CN103691715B - A kind of substrate cleaning apparatus - Google Patents
A kind of substrate cleaning apparatus Download PDFInfo
- Publication number
- CN103691715B CN103691715B CN201310752372.5A CN201310752372A CN103691715B CN 103691715 B CN103691715 B CN 103691715B CN 201310752372 A CN201310752372 A CN 201310752372A CN 103691715 B CN103691715 B CN 103691715B
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- CN
- China
- Prior art keywords
- glass substrate
- laser displacement
- displacement sensor
- head body
- signal processor
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- 239000000758 substrate Substances 0.000 title claims abstract description 127
- 238000004140 cleaning Methods 0.000 title claims abstract description 77
- 239000011521 glass Substances 0.000 claims abstract description 101
- 238000006073 displacement reaction Methods 0.000 claims abstract description 72
- 238000001514 detection method Methods 0.000 claims description 26
- 230000002159 abnormal effect Effects 0.000 claims description 12
- 238000010586 diagram Methods 0.000 description 8
- 238000009434 installation Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention discloses a kind of substrate cleaning apparatus, comprising frame, for holding the microscope carrier of glass substrate, the cleaning head body being provided with ultrasonic transmitter, at least one laser displacement sensor and signal processor; Wherein, microscope carrier is fixed on frame; Cleaning head body is positioned at above microscope carrier, and is slidably mounted on frame; Laser displacement sensor is installed on cleaning head body and by measuring the range information between laser displacement sensor and glass baseplate surface to glass baseplate surface Emission Lasers detected ray; Signal processor judges glass substrate breakage when being connected with laser displacement sensor signal and occurring exception for the range information between laser displacement sensor and glass baseplate surface.Substrate cleaning apparatus provided by the invention can detect whether tested glass substrate has breakage exactly, and undetected situation can be avoided to occur, improves the recall rate of broken glass substrate.
Description
Technical Field
The invention relates to the field of liquid crystal display device manufacturing equipment, in particular to substrate cleaning equipment.
Background
In the fields of semiconductors and liquid crystal displays, vacuum equipment is a very important production equipment. The maintenance of the vacuum equipment is extremely hard, particularly when the vacuum equipment is abnormally shut down, the cavity needs to be opened to overhaul the interior of the vacuum equipment, but the vacuum equipment generally needs to be cooled for several hours and other special treatments before the cavity is opened, and after the vacuum equipment is overhauled and assembled, the temperature is raised for 7-8 hours and the vacuum pumping operation is needed, and after the vacuum pumping operation is completed, the normal production can be recovered by recovery operation for 3-4 hours, so that the utilization rate of the equipment is seriously influenced. Therefore, before each glass substrate is sent into the vacuum apparatus, it is necessary to detect whether the glass substrate is broken or not, so as to prevent the broken glass substrate from being broken in the vacuum chamber of the vacuum apparatus and causing an abnormal shutdown of the vacuum apparatus.
In the prior art, a vacuum adsorption mode is usually adopted to detect whether a glass substrate is broken, but blind areas are more when the glass substrate is detected by the vacuum adsorption mode, cracks existing in the glass substrate cannot be detected, and the condition of missed detection of the broken part on the glass substrate is easy to occur.
Disclosure of Invention
The invention aims to provide a substrate cleaning device which can detect whether a glass substrate is damaged or not while cleaning the glass substrate and has high detection rate.
In order to achieve the purpose, the invention provides the following technical scheme:
a substrate cleaning device comprises a frame, a carrying platform for containing a glass substrate, a cleaning head body provided with an ultrasonic transmitter, at least one laser displacement sensor and a signal processor; wherein,
the carrying platform is fixed on the frame;
the cleaning head body is positioned above the carrying platform and is slidably arranged on the rack;
the laser displacement sensor is mounted on the cleaning head body, and measures distance information between the laser displacement sensor and the surface of the glass substrate by emitting laser detection rays to the surface of the glass substrate;
the signal processor is in signal connection with the laser displacement sensor and is used for judging the breakage of the glass substrate when the distance information between the laser displacement sensor and the surface of the glass substrate is abnormal.
