CN202649489U - Base plate detection apparatus - Google Patents
Base plate detection apparatus Download PDFInfo
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- CN202649489U CN202649489U CN 201220328429 CN201220328429U CN202649489U CN 202649489 U CN202649489 U CN 202649489U CN 201220328429 CN201220328429 CN 201220328429 CN 201220328429 U CN201220328429 U CN 201220328429U CN 202649489 U CN202649489 U CN 202649489U
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Abstract
The utility model relates to the liquid crystal display technology field, especially to base plate detection apparatus that is used for improving the production efficiency of a liquid crystal panel. More particularly, disclosed in the utility model is a base plate detection apparatus that comprises a bearing platform for baring a base plate and a control system. A sensor having a signal transmitting terminal and a signal receiving terminal is arranged at one of the upper side and the lower side of the bearing platform; and a signal processing board opposite to the sensor is arranged at another side between the upper side and the lower side of the bearing platform. And the control system is in signal connected with the sensor. Besides, the signal transmitting terminal and the signal receiving terminal of the sensor are at the same end surface that is parallel to the end surface of the signal processing board. The control system can accurately determine whether there is a to-be-processed base plate on the bearing platform according to the setting of the system and the signal state of the signal transmitting terminal of the sensor, thereby reducing the time and the number of times of shutdown of automatic production equipment due to wrong detection and thus improving the production efficiency of the liquid crystal panel.
Description
Technical field
The utility model relates to technical field of liquid crystal display, particularly a kind of substrate detection apparatus.
Background technology
At present, in producing the liquid crystal panel process, generally all in automated production equipment, carry out, can reduce like this use of manpower, make the liquid crystal panel of producing have good consistance, and then improved the yield of liquid crystal panel.
But, above-mentioned manufacturing method is also had higher requirement to substrate detection apparatus in the automated production equipment when having reduced manual operation, occurs to prevent the maloperation situation; That is to say, automated production equipment will be treated treatment substrate and carry out PROCESS FOR TREATMENT, at first will confirm whether there is pending substrate in the automated production equipment; Whether as when glass substrate is made pixel electrode or public electrode, at first will judge has pending glass substrate to exist in automated production equipment, then just can carry out next step action; But the substrate detection apparatus in the existing automated production equipment; it is disconnected that erroneous judgement often appears; judge namely whether pending substrate exists inaccurate in automated production equipment, cause like this automated production equipment often to be shut down, seriously influenced the production efficiency of liquid crystal panel.
The utility model content
The purpose of this utility model has provided a kind of substrate detection apparatus, is used for improving the production efficiency of liquid crystal panel.
The substrate detection apparatus that the utility model provides comprises: the plummer that is used for bearing substrate, the upside of described plummer and downside wherein are provided with the sensor that comprises signal transmitting terminal and signal receiving end on the side, be provided with the signal-processing board relative with described sensing station on the opposite side in the upside of described plummer and the downside, and the control system that is connected with described sensor signal; Wherein, the signal transmitting terminal of described sensor and signal receiving end are on same end face, and be and parallel to each other with the end face of described signal-processing board.
Preferably, described sensor and described signal-processing board are obliquely installed the upper and lower both sides in plummer.
Preferably, described sensor and described signal-processing board angle of inclination with respect to the horizontal plane greater than 0 ° less than 90 °.
Preferably, described sensor and signal-processing board angle of inclination with respect to the horizontal plane is 45 °.
Preferably, described sensor is photoelectric sensor, and described signal-processing board is the baffle of the light signal that is used for absorbing described photoelectric sensor and launches.
Preferably, described signal transmitting terminal and signal receiving end are photoelectric sensor, and described signal-processing board is for being used for the light signal that described photoelectric sensor is launched is reflected back the reflecting plate of described photoelectric sensor.
Preferably, described signal transmitting terminal and signal receiving end are range sensor, and described signal-processing board is reflecting plate, baffle.
From technique scheme as can be known; the substrate detection apparatus that the utility model provides; sensor has signal transmitting terminal and the signal receiving end in the same side; the light signal that the signal transmitting terminal of sensor is launched is absorbed or reflects by signal-processing board; then according to the signal condition of the signal receiving end of the default of control system and sensor; judge that whether remaining treatment substrate on plummer exists; improved the performance of substrate detection apparatus; thereby reduced shutdown number of times and time that automated production equipment causes because of the error detection of substrate detection apparatus, thereby improved the production efficiency of liquid crystal panel.
