CN202626277U - Optical coating device with ultrasonic dust removal function - Google Patents
Optical coating device with ultrasonic dust removal function Download PDFInfo
- Publication number
- CN202626277U CN202626277U CN 201220129220 CN201220129220U CN202626277U CN 202626277 U CN202626277 U CN 202626277U CN 201220129220 CN201220129220 CN 201220129220 CN 201220129220 U CN201220129220 U CN 201220129220U CN 202626277 U CN202626277 U CN 202626277U
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- rotating disk
- coating device
- vacuum space
- optical coating
- evaporation source
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Abstract
The utility model provides an optical coating device with an ultrasonic dust removal function. The optical coating device comprises a vacuum room, a rotating disc, an evaporation source, a supporting rod, a shielding plate group, an ultrasonic generator and an ultrasonic transducer, wherein the rotating disc is used for carrying a piece to be coated; the evaporation source is opposite to the piece to be coated; the shielding plate group is positioned between the rotating disc and the evaporation source through the supporting rod; the rotating disc, the evaporation source, the supporting rod and the shielding plate group are positioned in the vacuum room; the ultrasonic generator is electrically connected with the ultrasonic transducer; and the ultrasonic transducer is mechanically connected with the rotating disc. The optical coating device with the ultrasonic dust removal function can remove dust stained on the piece to be coated before the cleaned piece to be coated is fed into the coating device, and the coating quality is guaranteed.
Description
Technical field
The utility model relates to the optical coating field, relates in particular to the optical coating device with supersonic dust separation function.
Background technology
Optical coating is used very extensive on opticinstrument, and it is the technological process that on the optical element surface, plates one or more layers optical thin film, can change the transport property that is radiated at the light wave on the optical element through this technological process.
Physical vapor deposition is adopted in the making of optical thin film usually, exactly with thin-film material by solid-state gaseous state or the ionic state of being converted into, the thin-film material of gaseous state or ionic state arrives unplated piece from evaporation source, deposition on unplated piece and form film.And,, adopt vacuum plating usually in order to make highly purified optical thin film.So usually, optically coated process is: clean unplated piece, unplated piece is placed on the object that supports unplated piece, send into film coating apparatus, then film coating apparatus is evacuated, under vacuum environment, unplated piece is carried out plated film.The shortcoming that above-mentioned technical scheme exists is, the environment that cleans unplated piece is not a vacuum environment, and the unplated piece after the cleaning can contact with external environment before being admitted to film coating apparatus, might make unplated piece catch dust once again like this.
The information that is disclosed in this utility model background technology part only is intended to deepen the understanding to the general background technology of the utility model, does not admit or hint in any form that this information constitutes to be prior art known in those skilled in the art and should not be regarded as.
The utility model content
To above-mentioned defective, the utility model provides a kind of optical coating device with supersonic dust separation function.
The optical coating device with supersonic dust separation function of the utility model comprises: vacuum space, be used to carry unplated piece rotating disk, and the evaporation source that is oppositely arranged of said unplated piece, support bar, through shield group, ultrasonic generator and the ultrasonic transducer of said support bar between said rotating disk and said evaporation source;
Wherein, said rotating disk, said evaporation source, said support bar and said shield group all are positioned at said vacuum space, and said ultrasonic generator and said ultrasonic transducer are electrically connected, said ultrasonic transducer and said rotating disk mechanical connection.
Aforesaid optical coating device with supersonic dust separation function, wherein, said shield group comprises a plurality of difform shields that have, said support bar stretches out said vacuum space.
Aforesaid optical coating device with supersonic dust separation function wherein, also comprises being used for driving said support bar rotation to have first motor of the shield of specified shape in said shield group selection.
Aforesaid optical coating device with supersonic dust separation function wherein, also comprises second motor that is used to drive said rotating disk rotation, and said second motor is positioned at outside the said vacuum space, and with said rotating disk mechanical connection.
Aforesaid optical coating device with supersonic dust separation function, wherein, said rotating disk is positioned at the top of said vacuum space, and said unplated piece is positioned at the bottom surface of said rotating disk.