When the substrate cleaning equipment provided by the invention is used for cleaning a glass substrate, the glass substrate is placed on the carrying platform, the cleaning head body is controlled to move on the frame above the glass substrate according to a set direction, in the moving process of the cleaning head body, the ultrasonic emitter on the cleaning head body continuously emits ultrasonic waves to the surface of the glass substrate to remove dust on the surface of the glass substrate, meanwhile, the laser displacement sensor arranged on one side of the cleaning head body, facing the carrying platform, continuously emits laser detection rays to the surface of the whole glass substrate to measure the distance information between the laser displacement sensor and the surface of the glass substrate, and the measured distance information between the laser displacement sensor and the surface of the glass substrate is fed back to the signal processor in real time; when the laser detection ray emitted by the laser displacement sensor irradiates a crack or a defect part on the glass substrate, the distance information between the crack or the defect part and the surface of the glass substrate, which is measured by the laser displacement sensor, is obviously abnormal, and when the signal processor finds that the received distance information is abnormal, the glass substrate to be measured is judged to be damaged.
Therefore, the substrate cleaning equipment provided by the invention can accurately detect whether the detected glass substrate is damaged or not, avoids the condition of missed detection, effectively improves the detection rate of the damaged glass substrate, and reduces the probability of the problem that the vacuum equipment is damaged due to the damage of the glass substrate.
Preferably, the substrate cleaning equipment provided by the invention further comprises an alarm device in signal connection with the signal processor, and the signal processor is further used for generating an alarm signal when the distance information between the laser displacement sensor and the glass substrate is abnormal, and controlling the alarm device to alarm according to the alarm signal. Can remind operating personnel directly perceivedly to be examined through alarm device that there is the damage by glass substrate, and do not need operating personnel to observe signal processor's processing result in real time, further avoided causing the condition of lou examining to appear.
Preferably, the substrate cleaning apparatus provided by the present invention further comprises:
the drawing equipment is in signal connection with the signal processor and draws a point location analysis chart according to the distance information received by the signal processor;
and the display is in signal connection with the drawing equipment to display the point location analysis chart.
If the detected glass substrate is damaged, the operator can visually see information such as the approximate position of a damaged point on the surface of the glass substrate, the damage degree of the glass substrate at the damaged point and the like through the display, so that the operator can conveniently confirm the damaged position on the surface of the glass substrate.
Preferably, the laser displacement sensors are arranged in a plurality and are closely arranged along a direction perpendicular to the sliding direction of the cleaning head body.
Preferably, the cleaning head further comprises a sensor mounting bracket fixedly connected with the cleaning head body, and each laser displacement sensor is fixed on the sensor mounting bracket. The laser displacement sensor is convenient to install, and meanwhile, the installation precision of the laser displacement sensor can be improved.
Preferably, the cleaning head body is provided with a groove with an opening facing the carrier, and the sensor mounting bracket is embedded in the groove, so that the structure of the cleaning head body is more compact.
Preferably, the cleaning head body is provided with caulking grooves with openings facing the carrier and corresponding to the laser displacement sensors one by one, and each laser displacement sensor is embedded in the caulking groove corresponding to the laser displacement sensor.
Therefore, when a single laser displacement sensor fails, only the failed laser displacement sensor needs to be detached, and the laser displacement sensor is convenient to replace.
Drawings
Fig. 1 is a schematic structural diagram of a substrate cleaning apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic cross-sectional view of a cleaning head body in a substrate cleaning apparatus according to an embodiment of the present invention;
fig. 3 is a schematic diagram illustrating a laser displacement sensor in the substrate cleaning apparatus according to the embodiment of the present invention detecting the surface of the glass substrate;
fig. 4 is a schematic diagram illustrating a laser displacement sensor in the substrate cleaning apparatus according to the embodiment of the present invention detecting a damaged portion of a surface of a glass substrate;
FIG. 5 is a diagram showing an analysis of abnormal spots at a damaged portion of the surface of a glass substrate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 to 3, in which fig. 1 is a schematic structural diagram of a substrate cleaning apparatus according to an embodiment of the present invention; FIG. 2 is a schematic cross-sectional view of a cleaning head body in a substrate cleaning apparatus according to an embodiment of the present invention; fig. 3 is a schematic diagram illustrating a laser displacement sensor in the substrate cleaning apparatus according to the embodiment of the present invention detecting the surface of the glass substrate;
the substrate cleaning apparatus provided by the present invention includes: the device comprises a frame 1, a carrying platform 3 for containing a glass substrate 2, a cleaning head body 4 provided with an ultrasonic transmitter, at least one laser displacement sensor 5 and a signal processor; wherein,
the carrier 3 is fixed on the frame 1;
the cleaning head body 4 is positioned above the carrier 3 and can be slidably arranged on the frame 1;
the laser displacement sensor 5 is mounted on the cleaning head body 4, and measures distance information between the laser displacement sensor 5 and the surface of the glass substrate 2 by emitting laser detection rays to the surface of the glass substrate 2, as shown in fig. 3;
the signal processor is in signal connection with the laser displacement sensor 5 and is used for judging that the glass substrate 2 is damaged when the distance information between the laser displacement sensor 5 and the surface of the glass substrate 2 is abnormal.