Description of drawings
Fig. 1 is the structural representation of substrate detection apparatus among the utility model embodiment;
Fig. 2 is the structural representation during without glass substrate on the substrate detection apparatus in the utility model specific embodiment one;
Fig. 3 is the structural representation when having the glass substrate that does not have edge deformation on the substrate detection apparatus in the utility model specific embodiment one;
Fig. 4 is the structural representation when having the glass substrate of edge deformation in the utility model specific embodiment one on the substrate detection apparatus;
Fig. 5 is the structural representation during without glass substrate on the substrate detection apparatus in the utility model specific embodiment two;
Fig. 6 is the structural representation when having the glass substrate that does not have edge deformation on the substrate detection apparatus in the utility model specific embodiment two;
Fig. 7 is the structural representation when having the glass substrate of edge deformation in the utility model specific embodiment two on the substrate detection apparatus;
Fig. 8 is the structural representation during without glass substrate on the substrate detection apparatus in the utility model specific embodiment three;
Fig. 9 is the structural representation when having the glass substrate of edge deformation in the utility model specific embodiment three on the substrate detection apparatus.
Embodiment
Substrate detection apparatus in the existing automated production equipment erroneous judgement often occurs disconnected, judges that namely whether to have glass substrate on plummer inaccurate, causes like this automated production equipment often to be shut down, and has seriously influenced the production efficiency of liquid crystal panel.
In view of this; the utility model provides a kind of substrate detection apparatus; by being used in conjunction with of sensor, signal-processing board and control system; can improve the performance of substrate detection apparatus; reduce shutdown number of times and time that automated production equipment causes because of the error detection of substrate detection apparatus, thereby improve the production efficiency of liquid crystal panel.
In order to make those skilled in the art better understand the technical solution of the utility model, below in conjunction with Figure of description the utility model embodiment is described in detail.
As shown in Figure 1, the utility model embodiment provides a kind of substrate detection apparatus that is applied in the automated production equipment, comprise: the plummer 10 that is used for bearing substrate, the upside of plummer 10 and downside wherein are provided with the sensor 20 that comprises signal transmitting terminal and signal receiving end on the side, be provided with the signal-processing board 30 relative with sensor 20 positions on the opposite side in the upside of plummer 10 and the downside, and the control system (not shown in FIG.) that is connected with sensor 20 signals; Wherein, the signal transmitting terminal of sensor 20 and signal receiving end are on same end face, and be and parallel to each other with the end face of signal-processing board 30.
Need to prove, whether detection remains treatment substrate on plummer 10 exists, the light signal of the signal transmitting terminal emission of sensor 20 is the edges that are radiated at pending substrate, can judge whether the position of pending substrate on plummer 10 has skew so simultaneously, namely detect pending substrate whether in the predeterminable area on plummer 10.
Control system judges whether there is pending substrate on plummer 10 according to the signal condition of the signal receiving end of default and sensor 20, and is specific as follows:
Specific embodiment one, as shown in Figure 2, the utility model specific embodiment one provides a kind of substrate detection apparatus that is applied in the automated production equipment, comprise: the plummer 100 that is used for bearing substrate, be positioned at the upside of plummer 100 and photoelectric sensor 110 and the signal-processing board 120 of downside, and the control system (not shown in FIG.) that is connected with photoelectric sensor 110 signals; Wherein, the signal transmitting terminal of photoelectric sensor 110 and signal receiving end are on same end face, and be and parallel to each other with the end face of signal-processing board 120.
Particularly, the aforesaid substrate pick-up unit is positioned at the process chamber 1 of automated production equipment, and wherein, plummer 100 is arranged in process chamber 1, and the upper surface of plummer 100 is parallel with surface level; Photoelectric sensor 110 is arranged on the inwall end face of process chamber 1 at plummer 100 upsides; Signal-processing board 120 is the baffle of the signal that is used for absorbing photoelectric sensor 110 and launches; Signal-processing board 120 is at plummer 100 downsides, be arranged on the inwall bottom surface of process chamber 1, and photoelectric sensor 110 is relative with signal-processing board 120 positions, and the signal transmitting terminal of photoelectric sensor 110 is parallel with surface level with the end face at signal receiving end place, the end face of signal-processing board 120 is also parallel with surface level, and namely the end face at the signal transmitting terminal of the end face of signal-processing board 120 and photoelectric sensor 110 and signal receiving end place is relative and parallel.Certainly, aforesaid substrate pick-up unit, signal-processing board 120 also can be arranged on the inwall end face of process chamber 1, and corresponding photoelectric sensor 110 is arranged on the inwall bottom surface of process chamber 1.
