CN202711096U - Tubular PECVD temperature control system - Google Patents
Tubular PECVD temperature control system Download PDFInfo
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- CN202711096U CN202711096U CN 201220406319 CN201220406319U CN202711096U CN 202711096 U CN202711096 U CN 202711096U CN 201220406319 CN201220406319 CN 201220406319 CN 201220406319 U CN201220406319 U CN 201220406319U CN 202711096 U CN202711096 U CN 202711096U
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Abstract
The utility model relates to a tubular PECVD temperature control system which includes a main controller, a temperature controller, a silicon controlled rectifier trigger board, a silicon controlled rectifier, a transformer and multiple pairs of thermocouples. The signal output terminals of the thermocouples are connected with the signal input terminal of the temperature controller. The control signal output terminal of the temperature controller is connected with the control signal input terminal of the silicon controlled rectifier trigger board. The output terminal of the silicon controlled rectifier trigger board is connected with the control signal input terminal of the silicon controlled rectifier. The output terminal of the silicon controlled rectifier is connected with a heating resistance wire in a furnace tube via the transformer. The main controller is connected with the temperature controller. The tubular PECVD temperature control system can solve the problem that the conventional temperature control pursues the temperature balance in the entire process, and because of the characteristics of the furnace body and the environment differences caused by the furnace door opening and closing, the phenomenon that the temperature rise at the beginning is slow and the later temperature rise is rapid occurs. The tubular PECVD temperature control system avoids the temperature of the auxiliary technology, mainly controls the temperature in the film plating process, so the technology requirements are satisfied.
Description
Technical field
The utility model design photovoltaic field relates in particular to a kind of tubular type PECVD temperature control system.
Background technology
PECVD is Plasma-enhanced chemical vapor deposition, helps to improve the solar battery sheet transformation efficiency.
Tubular type PECVD know-why is to utilize low temperature plasma to make energy source, silicon chip places on the negative electrode of glow discharge under the infrabar, utilize glow discharge to make sample be warmed up to predetermined temperature, then pass into an amount of reacting gas, gas forms solid film through series of chemical and plasma reaction at silicon chip surface.
Depositing temperature has larger impact to thickness and the homogeneity of deposited film, be to determine whether one of successful important parameter of plated film, and there is following difficult point in present control to temperature in the coating process:
1, the resistance furnace hysteresis quality is large, heats up slow, and overtemperature is large;
2, external environment comes and go, and the temperature field is not easy control.
Summary of the invention
The utility model solves the problem that traditional temperature controller programming rate is slow, overtemperature is large mainly for the large mode that problem is heated in advance by adopting, segmentation is controlled of the temperature control difficulty of tubular type PECVD in the coating process process.
The utility model is realized by following technical method: a kind of tubular type PECVD temperature control system, described temperature control system comprises: master controller, temperature controller, the controllable silicon trigger board, controllable silicon, transformer, many to thermopair, described every pair of thermopair is divided into interior thermopair and outer thermopair, outer the installation of TC is in the middle of resistive heater, interior the installation of TC is on the boiler tube inwall, the signal output part of thermopair links to each other with the signal input part of temperature controller, the control signal output terminal of temperature controller links to each other with the control signal input end of controllable silicon trigger board, the output terminal of controllable silicon trigger board links to each other with silicon controlled control signal input end, the silicon controlled output terminal is connected with resistive heater in the boiler tube by transformer, and master controller links to each other with temperature controller.
Described temperature controller comprises temperature collecting cell and temperature PID control module, the temperature signal input end of described temperature collecting cell links to each other with the signal output part of thermopair, the temperature signal output terminal of temperature collecting cell links to each other with the temperature signal input end of temperature PID temperature control unit, the signal output part of described temperature PID control module links to each other with the control signal input end of controllable silicon trigger board, and the mode of passing through communication of temperature PID control module (RS485 communications protocol) obtains desired temperature from master controller.
What described temperature controller adopted is programmable logic controller (PLC).
The RS485 communications protocol mode of passing through of described temperature controller obtains desired temperature from master controller.
The number of described thermopair is mainly definite according to boiler tube length, and number is more many more accurately to reflect boiler tube internal temperature field.