In general, the laser displacement sensor 5 includes a transmitter, a receiver, and an echo processor in signal connection with the transmitter and the receiver. The emitter is used for emitting laser pulses to the surface of the glass substrate to form laser detection rays; the receiver is used for receiving laser pulses returned after the laser detection rays encounter the glass substrate; the echo processor calculates the distance information between the laser displacement sensor 5 and the surface of the glass substrate 2 based on the time required for the transmitter to start transmitting the laser pulse until the laser pulse returns to the receiver. In the present invention, the echo processor of the laser displacement sensor 5 is connected to the signal processor in a signal manner, so as to feed back the calculated information of the distance between the laser displacement sensor 5 and the surface of the glass substrate 2 to the signal processor in real time.
When the glass substrate cleaning equipment provided by the invention is adopted to clean the glass substrate, firstly, the glass substrate 2 is placed on the carrying platform 3 through the mechanical arm and the lifting mechanism 6, the glass substrate 2 is fixed through the air suction hole on the carrying platform 3, after the glass substrate 2 is fixed, the cleaning head body 4 is operated to move on the carrying platform 3 along the frame 1 according to the set direction, in the process of moving the cleaning head body 4, the ultrasonic transmitter on the cleaning head body 4 continuously transmits ultrasonic waves to the surface of the glass substrate 2 to clean dust on the surface of the glass substrate 2, meanwhile, the laser displacement sensor 5 arranged on one side of the cleaning head body 4 facing the carrying platform 3 continuously transmits laser detection rays to the surface of the whole glass substrate 2 to measure the distance information between the laser displacement sensor 5 and the surface of the glass substrate 2, and feeds the measured distance information between the laser displacement sensor 5 and the surface of the glass substrate 2 back to the signal processor in real time, when the laser detection ray emitted by the laser displacement sensor 5 irradiates a crack or a defect part on the glass substrate 2, the distance information between the laser displacement sensor 5 and the surface of the glass substrate 2 measured by the laser displacement sensor is obviously abnormal, and when the signal processor finds that the received distance information is abnormal, the glass substrate 2 to be detected is judged to be damaged.
For example, as shown in fig. 3, the distance L1 from the laser displacement sensor 5 to the glass substrate 2 is 13mm, the thickness h of the glass substrate is 7mm, and the distance L2 between the surface of the laser displacement sensor 5 facing the stage 3 and the upper surface of the stage 3 is 20mm, and during the detection, as shown in fig. 4, when the distance information fed back to the signal processor by the laser displacement sensor 5 is greater than 13mm, the signal processor determines that the area on the glass substrate 2 is damaged.
Certainly, after signal processor judges that glass substrate 2 has the damage, cleaning head body 4 still can continue to move in order to accomplish this washing and detection, treats that the washing of whole glass substrate and detection accomplish the back, and cleaning equipment shuts down and whether has the damage in order to make things convenient for operating personnel to confirm glass substrate 2 to the waste of glass substrate has been avoided appearing the false retrieval and causes.
Therefore, the substrate cleaning equipment provided by the invention can accurately detect whether the detected glass substrate 2 is damaged or not, the condition of missed detection is avoided, the detection rate of the damaged glass substrate 2 is effectively improved, and the probability of the problem that the vacuum equipment is damaged due to the damage of the glass substrate 2 is reduced.
In addition, in order to further improve the accuracy of the detection of the glass substrate 2 by the laser displacement sensor 5, the number of times of reciprocating movement of the cleaning head body 4 and the number of times of detection of the same glass substrate 2 by the laser displacement sensor 5 can be increased when the glass substrate 2 is detected.
In a preferred embodiment, the substrate cleaning apparatus further comprises an alarm device in signal connection with the signal processor, and when the distance information between the laser displacement sensor 5 and the glass substrate 2 is abnormal, the signal processor generates an alarm signal and controls the alarm device to alarm according to the alarm signal. The glass substrate 2 to be detected can be intuitively reminded of being damaged by the alarm device without observing the processing result of the signal processor in real time by the operator, so that the condition of missed detection is further avoided.
The alarm device can be an audible and visual alarm, an alarm module integrated in the signal processor, or other alarm devices as long as the alarm prompt sent by the alarm device can be timely discovered by an operator.
