CN202705232U - Air knife device - Google Patents
Air knife device Download PDFInfo
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- CN202705232U CN202705232U CN 201220364688 CN201220364688U CN202705232U CN 202705232 U CN202705232 U CN 202705232U CN 201220364688 CN201220364688 CN 201220364688 CN 201220364688 U CN201220364688 U CN 201220364688U CN 202705232 U CN202705232 U CN 202705232U
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- water conservancy
- conservancy diversion
- air knife
- diversion
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Abstract
The utility model discloses an air knife device, which comprises an air knife body, wherein the air knife body comprises a first plate body and a second plate body which are fixedly connected, wherein an air cavity is formed between two surfaces of the first and second plate bodies; a nozzle part with a linear air injection orifice is formed at one ends of the first and second plate bodies; the air injection orifice is in fluid communication with the air cavity; the first plate body is provided with at least one air introduction port which is in fluid communication with the air cavity; at least one guide slot used for guiding liquid accumulated on the first plate body away from a corresponding area of the air injection orifice is formed in an outer surface, which deviates from the air cavity, of the first plate body; and the guide slots penetrate through the length direction of the first plate body. According to the air knife device, liquid flow formed by converging liquid drops splashing down to the outer surface of the first plate body is guided to flow down through the guide slots in the using process, so that the influence of the liquid flow on the uniformity of an air curtain formed at the air injection orifice is reduced.
Description
Technical field
The utility model relates to display panels process for processing technical field, particularly a kind of air knife device.
Background technology
Along with the nineties TFT-LCD (Thin Film Transistor-Liquid Crystal Display, the Thin Film Transistor (TFT) liquid-crystal display) maturation of technology, display panels since the advantages such as its flat board, frivolous, reduce power consumption, variation, the feature of environmental protection developed rapidly.Along with the maximization of glass substrate in the display panels, for guaranteeing the qualification rate of product, the homogeneity of each step process requires to be faced with larger challenge in the production technology of TFT-LCD.
Wherein, wet etching is a ring important in the TFT-LCD complete processing, utilizes mix acid liquor that the unlapped metal of glass surface photoresist material is carried out etching, thereby forms needed metal pattern.And in the actual process process, the exit of etching apparatus etching reaction unit is equipped with air knife device, and air knife device is used for holding back etching liquid, reduces product to the drag-out of etching liquid, reduces production costs; Air knife device can also be used to the scavenging solution in the wet-etching technology is held back etc.
As shown in Figure 1, Fig. 1 is that the cross section structure schematic diagram is analysed and observe in the side-looking of a kind of air knife device of the prior art.
The air knife device in orientation shown in Figure 1 mainly comprises the air knife body with platy structure, the air knife body is comprised of the first plate body 1 that is fixedly connected with by mounting block 4 and the second plate body 2, form gas chamber 6 in the first plate body 1 and the second plate body 2 between relative two faces, the lower end of the first plate body 1 and the second plate body 2 forms spray nozzle part, a-quadrant as shown in fig. 1, have at least one gas that is communicated with gas chamber 6 fluids on the first plate body 1 and pass into mouthfuls 3, and the lower end of said nozzle section has the slot-shaped gas ejection ports of a line 5, and gas ejection ports 5 is communicated with gas chamber 6 fluids; High pressure gas pass into mouth 3 by gas and pass into gas chamber 6, and spray to glass substrate by gas ejection ports 5, so that the etching liquid on the glass substrate is held back.
Because the first plate body 1 general correspondence of air knife device is the spray unit of etching liquid and scavenging solution, etching liquid and scavenging solution can splash on the first plate body 1, and gas ejection ports 5 is positioned at the lower end of air knife body, and horizontal expansion, the liquid that the drop of etching liquid on the first plate body 1 and scavenging solution of splashing down converges formation fails to be convened for lack of a quorum and flows to the lower end of air knife body, and flow down at gas ejection ports 5 places, the liquid that gas ejection ports 5 places flow down fails to be convened for lack of a quorum affects the homogeneity of slot-shaped gas ejection ports 5 curtain jets, the air curtain bifurcated that causes gas ejection ports 5 to be sprayed is uneven, cause holding back of etching liquid residual on 5 pairs of glass substrates of gas ejection ports inhomogeneous, cause in the product because inhomogeneous cause various bad of residual etching liquid, even cause the appearance of product straight line defective region, had a strong impact on the quality of product.
The utility model content
The utility model provides a kind of air knife device, can reduce liquid stream to the inhomogeneity impact of the air curtain of gas injection interruption-forming, and then improve the quality of products.