The beneficial effects of the utility model are:
The utility model can solve the balance that tradition control temperature is pursued temperature in the whole process, because the difference of environment before and after body of heater self character and the switch fire door causes the beginning temperature to heat up slow, then the large phenomenon of overtemperature.Temperature when the utility model is ignored auxiliary process, the temperature in the major control coating process makes it satisfy technological requirement.
Description of drawings
Fig. 1 is the overall schematic of a kind of tubular type PECVD temperature controller of the present utility model.
Among the figure: 1-master controller, 2-temperature controller, 3-controllable silicon trigger board, 4-controllable silicon, 5-transformer, 6-thermopair, 7-resistive heater, 8-boiler tube.
Embodiment
As shown in Figure 1, a kind of tubular type PECVD temperature control system, described temperature control system comprises: master controller 1, temperature controller 2, controllable silicon trigger board 3, controllable silicon 4, transformer 5, many to thermopair 6, described every pair of thermopair 6 is divided into interior thermopair and outer thermopair, outer the installation of TC is in the middle of resistive heater 7, interior the installation of TC is on boiler tube 8 inwalls, the signal output part of thermopair 6 links to each other with the signal input part of temperature controller 2, the control signal output terminal of temperature controller 2 links to each other with the control signal input end of controllable silicon trigger board 3, the output terminal of controllable silicon trigger board 3 links to each other with the control signal input end of controllable silicon 4, the output terminal of controllable silicon 4 is connected by the resistive heater 7 in transformer 5 and the boiler tube 8, the power stage of control transformer 5, thereby reach the effect of regulating temperature, master controller 1 links to each other with temperature controller 2.
Described temperature controller 2 comprises temperature collecting cell and temperature PID control module, the temperature signal input end of described temperature collecting cell links to each other with the signal output part of thermopair 6, the temperature signal output terminal of temperature collecting cell links to each other with the temperature signal input end of temperature PID temperature control unit, the signal output part of described temperature PID control module links to each other with the control signal input end of controllable silicon trigger board 3, and the mode of passing through communication of temperature PID control module (RS485 communications protocol) obtains desired temperature from master controller 1.
PID is a kind of circuit controls mathematical model, its implication: P-proportional control, I-integration control, D-differential control.
The output terminal of described controllable silicon trigger board links to each other with silicon controlled control signal input end, and described controllable silicon is connected with transformer by circuit, the power stage of control transformer.
When this control system work, thermopair 6 inputs to the temperature value that measures the temperature acquisition input port of temperature controller 2, temperature controller 2 is compared this temperature value with the desired temperature that master controller 1 sends, after carrying out the PID mathematical operation, obtain the heating power control signal, this control signal is passed to controllable silicon trigger board 3 by the control signal output terminal of temperature controller 2, the control signal that controllable silicon trigger board 3 is sent temperature controller 2 converts controllable silicon 4 control signals to and passes to controllable silicon 4, controllable silicon 4 is connected with transformer 5 by circuit, thereby regulate the size of the heating power of resistive heater 7, reach the purpose of regulating temperature, furnace tube temperature is reached and be stabilized near the desired temperature.
Again because boiler tube 8 internal environments are not always constant, switch along with fire door, boiler tube 8 internal temperatures can have greatly changed, when oven door opening, boiler tube 8 temperature can significantly descend, at this moment, temperature controller 2 sends the control signal of full power heating, make too low that boiler tube 8 temperature are unlikely to descend when the blow-on door, when closing upper furnace door, furnace tube temperature can rise rapidly, and this moment, temperature controller 2 sent the control signal of zero energy heating or low-power heating according to the speed of temperature rate-of-rise, prevented excessive overheating problem to occur.When temperature variation tends towards stability, be converted into again normal PID s operation control.