Control system is connected with photoelectric sensor 110 signals, is used on the one hand the signal transmitting terminal emission of light signal of control photoelectric sensor 110; Be used on the other hand judging according to the signal condition of the signal receiving end of default and photoelectric sensor 110 whether automated production equipment exists glass substrate.
As shown in Figure 2, when the signal receiving end of photoelectric sensor 110 does not receive the reflection ray signal, that is to say, the light signal of the signal transmitting terminal emission of photoelectric sensor 110 is absorbed by signal-processing board 120, signal receiving end does not receive the reflection ray signal, at this moment, the control system that is connected with photoelectric sensor 110 signals determines do not have glass substrate on the plummer 100 according to the signal condition of default and photoelectric sensor 110 signal receiving ends.
As shown in Figure 3, when the signal receiving end of photoelectric sensor 110 receives the reflection ray signal, that is to say, the light signal of the signal transmitting terminal emission of photoelectric sensor 110 reflexes to signal receiving end through object and connects, at this moment, control system determines to have on the plummer 100 glass substrate 130 to exist according to the signal condition of default and photoelectric sensor 110 signal receiving ends.
But; in specific embodiment one; when the thinner thickness of glass substrate 130 (when normally the thickness of glass substrate is less than 0.6T; have deformation to occur at the edge of glass substrate) or hardness when low; the edge be prone to distortion; this moment, the signal receiving end of photoelectric sensor 110 did not receive the reflection ray signal; as shown in Figure 4; glass substrate 131 be equipped with distortion at margin location; the light signal of the signal transmitting terminal emission of photoelectric sensor 110 is radiated at the deformed region of glass substrate 131; according to the reflection of light rule; the light signal of incident will be reflected to other places; can not reflex to the signal receiving end of photoelectric sensor 110; the signal receiving end that is photoelectric sensor 110 does not receive the reflection ray signal; at this moment; control system determines not have on the plummer 100 glass substrate 131 to exist according to the signal condition of default and photoelectric sensor 110 signal receiving ends; the information that causes control system to confirm does not square with the fact; control system will start the self-protection program; automatically automated production equipment is out of service; particularly (thickness is less than the 0.6T glass substrate at the conversion different-thickness; marginal position at glass substrate is prone to distortion) glass substrate is than in the situation more frequently; cause automated production equipment often to stop, reducing the production efficiency of liquid crystal panel.Therefore provide a kind of improvement technical scheme based on specific embodiment one below.
Specific embodiment two, as shown in Figure 5, the utility model specific embodiment two provides a kind of substrate detection apparatus that is applied in the automated production equipment, comprise: the plummer 200 that is used for bearing substrate, be positioned at the upside of plummer 200 and photoelectric sensor 210 and the signal-processing board 220 of downside, and the control system (not shown in FIG.) that is connected with photoelectric sensor 210 signals; Wherein, the signal transmitting terminal of photoelectric sensor 210 and signal receiving end are on same end face, and be and parallel to each other with the end face of signal-processing board 220, and photoelectric sensor 210 and signal-processing board 220 upside that is arranged on plummer 200 and the downside that tilt.
Particularly, the aforesaid substrate pick-up unit is positioned at the process chamber 1 of automated production equipment, and wherein, plummer 200 is arranged in process chamber 1, and the upper surface of plummer 200 is parallel with surface level.Photoelectric sensor 210 comprises signal transmitting terminal and signal receiving end, and the end face of the end face of signal transmitting terminal and signal receiving end is in same plane; Photoelectric sensor 210 is above plummer 200, be installed on the inwall end face of process chamber 1, and angle of inclination with respect to the horizontal plane greater than 0 ° less than 90 °, be the end face pitch angle with respect to the horizontal plane at the signal transmitting terminal of photoelectric sensor 210 and signal receiving end place greater than 0 ° less than 90 °, preferably, described pitch angle is 45 °.Signal-processing board 220 is for the reflecting plate of the signal receiving end of the signal reflex light echo electric transducer 210 that photoelectric sensor 210 is launched, and comprises mirror surface; Signal-processing board 220 is installed on the inwall side of process chamber 1 below plummer 200, and the mirror surface of signal-processing board 220 is parallel with the end face of the signal transmitting terminal of photoelectric sensor 210; That is to say, signal-processing board 220 angle of inclination with respect to the horizontal plane greater than 0 ° less than 90 °, the light signal of the signal transmitting terminal emission of photoelectric sensor 210 shines on the mirror surface of reflecting plate, the light signal of reflection can be received by the signal transmitting terminal, and namely described mirror surface can reflex to signal receiving end to the light signal of signal transmitting terminal emission.