For achieving the above object, the utility model provides following technical scheme:
A kind of air knife device for wet-method etching equipment, comprise the air knife body, described air knife body comprises and being fixedly connected with and relative two faces form the first plate body and second plate body of gas chamber, one end of described the first plate body and the second plate body forms the spray nozzle part with a line gas ejection ports, described gas ejection ports is communicated with the gas chamber fluid, and described the first plate body has at least one gas that is communicated with the gas chamber fluid and passes into mouth;
The outside surface that described the first plate body deviates from described gas chamber is formed at least one diversion trench of the liquid diversion gas ejection ports corresponding zone of will converge on the first plate body, and described diversion trench runs through the length direction of described the first plate body.
Preferably, described the second plate body outside surface of deviating from described gas chamber is formed at least one diversion trench of the liquid diversion gas ejection ports corresponding zone of will converge on the second plate body.
Preferably, the second plate body outside surface of deviating from described gas chamber has two diversion trenchs.
Preferably, described the first plate body is fixedly connected with by two row's fastening screws with the second plate body, each described fastening screw is passed with the first plate body by the second plate body and is fixedly connected with, and each arranges evenly distribution in the diversion trench of described retaining screw on described the second plate body.
Preferably, in two sidewalls of a described diversion trench, the angle between the first side wall of close described gas ejection ports and the bottom land of diversion trench is acute angle.
Preferably, in two sidewalls of at least one described diversion trench, the first side wall of close described gas ejection ports has the water conservancy diversion slope; Point to the direction of point at the bottom of the water conservancy diversion along the water conservancy diversion summit on described water conservancy diversion slope, the upstream point on described water conservancy diversion slope is apart from the distance of the end surfaces of described spray nozzle part, greater than the distance of the end surfaces of the described spray nozzle part of point downstream distance on described water conservancy diversion slope.
Preferably, described the first side wall has a water conservancy diversion slope, and the water conservancy diversion summit on described water conservancy diversion slope is an end of the first side wall, and point is the other end of the first side wall at the bottom of the water conservancy diversion on described water conservancy diversion slope.
Preferably, described the first side wall has two water conservancy diversion slopes, and two described water conservancy diversion slopes have same water conservancy diversion summit, and point is an end of the first side wall at the bottom of the water conservancy diversion on a described water conservancy diversion slope, and point is the other end of the first side wall at the bottom of the water conservancy diversion on another described water conservancy diversion slope.
Preferably, described gas passes into mouth for a plurality of, and evenly distributes along the length direction of described air knife body.
Preferably, has gasket seal between two faces that described the first plate body is relative with the second plate body.
The air knife device that is used for wet-method etching equipment that the utility model provides, comprise the air knife body, described air knife body comprises and being fixedly connected with and relative two faces form the first plate body and second plate body of gas chamber, one end of described the first plate body and the second plate body forms the spray nozzle part with a line gas ejection ports, described gas ejection ports is communicated with the gas chamber fluid, described the first plate body has at least one gas that is communicated with the gas chamber fluid and passes into mouth
The outside surface that described the first plate body deviates from described gas chamber is formed at least one diversion trench of the liquid diversion gas ejection ports corresponding zone of will converge on the first plate body, and described diversion trench runs through the length direction of described the first plate body.
The air knife device that the utility model provides in use, the injection direction of its gas ejection ports is downward, and high pressure gas pass into mouth by gas and pass in the gas chamber, and spray by gas ejection ports, form air curtain, the liquid such as the etching liquid of product surface and scavenging solution are held back; Wherein, the first plate body is towards the spray equipment of wet-method etching equipment, the drops falling and splashing of spray equipment spray deviates from gas chamber at the first plate body outside surface, after converging, drop on the first plate body outside surface flows downward, because the first plate body outside surface is provided with at least one diversion trench, the liquid that forms after drop the converges inflow diversion trench that fails to be convened for lack of a quorum, and along the corresponding zone of diversion trench diversion gas ejection ports.Like this, the drop that splashes to the outside surface of the first plate body converges the liquid that forms and flows diversed groove guiding other places and flow down, and then has reduced liquid stream to the inhomogeneity impact of the air curtain of gas injection interruption-forming.
Therefore, the air knife device that the utility model provides can reduce liquid stream to the inhomogeneity impact of the air curtain of gas injection interruption-forming, and then improves the quality of products.