In some preferred embodiments, the substrate cleaning apparatus provided by the present invention further comprises:
a drawing device which is connected with the signal processor by signals and draws an equal height diagram and a point location analysis diagram (as shown in figure 5) according to the distance information acquired by the signal processor;
and a display in signal connection with the plotting device for displaying the isocontogram and the locus analysis chart. Generally, the drawing device may be a drawing computer.
The drawing equipment can draw the equal height map and the point analysis map of the surface of the glass substrate 2 according to the real-time receiving distance information of the signal processor and the mapping coordinates preset in the drawing equipment, and transmits the equal height map and the point analysis map to the display connected with the signal processor for displaying. In this way, if the glass substrate 2 to be detected is damaged, the operator can visually recognize information such as the approximate position of the damaged point on the surface of the glass substrate 2 and the degree of damage of the glass substrate 2 at the damaged point through the display, thereby facilitating the operator to confirm the damaged point on the surface of the glass substrate 2.
In some optional embodiments, the signal processor is further in signal connection with a control device of a manipulator for grabbing the glass substrate 2, and when the signal processor determines that the detected glass substrate 2 is damaged, the signal processor generates a signal for refusing to grab and sends the signal to the control device of the manipulator, so that the control device controls the manipulator to stop grabbing, so as to facilitate an operator to confirm whether the glass substrate 2 is damaged.
In order to ensure the accuracy of the detection result of the laser displacement sensor 5, as shown in fig. 1, in a preferred embodiment, the laser displacement sensors 5 are multiple and closely arranged along the direction perpendicular to the sliding direction of the cleaning head body 4.
Therefore, the cleaning head body 4 reciprocates back and forth, so that the laser displacement sensor 5 can detect the whole glass substrate back and forth, the accuracy of a detection result is improved, the condition of missed detection is avoided, and the detection efficiency of the glass substrate is improved.
Specifically, the substrate cleaning apparatus provided by the present invention further includes a sensor mounting bracket (not shown in the figure) fixedly connected to the cleaning head body 4, and each laser displacement sensor 5 is fixed to the sensor mounting bracket. Therefore, all the laser displacement sensors 5 can be installed in the sensor installation support in advance, and then the sensor installation support is fixed on the cleaning head body 4, so that the installation of the laser displacement sensors 5 is facilitated.
More specifically, as shown in fig. 2, the cleaning head body 4 has a groove 7 that opens toward the stage 3, and the sensor mounting bracket is embedded in the groove 7, so that the cleaning head body 4 is made more compact, and the mounting accuracy of the laser displacement sensor 5 can also be improved.
In addition, in some other alternative embodiments, the cleaning head body 4 may have a caulking groove with an opening facing the stage and corresponding to the laser displacement sensors 5 one by one, and each laser displacement sensor 5 is separately embedded in the caulking groove corresponding to it. When individual laser displacement sensor 5 breaks down, only need break down laser displacement sensor 5 can, can not influence other laser and be located the mounted position of sensor 5, made things convenient for laser displacement sensor 5's change.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (7)
1. The substrate cleaning equipment is characterized by comprising a rack, a carrying platform for containing a glass substrate, a cleaning head body provided with an ultrasonic transmitter, at least one laser displacement sensor and a signal processor, wherein the cleaning head body is provided with the ultrasonic transmitter; wherein,
the carrying platform is fixed on the frame;
the cleaning head body is positioned above the carrying platform and is slidably arranged on the rack; after the signal processor judges that the glass substrate is damaged, the cleaning head body continues to move to finish the cleaning and the detection;
the laser displacement sensor is mounted on the cleaning head body, and measures distance information between the laser displacement sensor and the surface of the glass substrate by emitting laser detection rays to the surface of the glass substrate;
the signal processor is in signal connection with the laser displacement sensor and is used for judging the breakage of the glass substrate when the distance information between the laser displacement sensor and the surface of the glass substrate is abnormal; the signal processor is further in signal connection with a control device of a manipulator for grabbing the glass substrate, and when the signal processor judges that the detected glass substrate is damaged, the signal processor generates a grabbing refusing signal and sends the grabbing refusing signal to the control device of the manipulator, so that the control device controls the manipulator to stop grabbing.
2. The substrate cleaning apparatus according to claim 1, further comprising an alarm device in signal connection with the signal processor, wherein the signal processor is further configured to generate an alarm signal when the distance information between the laser displacement sensor and the glass substrate is abnormal, and to control the alarm device to alarm according to the alarm signal.
