CN110109496A - A kind of automatic heating control system for PCVD holding furnace - Google Patents
A kind of automatic heating control system for PCVD holding furnace Download PDFInfo
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- CN110109496A CN110109496A CN201910307630.6A CN201910307630A CN110109496A CN 110109496 A CN110109496 A CN 110109496A CN 201910307630 A CN201910307630 A CN 201910307630A CN 110109496 A CN110109496 A CN 110109496A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/05—Programmable logic controllers, e.g. simulating logic interconnections of signals according to ladder diagrams or function charts
- G05B19/058—Safety, monitoring
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/30—Automatic controllers with an auxiliary heating device affecting the sensing element, e.g. for anticipating change of temperature
- G05D23/32—Automatic controllers with an auxiliary heating device affecting the sensing element, e.g. for anticipating change of temperature with provision for adjustment of the effect of the auxiliary heating device, e.g. a function of time
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/10—Plc systems
- G05B2219/16—Plc to applications
- G05B2219/163—Domotique, domestic, home control, automation, smart, intelligent house
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Control Of Temperature (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Abstract
The present invention relates to apparatus for preparing optical fiber blanks technical fields, and disclose a kind of automatic heating control system for PCVD holding furnace, add PLC, PLC is according to the temperature C of temperature sensor Real-time Feedback, and the actual set temperature value SPX of temperature control instrument is calculated using special algorithm, and it is sent to temperature control instrument, temperature control instrument carries out fuzzy control calculating further according to the SPX adjusted in real time.The present invention is compared with prior art, utilize the intelligent control of PLC, heating setting is carried out according to specific algorithm, and cooperate the PID fuzzy control technology of temperature control instrument, the heating efficiency of holding furnace and the service life of the heater elements such as holding furnace control cabinet and Elema are improved, and can realize the High Accuracy Constant Temperature control of holding furnace.
Description
Technical field
The present invention relates to apparatus for preparing optical fiber blanks technical field, specially a kind of automatic liter for PCVD holding furnace
Temperature control system.
Background technique
In PCVD technique, i.e., in the prefabricated fiber rod depositing system of microwave plasma CVD technique, heat preservation
Furnace is a very important component in depositing system, is kept the temperature for the deposition reaction area to quartz substrate pipe, so that stone
English substrate tube completes the deposition of quartz glass layer under the conditions of suitable temperature, in quartz substrate inside pipe wall, and preform is heavy
During product reaction, holding furnace need to generally maintain some steady state value between 1000~1300 DEG C, and thermal field is not in holding furnace
Preform quartz deposition layer will be uniformly caused, especially fiber dopants is uneven, causes very to the quality of optical fiber
Big adverse effect, therefore generally using Elema as heater element in production, it is uniform compared in long spacing to meet holding furnace
The requirement of thermal field, and temperature control instrument is used, close loop control circuit is formed with the temperature sensor being embedded in inside holding furnace
Carry out thermostatic control.
Before and after prefabricated fiber rod depositing reaction, holding furnace need to carry out an opening/closing operation, to complete quartzy lining
The installation or removal of bottom tube, according to the length for intermittent time of stopping work, initial temperature in holding furnace generally room temperature~800 DEG C it
Between, to meet job requirement of the depositing operation to holding furnace, before carrying out deposition reaction, the temperature of holding furnace need to be increased to
Some definite value between 1000~1300 DEG C.With this condition, closed-loop control directly is carried out using temperature control instrument, will lead to
Temperature control instrument full voltage exports in long period, and then leads to Elema etc. heater elements surface loading is excessive, causes silicon
The heater elements lost of life such as carbon-point, also be easy to cause silicon-controlled breakdown in heating control circuit, causes holding furnace control
Cabinet failure.
The method for controlling temperature rise of present PCVD holding furnace, usually first passes through manual mode, is adjusted by potentiometer defeated
Voltage out, and then the heating rate of the method adjustment holding furnace of the voltages at heater elements both ends such as Elema is limited, and will heat preservation
Temperature in furnace is increased near preset operating temperature, and heat preservation furnace control system is switched to closed loop control mode later,
Closed-loop control is carried out to output voltage by temperature control instrument, and then realizes the High Accuracy Constant Temperature control of holding furnace furnace temperature.It is this
Method can avoid damaging in the temperature rise period in the initial temperature rise period by limiting the heater elements surface loading such as Elema manually
Bad holding furnace control cabinet avoids the heater elements such as Elema impaired.