Description of drawings
Fig. 1 is that the cross section structure schematic diagram is analysed and observe in the side-looking of a kind of air knife device of the prior art;
The air knife device that Fig. 2 provides for the utility model analyse and observe the cross section structure schematic diagram;
A kind of guide trough structure schematic diagram in the second plate body in the air knife device that Fig. 3 provides for the utility model;
The first plate body faces structural representation in the air knife device that Fig. 4 provides for the utility model.
Another kind of guide trough structure schematic diagram in the second plate body in the air knife device that Fig. 5 provides for the utility model;
Another kind of guide trough structure schematic diagram in the first plate body in the air knife device that Fig. 6 provides for the utility model.
Embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
The air knife device that provides in the technical solution of the utility model one, comprise the air knife body, the air knife body comprises and being fixedly connected with and relative two faces form the first plate body and second plate body of gas chamber, one end of the first plate body and the second plate body forms the spray nozzle part with a line gas ejection ports, gas ejection ports is communicated with the gas chamber fluid, and the first plate body has at least one gas that is communicated with the gas chamber fluid and passes into mouth;
The outside surface that the first plate body deviates from gas chamber is formed at least one diversion trench of the liquid diversion gas ejection ports corresponding zone of will converge on the first plate body, and diversion trench runs through the length direction of the first plate body.
Air knife device in use, the spray equipment of the corresponding wet-method etching equipment of the first plate body, at least one diversion trench that deviates from the outside surface setting of gas chamber by the first plate body, the drop on the first plate body of will splashing down converges the liquid conductance that forms from the corresponding zone of gas ejection ports, and then reduce liquid stream and gas ejection ports is sprayed the homogeneity that forms air curtain, improve the quality of products.
As the technical solution of the utility model two, the technical program is on the basis of technical scheme one, converge the liquid stream that forms to the inhomogeneity impact of gas injection interruption-forming air curtain in order to reduce drop on the second plate body, the outside surface that the second plate body deviates from gas chamber has at least one diversion trench, is used for the liquid diversion gas ejection ports corresponding zone of converging on the second plate body.
The second plate body deviates from liquid conductance that diversion trench that the outside surface of gas chamber forms can pool the drop on the second plate body from zone corresponding to gas ejection ports, has further reduced the liquid stream that converges on the air knife body to the inhomogeneity impact of gas injection interruption-forming air curtain.
As the technical solution of the utility model three, the technical program limits the diversion trench that the second plate body arranges on the basis of technical scheme two: the outside surface that the second plate body deviates from gas chamber has two diversion trenchs.
As the technical solution of the utility model four, the technical program is on the basis of technical scheme three, the mode that is fixedly connected with between the first plate body and the second plate body is limited: preferably, the first plate body is fixedly connected with by two row's fastening screws with the second plate body, each fastening screw is passed with the first plate body by the second plate body and is fixedly connected with, and evenly distributes in the diversion trench of each row's retaining screw on the second plate body.
One row's retaining screw distributes in a diversion trench of the second plate body setting, and then this diversion trench can be arranged the liquid that converges on the nut of each retaining screw in the retaining screw to this and carries out water conservancy diversion, prevents that the fluid drips that converges on the nut from dropping on the product.
Certainly, can also be fixedly connected with by alternate manner between the first plate body and the second plate body, as using the modes such as padlock, clamping, welding, as long as can realize being fixedly connected with of said structure.
As the technical solution of the utility model five, the technical program limits at technical scheme one concrete structure to diversion trench to the basis of technical scheme four arbitrary technical schemes respectively: in two sidewalls of a diversion trench, be acute angle near the angle between the bottom land of the first side wall of gas ejection ports and diversion trench.
Because air knife device in use, the injection direction of gas ejection ports is downward, in the diversion trench, angle between the first side wall of close gas ejection ports and the bottom land of diversion trench is acute angle, then the height in the outside of diversion trench the first side wall is higher than inboard height, and liquid stream flows into after the diversion trench, can be stopped by the outside of the first side wall, can only flow along the water conservancy diversion direction of diversion trench, strengthened the flow conductivity of diversion trench.
As the technical solution of the utility model six, the technical program limits at technical scheme one concrete structure to diversion trench to the basis of technical scheme five arbitrary technical schemes respectively: in two sidewalls of at least one diversion trench, the first side wall near gas ejection ports has the water conservancy diversion slope, point to the direction of putting at the bottom of the water conservancy diversion along the water conservancy diversion summit on water conservancy diversion slope, the upstream point on water conservancy diversion slope is apart from the distance of the end surfaces of spray nozzle part, greater than the point downstream on the water conservancy diversion slope distance apart from the end surfaces of spray nozzle part.