Control system is connected with photoelectric sensor 210 signals, is used on the one hand the signal transmitting terminal emission of light signal of control photoelectric sensor 210; Be used on the other hand judging whether there is glass substrate on the plummer 200 according to the signal condition of the signal receiving end of default and photoelectric sensor 210.
Detection mode is: when signal receiving end receives the reflection ray signal, that is to say, the light signal of signal transmitting terminal emission shines directly on the mirror surface, reflexive property according to light, the incident ray signal is reflected mirror-reflection to signal receiving end, at this moment, control system thinks do not have the glass substrate existence on the plummer 200 according to the signal condition of default and signal receiving end.When signal receiving end does not receive the reflection ray signal, that is to say, the edge that shines glass substrate to be detected that the light signal of signal transmitting terminal emission tilts, reflexive property according to light, the incident ray signal is reflexed to except the signal receiving end place outside by glass substrate to be detected, signal receiving end does not receive the reflection ray signal, and at this moment, control system determines to have on the plummer 200 glass substrate to exist according to the signal condition of the signal receiving end of photoelectric sensor 210.
In order to prevent the interference that other reflection causes and the judgement precision that improves apparatus control system, according to when plummer 200 does not have glass substrate, the light signal of signal transmitting terminal emission directly is reflected mirror-reflection to signal receiving end, at this moment, the reflection ray signal intensity that signal receiving end receives is the strongest, the light signal intensity that signal receiving end can receive during by the direct reflection ray signal of statistics Multi reflection minute surface, the minimum value of the light signal intensity that signal receiving end can receive in the time of can obtaining the direct reflection ray signal of mirror surface according to statistics.
Whether therefore, the light signal intensity size that receives according to signal receiving end of apparatus control system is judged has glass substrate to be detected to exist on the plummer 200.When signal receiving end received the light signal minimum of intensity that light signal intensity can receive less than the direct reflex time signal receiving end of mirror surface, apparatus control system determined that glass substrate to be detected is arranged on the plummer 200; Otherwise when signal receiving end received the light signal minimum of intensity that light signal intensity can receive more than or equal to the direct reflex time signal receiving end of mirror surface, control system determined there is not glass substrate to be detected on the plummer 200.
As shown in Figure 6, glass substrate 230 is arranged on plummer 200, and when the edge of glass substrate 230 is not out of shape, the light signal of signal transmitting terminal emission shines glass substrate 230 with certain pitch angle, reflexive property according to light, the incident ray signal is reflected to except the signal receiving end place outside, and both made the part light signal see through the mirror surface of glass substrate 230 arriving signal disposable plates 220 because of refraction, change because of incident angle, mirror surface can reflex to signal receiving end to the light signal that sees through, it is very weak that signal receiving end receives light signal intensity, that is to say, signal receiving end receives the light signal minimum of intensity that light signal intensity can receive less than the direct reflex time signal receiving end of mirror surface, at this moment, the light signal intensity size that receives according to signal receiving end of control system determines to have on the plummer 200 glass substrate 230 to exist.
As shown in Figure 7, glass substrate 231 is arranged on plummer 200, and when there is distortion at the edge of glass substrate 231, at this moment, the light signal of signal transmitting terminal emission shines the crushed element of glass substrate 231 with certain pitch angle, reflexive property according to light, the incident ray signal is reflected to except the signal receiving end place outside, signal receiving end does not receive the reflection ray signal, or the reflection ray signal intensity that the receives light signal minimum of intensity that can receive less than the direct reflex time signal receiving end of mirror surface, the light signal intensity size that control system receives according to signal receiving end determines to have on the plummer 200 glass substrate 231 to exist.