The heater elements such as Elema resistance value is different with the difference of temperature, and resistance value reaches most at 850 DEG C or so
Small value, it is clear that, since the initial temperature in holding furnace is different, the requirement to the aperture of thyristor operating angle is also different, not just
When open loop adjustment can not effectively improve service life of the heater elements such as holding furnace Elema, this can only just rely on experienced
Engineer is adjusted it, selects different output voltages in the different temperature rise periods, the strong influence efficiency of work,
And the lasting of the heater elements such as Elema can occur oxidation using surface resistance value is made to change, and make to manually adjust that there are larger
Uncertainty.
There are also using the method for carrying out advanced programming to temperature control instrument, realizes and be arranged in different temperature stages
Different heating rates realizes full-automatic heating, when the initial temperature difference of holding furnace, different programs is needed to execute
This automatic heating, it is easy to cause the maloperation of operator, and lead to Elema damage or transition loss, and Elema etc.
After heater element long-time use, identical heating rate will not be able to satisfy the heating requirement of holding furnace gradually, it has to right
Program segment could be adjusted to adapt to the variation of the heater element resistances values such as Elema.Obviously, this method can not be fundamentally
It solves the problems, such as that holding furnace heats up, still be easy to cause the transition loss of the heater elements such as Elema or heating efficiency too low.
Summary of the invention
The present invention has overcome the deficiencies of the prior art and provide a kind of automatic temperature rise control method for PCVD holding furnace,
Temperature control instrument is remotely controlled using PLC and replaces the manually opened loop control in the holding furnace temperature rise period, using in holding furnace
The temperature feedback for the holding furnace that temperature sensor real-time detection arrives carries out heating setting according to special algorithm, and combines original temperature
The PID fuzzy control technology of degree control instrument realizes the control of silicon-controlled opening angle, and then realizes to Elema in holding furnace
The stepless changing of equal heater elements both end voltage value, realizes the stability contorting of holding furnace furnace temperature, according to holding furnace Current Temperatures
Difference uses different heating rates in different temperature ranges, in the case where guaranteeing holding furnace control precision, avoids and adds
Holding furnace control cabinet failure caused by heat is improper, improves the working life of heating element in holding furnace.
To achieve the above object, the invention provides the following technical scheme: a kind of automatic heating control for PCVD holding furnace
System processed, including automatic heating control device；The automatic heating control device includes the holding furnace equipped with temperature control instrument
If control cabinet, the dry temperature sensor in holding furnace；Control holding furnace internal heat generation is additionally provided in the holding furnace control cabinet
The heating control circuit of element input voltage；The temperature control instrument is calculated using PID FUZZY ALGORITHMS FOR CONTROL to be added
The input voltage in thermal control circuit, it is characterised in that:
The automatic heating control device further includes PLC；The first communication ends of the PLC connect heating control circuit
Relay, the second communication ends of the PLC are bi-directionally connected the first signal end of the temperature control instrument, the temperature control
If the signal output end of the second signal end connection dry temperature sensor of instrument processed, the third signal end of the temperature control instrument
It is bi-directionally connected the first signal end of heating control circuit, the signal output end of heating control circuit is used to connect the hair in holding furnace
Thermal element；PLC calculates temperature control instrument using special algorithm according to the temperature C of temperature sensor Real-time Feedback
Actual set temperature value SPX, and it is sent to temperature control instrument, temperature control instrument is carried out further according to the SPX adjusted in real time
Fuzzy control calculates, and obtains the voltage value of output to heating control circuit, and adjust in heating control circuit according to the voltage value
The silicon-controlled angle of flow realizes the Automatic Control heating of the point from room temperature to operating temperature in holding furnace temperature-rise period；
The automatic heating control device mainly includes following processing step:
First step parameter setting: P.I.D temperature control parameter is set on temperature control instrument, and sets phase on PLC
PLC control parameter is answered, then passes through the heating control circuit of PLC remote opening holding furnace again；The PLC control parameter includes
Holding furnace targeted operating temperature value SP, temperature-rise period parameter；The temperature-rise period parameter includes timer Δ T value, initial temperature
Degree setting deviation d and heating 1~Δ of step delta, 5 value；
Second step calculates control: PLC compares the value of feedback of holding furnace targeted operating temperature value SP and Current Temperatures sensor
C；If SP≤C makes SPX=SP；If when SP > C, the timer T for triggering PLC starts timing, while PLC is according to temperature
The C for spending sensor Real-time Feedback remotely adjusts the SPX value of temperature control instrument using special algorithm in real time；The specific calculation
Method uses following computation rule:
During timer T timing, then SPX=INT (c)-α, α value -3~3；
Timer T timing is completed, then:
If c≤100 DEG C, SPX=INT (c)+Δ 1,1 value 1~3 of Δ；
If 100 DEG C of c≤300 DEG C <, SPX=INT (c)+Δ 2,2 value 1~5 of Δ；
If 300 DEG C of c≤800 DEG C <, SPX=INT (c)+Δ 3,3 value 2~6 of Δ；
If 800 DEG C of c≤1000 DEG C <, SPX=INT (c)+Δ 4,4 value 2~8 of Δ；
If 1000 DEG C of c≤1300 DEG C <, SPX=INT (c)+Δ 5,5 value 1~5 of Δ；
Until SPX=SP.