The water conservancy diversion summit on water conservancy diversion slope refers to bottom farthest the position of the first side wall middle distance air knife body, and point refers to the bottom nearest position of the first side wall middle distance air knife body at the bottom of the water conservancy diversion on water conservancy diversion slope.The setting on water conservancy diversion slope can make the liquid stream water conservancy diversion direction water conservancy diversion along the water conservancy diversion slope after entering diversion trench, flows to point at the bottom of the water conservancy diversion by the water conservancy diversion summit, has strengthened the water conservancy diversion of diversion trench.
As the technical solution of the utility model seven, the technical program limits the set-up mode on the water conservancy diversion slope of diversion trench in the technical scheme six on the basis of technical scheme six; Concrete, the first side wall has a water conservancy diversion slope, and the water conservancy diversion summit on water conservancy diversion slope is an end of the first side wall, and point is the other end of the first side wall at the bottom of the water conservancy diversion on water conservancy diversion slope.
As the technical solution of the utility model eight, the technical program is on the basis of technical scheme six, set-up mode to the water conservancy diversion slope of diversion trench in the technical scheme six limits: concrete, the first side wall has two water conservancy diversion slopes, two water conservancy diversion slopes have same water conservancy diversion summit, point is an end of the first side wall at the bottom of the water conservancy diversion on one water conservancy diversion slope, and point is the other end of the first side wall at the bottom of the water conservancy diversion on another water conservancy diversion slope.
The water conservancy diversion slope is set to segmental structure, the water conservancy diversion direction of diversion trench can be divided into both direction, can play shunting action, and the liquid flow point both direction that flows into diversion trench is carried out water conservancy diversion, has further strengthened the water conservancy diversion of diversion trench.
As the technical solution of the utility model nine, the technical program respectively in technical scheme one to the basis of technical scheme eight arbitrary technical schemes, the decoration form that gas is passed into mouth limits: concrete, gas passes into mouth for a plurality of, and evenly distributes along the length direction of air knife body.
As the technical solution of the utility model ten, the technical program respectively in technical scheme one to the basis of technical scheme nine arbitrary technical schemes, tightness system between the first plate body and the second plate body is increased: preferably, have gasket seal between the first plate body two faces relative with the second plate body.
The setting of diaphragm seal can strengthen the stopping property of edge between the first plate body and the second plate body, prevents that gas chamber from producing gas leak phenomenon except the position beyond the gas ejection ports.
Above-mentionedly of the present utility model ten kinds of preferred technical schemes have been enumerated, can make up between the corresponding technical scheme, to form corresponding embodiment in the utility model, in specific embodiment, there are other replacement schemes in above-mentioned a plurality of technical scheme, give unnecessary details no longer one by one here.The below enumerates important embodiment the air knife device that the utility model provides is described, so that those skilled in the art are to the understanding of technical solutions of the utility model.
Embodiment one
Such as Fig. 2, Fig. 4 and shown in Figure 6.
The air knife device that is used for wet-method etching equipment that the utility model provides, comprise the air knife body, the air knife body comprises and being fixedly connected with, and two relative faces form the first plate body 11 and second plate body 12 of gas chamber 16, one end of the first plate body 11 and the second plate body 12 forms the spray nozzle part with a line gas ejection ports 15, specifically dotted line frame B is regional as shown in Figure 2 for spray nozzle part, gas ejection ports 15 is communicated with gas chamber 16 fluids, the first plate body 11 has at least one gas that is communicated with gas chamber 16 fluids and passes into mouthfuls 13, the outside surface that the first plate body 11 deviates from gas chamber 16 is formed at least one diversion trench 111 of liquid diversion gas ejection ports 15 corresponding zones of will converge on the first plate body 11, and diversion trench 111 runs through the length direction of the first plate body 11.
The air knife device that the utility model provides in use, the injection direction of its gas ejection ports 15 is downward, high pressure gas pass into mouth 13 by at least one gas and pass in the gas chamber 16, and by gas ejection ports 15 ejections, form air curtain, the liquid such as the etching liquid of product surface and scavenging solution are held back; Wherein, the first plate body 11 is towards the spray equipment of wet-method etching equipment, the drops falling and splashing of spray equipment spray deviates from gas chamber at the first plate body 11 outside surface 112, after converging, drop on the first plate body 11 outside surfaces 112 flows downward, because the first plate body 11 outside surfaces 112 are provided with at least one diversion trench 111, the liquid that forms after drop converges fails to be convened for lack of a quorum and flows into diversion trench 111, and along diversion trench 111 diversion gas ejection ports 15 corresponding zones.Like this, the drop that splashes to the outside surface 112 of the first plate body 11 converges the liquid that forms and flows diversed groove 111 guiding other places and flow down, and then has reduced the inhomogeneity impact of air curtain that liquid stream forms gas ejection ports 15.
