CN202178242U - Substrate carrying device - Google Patents
Substrate carrying device Download PDFInfo
- Publication number
- CN202178242U CN202178242U CN 201120304987 CN201120304987U CN202178242U CN 202178242 U CN202178242 U CN 202178242U CN 201120304987 CN201120304987 CN 201120304987 CN 201120304987 U CN201120304987 U CN 201120304987U CN 202178242 U CN202178242 U CN 202178242U
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- China
- Prior art keywords
- chamber
- glass substrate
- adjuster
- transfer apparatus
- substrate transfer
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Abstract
The utility model refers to the technical field of LED (Liquid Crystal Display) production technology, especially to a substrate carrying device which comprises at least one chamber used for placing and delivering substrates and successively arranged according to processes and a regulator used for adjusting oblique directions of the at least chamber; at least one chamber possesses the regulator used for adjusting oblique directions of the chamber. According to the utility model, the chamber is provided with the regulator which can effectively adjust oblique directions of the glass substrate in processes, make soup on the glass substrate be uniformly distributed on the surface of the glass substrate, promote process effects of the glass substrate and raise the final product yield.
Description
Technical field
The utility model relates to production of liquid crystal displays technology field, particularly a kind of substrate transfer apparatus.
Background technology
TFT-LCD (Thin Film Transistor-Liquid Crystal Display; TFT-LCD) in the production technology, wet carves, clean, peel off and wet processing such as development in usually employing glass substrate be set carry with certain angular way that tilts.To glass substrate wet quarter, clean, peel off and wet processing such as development is all accomplished in chamber, after chamber is accomplished corresponding wet processing and handled glass substrate, it is transported to proceeds corresponding working procedures in another chamber and handle.In the glass substrate motion; The soup that is positioned at its top constantly is sprayed onto on the surface of glass substrate, therefore, glass substrate is in heeling condition transmits; Help soup flowing at glass baseplate surface; Make the processing time of glass substrate shorten, the consumption of soup and water is dropped to minimum, and help the eliminating of foreign matter.Simultaneously, tilt to place glass substrate, also help to accelerate soup and the replacing velocity of water on glass substrate, shortened the circulation timei of liquid in the whole technology, increased the service efficiency of liquid, and then accelerated the processing speed of wet processing.
But because the effect of gravity; The soup and the water that are on the glass substrate that is tilted in a direction all flow to the lower end of glass substrate, make that the liquid of this end is more, and existence accumulates; The soup that a termination that makes glass substrate be positioned at eminence is like this received compares comparatively fresh; Leave a large amount of soups that reaction took place on the glass substrate of bottom and be positioned at, make glass substrate suffered soup in wet processing handle skewness, cause causing final products defective products to occur
The utility model content
The technical problem that (one) will solve
The technical problem that the utility model will solve provides a kind of substrate transfer apparatus; Existingly fixedly tend to a direction because of glass substrate transportation cavity to overcome always; And cause the soup skewness that acts on the glass substrate, cause glass substrate suffered treatment process in wet processing inhomogeneous and then influence the defective that bad phenomenon appears in final products.
(2) technical scheme
In order to address the above problem, the utility model provides a kind of substrate transfer apparatus, comprising:
At least one chamber, said chamber are used for placing and transferring substrates, and said chamber is arranged by operation successively;
Adjuster, it is used to regulate the incline direction of said chamber;
At least one said chamber has the said adjuster of regulating its incline direction.
Further, when the quantity of said chamber is three or three when above, at least one is positioned on the cavity at non-two ends installs said adjuster.
Further, the incline direction of two chambers adjacent with the chamber that adjuster is installed is opposite, and the initial tilt direction that the adjuster chamber is installed is consistent with the incline direction of its previous chamber.
Further, said adjuster comprises two elevating levers, and said elevating lever is driven by drive unit and moves up and down;
The top of said two elevating levers be fixedly connected on respectively the two ends of the chamber that will install.
Further, said adjuster comprises a support and a rotating shaft, the upper end of said support be fixed on the bottom of the chamber that will install, the lower end of said support is installed in the said rotating shaft, said rotating shaft is by the drive unit driven in rotation.