Further, when PLC relay in remote opening heating control circuit, and when SP > c is to holding furnace
When carrying out warming temperature, timer T timing can be triggered, when the timing time Δ T of timer T setting is opened as initial heating
The retention time of SPX, Δ T=60~600s.
Further, the first communication ends of the PLC are DO module, by DO module to the relay of heating control circuit
Remotely controlled.
Further, the PLC has touch screen or host computer operation interface.
Further, the PLC is individually set up or the PLC and PLC of other systems is integrated.
Further, the temperature control instrument uses the temperature control instrument with digital communication protocol module.
Further, the digital communication protocol module is used with any one association for having data exchanging function with PLC
View；The agreement includes RS485, DeviceNet, Profibus.
Further, the P.I.D temperature control parameter includes the fuzzy control ratio parameter P of temperature control instrument
Value, integral parameter i value and differential parameter d value.Temperature control instrument is calculated using PID FUZZY ALGORITHMS FOR CONTROL in the present invention
The input voltage of heating control circuit is the prior art, therefore is not unfolded to describe.
The present invention have it is following the utility model has the advantages that
1, the method for the present invention is real according to temperature sensor in holding furnace to the actual setpoint of temperature control instrument by PLC
When the temperature feedback value of holding furnace that detects adjusted in real time, and according to current temperature feedback value, adjustment setting
Value follows amplification, neither influence heating rate, and can reduce the heater elements surface loading such as Elema to greatest extent, extends
The working life of the heater elements such as Elema, and then play a protective role to holding furnace control cabinet, it avoids in heating control circuit
It is silicon-controlled breakdown, cause holding furnace control cabinet failure.
2, the method for the present invention, using the PID fuzzy control technology of PLC control technology and temperature control instrument, and according to silicon
Temperature/resistance characteristic of the heater elements such as carbon-point replaces the manually open loop control in the holding furnace temperature rise period by PLC control device
System, is effectively reduced temperature rise period manually-operated workload, makes full use of the intelligence of PLC control technology, calculates according to specific
Method carries out heating setting, avoids the fever member of Furnace Temperature Control System failure or Elema etc. caused by manually adjusting improper or maloperation
Part is impaired, the PID fuzzy control technology of combination temperature control instrument, realizes intelligent stepless adjustment to thyristor operating angle, realizes
The High Accuracy Constant Temperature of holding furnace controls, and the fever member such as avoids the angle of flow excessive and then lead to holding furnace control cabinet failure or Elema
Part fracture or excessive loss, reduce manufacturing cost.
Detailed description of the invention
Fig. 1 is schematic block circuit diagram in the present invention.
Fig. 2 is workflow schematic diagram of the present invention.
Specific embodiment
Below with reference to the embodiment of the present invention and attached drawing, technical solution in the embodiment of the present invention is carried out clearly and completely
Description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on this hair
Embodiment in bright, every other implementation obtained by those of ordinary skill in the art without making creative efforts
Example, shall fall within the protection scope of the present invention.
Embodiment 1
Certain PCVD process deposits holding furnace.
Referring to fig. 2, PLC uses Simense Products CPU-313C, and the PLC and PCVD process control system are shared, used
The thyristor transformer maximum adjustment voltage of the DO module model SM322 arrived, holding furnace control cabinet are 400V, temperature controller
Table model E5CC-QX2ASM-802, holding furnace are heated using Elema, are passed through between temperature control instrument and PLC
RS485 carries out communication read-write data.