Therefore, the air knife device that the utility model provides can reduce the inhomogeneity impact of air curtain that liquid stream forms gas ejection ports 15, and then improves the quality of products.
Certainly, the concrete structure of above-mentioned diversion trench 111 and concrete set-up mode can have multiple choices:
As, in the optimal technical scheme, in two sidewalls of above-mentioned diversion trench 111, the angle α between the first side wall 113 of close gas ejection ports 15 and the bottom land of diversion trench 111 is acute angle.As shown in Figure 2.
Because air knife device in use, the injection direction of gas ejection ports 15 is downward, in the diversion trench 111, angle α between the first side wall 113 of close gas ejection ports 15 and the bottom land of diversion trench 111 is acute angle, then the height in the outside of diversion trench 111 the first side walls 113 is higher than inboard height, and liquid stream flows into after the diversion trench 111, can be stopped by the outside of the first side wall 113, can only flow along the water conservancy diversion direction of diversion trench 111, strengthened the flow conductivity of diversion trench 111.
Further, in the optimal technical scheme, such as Fig. 2 and shown in Figure 4, in two sidewalls of the diversion trench 111 that the first plate body 11 has in the technique scheme, the first side wall 113 of close gas ejection ports 15 has the water conservancy diversion slope, puts D1 at the bottom of the water conservancy diversion summit C sensing water conservancy diversion on water conservancy diversion slope, and/or, the direction of point D2 at the bottom of the water conservancy diversion, the upstream point on water conservancy diversion slope is apart from the distance of the end surfaces of spray nozzle part, greater than the point downstream on the water conservancy diversion slope distance apart from the end surfaces of spray nozzle part.
The water conservancy diversion summit C on water conservancy diversion slope refers to bottom farthest the position of the first side wall 113 middle distance air knife bodies, position C as shown in Figure 4, point refers to the bottom nearest position of the first side wall 113 middle distance air knife bodies, as shown in Figure 4 position D1 and D2 at the bottom of the water conservancy diversion on water conservancy diversion slope.The setting on water conservancy diversion slope can make the liquid stream water conservancy diversion direction water conservancy diversion along the water conservancy diversion slope entering diversion trench 111 after, flows to some D1 at the bottom of the water conservancy diversion by water conservancy diversion summit C, and/or, put D2 at the bottom of the water conservancy diversion, strengthened the water conservancy diversion of diversion trench 111.
Concrete, structure as shown in Figure 6, the first side wall 113 of the above-mentioned diversion trench of mentioning 111 has a water conservancy diversion slope, and the water conservancy diversion summit on water conservancy diversion slope is an end of the first side wall 113, and point is the other end of the first side wall 113 at the bottom of the water conservancy diversion on water conservancy diversion slope.
Perhaps, structure as shown in Figure 4, the first side wall 113 of above-mentioned diversion trench 111 has two water conservancy diversion slopes, and two water conservancy diversion slopes have same water conservancy diversion summit C, point D1 is an end of the first side wall 113 at the bottom of the water conservancy diversion on one water conservancy diversion slope, and some D2 is the other end of the first side wall 113 at the bottom of the water conservancy diversion on another water conservancy diversion slope.
The water conservancy diversion slope is set to segmental structure, the water conservancy diversion direction of diversion trench 111 can be divided into both direction, can play shunting action, and the liquid flow point both direction that flows into diversion trench 111 is carried out water conservancy diversion, has further strengthened the water conservancy diversion of diversion trench.
Further, in the optimal technical scheme, above-mentioned gas passes into mouth 13 for a plurality of, and evenly distributes along the length direction of air knife body.Gas passes into mouthful 13 length directions along the air knife body and evenly distributes, the homogeneity in the time of can strengthening gas and pass into gas chamber 16.
Preferably, has gasket seal 17 between two faces that the first plate body 11 is relative with the second plate body 12.
The setting of diaphragm seal 17, can strengthen the stopping property of edge between the first plate body 11 and the second plate body 12, prevent that gas chamber 16 from producing gas leak phenomenon except the position beyond the gas ejection ports 15, prevent from leaking gas the bubble that produces at this external surface of air knife to the sputter of liquid, strengthen the harmony of product etching.