Further, said adjuster comprises an elevating lever, swivel bearing axle and pillar,
Said elevating lever and pillar lay respectively at the two ends of the chamber that will install, said elevating lever is driven by drive unit and moves up and down, its top is fixedly connected on an end of the chamber of installing;
Said swivel bearing axle is fixed in the middle part of the chamber of installing.
Further, the plane at said pillar place is lower than the plane at said swivel bearing axle place.
Further, the angle of said chamber inclination is less than or equal to 10 °.
(3) beneficial effect
The substrate transfer apparatus that the utility model provides; Through adjuster is set on cavity; Can effectively adjust the incline direction that is in the glass substrate under the state of the art; The feasible soup that acts on the glass substrate can be evenly distributed in the surface of glass substrate, promotes the technological effect of glass substrate, improves the yields of final products.
Description of drawings
Fig. 1 is the utility model embodiment one substrate transfer apparatus structural representation;
Fig. 2 a-2b is that the utility model embodiment substrate transfer apparatus is through adjuster adjustment state sketch map;
Fig. 3 is the utility model embodiment two substrate transfer apparatus application state sketch mapes;
Fig. 4 is the utility model embodiment three substrate transfer apparatus structural representations;
Fig. 5 is the utility model embodiment three another sketch mapes of substrate transfer apparatus structure.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the embodiment of the utility model is described in further detail.Following examples are used to explain the utility model, but are not used for limiting the scope of the utility model.
As shown in Figure 1, the utility model embodiment provides a kind of substrate transfer apparatus, and it comprises at least one chamber 1 and adjuster 2.Chamber 1 is used for placing and transferring substrates, and each chamber is by the operation adjuster 2 of arranging successively, and adjuster 2 is used to regulate the incline direction of chamber 1; At least one chamber 1 has the adjuster 2 of regulating its incline direction.The concrete quantity of this chamber 1 can be decided according to the actual process operational requirements.Under the effect of adjuster 2, the angle that chamber 1 tilts is less than or equal to 10 °, is convenient to soup and carries out shuttling movement fast and effectively on the surface of glass substrate.
More excellent ground, when the quantity of chamber is three or three when above, at least one is positioned at install adjustment device 2 on the cavity 1 at non-two ends.In order to reduce the adjustment number of times of adjuster 2, the initial tilt direction of chamber 1 that adjuster 2 is installed is consistent with the incline direction of its previous chamber 1, can receive the glass substrate that from previous chamber 1, transmits smoothly like this.The incline direction that two chambers 1 adjacent with the chamber that adjuster 2 is installed 1 are set is opposite; Chamber 1 through changing incline direction after adjuster 2 effects can successfully transfer to glass substrate in the next chamber; Can guarantee that like this adjuster 2 is through a lift action; Can make the conversion of the glass substrate run-off the straight direction in the chamber 1, and then make soup can comparatively be evenly distributed in its surface, optimize the treatment effect of glass substrate in wet processing; And can farthest improve process efficiency, practice thrift the activity duration.
Lift action through adjuster 2; Can effectively control the incline direction of chamber, and then change the incline direction of glass substrate, be convenient to soup and carry out shuttling movement fast and effectively on the surface of glass substrate; Guarantee that the soup that is positioned at glass baseplate surface can be evenly distributed on its surface; Make glass substrate in wet processing, can access uniformly and effectively and handle, promote the technological effect of glass substrate, improve the yields of final products.
The quantity of the utility model embodiment middle chamber is three, is specially first cavity 11, second cavity 12 and the 3rd cavity 13, and glass substrate carries out the wet processing of different step in these three cavitys handles.The in the opposite direction of first cavity 11 and 13 horizontal tilts of the 3rd cavity is set, and even first cavity 11 tilts to the lower right, and then the 3rd cavity 13 tilts to the lower left.This adjuster 2 is installed on second cavity 12, and the initial tilt direction of second cavity 12 is consistent with the incline direction of first cavity 11, so that receive the glass substrate that from first cavity 11, spreads out of.