Each parameter setting is as follows in PLC:
α=1:
Δ 1=2, Δ 2=3, Δ 3=3, Δ 4=5, Δ 5=3；
Δ T=300s
Holding furnace temperature control instrument pid parameter is provided that
P=12, i=412, d=60；
Holding furnace operating target temperature SP is 1090 DEG C, and PLC control device is in remote opening heating control circuit relay
Shi Baowen in-furnace temperature c is 470.6 DEG C, according to special algorithm:
Remotely located temperature SPX=INT (c)-α=470-1=469 of temperature control instrument；
Timer T starts timing, and after 300s, the heat preservation in-furnace temperature c that PLC is read is 469.1 DEG C, according to specific calculation
Method, the remotely located temperature SPX=INT (c) of temperature control instrument+Δ 3=469+3=472；
Temperature feedback value c in the holding furnace read according to PLC changes temperature according to value of 2~3 DEG C more than c value in real time
The setting value of control instrument, until heat preservation in-furnace temperature c is increased to 800.1 DEG C, according to special algorithm, temperature control instrument is long-range
Temperature SPX=INT (c)+Δ 4=800+5=805 is set；
Temperature feedback value c in the holding furnace read according to PLC changes temperature according to value of 4~5 DEG C more than c value in real time
The setting value of control instrument, until heat preservation in-furnace temperature c is increased to 1000.1 DEG C, according to special algorithm, temperature control instrument is remote
Temperature SPX=INT (c)+Δ 5=1000+3=1003 is arranged in journey；
Temperature feedback value c in the holding furnace read according to PLC changes temperature according to value of 2~3 DEG C more than c value in real time
The setting value of control instrument, until heat preservation in-furnace temperature c is increased to 1087.1 DEG C, according to special algorithm, temperature control instrument is remote
Temperature SPX=INT (c)+Δ 5=1087+3=1090 is arranged in journey；
The setting value of temperature control instrument is stablized and is arranged at 1090 DEG C by PLC later, until SP value is modified.
It is heated up using the method to holding furnace, it can be observed that being applied to Elema both ends from holding furnace unlatching moment
Voltage maximum instantaneous value about 120V, the 300s of timer timing during, be applied to the voltage about 80V or so at Elema both ends,
The surface loading of Elema will not adversely affect the service life of Elema in security interval；
During 469~1090 DEG C of heatings, the voltage at Elema both ends is applied between 80V~110V, Elema
Surface loading will not adversely affect the service life of Elema in security interval, and about 55 points of entire temperature-rise period
Clock fully meets the requirement of PCVD technique holding furnace heating rate.
Embodiment 2
Certain PCVD process deposits holding furnace.
PLC uses Simense Products CPU-313C, and the PLC and PCVD process control system share, DO module model
Thyristor transformer maximum adjustment voltage for SM322, holding furnace control cabinet is 400V, temperature control instrument model E5CC-
QX2ASM-802, holding furnace are heated using Elema, carry out communication reading by RS485 between temperature control instrument and PLC
Write data.
Each parameter setting is as follows in PLC:
α=0；
Δ 1=2, Δ 2=3, Δ 3=4, Δ 4=5, Δ 5=2；
Δ T=200s
Holding furnace temperature control instrument pid parameter is provided that
P=12, i=412, d=60；
Holding furnace operating target temperature SP is 1090 DEG C, and PLC control device is in remote opening heating control circuit relay
Shi Baowen in-furnace temperature c is 31.6 DEG C, according to special algorithm:
Remotely located temperature SPX=INT (c)-α=31-0=31 of temperature control instrument；
Timer T starts timing, and after 200s, the heat preservation in-furnace temperature c that PLC is read is 31.4 DEG C, according to special algorithm,
The remotely located temperature SPX=INT (c) of temperature control instrument+Δ 1=31+2=33；
Temperature feedback value c in the holding furnace read according to PLC changes temperature according to value of 1~2 DEG C more than c value in real time
The setting value of control instrument, until heat preservation in-furnace temperature c is increased to 100.1 DEG C, according to special algorithm, temperature control instrument is long-range
Temperature SPX=INT (c)+Δ 2=100+3=103 is set；
Temperature feedback value c in the holding furnace read according to PLC changes temperature according to value of 2~3 DEG C more than c value in real time
The setting value of control instrument, until heat preservation in-furnace temperature c is increased to 300.1 DEG C, according to special algorithm, temperature control instrument is long-range
Temperature SPX=INT (c)+Δ 3=300+4=304 is set；
Temperature feedback value c in the holding furnace read according to PLC changes temperature according to value of 3~4 DEG C more than c value in real time
The setting value of control instrument, until heat preservation in-furnace temperature c is increased to 800.1 DEG C, according to special algorithm, temperature control instrument is long-range
Temperature SPX=INT (c)+Δ 4=800+5=805 is set；
Temperature feedback value c in the holding furnace read according to PLC changes temperature according to value of 4~5 DEG C more than c value in real time
The setting value of control instrument, until heat preservation in-furnace temperature c is increased to 1000.1 DEG C, according to special algorithm, temperature control instrument is remote
Temperature SPX=INT (c)+Δ 5=1000+2=1002 is arranged in journey；
Temperature feedback value c in the holding furnace read according to PLC changes temperature according to value of 1~2 DEG C more than c value in real time
The setting value of control instrument, until heat preservation in-furnace temperature c is increased to 1088.1 DEG C, according to special algorithm, temperature control instrument is remote
Temperature SPX=INT (c)+Δ 5=1088+2=1090 is arranged in journey；
The setting value of temperature control instrument is stablized and is arranged at 1090 DEG C by PLC later, until SP value is modified.