Aforesaid optical coating device with supersonic dust separation function, wherein, said ultrasonic generator and said ultrasonic transducer are all outside vacuum space.
Use the optical coating device with supersonic dust separation function of the utility model, can remove the unplated piece cleaning and send into the dust of catching before the film coating apparatus afterwards, guarantee the quality of plated film.
Accompanying drawing through including this paper in and the embodiment that is used to explain some principle of the utility model subsequently with accompanying drawing, further feature that device had of the utility model and advantage will become clear or be able to more particularly illustrate.
Description of drawings
Fig. 1 is the structure iron of an embodiment that the utlity model has the optical coating device of supersonic dust separation function;
Fig. 2 is the enlarged view that the utlity model has shield group among another embodiment of optical coating device of supersonic dust separation function;
Fig. 3 is the structure iron of another embodiment that the utlity model has the optical coating device of supersonic dust separation function;
Fig. 4 is the structure iron of another embodiment that the utlity model has the optical coating device of supersonic dust separation function.
Should understand, appended accompanying drawing is not the technique of painting of somewhat simplified of exemplifying various characteristics that has shown the ultimate principle of the utility model pari passu.The concrete DESIGNED FEATURE of the utility model disclosed herein for example comprises that concrete size, direction, position and profile will be partly confirmed by concrete the environment that will use and use.
In these figures, run through several figures of accompanying drawing, Reference numeral is quoted the part same or that be equal to of the utility model.
Embodiment
Mention in the background technology that there is defective in optically coated technical scheme in the prior art: unplated piece is sent into before the film coating apparatus, can be influenced the quality of plated film by slight recontaminate.Therefore, the utility model designed have the supersonic dust separation function optical coating device to overcome defective of the prior art.
Fig. 1 is the structure iron of an embodiment that the utlity model has the optical coating device of supersonic dust separation function; As shown in Figure 1, this device comprises: vacuum space 1, be used to carry unplated piece 3 rotating disk 2, and the evaporation source 4 that is oppositely arranged of unplated piece 3, support bar 5, through shield 11 shields 11 group 6, ultrasonic generator 7 and the ultrasonic transducer 8 of support bar 5 between rotating disk 2 and evaporation source 4.
Wherein, rotating disk 2, evaporation source 4, support bar 5 and shield 11 shields all are positioned at vacuum space 1 for 11 group 6, and ultrasonic generator 7 is electrically connected ultrasonic transducer 8 and rotating disk 2 mechanical connections with ultrasonic transducer 8.
Owing to need in vacuum environment, carry out optical coating, so need the environment of a sealing, vacuum space 1 just plays such effect in the utility model.Rotating disk 2 can rotate, because rotating disk 2 carries unplated piece 3, unplated piece 3 also is rotary.When unplated piece 3 rotates with rotating disk 2, evaporation source 4 is heated the surface that makes evaporation source 4 evaporations and finally be deposited on unplated piece 3 form film.Shield 11 shields can be controlled the plated film shape on the unplated piece 3 for 11 group 6; And must be between rotating disk 2 and evaporation source 4; Just can play above-mentioned effect, in the utility model, support bar 5 makes that shield 11 shields 11 group 6 can be between rotating disk 2 and evaporation source 4.
Situation shown in Fig. 1 is, rotating disk 2 is on the top of vacuum space 1, and certainly, rotating disk 2 can be at other positions of vacuum space 1, as long as shield 11 shields are in for 11 group 6 between unplated piece 3 and the evaporation source 4; Ultrasonic generator 7 and ultrasonic transducer 8 are all in vacuum space 1 outside, and both also can be in vacuum space 1 inside certainly.
Introduce below and use the optical coating device of the utility model to carry out process of plating.
Outside vacuum space 1, clean unplated piece 3, and unplated piece 3 is placed on the rotating disk 2.Then rotating disk 2 is installed in the vacuum space 1, and opens the dedusting function of the optical coating device with supersonic dust separation function of the utility model, unplated piece 3 is carried out dedusting.After the dedusting vacuum space 1 is evacuated, opens the plated film function of the optical coating device with supersonic dust separation function of the utility model then, finally accomplish unplated piece 3 high-quality plated films.