From above-mentioned specific embodiment two as can be known; by changing the mounting means of photoelectric sensor 210; even between the end face of the signal transmitting terminal of photoelectric sensor 210 and the surface level certain pitch angle is arranged; the light of the signal transmitting terminal emission of photoelectric sensing 210 devices can be reflexed to by the mirror surface of signal-processing board 220 the signal transmitting terminal of photoelectric sensor 210; but there is the pending substrate of distortion in photoelectric sensor 210 Edge detecteds; can improve like this control system and judge on plummer 200, whether to remain the precision for the treatment of substrate; effectively reduce the unnecessary stop time of automated production equipment, thereby improved the production efficiency of liquid crystal panel.
Specific embodiment three, as shown in Figure 8, the utility model specific embodiment three provides a kind of substrate detection apparatus that is applied in the automated production equipment, comprising: apparatus control system (not shown in FIG.), plummer 300, range sensor 310 and signal-processing board; Wherein, range sensor 310 comprises: signal transmitting terminal and signal receiving end; Range sensor 310 is installed on the inwall end face of process chamber 1 at the upside of plummer 300, and the inwall bottom reflection that the light of signal transmitting terminal emission can processed chamber 1 is to signal receiving end.Signal-processing board is reflecting plate, baffle or other barrier, and signal-processing board is the inwall bottom surface of process chamber 1 in the present embodiment.Control system is connected with range sensor 310 signals, is used for judging whether there is glass substrate on the plummer 300.
Usually range sensor 310 be utilize the principle of " time-of-flight method " (flying time) realize range finding from, with a kind of sensor of the distance of inspected object." time-of-flight method " is by the short especially light pulse of emission, and measures this light pulse from being transmitted into the time that is reflected by the object, by survey that the time interval calculates and object between distance.Therefore, the detection mode of range sensor 310 is: the signal transmitting terminal utilizing emitted light pulse of range sensor 310, measure described light pulse from being transmitted into the time that is reflected by the object, calculate distance between range sensor 310 and the object by surveying the time interval, when described distance during less than or equal to the pending substrate of setting and the maximum distance between the range sensor 310, control system determines to exist on the plummer 300 pending substrate according to the distance signal of described range sensor 310 feedbacks; Otherwise, when described distance greater than the pending substrate of setting during with the maximum distance between the range sensor 310, the distance signal that control system is fed back according to described range sensor 310, determining does not have pending glass substrate on the plummer 300.Wherein, described maximum distance is: when pending glass substrate contacted fully with the bottom surface of process chamber 1 inwall, range sensor 310 was to the distance of pending glass substrate; In other words, range sensor 310 deducts the distance that pending thickness of glass substrate obtains to the bottom surface distance of process chamber 1 inwall.
As shown in Figure 9, pending glass substrate (whether the edge that is not limited to pending glass substrate exists distortion) is arranged when existing on plummer 300, range sensor that range sensor 310 detects 310 detect and object between distance during less than or equal to the pending substrate of setting and the maximum distance between the range sensor 310, control system determines to exist on the plummer 300 pending glass substrate according to the distance signal of described range sensor 310 feedbacks.
As seen, in the specific embodiment three, by changing the type of sensor, namely adopt range sensor 310; But there is the pending substrate of distortion in Edge detected; significantly improved control system and judged on plummer 300, whether to remain the precision for the treatment of substrate; effectively reduce the unnecessary stop time of automated production equipment, thereby improved the production efficiency of liquid crystal panel.
In above-mentioned three specific embodiments, the sensor of substrate detection apparatus and signal-processing board are positioned at the upper and lower of plummer, be on 1 inwall of alignment processing chamber, but be not limited to this, sensor and signal-processing board also can be arranged on by other mounting means the up and down both sides of plummer, as, adopt rack form, the upside of sensor setting at plummer, signal-processing board is arranged on the downside of plummer.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (7)
1. substrate detection apparatus, it is characterized in that, comprise: the plummer that is used for bearing substrate, the upside of described plummer and downside wherein are provided with the sensor that comprises signal transmitting terminal and signal receiving end on the side, be provided with the signal-processing board relative with described sensing station on the opposite side in the upside of described plummer and the downside, and the control system that is connected with described sensor signal; Wherein, the signal transmitting terminal of described sensor and signal receiving end are on same end face, and be and parallel to each other with the end face of described signal-processing board.
2. substrate detection apparatus as claimed in claim 1 is characterized in that, described sensor and described signal-processing board are obliquely installed the upper and lower both sides in plummer.