It is heated up using the method to holding furnace, it can be observed that being applied to Elema both ends from holding furnace unlatching moment
Voltage maximum instantaneous value about 100V, the 300s of timer timing during, be applied to the voltage about 30V~50V at Elema both ends,
The surface loading of Elema will not adversely affect the service life of Elema in security interval；
During 31~1090 DEG C of heatings, the voltage at Elema both ends is applied between 50V~110V, the table of Elema
Face load will not adversely affect the service life of Elema in security interval, and about 130 points of entire temperature-rise period
Clock fully meets the requirement of PCVD technique holding furnace heating rate.
In production practice, using the temperature-rising method of the prior art, the service life of Elema is about 2000~3000 small
When, and automatic heating method provided by the invention patent is used, under same production status, the service life of Elema is about
It improves to 5000~6000 hours, service life has very big raising, and the raising of the service life of Elema is also dropped simultaneously
It is low because replacing Elema due to bring process downtime, improve production efficiency to a certain extent.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (8)
1. a kind of automatic heating control system for PCVD holding furnace, including automatic heating control device；The automatic heating
If control device includes holding furnace control cabinet, the dry temperature sensor in holding furnace equipped with temperature control instrument；It is described
The heating control circuit of control holding furnace internal heat generation element input voltage is additionally provided in holding furnace control cabinet；The temperature control
Instrument processed calculates the input voltage of heating control circuit using PID FUZZY ALGORITHMS FOR CONTROL, it is characterised in that:
The automatic heating control device further includes PLC；The PLC the first communication ends connection heating control circuit after
Second communication ends of electric appliance, the PLC are bi-directionally connected the first signal end of the temperature control instrument, the temperature controller
If the signal output end of the second signal end connection dry temperature sensor of table, the third signal end of the temperature control instrument are two-way
The first signal end of heating control circuit is connected, the signal output end of heating control circuit is used to connect the fever member in holding furnace
Part；PLC calculates using special algorithm the reality of temperature control instrument according to the temperature C of temperature sensor Real-time Feedback
Set temperature value SPX, and it is sent to temperature control instrument, temperature control instrument is obscured further according to the SPX adjusted in real time
Control calculates, and obtains the voltage value of output to heating control circuit, and according to controllable in voltage value adjustment heating control circuit
The angle of flow of silicon realizes the Automatic Control heating of the point from room temperature to operating temperature in holding furnace temperature-rise period；
The automatic heating control device mainly includes following processing step:
First step parameter setting: P.I.D temperature control parameter is set on temperature control instrument, and sets corresponding PLC on PLC
Then control parameter passes through the heating control circuit of PLC remote opening holding furnace again；The PLC control parameter includes heat preservation
Furnace targeted operating temperature value SP, temperature-rise period parameter；The temperature-rise period parameter includes timer Δ T value, and initial temperature is set
Set deviation d and heating 1~Δ of step delta, 5 value；
Second step calculates control: PLC compares the value of feedback C of holding furnace targeted operating temperature value SP Yu Current Temperatures sensor；Such as
Fruit SP≤C, then make SPX=SP；If when SP > C, the timer T for triggering PLC starts timing, while PLC is passed according to temperature
The C of sensor Real-time Feedback remotely adjusts the SPX value of temperature control instrument using special algorithm in real time；The special algorithm is adopted
With following computation rule:
During timer T timing, then SPX=INT (c)-α, α value -3~3；
Timer T timing is completed, then:
If c≤100 DEG C, SPX=INT (c)+Δ 1,1 value 1~3 of Δ；
If 100 DEG C of c≤300 DEG C <, SPX=INT (c)+Δ 2,2 value 1~5 of Δ；
If 300 DEG C of c≤800 DEG C <, SPX=INT (c)+Δ 3,3 value 2~6 of Δ；
If 800 DEG C of c≤1000 DEG C <, SPX=INT (c)+Δ 4,4 value 2~8 of Δ；
If 1000 DEG C of c≤1300 DEG C <, SPX=INT (c)+Δ 5,5 value 1~5 of Δ；
Until SPX=SP.