Embodiment two
Such as Fig. 2 ~ shown in Figure 6.
The air knife device that is used for wet-method etching equipment that the utility model provides, comprise the air knife body, the air knife body comprises and being fixedly connected with, and two relative faces form the first plate body 11 and second plate body 12 of gas chamber 16, one end of the first plate body 11 and the second plate body 12 forms the spray nozzle part with a line gas ejection ports 15, specifically dotted line frame B is regional as shown in Figure 2 for spray nozzle part, gas ejection ports 15 is communicated with gas chamber 16 fluids, the first plate body 11 has at least one gas that is communicated with gas chamber 16 fluids and passes into mouthfuls 13, the outside surface that the first plate body 11 deviates from gas chamber 16 is formed at least one diversion trench 111 of liquid diversion gas ejection ports 15 corresponding zones of will converge on the first plate body 11, diversion trench 111 runs through the length direction of the first plate body 11, simultaneously, the outside surface 123 that the second plate body 12 deviates from gas chamber 16 has at least one diversion trench, is used for liquid diversion gas ejection ports 15 corresponding zones of converging on the second plate body 12.
The air knife device that the utility model provides, described in embodiment one, diversion trench 111 can converge the drop that splashes to the outside surface 112 of the first plate body 11 the liquid conductance elsewhere that forms and flow down, and then reduces the liquid that converges on the first plate body 11 and flow the inhomogeneity impact of air curtain that gas ejection ports 15 is formed; In like manner, the second plate body 12 deviates from liquid conductance that diversion trench that the outside surface 123 of gas chamber 16 forms can pool the drop on the second plate body 12 from the zone of gas ejection ports 15 correspondences, the liquid that has reduced on the second plate body 12 flows the inhomogeneity impact of air curtain that gas ejection ports 15 is formed, and has further reduced the liquid stream that converges on the air knife body gas ejection ports 15 is formed the inhomogeneity impact of air curtains.
Concrete, the outside surface 123 that above-mentioned the second plate body 12 deviates from gas chamber 16 has two diversion trenchs, as shown in Figures 2 and 3, is respectively diversion trench 121 and diversion trench 122.Diversion trench is set to two, and distributes up and down, and the liquid stream that can converge drop on the second plate body 12 to greatest extent carries out water conservancy diversion.
Further, mounting block between above-mentioned the first plate body 11 and the second plate body 12 is two row's fastening screws, each fastening screw is passed with the first plate body 11 by the second plate body 12 and is fixedly connected with, and evenly distributes in the diversion trench of each row's retaining screw on the second plate body 12.
As shown in Figures 2 and 3, the diversion trench 121 interior distributions that one row's retaining screw 141 arranges at the second plate body 12, then diversion trench 121 can be arranged the liquid that converges on the nut of each retaining screw in the retaining screw 141 to this and carries out water conservancy diversion, prevents that the fluid drips that converges on the nut from dropping on the product; The diversion trench 122 interior distributions that another row's retaining screw 142 arranges at the second plate body 12, then diversion trench 122 can be arranged the liquid that converges on the nut of each retaining screw in the retaining screw 142 to this and carries out water conservancy diversion, prevents that the fluid drips that converges on the nut from dropping on the product.
Certainly, the concrete structure of above-mentioned diversion trench 111, diversion trench 121 and diversion trench 122 and concrete set-up mode can have multiple choices:
As, in the optimal technical scheme, at least one in above-mentioned diversion trench 111, diversion trench 121 and the diversion trench 122, in two sidewall, the angle between the first side wall of close gas ejection ports 15 and the bottom land of this diversion trench is acute angle.
Because air knife device in use, the injection direction of gas ejection ports 15 is downward, is described as an example of diversion trench 111 example; In the diversion trench 111, angle α between the first side wall 113 of close gas ejection ports 15 and the bottom land of diversion trench 111 is acute angle, then the height in the outside of diversion trench 111 the first side walls 113 is higher than inboard height, liquid stream flows into after the diversion trench 111, can be stopped by the outside of the first side wall 113, can only flow along the water conservancy diversion direction of diversion trench 111, strengthened the flow conductivity of diversion trench 111.
Preferably, as shown in Figure 2, angle α is acute angle between the first side wall 113 of above-mentioned diversion trench 111 and its bottom land, and the first side wall 125 and the angle β between its bottom land of diversion trench 121 are acute angle, and the first side wall 124 and the angle γ between its bottom land of diversion trench 122 are acute angle.