Shown in figure 2a, Fig. 2 b; When glass substrate enters into second cavity 12 fully; And carry out etching to a half at this second chamber 12,, can this second chamber 12 tilted to be transformed into to the lower left to the lower right by original through driving the adjustable height of elevating lever 21; Glass substrate is also along with being tilted to be transformed into to the lower left to the lower right by original; And then make and to act on soup on the glass substrate is done once reciprocating on the surface of glass substrate shuttling movement, make soup can be evenly distributed on this glass substrate through this shuttling movement, make glass substrate in wet processing, can be handled equably.After treating in this second chamber 12, to accomplish cleaning or etching technics, this glass substrate is spread out of to the 3rd chamber 13.Because then the 3rd cavity 13 tilts to the lower left, also convert to the lower left through these adjuster 2 adjusted second chambers 12, therefore, glass substrate can successfully import in the 3rd chamber 13.After glass substrate transferred to the 3rd chamber 13, this adjuster 2 was adjusted back initial conditions with second cavity 12, made the incline direction of second cavity 12 continue to be consistent with first cavity 11, was convenient to continue to receive next glass substrate.
As shown in Figure 3; The difference of present embodiment and embodiment 1 is that this adjuster 2 comprises a support 22 and a rotating shaft 23, and the upper end of support 22 is fixed on the bottom of second chamber 12; The lower end of support 22 is installed in the rotating shaft 23, and rotating shaft 23 is by drive unit (figure does not show) driven in rotation.The rotary power that passes over through drive unit drives rotating shaft 23 and rotates, and drives support 22 and in rotating shaft 23, is in different angles, and then regulate the corner of support 22, and the incline direction of second chamber 12 is changed.
Embodiment 3
Like Fig. 4, shown in Figure 5, the above-mentioned difference of present embodiment and embodiment is that this adjuster 2 comprises elevating lever 24, swivel bearing axle 25 and pillar 26.Wherein, elevating lever 24 and pillar 26 lay respectively at the two ends of second chamber 12, and elevating lever 24 is driven by drive unit (figure does not show) and moves up and down, and its top is fixedly connected on an end of second chamber 12; Swivel bearing axle 25 is fixed in the middle part of second chamber 12.The plane at pillar 26 places is lower than the plane at swivel bearing axle 25 places.When elevating lever 24 was in elongation state, then the center of gravity of second chamber 12 was supported by pillar 26, and this moment, second chamber 2 was in a direction inclination.When elevating lever 24 was in the pulling-down state, then the center of gravity of this second chamber 12 was supported by elevating lever 24, and this moment, second chamber 12 was in previous direction in the opposite direction.
Through regulating the height of elevating lever 21, make an end of second chamber 12 be in different height, and then make the incline direction of this chamber change.
Buy and execute example 4
The difference that present embodiment and the foregoing description exist is: according to practical operation situation and test needs; Also can be at each cavity bottom install adjustment device; Promptly at the equal install adjustment device 2 in bottom of first cavity 11, second cavity 12 and the 3rd cavity 13; In order to receive smoothly glass substrate, the incline direction of this first cavity 11, second cavity 12 and the 3rd cavity 13 should be consistent, and first cavity 11, second cavity 12 and the 3rd cavity 13 for example is set all tilts to the lower right.Deserve glass substrate when first chamber 11 carries out the wet processing processing; Can pass through the adjustment of 2 pairs of cavity 1 incline directions of adjuster any time in treatment progress, to the conversion of an incline direction of glass substrate completion, promptly by tilting to convert to the lower left to the lower right; When treating that glass substrate is accomplished corresponding wet processing in this chamber; Through adjuster 2, convert glass substrate to initial incline direction once more, and then glass substrate is transferred to second chamber smoothly once more.In like manner; All can adopt identical transfer principle glass substrate to be carried out the change of incline direction in second chamber 12 and the 3rd chamber 13; And then make the soup that acts on glass baseplate surface to be evenly distributed on more fully on the glass substrate, make glass substrate in any step of wet processing, can both obtain PROCESS FOR TREATMENT preferably.
In addition, according to the actual requirements,, also can make each chamber be in level and transmit and satisfy the placement demand of different process glass substrate through the height of adjustment adjuster.