2. a kind of automatic heating control system for PCVD holding furnace according to claim 1, it is characterised in that: work as institute
PLC is stated in remote opening heating control circuit when relay, and when SP > c carries out warming temperature to holding furnace, can be triggered
The retention time of SPX, Δ T=60 when the timing time Δ T of timer T timing, timer T setting is opened as initial heating
~600s.
3. a kind of automatic heating control system for PCVD holding furnace according to claim 1, it is characterised in that: described
The first communication ends of PLC are D0 module, are remotely controlled by relay of the D0 module to heating control circuit.
4. a kind of automatic heating control system for PCVD holding furnace according to claim 1, it is characterised in that: described
PLC has touch screen or host computer operation interface.
5. a kind of automatic heating control system for PCVD holding furnace according to claim 1, it is characterised in that: described
PLC is individually set up or the PLC and PLC of other systems is integrated.
6. a kind of automatic heating control system for PCVD holding furnace according to claim 1, it is characterised in that: described
Temperature control instrument uses the temperature control instrument with digital communication protocol module.
7. a kind of automatic heating control system for PCVD holding furnace according to claim 6, it is characterised in that: described
Digital communication protocol module is used with any one agreement for having data exchanging function with PLC；The agreement include RS485,
DeviceNet、Profibus。
8. a kind of automatic heating control system for PCVD holding furnace according to claim 1, it is characterised in that: described
P.I.D temperature control parameter include temperature control instrument fuzzy control ratio parameter P value, integral parameter i value and differential
Parameter d value.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110953878A (en) * | 2019-12-04 | 2020-04-03 | 佛山市天禄智能装备科技有限公司 | Rotary furnace control system |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003131702A (en) * | 2001-10-26 | 2003-05-09 | Omron Corp | Control equipment, temperature controller, and heat treatment system |
| CN202711096U (en) * | 2012-08-16 | 2013-01-30 | 南京科达新控仪表有限公司 | Tubular PECVD temperature control system |
| CN103726033A (en) * | 2012-10-10 | 2014-04-16 | 无锡尚德太阳能电力有限公司 | Method for controlling plasma enhanced chemical vapor deposition heater body temperature |
| CN104035461A (en) * | 2014-07-02 | 2014-09-10 | 深圳市捷佳伟创新能源装备股份有限公司 | Temperature control system and method |
| CN205608554U (en) * | 2015-11-03 | 2016-09-28 | 江苏奥维信亨通光学科技有限公司 | Temperature control device |
| CN107555439A (en) * | 2016-06-30 | 2018-01-09 | 新特能源股份有限公司 | Polycrystalline silicon growth electric current autocontrol method and device |
-
2019
- 2019-04-17 CN CN201910307630.6A patent/CN110109496B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003131702A (en) * | 2001-10-26 | 2003-05-09 | Omron Corp | Control equipment, temperature controller, and heat treatment system |
| CN202711096U (en) * | 2012-08-16 | 2013-01-30 | 南京科达新控仪表有限公司 | Tubular PECVD temperature control system |
| CN103726033A (en) * | 2012-10-10 | 2014-04-16 | 无锡尚德太阳能电力有限公司 | Method for controlling plasma enhanced chemical vapor deposition heater body temperature |
| CN104035461A (en) * | 2014-07-02 | 2014-09-10 | 深圳市捷佳伟创新能源装备股份有限公司 | Temperature control system and method |
| CN205608554U (en) * | 2015-11-03 | 2016-09-28 | 江苏奥维信亨通光学科技有限公司 | Temperature control device |
| CN107555439A (en) * | 2016-06-30 | 2018-01-09 | 新特能源股份有限公司 | Polycrystalline silicon growth electric current autocontrol method and device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110953878A (en) * | 2019-12-04 | 2020-04-03 | 佛山市天禄智能装备科技有限公司 | Rotary furnace control system |
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