Further, in the optimal technical scheme, such as Fig. 2 and shown in Figure 4, in two sidewalls of the diversion trench 111 that the first plate body 11 has in the technique scheme, the first side wall 113 of close gas ejection ports 15 has the water conservancy diversion slope, puts D1 at the bottom of the water conservancy diversion summit C sensing water conservancy diversion on water conservancy diversion slope, and/or, the direction of point D2 at the bottom of the water conservancy diversion, the upstream point on water conservancy diversion slope is apart from the distance of the end surfaces of spray nozzle part, greater than the point downstream on the water conservancy diversion slope distance apart from the end surfaces of spray nozzle part.
The water conservancy diversion summit C on water conservancy diversion slope refers to bottom farthest the position of the first side wall 113 middle distance air knife bodies, position C as shown in Figure 4, point refers to the bottom nearest position of the first side wall 113 middle distance air knife bodies, as shown in Figure 4 position D1 and D2 at the bottom of the water conservancy diversion on water conservancy diversion slope.The setting on water conservancy diversion slope can make the liquid stream water conservancy diversion direction water conservancy diversion along the water conservancy diversion slope entering diversion trench 111 after, flows to some D1 at the bottom of the water conservancy diversion by water conservancy diversion summit C, and/or, put D2 at the bottom of the water conservancy diversion, strengthened the water conservancy diversion of diversion trench 111.
Concrete, structure as shown in Figure 6, the first side wall 113 of the above-mentioned diversion trench of mentioning 111 has a water conservancy diversion slope, and the water conservancy diversion summit on water conservancy diversion slope is an end of the first side wall 113, and point is the other end of the first side wall 113 at the bottom of the water conservancy diversion on water conservancy diversion slope.
Perhaps, structure as shown in Figure 4, the first side wall 113 of above-mentioned diversion trench 111 has two water conservancy diversion slopes, and two water conservancy diversion slopes have same water conservancy diversion summit C, point D1 is an end of the first side wall 113 at the bottom of the water conservancy diversion on one water conservancy diversion slope, and some D2 is the other end of the first side wall 113 at the bottom of the water conservancy diversion on another water conservancy diversion slope.
The water conservancy diversion slope is set to segmental structure, the water conservancy diversion direction of diversion trench 111 can be divided into both direction, can play shunting action, and the liquid flow point both direction that flows into diversion trench 111 is carried out water conservancy diversion, has further strengthened the water conservancy diversion of diversion trench.
Certainly, the diversion trench 121 that the outside surface 123 of the second plate body 12 has and diversion trench 122 also can have above-mentioned water conservancy diversion slope, such as Fig. 3 and shown in Figure 5.
Further, in the optimal technical scheme, above-mentioned gas passes into mouth 13 for a plurality of, and evenly distributes along the length direction of air knife body.Gas passes into mouthful 13 length directions along the air knife body and evenly distributes, the homogeneity in the time of can strengthening gas and pass into gas chamber 16.
Preferably, has gasket seal 17 between two faces that the first plate body 11 is relative with the second plate body 12.
The setting of diaphragm seal 17, can strengthen the stopping property of edge between the first plate body 11 and the second plate body 12, prevent that gas chamber 16 from producing gas leak phenomenon except the position beyond the gas ejection ports 15, prevent from leaking gas the bubble that produces at this external surface of air knife to the sputter of liquid, strengthen the harmony of product etching.
Certainly, above-described embodiment one and embodiment two only are the preferred embodiments among many embodiment of combining of above-mentioned ten kinds of technical schemes, and above-mentioned ten kinds of technical schemes can also be combined into other embodiment, give unnecessary details no longer one by one here.
Obviously, those skilled in the art can carry out various changes and modification to the utility model embodiment and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (10)
1. air knife device that is used for wet-method etching equipment, comprise the air knife body, described air knife body comprises and being fixedly connected with and relative two faces form the first plate body and second plate body of gas chamber, one end of described the first plate body and the second plate body forms the spray nozzle part with a line gas ejection ports, described gas ejection ports is communicated with the gas chamber fluid, described the first plate body has at least one gas that is communicated with the gas chamber fluid and passes into mouth, it is characterized in that
The outside surface that described the first plate body deviates from described gas chamber is formed at least one diversion trench of the liquid diversion gas ejection ports corresponding zone of will converge on the first plate body, and described diversion trench runs through the length direction of described the first plate body.
2. air knife device according to claim 1 is characterized in that, the outside surface that described the second plate body deviates from described gas chamber is formed at least one diversion trench of the liquid diversion gas ejection ports corresponding zone of will converge on the second plate body.