Adjuster among the utility model embodiment except the structure of foregoing description, can also for make arbitrarily chamber can the run-off the straight direction existing product of conversion.
The substrate transfer apparatus that the utility model provides; Through adjuster is set on cavity; Can effectively adjust the incline direction that is in the glass substrate under the state of the art; The feasible soup that acts on the glass substrate can be evenly distributed in the surface of glass substrate, promotes the technological effect of glass substrate, improves the yields of final products.
Above execution mode only is used to explain the utility model; And be not the restriction to the utility model; The those of ordinary skill in relevant technologies field under the situation of spirit that does not break away from the utility model and scope, can also be made various variations and modification; Therefore all technical schemes that are equal to also belong to the category of the utility model, and the scope of patent protection of the utility model should be defined by the claims.
Claims (8)
1. a substrate transfer apparatus is characterized in that, comprising:
At least one chamber, said chamber are used for placing and transferring substrates, and said chamber is arranged by operation successively;
Adjuster, it is used to regulate the incline direction of said chamber;
At least one said chamber has the said adjuster of regulating its incline direction.
2. substrate transfer apparatus as claimed in claim 1 is characterized in that, when the quantity of said chamber is three or three when above, at least one is positioned on the cavity at non-two ends installs said adjuster.
3. substrate transfer apparatus as claimed in claim 2 is characterized in that, the incline direction of two chambers adjacent with the chamber that adjuster is installed is opposite, and the initial tilt direction that the adjuster chamber is installed is consistent with the incline direction of its previous chamber.
4. like each described substrate transfer apparatus of claim 1-3, it is characterized in that said adjuster comprises two elevating levers, said elevating lever is driven by drive unit and moves up and down;
The top of said two elevating levers be fixedly connected on respectively the two ends of the chamber that will install.
5. like each described substrate transfer apparatus of claim 1-3; It is characterized in that; Said adjuster comprises a support and a rotating shaft; The upper end of said support be fixed on the bottom of the chamber that will install, the lower end of said support is installed in the said rotating shaft, said rotating shaft is by the drive unit driven in rotation.
6. like each described substrate transfer apparatus of claim 1-3, it is characterized in that said adjuster comprises an elevating lever, swivel bearing axle and pillar,
Said elevating lever and pillar lay respectively at the two ends of the chamber that will install, said elevating lever is driven by drive unit and moves up and down, its top is fixedly connected on an end of the chamber of installing;
Said swivel bearing axle is fixed in the middle part of the chamber of installing.
7. substrate transfer apparatus as claimed in claim 6 is characterized in that, the plane at said pillar place is lower than the plane at said swivel bearing axle place.
8. substrate transfer apparatus as claimed in claim 1 is characterized in that, the angle that said chamber tilts is less than or equal to 10 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120304987 CN202178242U (en) | 2011-08-19 | 2011-08-19 | Substrate carrying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120304987 CN202178242U (en) | 2011-08-19 | 2011-08-19 | Substrate carrying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202178242U true CN202178242U (en) | 2012-03-28 |
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ID=45868110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120304987 Expired - Lifetime CN202178242U (en) | 2011-08-19 | 2011-08-19 | Substrate carrying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202178242U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104409397A (en) * | 2014-11-28 | 2015-03-11 | 昆山国显光电有限公司 | Wet etching device |
| CN105109828A (en) * | 2015-07-27 | 2015-12-02 | 深圳市华星光电技术有限公司 | Packing box for liquid crystal panel |
-
2011
- 2011-08-19 CN CN 201120304987 patent/CN202178242U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104409397A (en) * | 2014-11-28 | 2015-03-11 | 昆山国显光电有限公司 | Wet etching device |
| CN104409397B (en) * | 2014-11-28 | 2017-06-16 | 昆山国显光电有限公司 | Wet-method etching device |
| CN105109828A (en) * | 2015-07-27 | 2015-12-02 | 深圳市华星光电技术有限公司 | Packing box for liquid crystal panel |
| CN105109828B (en) * | 2015-07-27 | 2018-03-09 | 深圳市华星光电技术有限公司 | Liquid crystal faceplate packing box |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120328 |
|
| CX01 | Expiry of patent term |