Claims (5)
1. tubular type PECVD temperature control system, described tubular type PECVD comprises: resistive heater (7) and boiler tube (8), resistive heater (7) is installed in the boiler tube (8), it is characterized in that described temperature control system comprises: master controller (1), temperature controller (2), controllable silicon trigger board (3), controllable silicon (4), transformer (5) and many to thermopair (6), described every pair of thermopair (6) is divided into interior thermopair and outer thermopair, outer the installation of TC is in the middle of resistive heater (7), interior the installation of TC is on boiler tube (8) inwall, the signal output part of thermopair (6) links to each other with the signal input part of temperature controller (2), the control signal output terminal of temperature controller (2) links to each other with the control signal input end of controllable silicon trigger board (3), the output terminal of controllable silicon trigger board (3) links to each other with the control signal input end of controllable silicon (4), the output terminal of controllable silicon (4) is connected by the interior resistive heater (7) of transformer (5) and boiler tube (8), and master controller (1) links to each other with temperature controller (2).
2. a kind of tubular type PECVD temperature control system according to claim 1, it is characterized in that: described temperature controller (2) comprises temperature collecting cell and temperature PID control module, the temperature signal input end of described temperature collecting cell links to each other with the signal output part of thermopair (6), the temperature signal output terminal of temperature collecting cell links to each other with the temperature signal input end of temperature PID temperature control unit, and the signal output part of described temperature PID control module links to each other with the control signal input end of controllable silicon trigger board (3).
3. a kind of tubular type PECVD temperature control system according to claim 1 is characterized in that: what described temperature controller (2) adopted is programmable logic controller (PLC).
4. a kind of tubular type PECVD temperature control system according to claim 1 is characterized in that: the RS485 communications protocol mode of passing through of described temperature controller (2) obtains desired temperature from master controller (1).
5. a kind of tubular type PECVD temperature control system according to claim 1 is characterized in that: the number of described thermopair (6) is mainly determined according to boiler tube (8) length, more many boiler tube (8) the internal temperature fields of more accurately reflecting of number.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220406319 CN202711096U (en) | 2012-08-16 | 2012-08-16 | Tubular PECVD temperature control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220406319 CN202711096U (en) | 2012-08-16 | 2012-08-16 | Tubular PECVD temperature control system |
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| CN202711096U true CN202711096U (en) | 2013-01-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220406319 Expired - Lifetime CN202711096U (en) | 2012-08-16 | 2012-08-16 | Tubular PECVD temperature control system |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105441907A (en) * | 2015-12-11 | 2016-03-30 | 湖南红太阳光电科技有限公司 | Flat plate type plasma enhanced chemical vapor deposition (PECVD) device |
| CN109444585A (en) * | 2018-11-09 | 2019-03-08 | 重庆仕益产品质量检测有限责任公司 | The quality determining method and detection device of electric blanket |
| CN110109496A (en) * | 2019-04-17 | 2019-08-09 | 上海至纯洁净系统科技股份有限公司 | A kind of automatic heating control system for PCVD holding furnace |
| CN112462824A (en) * | 2020-11-12 | 2021-03-09 | 宣城睿晖宣晟企业管理中心合伙企业(有限合伙) | Heating control system and method for thin film deposition equipment |
| CN112505509A (en) * | 2020-12-14 | 2021-03-16 | 湖南顶立科技有限公司 | Method and equipment for processing insulation condition of high-temperature heating equipment |
-
2012
- 2012-08-16 CN CN 201220406319 patent/CN202711096U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105441907A (en) * | 2015-12-11 | 2016-03-30 | 湖南红太阳光电科技有限公司 | Flat plate type plasma enhanced chemical vapor deposition (PECVD) device |
| CN109444585A (en) * | 2018-11-09 | 2019-03-08 | 重庆仕益产品质量检测有限责任公司 | The quality determining method and detection device of electric blanket |
| CN110109496A (en) * | 2019-04-17 | 2019-08-09 | 上海至纯洁净系统科技股份有限公司 | A kind of automatic heating control system for PCVD holding furnace |
| CN112462824A (en) * | 2020-11-12 | 2021-03-09 | 宣城睿晖宣晟企业管理中心合伙企业(有限合伙) | Heating control system and method for thin film deposition equipment |
| CN112505509A (en) * | 2020-12-14 | 2021-03-16 | 湖南顶立科技有限公司 | Method and equipment for processing insulation condition of high-temperature heating equipment |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130130 |