3. air knife device according to claim 2 is characterized in that, the outside surface that the second plate body deviates from described gas chamber has two diversion trenchs.
4. air knife device according to claim 3, it is characterized in that, described the first plate body is fixedly connected with by two row's fastening screws with the second plate body, each described fastening screw is passed with the first plate body by the second plate body and is fixedly connected with, and each arranges evenly distribution in the diversion trench of described retaining screw on described the second plate body.
5. air knife device according to claim 1 is characterized in that, in two sidewalls of a described diversion trench, the angle between the first side wall of close described gas ejection ports and the bottom land of diversion trench is acute angle.
6. air knife device according to claim 1 is characterized in that, in two sidewalls of at least one described diversion trench, the first side wall of close described gas ejection ports has the water conservancy diversion slope; Point to the direction of point at the bottom of the water conservancy diversion along the water conservancy diversion summit on described water conservancy diversion slope, the upstream point on described water conservancy diversion slope is apart from the distance of the end surfaces of described spray nozzle part, greater than the distance of the end surfaces of the described spray nozzle part of point downstream distance on described water conservancy diversion slope.
7. air knife device according to claim 6 is characterized in that, described the first side wall has a water conservancy diversion slope, and the water conservancy diversion summit on described water conservancy diversion slope is an end of the first side wall, and point is the other end of the first side wall at the bottom of the water conservancy diversion on described water conservancy diversion slope.
8. air knife device according to claim 6, it is characterized in that, described the first side wall has two water conservancy diversion slopes, two described water conservancy diversion slopes have same water conservancy diversion summit, point is an end of the first side wall at the bottom of the water conservancy diversion on one described water conservancy diversion slope, and point is the other end of the first side wall at the bottom of the water conservancy diversion on another described water conservancy diversion slope.
9. air knife device according to claim 1 is characterized in that, described gas passes into mouth for a plurality of, and evenly distributes along the length direction of described air knife body.
10. each described air knife device is characterized in that according to claim 1-9, has gasket seal between described the first plate body two faces relative with the second plate body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220364688 CN202705232U (en) | 2012-07-25 | 2012-07-25 | Air knife device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220364688 CN202705232U (en) | 2012-07-25 | 2012-07-25 | Air knife device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202705232U true CN202705232U (en) | 2013-01-30 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220364688 Expired - Fee Related CN202705232U (en) | 2012-07-25 | 2012-07-25 | Air knife device |
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| Country | Link |
|---|---|
| CN (1) | CN202705232U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106345623A (en) * | 2016-09-18 | 2017-01-25 | 京东方科技集团股份有限公司 | Gas-liquid cutter and control method thereof |
| CN106460139A (en) * | 2015-03-30 | 2017-02-22 | 株式会社三旴Eco | Air knife width changing device having excellent operation efficiency |
| CN113544305A (en) * | 2019-02-26 | 2021-10-22 | 杰富意钢铁株式会社 | Gas wiping nozzle and method for manufacturing molten metal plated metal strip |
| CN115537700A (en) * | 2022-08-30 | 2022-12-30 | 武汉钢铁有限公司 | Air knife |
-
2012
- 2012-07-25 CN CN 201220364688 patent/CN202705232U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106460139A (en) * | 2015-03-30 | 2017-02-22 | 株式会社三旴Eco | Air knife width changing device having excellent operation efficiency |
| CN106460139B (en) * | 2015-03-30 | 2018-08-24 | 株式会社三旴Eco | The variable-width device of the outstanding air knife of operational efficiency |
| CN106345623A (en) * | 2016-09-18 | 2017-01-25 | 京东方科技集团股份有限公司 | Gas-liquid cutter and control method thereof |
| CN106345623B (en) * | 2016-09-18 | 2018-10-02 | 京东方科技集团股份有限公司 | The control method of the gentle liquid cutter of gas-liquid knife |
| CN113544305A (en) * | 2019-02-26 | 2021-10-22 | 杰富意钢铁株式会社 | Gas wiping nozzle and method for manufacturing molten metal plated metal strip |
| CN113544305B (en) * | 2019-02-26 | 2023-07-07 | 杰富意钢铁株式会社 | Gas wiping nozzle and method for producing molten metal plated metal strip |
| CN115537700A (en) * | 2022-08-30 | 2022-12-30 | 武汉钢铁有限公司 | Air knife |
| CN115537700B (en) * | 2022-08-30 | 2024-04-23 | 武汉钢铁有限公司 | Air knife |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
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Granted publication date: 20130130 Termination date: 20210725 |