3. substrate detection apparatus as claimed in claim 2 is characterized in that, described sensor and described signal-processing board angle of inclination with respect to the horizontal plane greater than 0 ° less than 90 °.
4. substrate detection apparatus as claimed in claim 3 is characterized in that, described sensor and signal-processing board angle of inclination with respect to the horizontal plane is 45 °.
5. such as the described substrate detection apparatus of claim 1 ~ 4, it is characterized in that, described sensor is photoelectric sensor, and described signal-processing board is the baffle of the light signal that is used for absorbing described photoelectric sensor and launches.
6. such as the described substrate detection apparatus of claim 1 ~ 4, it is characterized in that, described signal transmitting terminal and signal receiving end are photoelectric sensor, and described signal-processing board is for being used for the light signal that described photoelectric sensor is launched is reflected back the reflecting plate of described photoelectric sensor.
7. such as the described substrate detection apparatus of claim 1 ~ 4, it is characterized in that, described signal transmitting terminal and signal receiving end are range sensor, and described signal-processing board is reflecting plate, baffle.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220328429 CN202649489U (en) | 2012-07-06 | 2012-07-06 | Base plate detection apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220328429 CN202649489U (en) | 2012-07-06 | 2012-07-06 | Base plate detection apparatus |
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| CN202649489U true CN202649489U (en) | 2013-01-02 |
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| CN 201220328429 Expired - Lifetime CN202649489U (en) | 2012-07-06 | 2012-07-06 | Base plate detection apparatus |
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| CN104176332A (en) * | 2014-08-14 | 2014-12-03 | 广州达意隆包装机械股份有限公司 | Bottle lack detection device and detection method |
| CN106409148A (en) * | 2015-07-27 | 2017-02-15 | 三星显示有限公司 | Flexible display device |
| CN106567051A (en) * | 2016-11-16 | 2017-04-19 | 武汉华星光电技术有限公司 | Substrate coating carrier and substrate coating method |
| CN106908454A (en) * | 2015-12-23 | 2017-06-30 | 昆山国显光电有限公司 | The testing equipment and method of substrate |
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| WO2015109612A1 (en) * | 2014-01-23 | 2015-07-30 | 深圳市华星光电技术有限公司 | Device for detecting the existence of article in high-temperature cavity and detection method |
| CN103792590A (en) * | 2014-01-23 | 2014-05-14 | 深圳市华星光电技术有限公司 | Device and method for detecting whether articles exist in high-temperature cavity |
| US9678243B2 (en) | 2014-01-23 | 2017-06-13 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Detection device and method for detecting something existed in the high temperature cavity |
| CN104176332A (en) * | 2014-08-14 | 2014-12-03 | 广州达意隆包装机械股份有限公司 | Bottle lack detection device and detection method |
| CN106409148A (en) * | 2015-07-27 | 2017-02-15 | 三星显示有限公司 | Flexible display device |
| CN106409148B (en) * | 2015-07-27 | 2020-12-01 | 三星显示有限公司 | Flexible display device |
| CN106908454A (en) * | 2015-12-23 | 2017-06-30 | 昆山国显光电有限公司 | The testing equipment and method of substrate |
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| WO2018023978A1 (en) * | 2016-08-05 | 2018-02-08 | 京东方科技集团股份有限公司 | Position sensor, conveyor device comprising same, and method for correcting position by using position sensor |
| CN106567051A (en) * | 2016-11-16 | 2017-04-19 | 武汉华星光电技术有限公司 | Substrate coating carrier and substrate coating method |
| CN108717207A (en) * | 2018-05-21 | 2018-10-30 | 深圳市杰普特光电股份有限公司 | Panel places detection device and panel places detection method |
| CN108717207B (en) * | 2018-05-21 | 2024-03-29 | 深圳市杰普特光电股份有限公司 | Panel placement detection device and panel placement detection method |
| CN109413536A (en) * | 2018-12-20 | 2019-03-01 | 歌尔科技有限公司 | A kind of wireless headset enters box detection method, device and wireless headset charging box |
| CN109413536B (en) * | 2018-12-20 | 2020-06-30 | 歌尔科技有限公司 | Wireless earphone box-entering detection method and device and wireless earphone charging box |
| WO2021023176A1 (en) * | 2019-08-06 | 2021-02-11 | 杭州众硅电子科技有限公司 | Device for detecting wafer, and detection method therefor |
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