3. The substrate cleaning apparatus according to claim 1, further comprising:
the drawing equipment is in signal connection with the signal processor and draws a point location analysis chart according to the distance information received by the signal processor;
and the display is in signal connection with the drawing equipment to display the point location analysis chart.
4. The apparatus according to any one of claims 1 to 3, wherein the plurality of laser displacement sensors are closely arranged in a direction perpendicular to a sliding direction of the cleaning head body.
5. The substrate cleaning apparatus of claim 4, further comprising a sensor mounting bracket fixedly connected to the cleaning head body, each of the laser displacement sensors being fixed to the sensor mounting bracket.
6. The substrate cleaning apparatus according to claim 5, wherein the cleaning head body has a groove opening toward the stage, and the sensor mounting bracket is embedded in the groove.
7. The substrate cleaning apparatus according to claim 4, wherein the cleaning head body has caulking grooves with openings facing the stage and corresponding to the laser displacement sensors one by one, and each of the laser displacement sensors is embedded in the caulking groove corresponding thereto.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310752372.5A CN103691715B (en) | 2013-12-30 | 2013-12-30 | A kind of substrate cleaning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310752372.5A CN103691715B (en) | 2013-12-30 | 2013-12-30 | A kind of substrate cleaning apparatus |
Publications (2)
| Publication Number | Publication Date |
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| CN103691715A CN103691715A (en) | 2014-04-02 |
| CN103691715B true CN103691715B (en) | 2015-12-09 |
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| CN201310752372.5A Active CN103691715B (en) | 2013-12-30 | 2013-12-30 | A kind of substrate cleaning apparatus |
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104022053B (en) * | 2014-05-20 | 2017-11-14 | 京东方科技集团股份有限公司 | A kind of vacuum chamber detection device and vacuum chamber detection method for film forming |
| CN104609137B (en) * | 2015-01-04 | 2017-03-08 | 京东方科技集团股份有限公司 | Glass substrate conveying device |
| CN106695747A (en) * | 2015-11-13 | 2017-05-24 | 国网辽宁省电力有限公司检修分公司 | Valve hall inspection method and inspection robot based on laser radar |
| CN105652604B (en) * | 2016-03-15 | 2017-10-24 | 武汉华星光电技术有限公司 | Exposure machine and its operating method |
| CN106918934A (en) * | 2017-03-27 | 2017-07-04 | 武汉华星光电技术有限公司 | Substrate macro -graph machine |
| JP7281901B2 (en) * | 2018-12-27 | 2023-05-26 | 東京エレクトロン株式会社 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD |
| CN110342258B (en) * | 2019-07-16 | 2021-12-24 | 蓝思智能机器人(长沙)有限公司 | Glass plate taking and placing device |
| CN110976436A (en) * | 2019-12-20 | 2020-04-10 | 苏州艾思兰光电有限公司 | Laser cleaning equipment is tracked to distance |
| CN115308116B (en) * | 2022-08-18 | 2024-01-05 | 浙江天女集团制漆有限公司 | Novel high anticorrosive color board coiled material coating performance detection equipment |
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|---|---|---|---|---|
| JPH0786218A (en) * | 1993-09-17 | 1995-03-31 | Dainippon Screen Mfg Co Ltd | Substrate cleaner |
| CN2621341Y (en) * | 2003-04-24 | 2004-06-23 | 南亚科技股份有限公司 | Apparatus for testing defect of chip |
| TWI289477B (en) * | 2004-04-23 | 2007-11-11 | Innolux Display Corp | Apparatus for coating |
| US7420669B2 (en) * | 2004-07-01 | 2008-09-02 | Midwest Research Institute | Optic probe for semiconductor characterization |
| JP2009288089A (en) * | 2008-05-29 | 2009-12-10 | Nikon Corp | Surface inspection device |
| WO2012062343A1 (en) * | 2010-11-12 | 2012-05-18 | Ev Group E. Thallner Gmbh | Measuring device and method for measuring layer thicknesses and defects in a wafer stack |
| JP5833959B2 (en) * | 2011-09-28 | 2015-12-16 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing apparatus and substrate processing method |
| KR101380494B1 (en) * | 2011-12-27 | 2014-04-01 | 시바우라 메카트로닉스 가부시끼가이샤 | Substrate processing apparatus and processing method |
| CN203198864U (en) * | 2013-04-01 | 2013-09-18 | 北京汽车股份有限公司 | Installation structure of ultrasonic wave sensor |
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2013
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