivery device is applied to comprise in the developing apparatus: conveyer belt and drive unit, and described drive unit drives conveyer belt and transports substrate, it is characterized in that, and described conveyer belt comprises: for delivery of the first delivery section of described substrate; Be connected the second delivery section with an end of described the first delivery section; Described conveying device also comprises: angle controller,
Described angle controller is connected with described the first delivery section and described the second delivery section, and described angle controller makes described the first delivery section become set angle with horizontal plane at the first direction initialization; And
Described angle controller makes described the second delivery section become described set angle with horizontal plane at the second direction initialization, and described the first direction initialization and described the second direction initialization are reverse.
2. base board delivery device as claimed in claim 1 is characterized in that, shown in the front end of first delivery section be provided with a transition part, the end of described second delivery section also is provided with a transition part.
3. base board delivery device as claimed in claim 1, it is characterized in that, described conveyer belt also comprises: the 3rd delivery section, be arranged between described the first delivery section and described the second delivery section, by regulating the angle of inclination of described the 3rd delivery section, make described substrate be transferred to described the second delivery section by described the first delivery section.
4. base board delivery device as claimed in claim 3 is characterized in that, described the 3rd delivery section is connected with described angle controller.
5. base board delivery device as claimed in claim 4, it is characterized in that, described the 3rd delivery section is provided with position transducer, when described position transducer detects described substrate and arrives on described the 3rd delivery section, regulate the angle of inclination of described the 3rd delivery section and the angle of inclination of described the first delivery section is complementary by described angle controller, and when described substrate is transitioned on described the 3rd delivery section, further regulates the angle of inclination of described the 3rd delivery section and the angle of inclination of described the second delivery section and be complementary.
6. base board delivery device as claimed in claim 1 is characterized in that, the size of described set angle is 0 ° ~ 10 °.
7. base board delivery device as claimed in claim 1 is characterized in that, described the first direction initialization is the direction with the perpendicular direction of described board transport.
8. base board delivery device as claimed in claim 5 is characterized in that, described the 3rd transport unit is provided with to provide and is inclined upwardly or downward-sloping link.
9. base board delivery device as claimed in claim 1 is characterized in that, described drive unit is specially or combination in free motor, cylinder and the stepping motor.
10. a developing machine is characterized in that, comprising: such as the arbitrary described base board delivery device of claim 1 ~ 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220370792 CN202712144U (en) | 2012-07-27 | 2012-07-27 | Substrate conveying apparatus and developing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220370792 CN202712144U (en) | 2012-07-27 | 2012-07-27 | Substrate conveying apparatus and developing machine |
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| Publication Number | Publication Date |
|---|---|
| CN202712144U true CN202712144U (en) | 2013-01-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220370792 Expired - Lifetime CN202712144U (en) | 2012-07-27 | 2012-07-27 | Substrate conveying apparatus and developing machine |
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| CN (1) | CN202712144U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103207543A (en) * | 2013-04-19 | 2013-07-17 | 京东方科技集团股份有限公司 | Developing method |
| CN104076622A (en) * | 2014-06-16 | 2014-10-01 | 京东方科技集团股份有限公司 | Developing unit |
| WO2014205889A1 (en) * | 2013-06-25 | 2014-12-31 | 京东方科技集团股份有限公司 | Developing device and developing method |
-
2012
- 2012-07-27 CN CN 201220370792 patent/CN202712144U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103207543A (en) * | 2013-04-19 | 2013-07-17 | 京东方科技集团股份有限公司 | Developing method |
| WO2014169614A1 (en) * | 2013-04-19 | 2014-10-23 | 京东方科技集团股份有限公司 | Developing method |
| WO2014205889A1 (en) * | 2013-06-25 | 2014-12-31 | 京东方科技集团股份有限公司 | Developing device and developing method |
| US9581939B2 (en) | 2013-06-25 | 2017-02-28 | Boe Technology Group Co., Ltd. | Developing device and developing method |
| CN104076622A (en) * | 2014-06-16 | 2014-10-01 | 京东方科技集团股份有限公司 | Developing unit |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130130 |
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| CX01 | Expiry of patent term |