Can know by above-mentioned technical scheme, use the optical coating device with supersonic dust separation function of the utility model, can remove the unplated piece cleaning and send into the dust of catching before the film coating apparatus afterwards, guarantee the quality of plated film.
Further, shield group 6 comprises a plurality of difform shields 11 that have, and support bar 5 stretches out vacuum space 1.For unplated piece 3, many times all hope on unplated piece 3, to plate the difform film of multilayer, just need multiplely have difform plate as shield this moment, just can realize selecting to have the shield of specified shape through twisting support bar 5.
Preferably; Adopt electric motor driving support bar 5; This moment, the device of the utility model comprised that also being used for driving support bar 5 rotates to have first motor 9 of the shield 11 of specified shape in 11 group of 6 selection of shield 11 shields; To improve the level of automation of this device, specifically can be referring to Fig. 3, Fig. 3 is the structure iron of another embodiment that the utlity model has the optical coating device of supersonic dust separation function.
Preferably; The device of the utility model can also comprise second motor 10 that is used to drive rotating disk 2 rotations; Second motor 10 is positioned at outside the vacuum space 1, and with rotating disk 2 mechanical connections, to improve the level of automation of this device; Specifically can be referring to Fig. 4, Fig. 4 is the structure iron of another embodiment that the utlity model has the optical coating device of supersonic dust separation function.
Alternatively, rotating disk 2 is positioned at the top of vacuum space 1, and unplated piece 3 is positioned at the bottom surface of rotating disk 2.
Further, ultrasonic generator 7 and ultrasonic transducer 8 all outside vacuum space 1, like this, can reduce the volume of vacuum space 1, the workload that vacuumizes with minimizing.
Claims (7)
1. optical coating device with supersonic dust separation function; It is characterized in that, comprising: vacuum space, be used to carry unplated piece rotating disk, and the evaporation source that is oppositely arranged of said unplated piece, support bar, through shield group, ultrasonic generator and the ultrasonic transducer of said support bar between said rotating disk and said evaporation source;
Wherein, said rotating disk, said evaporation source, said support bar and said shield group all are positioned at said vacuum space, and said ultrasonic generator and said ultrasonic transducer are electrically connected, said ultrasonic transducer and said rotating disk mechanical connection.
2. device according to claim 1 is characterized in that, said shield group comprises a plurality of difform shields that have, and said support bar stretches out said vacuum space.
3. device according to claim 2 is characterized in that, said shield group is four shield structures.
4. device according to claim 2 is characterized in that, also comprises being used for driving said support bar rotation to have first motor of the shield of specified shape in said shield group selection.
5. according to the arbitrary described device of claim 1-4, it is characterized in that also comprise second motor that is used to drive said rotating disk rotation, said second motor is positioned at outside the said vacuum space, and with said rotating disk mechanical connection.
6. according to the arbitrary described device of claim 1-4, it is characterized in that said rotating disk is positioned at the top of said vacuum space, said unplated piece is positioned at the bottom surface of said rotating disk.
7. according to the arbitrary described device of claim 1-4, it is characterized in that said ultrasonic generator and said ultrasonic transducer are all outside vacuum space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220129220 CN202626277U (en) | 2012-03-30 | 2012-03-30 | Optical coating device with ultrasonic dust removal function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220129220 CN202626277U (en) | 2012-03-30 | 2012-03-30 | Optical coating device with ultrasonic dust removal function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202626277U true CN202626277U (en) | 2012-12-26 |
Family
ID=47379495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220129220 Expired - Fee Related CN202626277U (en) | 2012-03-30 | 2012-03-30 | Optical coating device with ultrasonic dust removal function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202626277U (en) |
-
2012
- 2012-03-30 CN CN 201220129220 patent/CN202626277U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121226 Termination date: 20130330 |